| Patent | Date |
|---|
Reactor System And Method To Reduce Residue Buildup During A Film Deposition Process
App 20220307139 - Kim; Hyeongeu ; et al. | 2022-09-29 |
Semiconductor Processing Method
App 20220310387 - Lim; WanGyu ; et al. | 2022-09-29 |
Method For Depositing A Group Iv Semiconductor And Related Semiconductor Device Structures
App 20220310825 - Margetis; Joe ; et al. | 2022-09-29 |
Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor
Grant 11,453,943 - Fukazawa , et al. September 27, 2 | 2022-09-27 |
Gas-phase reactor system including a gas detector
Grant 11,453,946 - Kim , et al. September 27, 2 | 2022-09-27 |
Susceptor shaft
Grant D965,044 - Patil , et al. September 27, 2 | 2022-09-27 |
Substrate Processing Method
App 20220301823 - Yoo; TaeHee ; et al. | 2022-09-22 |
Wafer Temperature Gradient Control To Suppress Slip Formation In High-temperature Epitaxial Film Growth
App 20220298672 - M'Saad; Hichem ; et al. | 2022-09-22 |
Wafer Far Edge Temperature Measurement System With Lamp Bank Alignment
App 20220301906 - Naik; Rutvij ; et al. | 2022-09-22 |
Temperature Control Assembly For Substrate Processing Apparatus And Method Of Using Same
App 20220298630 - Jun; SungHoon ; et al. | 2022-09-22 |
Semiconductor Processing Preclean Methods And Apparatus
App 20220301856 - Wei; Chuang ; et al. | 2022-09-22 |
Methods Of Forming Structures, Semiconductor Processing Systems, And Semiconductor Device Structures
App 20220298643 - Kajbafvala; Amir ; et al. | 2022-09-22 |
Dual Pyrometer Systems For Substrate Temperature Control During Film Deposition
App 20220301905 - Ye; Han ; et al. | 2022-09-22 |
Temperature Controlled Reaction Chamber
App 20220301829 - Yoshikawa; Jun | 2022-09-22 |
Systems And Methods For Selectively Etching Films
App 20220301857 - Wang; Fei ; et al. | 2022-09-22 |
Layer forming method and apparatus
Grant 11,447,864 - Fluit September 20, 2 | 2022-09-20 |
Process for film deposition on a substrate with non-uniform overlapping subpulses of a precursor
Grant 11,447,854 - Zhu September 20, 2 | 2022-09-20 |
Vapor phase deposition of organic films
Grant 11,446,699 - Pore , et al. September 20, 2 | 2022-09-20 |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure
Grant 11,447,861 - Maes , et al. September 20, 2 | 2022-09-20 |
Fluorine-containing conductive films
Grant 11,450,591 - Blomberg , et al. September 20, 2 | 2022-09-20 |
Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
Grant 11,450,529 - Longrie , et al. September 20, 2 | 2022-09-20 |
Substrate Processing Apparatus
App 20220293398 - Jeong; WonKi ; et al. | 2022-09-15 |
Methods And Systems For Filling A Gap
App 20220293463 - Vervuurt; Rene Henricus Jozef ; et al. | 2022-09-15 |
Substrate processing apparatus
Grant 11,443,926 - Jeong , et al. September 13, 2 | 2022-09-13 |
Methods And Systems For Forming A Layer Comprising Vanadium And Nitrogen
App 20220285146 - Alessio Verni; Giuseppe ; et al. | 2022-09-08 |
Methods And Systems For Filling A Gap
App 20220285211 - Farm; Elina ; et al. | 2022-09-08 |
Methods And Systems For Forming A Layer Comprising Vanadium And Oxygen
App 20220282374 - Alessio Verni; Giuseppe ; et al. | 2022-09-08 |
Film Deposition Systems And Methods
App 20220282370 - Kajbafvala; Amir ; et al. | 2022-09-08 |
Methods And Systems For Forming A Layer Comprising Aluminum, Titanium, And Carbon
App 20220285147 - Chen; Lifu ; et al. | 2022-09-08 |
Showerhead device for semiconductor processing system
Grant 11,437,249 - Blomberg , et al. September 6, 2 | 2022-09-06 |
Apparatus and methods for selectively etching silicon oxide films
Grant 11,437,241 - Wang , et al. September 6, 2 | 2022-09-06 |
Method For Treatment Of Deposition Reactor
App 20220277937 - Haukka; Suvi ; et al. | 2022-09-01 |
Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
Grant 11,430,674 - Susa August 30, 2 | 2022-08-30 |
Deposition of oxide thin films
Grant 11,430,656 - Haukka , et al. August 30, 2 | 2022-08-30 |
Substrate processing apparatus
Grant 11,430,640 - Jeong , et al. August 30, 2 | 2022-08-30 |
Methods Of Forming Phosphosilicate Glass Layers, Structures Formed Using The Methods And Systems For Performing The Methods
App 20220267903 - Lee; SeungHyun | 2022-08-25 |
Cyclical Deposition Method And Apparatus For Filling A Recess Formed Within A Substrate Surface
App 20220270917 - Liu; Zecheng ; et al. | 2022-08-25 |
Vertical Furnace Reactor Assembly, Method Of Aligning Annular Flange Units, And Use
App 20220268520 - Oosterlaken; Theodorus G.M. ; et al. | 2022-08-25 |
Substrate Processing Method And Device Manufactured By Using The Same
App 20220270920 - Min; Yoon Ki | 2022-08-25 |
Apparatuses for thin film deposition
Grant 11,421,321 - Kawahara , et al. August 23, 2 | 2022-08-23 |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
Grant 11,424,119 - Shero , et al. August 23, 2 | 2022-08-23 |
Substrate Processing Apparatus With Flow Control Ring, And Substrate Processing Method
App 20220259731 - Tsuji; Naoto | 2022-08-18 |
Substrate Processing Device
App 20220259740 - Kim; SungBae | 2022-08-18 |
Radiation shield
Grant 11,417,545 - Verbaas August 16, 2 | 2022-08-16 |
Apparatus and method for adjusting a pedestal assembly for a reactor
Grant 11,417,563 - Haplin August 16, 2 | 2022-08-16 |
Deposition Of Transition Metal -comprising Material
App 20220251701 - Mattinen; Miika ; et al. | 2022-08-11 |
Methods Of Filling Recesses On Substrate Surface, Structures Formed Using The Methods, And Systems For Forming Same
App 20220251707 - Susa; Yoshio ; et al. | 2022-08-11 |
Method And System For Forming Boron Nitride On A Surface Of A Substrate
App 20220254628 - Shero; Eric ; et al. | 2022-08-11 |
Wafer Boat
App 20220254668 - Oosterlaken; Theodorus G.M. ; et al. | 2022-08-11 |
Selective Deposition Of Transition Metal-containing Material
App 20220254642 - Farm; Elina ; et al. | 2022-08-11 |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
Grant 11,410,851 - Vayrynen , et al. August 9, 2 | 2022-08-09 |
Fixtures And Methods For Positioning Process Kit Components Within Reaction Chambers
App 20220243324 - Kim; KiHyun | 2022-08-04 |
Apparatus And Methods For Selectively Etching Films
App 20220246436 - Wang; Fei ; et al. | 2022-08-04 |
Substrate Processing Apparatus
App 20220243322 - Kim; TaeWoong ; et al. | 2022-08-04 |
Substrate susceptor using edge purging
Grant 11,404,302 - Singu , et al. August 2, 2 | 2022-08-02 |
Substrate processing apparatus
Grant 11,401,605 - Roh , et al. August 2, 2 | 2022-08-02 |
Methods And Systems For Depositing A Layer
App 20220235460 - Tuominen; Marko ; et al. | 2022-07-28 |
Gas supply unit and substrate processing apparatus including the gas supply unit
Grant 11,396,702 - Kim , et al. July 26, 2 | 2022-07-26 |
Higher temperature vented susceptor
Grant D958,764 - Rokkam , et al. July 26, 2 | 2022-07-26 |
Passivation against vapor deposition
Grant 11,396,701 - Sharma , et al. July 26, 2 | 2022-07-26 |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
Grant 11,398,382 - Mousa , et al. July 26, 2 | 2022-07-26 |
Methods For Depositing A Transition Metal Nitride Film On A Substrate By Atomic Layer Deposition And Related Deposition Apparatus
App 20220228264 - Shero; Eric James ; et al. | 2022-07-21 |
Fall Prevention Devices And Methods
App 20220230902 - Ito; Daisuke | 2022-07-21 |
Temperature control assembly for substrate processing apparatus and method of using same
Grant 11,390,945 - Jun , et al. July 19, 2 | 2022-07-19 |
Reactor system and method to reduce residue buildup during a film deposition process
Grant 11,390,950 - Kim , et al. July 19, 2 | 2022-07-19 |
Deposition method
Grant 11,393,690 - Zhu , et al. July 19, 2 | 2022-07-19 |
Vapor phase deposition of organic films
Grant 11,389,824 - Pore , et al. July 19, 2 | 2022-07-19 |
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
Grant 11,390,946 - Hatanpaa , et al. July 19, 2 | 2022-07-19 |
Methods For Depositing Gap-filling Fluids And Related Systems And Devices
App 20220223411 - Blanquart; Timothee | 2022-07-14 |
Electrostatic Chuck
App 20220223453 - Aguilar Santillan; Joaquin ; et al. | 2022-07-14 |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
Grant 11,387,120 - Sharma July 12, 2 | 2022-07-12 |
Deposition of organic films
Grant 11,387,107 - Tois , et al. July 12, 2 | 2022-07-12 |
Self-centering susceptor ring assembly
Grant 11,387,137 - Aggarwal , et al. July 12, 2 | 2022-07-12 |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
Grant 11,387,106 - Haukka July 12, 2 | 2022-07-12 |
Methods For Depositing A Molybdenum Metal Film Over A Dielectric Surface Of A Substrate By A Cyclical Deposition Process And Related Semiconductor Device Structures
App 20220216105 - Zope; Bhushan ; et al. | 2022-07-07 |
Method Of Treating A Substrate
App 20220216059 - Liu; Zecheng ; et al. | 2022-07-07 |
Manifolds for uniform vapor deposition
Grant 11,377,737 - Marquardt July 5, 2 | 2022-07-05 |
Reactant vaporizer and related systems and methods
Grant 11,377,732 - Verghese , et al. July 5, 2 | 2022-07-05 |
Door opener and substrate processing apparatus provided therewith
Grant 11,378,337 - Fluit July 5, 2 | 2022-07-05 |
Compositions For Depositing Material, Synthesis Methods And Uses
App 20220205083 - Dezelah; Charles ; et al. | 2022-06-30 |
Selective Passivation And Selective Deposition
App 20220208542 - Maes; Jan Willem Hub ; et al. | 2022-06-30 |
Container for efficient vaporization of precursor materials and method of using the same
App 20220205088 - Niskanen; Antti | 2022-06-30 |
Method for depositing a group IV semiconductor and related semiconductor device structures
Grant 11,374,112 - Margetis , et al. June 28, 2 | 2022-06-28 |
Wafer Processing Apparatus With A Rotatable Table
App 20220199444 - Oosterlaken; Theodorus G.M. ; et al. | 2022-06-23 |
Precursor Capsule, A Vessel And A Method
App 20220195595 - Zhu; Chiyu ; et al. | 2022-06-23 |
Plasma Treatment Device Having Matching Box
App 20220199367 - Arakawa; Tomohiro | 2022-06-23 |
Selective Deposition Of Metals, Metal Oxides, And Dielectrics
App 20220193720 - Haukka; Suvi P. ; et al. | 2022-06-23 |
Transition Metal Deposition Method
App 20220195599 - Dezelah; Charles ; et al. | 2022-06-23 |
Deposition of SiN
Grant 11,367,613 - Chen , et al. June 21, 2 | 2022-06-21 |
Combination CVD/ALD method, source and pulse profile modification
Grant 11,365,478 - Huotari , et al. June 21, 2 | 2022-06-21 |
Fixture And Method For Determining Position Of A Target In A Reaction Chamber
App 20220189804 - Luan; Siyao ; et al. | 2022-06-16 |
Method Of Forming Structures For Threshold Voltage Control
App 20220189775 - van Druenen; Maart ; et al. | 2022-06-16 |
Methods And Systems For Depositing A Layer
App 20220189741 - Piumi; Daniele ; et al. | 2022-06-16 |
Methods For Depositing A Molybdenum Nitride Film On A Surface Of A Substrate By A Cyclical Deposition Process And Related Semiconductor Device Structures Including A Molybdenum Nitride Film
App 20220186364 - Stevens; Eric Christopher ; et al. | 2022-06-16 |
Runout And Wobble Measurement Fixtures
App 20220186369 - Patil; Aniket Nitin ; et al. | 2022-06-16 |
Photoactive devices and materials
Grant 11,362,222 - Blomberg , et al. June 14, 2 | 2022-06-14 |
Substrate processing method and device manufactured by using the same
Grant 11,361,990 - Min June 14, 2 | 2022-06-14 |
Susceptor having CF coating
Grant 11,359,302 - Yanagisawa June 14, 2 | 2022-06-14 |
Silicon Precursors For Silicon Nitride Deposition
App 20220181148 - Dezelah; Charles ; et al. | 2022-06-09 |
High Performance Susceptor Apparatus
App 20220181193 - Gao; Peipei ; et al. | 2022-06-09 |
Method Of Forming A Structure Including Silicon-carbon Material, Structure Formed Using The Method, And System For Forming The Structure
App 20220178023 - Susa; Yoshio ; et al. | 2022-06-09 |
Ald Of Metal-containing Films Using Cyclopentadienyl Compounds
App 20220178027 - Barry; Sean T. ; et al. | 2022-06-09 |
Toposelective Vapor Deposition Using An Inhibitor
App 20220181163 - Illiberi; Andrea ; et al. | 2022-06-09 |
Gas-phase Chemical Reactor And Method Of Using Same
App 20220178025 - Niskanen; Antti Juhani | 2022-06-09 |
Method of depositing material onto a surface and structure formed according to the method
Grant 11,355,338 - Ueda June 7, 2 | 2022-06-07 |
Injector Configured For Arrangement Within A Reaction Chamber Of A Substrate Processing Apparatus
App 20220170156 - Jdira; Lucian C. ; et al. | 2022-06-02 |
Cleaning Fixture For Showerhead Assemblies
App 20220168787 - Nandwana; Dinkar ; et al. | 2022-06-02 |
Self-centering Susceptor Ring Assembly
App 20220172980 - Aggarwal; Ravinder ; et al. | 2022-06-02 |
Method of using a gas-phase reactor system including analyzing exhausted gas
Grant 11,345,999 - Kim , et al. May 31, 2 | 2022-05-31 |
Substrate processing apparatus
Grant 11,348,766 - Susa May 31, 2 | 2022-05-31 |
Methods For Filling A Gap And Related Systems And Devices
App 20220165569 - Liu; Zecheng ; et al. | 2022-05-26 |
Wafer Handling Chamber With Moisture Reduction
App 20220165595 - Raisanen; Petri ; et al. | 2022-05-26 |
Substrate Processing Apparatus With An Injector
App 20220162751 - Haanstra; Kornelius ; et al. | 2022-05-26 |
Methods For Filling A Gap And Related Systems And Devices
App 20220165615 - Liu; Zecheng ; et al. | 2022-05-26 |
Method Of Forming Structures For Threshold Voltage Control
App 20220165575 - Xie; Qi ; et al. | 2022-05-26 |
Substrate processing device having connection plates, substrate processing method
Grant 11,339,476 - Tsuji , et al. May 24, 2 | 2022-05-24 |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface
Grant 11,342,216 - Liu , et al. May 24, 2 | 2022-05-24 |
Reactor And Related Methods
App 20220145455 - Aarnink; Antonius ; et al. | 2022-05-12 |
Structures Including Metal Carbide Material, Devices Including The Structures, And Methods Of Forming Same
App 20220149175 - Raisanen; Petri ; et al. | 2022-05-12 |
Methods For Depositing A Hafnium Lanthanum Oxide Film On A Substrate By A Cyclical Deposition Process In A Reaction Chamber
App 20220139702 - Ivanova; Tatiana ; et al. | 2022-05-05 |
Molybdenum Deposition Method
App 20220139713 - Farm; Elina ; et al. | 2022-05-05 |
Method And Device For Depositing Silicon Onto Substrates
App 20220130668 - Tolle; John ; et al. | 2022-04-28 |
Method Of Depositing Vanadium Metal, Structure, Device And A Deposition Assembly
App 20220127724 - Dezelah; Charles ; et al. | 2022-04-28 |
Apparatus and methods for selectively etching films
Grant 11,315,794 - Wang , et al. April 26, 2 | 2022-04-26 |
Thermal Atomic Layer Etching Processes
App 20220119962 - Blomberg; Tom E. ; et al. | 2022-04-21 |
Thermal Atomic Layer Etching Processes
App 20220119961 - Blomberg; Tom E. ; et al. | 2022-04-21 |
Methods And Aparatuses For Flowable Gap-fill
App 20220119944 - Yoshimoto; Shinya ; et al. | 2022-04-21 |
Predictive Maintenance Method, And Predictive Maintenance Device
App 20220121196 - Omori; Taku | 2022-04-21 |
Method Of Manufacturing Semiconductor Device, And Substrate Treatment Apparatus Using Ether-cat
App 20220122808 - Omori; Taku | 2022-04-21 |
Method Of Forming Structures For Threshold Voltage Control
App 20220123131 - Madia; Oreste ; et al. | 2022-04-21 |
Methods For Depositing Gap-filling Fluids And Related Systems And Devices
App 20220122841 - Blanquart; Timothee ; et al. | 2022-04-21 |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
Grant 11,306,395 - Shero , et al. April 19, 2 | 2022-04-19 |
Exhaust duct
Grant D949,319 - Jung , et al. April 19, 2 | 2022-04-19 |
Method Of Depositing Material On Stepped Structure
App 20220112602 - Kojima; Kentaro ; et al. | 2022-04-14 |
Methods For Depositing A Transition Metal Chalcogenide Film On A Substrate By A Cyclical Deposition Process
App 20220115232 - Mattinen; Miika ; et al. | 2022-04-14 |
Susceptor for semiconductor substrate supporting apparatus
Grant D948,463 - Lee , et al. April 12, 2 | 2022-04-12 |
Deposition Method And An Apparatus For Depositing A Silicon-containing Material
App 20220108915 - Liu; Zecheng ; et al. | 2022-04-07 |
Gas Supply Unit And Substrate Processing Apparatus Including Gas Supply Unit
App 20220108876 - Aida; Koei | 2022-04-07 |
Method And System For Forming Silicon Nitride On A Sidewall Of A Feature
App 20220108881 - Kubota; Tomohiro ; et al. | 2022-04-07 |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
Grant 11,295,980 - Zope , et al. April 5, 2 | 2022-04-05 |
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
Grant 11,296,189 - Lo , et al. April 5, 2 | 2022-04-05 |
Susceptor shaft
Grant D947,913 - Patil , et al. April 5, 2 | 2022-04-05 |
Method For Forming An Ultraviolet Radiation Responsive Metal Oxide-containing Film
App 20220102140 - Huotari; Hannu ; et al. | 2022-03-31 |
Apparatus And Method For Etching Metal Nitrides
App 20220102163 - Chang; Ren-Jie ; et al. | 2022-03-31 |
Vertical Batch Furnace Assembly
App 20220102170 - de Ridder; Chris G.M. | 2022-03-31 |
Semiconductor Processing Method
App 20220102190 - Kang; HeeSung | 2022-03-31 |
Method And Apparatus For Filling A Recess Formed Within A Substrate Surface
App 20220102195 - Pore; Viljami ; et al. | 2022-03-31 |
Gas-phase chemical reactor and method of using same
Grant 11,286,562 - Niskanen March 29, 2 | 2022-03-29 |
Si precursors for deposition of SiN at low temperatures
Grant 11,289,327 - Niskanen , et al. March 29, 2 | 2022-03-29 |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
Grant 11,286,558 - Stevens , et al. March 29, 2 | 2022-03-29 |
Method for reforming amorphous carbon polymer film
Grant 11,289,326 - Blanquart March 29, 2 | 2022-03-29 |
Systems, Devices, And Methods For Depositing A Layer Comprising A Germanium Chalcogenide
App 20220093861 - Givens; Michael Eugene ; et al. | 2022-03-24 |
Method of forming topology-controlled amorphous carbon polymer film
Grant 11,282,698 - Blanquart March 22, 2 | 2022-03-22 |
Silicon Oxide Deposition Method
App 20220084817 - Sharma; Varun ; et al. | 2022-03-17 |
Susceptor Assembly For Plasma Apparatus
App 20220084786 - Kim; Sam ; et al. | 2022-03-17 |
Bottom-up Metal Nitride Formation
App 20220084831 - Shero; Eric James | 2022-03-17 |
Thin film deposition method
Grant 11,274,369 - Um , et al. March 15, 2 | 2022-03-15 |
FORMATION OF SiOCN THIN FILMS
App 20220076946 - Suzuki; Toshiya ; et al. | 2022-03-10 |
Selective Peald Of Oxide On Dielectric
App 20220076949 - Tois; Eva ; et al. | 2022-03-10 |
Replacing End Effectors In Semiconductor Processing Systems
App 20220076986 - Chen; Dongyang | 2022-03-10 |
Methods For Depositing Gap Filing Fluids And Related Systems And Devices
App 20220076996 - Blanquart; Timothee ; et al. | 2022-03-10 |
Wafer handling chamber with moisture reduction
Grant 11,270,899 - Raisanen , et al. March 8, 2 | 2022-03-08 |
Method Of Cleaning A Surface
App 20220068634 - Deng; Shaoren ; et al. | 2022-03-03 |
Method And System For Forming Patterned Structures Using Multiple Patterning Process
App 20220068639 - Inoue; Naoki ; et al. | 2022-03-03 |
Method And System For Forming Patterned Features On A Surface Of A Substrate
App 20220068647 - Lee; SeungHyun ; et al. | 2022-03-03 |
Method And System For Forming Metal Silicon Oxide And Metal Silicon Oxynitride Layers
App 20220064795 - Yoshida; Takashi ; et al. | 2022-03-03 |
Pre-clean chamber and process with substrate tray for changing substrate temperature
Grant 11,264,255 - Tolle , et al. March 1, 2 | 2022-03-01 |
Shower plate
Grant D944,946 - Adachi , et al. March 1, 2 | 2022-03-01 |
Methods For Forming A Laminate Film By Cyclical Plasma-enhanced Deposition Processes
App 20220059340 - Susa; Yoshio | 2022-02-24 |
Methods For Depositing A Titanium Aluminum Carbide Film Structure On A Substrate And Related Semiconductor Structures
App 20220051895 - Raisanen; Petri ; et al. | 2022-02-17 |
Substrate Processing Method
App 20220051935 - Kim; Hyunchul ; et al. | 2022-02-17 |
Atomic Layer Etching Processes
App 20220051872 - Blomberg; Tom E. ; et al. | 2022-02-17 |
Cyclical deposition method including treatment step and apparatus for same
Grant 11,251,040 - Lee , et al. February 15, 2 | 2022-02-15 |
Method of forming a structure on a substrate
Grant 11,251,035 - Blanquart , et al. February 15, 2 | 2022-02-15 |
Method for teaching a transportation position and alignment jig
Grant 11,247,330 - Yoshida , et al. February 15, 2 | 2022-02-15 |
Substrate processing apparatus and substrate processing method
Grant 11,251,068 - Roh , et al. February 15, 2 | 2022-02-15 |
Substrate Processing Apparatus
App 20220044913 - Jeong; WonKi ; et al. | 2022-02-10 |
Substrate Processing Apparatus
App 20220044916 - Um; KiChul ; et al. | 2022-02-10 |
Plasma Enhanced Deposition Processes For Controlled Formation Of Oxygen Containing Thin Films
App 20220044931 - Jia; Lingyun ; et al. | 2022-02-10 |
Substrate Supporting Apparatus, Substrate Processing Apparatus Including The Same, And Substrate Processing Method
App 20220044956 - Choi; Seung Woo ; et al. | 2022-02-10 |
FORMATION OF SiN THIN FILMS
App 20220044923 - Suzuki; Toshiya ; et al. | 2022-02-10 |
Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
Grant 11,244,825 - Mattinen , et al. February 8, 2 | 2022-02-08 |
Structures including metal carbide material, devices including the structures, and methods of forming same
Grant 11,242,598 - Raisanen , et al. February 8, 2 | 2022-02-08 |
Gas Supply Unit And Substrate Processing Apparatus Including The Gas Supply Unit
App 20220033968 - Kim; Young Hoon ; et al. | 2022-02-03 |
Atomic Layer Deposition Of Iii-v Compounds To Form V-nand Devices
App 20220028870 - Blomberg; Tom E. ; et al. | 2022-01-27 |
Selective Deposition On Metal Or Metallic Surfaces Relative To Dielectric Surfaces
App 20220025513 - Haukka; Suvi P. ; et al. | 2022-01-27 |
Methods For Forming A Rhenium-containing Film On A Substrate By A Cyclical Deposition Process And Related Semiconductor Device Structures
App 20220028694 - Sharma; Varun | 2022-01-27 |
Thin Film Deposition Process
App 20220028678 - Inoue; Naoki | 2022-01-27 |
Substrate processing apparatus and method
Grant 11,230,766 - Pierreux , et al. January 25, 2 | 2022-01-25 |
Thermal atomic layer etching processes
Grant 11,230,770 - Blomberg , et al. January 25, 2 | 2022-01-25 |
Substrate processing apparatus and method
Grant 11,232,963 - Oosterlaken January 25, 2 | 2022-01-25 |
Thermal atomic layer etching processes
Grant 11,230,769 - Blomberg , et al. January 25, 2 | 2022-01-25 |
NbMC layers
Grant 11,233,133 - Zhu , et al. January 25, 2 | 2022-01-25 |
Structures And Methods For Use In Photolithography
App 20220019149 - Piumi; Daniele ; et al. | 2022-01-20 |
Method And System For Forming Structures Including Transition Metal Layers
App 20220018025 - Ma; Paul ; et al. | 2022-01-20 |
Method And System For Depositing Molybdenum Layers
App 20220018016 - Ma; Paul ; et al. | 2022-01-20 |
Method and apparatus for filling a recess formed within a substrate surface
Grant 11,227,789 - Pore , et al. January 18, 2 | 2022-01-18 |
Vertical batch furnace assembly
Grant 11,227,782 - de Ridder January 18, 2 | 2022-01-18 |
Methods for depositing a hafnium lanthanum oxide film on a substrate by a cyclical deposition process in a reaction chamber
Grant 11,227,763 - Ivanova , et al. January 18, 2 | 2022-01-18 |
Substrate Processing Method
App 20220013358 - Lee; SeungHyun ; et al. | 2022-01-13 |
Electrode
Grant D940,837 - Jung , et al. January 11, 2 | 2022-01-11 |
Substrate processing apparatus
Grant 11,222,772 - Kim , et al. January 11, 2 | 2022-01-11 |
Silicon Nitride And Silicon Oxide Deposition Methods Using Fluorine Inhibitor
App 20220005693 - Mizoguchi; Takashi ; et al. | 2022-01-06 |
Atomic Layer Deposition Of Rhenium Containing Thin Films
App 20220002868 - Hamalainen; Jani ; et al. | 2022-01-06 |
Method and apparatus for depositing thin films on a surface
Grant RE48,871 - Soininen , et al. January 4, 2 | 2022-01-04 |
Method for forming an ultraviolet radiation responsive metal oxide-containing film
Grant 11,217,444 - Huotari , et al. January 4, 2 | 2022-01-04 |
Selective deposition of metals, metal oxides, and dielectrics
Grant 11,213,853 - Haukka , et al. January 4, 2 | 2022-01-04 |
Vapor Deposition Of Films Comprising Molybdenum
App 20210407809 - Zope; Bhushan ; et al. | 2021-12-30 |
Storage Apparatus For Storing Cassettes For Substrates And Processing Apparatus Equipped Therewith
App 20210407838 - Garssen; Adriaan ; et al. | 2021-12-30 |
Area Selective Organic Material Removal
App 20210407818 - Ritala; Mikko ; et al. | 2021-12-30 |
Vapor Deposition Of Tungsten Films
App 20210404060 - Milligan; Robert Brennan ; et al. | 2021-12-30 |
Substrate Processing Method
App 20210407813 - Lee; SeungHyun ; et al. | 2021-12-30 |
Method For Forming A Layer Provided With Silicon
App 20210407789 - Pierreux; Dieter ; et al. | 2021-12-30 |
Vapor flow control apparatus for atomic layer deposition
Grant 11,208,722 - White , et al. December 28, 2 | 2021-12-28 |
Vented Susceptor
App 20210398843 - Fitzgerald; Thomas | 2021-12-23 |
Multi-stage Substrate Processing System
App 20210398826 - Mori; Yukihiro | 2021-12-23 |
Selective Deposition Of Sioc Thin Films
App 20210398797 - Maes; Jan Willem ; et al. | 2021-12-23 |
Titanium Aluminum And Tantalum Aluminum Thin Films
App 20210399111 - Haukka; Suvi ; et al. | 2021-12-23 |
Substrate processing apparatus and method of operating the same
Grant 11,205,585 - Jeong , et al. December 21, 2 | 2021-12-21 |
Methods For Forming A Semiconductor Device Structure And Related Semiconductor Device Structures
App 20210391440 - Zhu; Chiyu ; et al. | 2021-12-16 |
Method For Depositing Boron Containing Silicon Germanium Layers
App 20210391172 - Barbosa Lima; Lucas Petersen ; et al. | 2021-12-16 |
Atomic Layer Deposition And Etching Of Transition Metal Dichalcogenide Thin Films
App 20210388503 - Hamalainen; Jani ; et al. | 2021-12-16 |
Method For Depositing A Gap-fill Layer By Plasma-assisted Deposition
App 20210384030 - Blanquart; Timothee Julien Vincent | 2021-12-09 |
Shower Plate, Substrate Treatment Device, And Substrate Treatment Method
App 20210384033 - Miyama; Ryo | 2021-12-09 |
Substrate Processing Apparatus, Reactor Mover For Moving A Reactor Of The Apparatus And Method Of Maintaining The Reactor Of The Apparatus
App 20210384046 - Ronner; Gijsbert Hendrik ; et al. | 2021-12-09 |
Process for deposition of titanium oxynitride for use in integrated circuit fabrication
Grant 11,195,712 - Pore , et al. December 7, 2 | 2021-12-07 |
Substrate processing method and device manufactured by the same
Grant 11,195,845 - Yoo , et al. December 7, 2 | 2021-12-07 |
Substrate Processing Device
App 20210371976 - Roh; JaeMin | 2021-12-02 |
System And Methods For Direct Liquid Injection Of Vanadium Precursors
App 20210371978 - Shero; Eric James ; et al. | 2021-12-02 |
Rotating Substrate Support
App 20210375598 - Mori; Yukihiro | 2021-12-02 |
Method For Depositing Boron And Gallium Containing Silicon Germanium Layers
App 20210375622 - Lima; Lucas Petersen Barbosa ; et al. | 2021-12-02 |
Purge Nozzle Assembly And Semiconductor Processing Assembly Including The Purge Nozzle Assembly
App 20210375644 - de Ridder; Christianus G.M. ; et al. | 2021-12-02 |
Structures Including Multiple Carbon Layers And Methods Of Forming And Using Same
App 20210366712 - Susa; Yoshio ; et al. | 2021-11-25 |
Storage Device For Storing Wafer Cassettes For Use With A Batch Furnace
App 20210366754 - Garssen; Adriaan | 2021-11-25 |
Apparatus For Depositing Thin Films Using Hydrogen Peroxide
App 20210363633 - Rodriguez; Leonard | 2021-11-25 |
Flange And Apparatus For Processing Substrates
App 20210366742 - de Jonge; Jeroen ; et al. | 2021-11-25 |
Susceptor With Ring To Limit Backside Deposition
App 20210363637 - Hawkins; Mark ; et al. | 2021-11-25 |
Substrate Processing Apparatus
App 20210366693 - Lee; ChangMin | 2021-11-25 |
Atomic layer etching processes
Grant 11,183,367 - Blomberg , et al. November 23, 2 | 2021-11-23 |
Methods For Silicon Germanium Uniformity Control Using Multiple Precursors
App 20210358741 - Kajbafvala; Amir ; et al. | 2021-11-18 |
Selective Passivation And Selective Deposition
App 20210358739 - Tois; Eva E. ; et al. | 2021-11-18 |
Reactor, System Including The Reactor, And Methods Of Manufacturing And Using Same
App 20210358721 - Blomberg; Tom ; et al. | 2021-11-18 |
Laser Alignment Fixture For A Reactor System
App 20210358790 - Ganguli; Surojit ; et al. | 2021-11-18 |
Selective Passivation And Selective Deposition
App 20210358745 - Maes; Jan Willem ; et al. | 2021-11-18 |
High-throughput, Multi-chamber Substrate Processing System
App 20210358780 - Mori; Yukihiro | 2021-11-18 |
Selective deposition on metal or metallic surfaces relative to dielectric surfaces
Grant 11,174,550 - Haukka , et al. November 16, 2 | 2021-11-16 |
Selective Deposition Using Hydrophobic Precursors
App 20210351031 - Farm; Elina ; et al. | 2021-11-11 |
Methods And Systems For Delivery Of Vanadium Compounds
App 20210348267 - Dezelah; Charles ; et al. | 2021-11-11 |
Apparatus And Methods For Performing An In-situ Etch Of Reaction Chambers With Fluorine-based Radicals
App 20210348271 - Mishra; Amit ; et al. | 2021-11-11 |
Reactor System Comprising A Tuning Circuit
App 20210348273 - Nakano; Ryu ; et al. | 2021-11-11 |
Substrate processing device
Grant 11,171,025 - Jeong November 9, 2 | 2021-11-09 |
Selective PEALD of oxide on dielectric
Grant 11,170,993 - Tois , et al. November 9, 2 | 2021-11-09 |
Temperature-controlled flange and reactor system including same
Grant 11,168,395 - Sreeram , et al. November 9, 2 | 2021-11-09 |
Gas channel plate
Grant D935,572 - Adachi November 9, 2 | 2021-11-09 |
Selective Deposition Method To Form Air Gaps
App 20210343580 - Zhu; Chiyu | 2021-11-04 |
Fast Foup Swapping With A Foup Handler
App 20210343554 - Oosterlaken; Theodorus G.M. ; et al. | 2021-11-04 |
Solid Source Precursor Vessel
App 20210340671 - Huang; Jianqiu ; et al. | 2021-11-04 |
Substrate Processing System For Processing Substrates
App 20210343556 - de Jonge; Jeroen | 2021-11-04 |
Methods Of Forming Structures Including Vanadium Boride And Vanadium Phosphide Layers
App 20210335612 - Deminskyi; Petro ; et al. | 2021-10-28 |
Apparatus And Method For Adjusting A Pedestal Assembly For A Reactor
App 20210335652 - Haplin; Michael | 2021-10-28 |
Methods And Systems For Depositing A Layer Comprising Vanadium, Nitrogen, And A Further Element
App 20210335615 - Pierreux; Dieter ; et al. | 2021-10-28 |
Method For Filling A Gap In A Three-dimensional Structure On A Semiconductor Substrate
App 20210332479 - KIM; KiKang ; et al. | 2021-10-28 |
Methods And Apparatus For Stabilizing Vanadium Compounds
App 20210331935 - Dezelah; Charles ; et al. | 2021-10-28 |
Method And Apparatus For Filling A Gap
App 20210335595 - Pore; Viljami ; et al. | 2021-10-28 |
Method Of Forming Vanadium Nitride Containing Layer And Structure Comprising The Same
App 20210332476 - Homm Jara; Pia ; et al. | 2021-10-28 |
Vertical Batch Furnace Assembly Comprising A Cooling Gas Supply
App 20210333049 - Verbaas; Melvin ; et al. | 2021-10-28 |
Plasma enhanced deposition processes for controlled formation of oxygen containing thin films
Grant 11,158,500 - Jia , et al. October 26, 2 | 2021-10-26 |
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
Grant 11,158,513 - Sharma October 26, 2 | 2021-10-26 |
Atomic layer deposition of rhenium containing thin films
Grant 11,155,917 - Hamalainen , et al. October 26, 2 | 2021-10-26 |
ALD of metal-containing films using cyclopentadienyl compounds
Grant 11,155,919 - Barry , et al. October 26, 2 | 2021-10-26 |
Injector Configured For Arrangement Within A Reactor Of A Vertical Furnace And Vertical Furnace
App 20210324518 - de Ridder; Christianus G.M. | 2021-10-21 |
Method For Forming Precoat Film And Method For Forming Silicon-containing Film
App 20210324510 - Kuwano; Takeru ; et al. | 2021-10-21 |
Method For Forming A Doped Metal Carbide Film On A Substrate And Related Semiconductor Device Structures
App 20210328036 - Li; Dong ; et al. | 2021-10-21 |
Methods Of Forming Structures Including Silicon Germanium And Silicon Layers, Devices Formed Using The Methods, And Systems For Performing The Methods
App 20210327704 - Kajbafvala; Amir ; et al. | 2021-10-21 |
Method For Processing A Substrate
App 20210327714 - Lee; SeungHyun ; et al. | 2021-10-21 |
Method Of Forming Chromium Nitride Layer And Structure Including The Chromium Nitride Layer
App 20210327715 - Xie; Qi ; et al. | 2021-10-21 |
Shower plate structure for supplying carrier and dry gas
Grant 11,149,350 - Adachi , et al. October 19, 2 | 2021-10-19 |
Gas Supply Unit And Substrate Processing Apparatus Including The Same
App 20210319982 - Kim; JaeHyun ; et al. | 2021-10-14 |
Cyclic Deposition Methods For Forming Metal-containing Material And Films And Structures Including The Metal-containing Material
App 20210317576 - Vayrynen; Katja ; et al. | 2021-10-14 |
Substrate Processing Apparatus For Processing Substrates
App 20210320020 - Oosterlaken; Theodorus ; et al. | 2021-10-14 |
Method Of Forming A Nitrogen-containing Carbon Film And System For Performing The Method
App 20210320003 - Sugiura; Hirotsugu ; et al. | 2021-10-14 |
Apparatus And Methods For Selectively Etching Silicon Oxide Films
App 20210320010 - Wang; Fei ; et al. | 2021-10-14 |
Selective passivation and selective deposition
Grant 11,145,506 - Maes , et al. October 12, 2 | 2021-10-12 |
Method For Forming Barrier Layer And Method For Manufacturing Semiconductor Device
App 20210313178 - Nakano; Ryu | 2021-10-07 |
Multi-port Gas Injection System And Reactor System Including Same
App 20210310125 - Ma; Mingyang ; et al. | 2021-10-07 |
Flush Fixture For Showerhead
App 20210310123 - Kimtee; Ankit | 2021-10-07 |
Method Of Post-deposition Treatment For Silicon Oxide Film
App 20210313170 - Suzuki; Toshiya | 2021-10-07 |
Method And Apparatus For Filling A Gap
App 20210313167 - PORE; Viljami ; et al. | 2021-10-07 |
Layer Forming Method
App 20210313182 - Zhu; Chiyu ; et al. | 2021-10-07 |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
Grant 11,139,191 - Garssen , et al. October 5, 2 | 2021-10-05 |
Selective Deposition Of Silicon Oxide On Metal Surfaces
App 20210301394 - Illiberi; Andrea ; et al. | 2021-09-30 |
Selective Deposition Of Silicon Oxide On Dielectric Surfaces Relative To Metal Surfaces
App 20210301392 - Illiberi; Andrea ; et al. | 2021-09-30 |
Simultaneous Selective Deposition Of Two Different Materials On Two Different Surfaces
App 20210301391 - Givens; Michael Eugene ; et al. | 2021-09-30 |
Method Of Depositing Epitaxial Material, Structure Formed Using The Method, And System For Performing The Method
App 20210292902 - Kajbafvala; Amir ; et al. | 2021-09-23 |
Method For Selectively Depositing A Metallic Film On A Substrate
App 20210296130 - Longrie; Delphine ; et al. | 2021-09-23 |
Substrate Handling Device With Adjustable Joints
App 20210287928 - Kim; KiHyun ; et al. | 2021-09-16 |
Lockout Tagout Assembly And System And Method Of Using Same
App 20210288476 - Wei; Chia Hsing | 2021-09-16 |
Substrate Processing Apparatus
App 20210287878 - Um; KiChul ; et al. | 2021-09-16 |
Method For Fabricating Layer Structure Having Target Topological Profile
App 20210287912 - Shiba; Eiichiro ; et al. | 2021-09-16 |
Method of forming an enhanced unexposed photoresist layer
Grant 11022879 - | 2021-06-01 |
Higher temperature vented susceptor
Grant D0920936 - | 2021-06-01 |
Substrate processing apparatus and method
Grant 11024523 - | 2021-06-01 |
Systems And Methods For Atomic Layer Deposition
App 20210156026A1 - | 2021-05-27 |
Multiple Temperature Range Susceptor, Assembly, Reactor And System Including The Susceptor, And Methods Of Using The Same
App 20210156030A1 - | 2021-05-27 |
Methods For Selectively Forming A Target Film On A Substrate Comprising A First Dielectric Surface And A Second Metallic Surface
App 20210159077A1 - | 2021-05-27 |
Substrate Processing Apparatus
App 20210156024A1 - | 2021-05-27 |
Hybrid lift pin
Grant 11018047 - | 2021-05-25 |
Synthesis and use of precursors for vapor deposition of tungsten containing thin films
Grant 11014866 - | 2021-05-25 |
Gas-phase reactor and system having exhaust plenum and components thereof
Grant 11015245 - | 2021-05-25 |
Method for selectively depositing a Group IV semiconductor and related semiconductor device structures
Grant 11018002 - | 2021-05-25 |
Methods For Depositing A Molybdenum Metal Film Over A Dielectric Surface Of A Substrate By A Cyclical Deposition Process And Related Semiconductor Device Structures
App 20210151352A1 - | 2021-05-20 |
Method For Providing A Semiconductor Device With Silicon Filled Gaps
App 20210151315A1 - | 2021-05-20 |
Method Of Depositing Carbon-containing Material On A Surface Of A Substrate, Structure Formed Using The Method, And System For Forming The Structure
App 20210151348A1 - | 2021-05-20 |
Deposition Of Organic Films
App 20210151324A1 - | 2021-05-20 |
Substrate processing apparatus
Grant 11001925 - | 2021-05-11 |
Method for depositing a group IV semiconductor and related semiconductor device structures
Grant 11004977 - | 2021-05-11 |
Uniform deposition of SiOC on dielectric and metal surfaces
Grant 10991573 - | 2021-04-27 |
Method Of Topology-selective Film Formation Of Silicon Oxide
App 20210118667A1 - | 2021-04-22 |
Semiconductor Deposition Reactor Manifolds
App 20210118668A1 - | 2021-04-22 |
Passivation Against Vapor Deposition
App 20210115559A1 - | 2021-04-22 |
Atomic Layer Deposition Of Indium Germanium Zinc Oxide
App 20210118671A1 - | 2021-04-22 |
Selective Layer Formation Using Deposition And Removing
App 20210118669A1 - | 2021-04-22 |
Apparatus And Methods For Selectively Etching Films
App 20210118687A1 - | 2021-04-22 |
Methods For Selective Deposition Of Doped Semiconductor Material
App 20210118679A1 - | 2021-04-22 |
Atomic Layer Deposition Of Indium Gallium Zinc Oxide
App 20210118672A1 - | 2021-04-22 |
Susceptor Having Cf Coating
App 20210108328A1 - | 2021-04-15 |
Method Of Forming A Photoresist Underlayer And Structure Including Same
App 20210111025A1 - | 2021-04-15 |
Vertical Batch Furnace Assembly
App 20210111053A1 - | 2021-04-15 |
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
Grant 10975470 - | 2021-04-13 |
Substrate Processing Device Having Connection Plates, Substrate Processing Method
App 20210102289A1 - | 2021-04-08 |
Methods For Forming A Topographically Selective Silicon Oxide Film By A Cyclical Plasma-enhanced Deposition Process
App 20210104399A1 - | 2021-04-08 |
Reactor System Including A Gas Distribution Assembly For Use With Activated Species And Method Of Using Same
App 20210102292A1 - | 2021-04-08 |
Gas Injection System And Reactor System Including Same
App 20210102290A1 - | 2021-04-08 |
Apparatus And Methods For Isolating A Reaction Chamber From A Loading Chamber Resulting In Reduced Contamination
App 20210104427A1 - | 2021-04-08 |
A Method For Depositing A Ruthenium-containing Film On A Substrate By A Cyclical Deposition Process
App 20210095372A1 - | 2021-04-01 |
Vented susceptor
Grant D0914620 - | 2021-03-30 |
Semiconductor Processing Device
App 20210087679A1 - | 2021-03-25 |
Susceptor Having Cooling Device
App 20210087680A1 - | 2021-03-25 |
Substrate Processing Method
App 20210090878A1 - | 2021-03-25 |
Gas supply plate for semiconductor manufacturing apparatus
Grant D0913980 - | 2021-03-23 |
Atomic layer deposition apparatus
Grant 10954597 - | 2021-03-23 |
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
App 20210082684A1 - | 2021-03-18 |
Method Of Forming A Carbon-containing Layer And Structure Including The Layer
App 20210082692A1 - | 2021-03-18 |
Heating Zone Separation For Reactant Evaporation System
App 20210079527A1 - | 2021-03-18 |
Method of depositing thin film and method of manufacturing semiconductor device
Grant 10950432 - | 2021-03-16 |
Substrate processing apparatus
Grant 10950449 - | 2021-03-16 |
Sequential Infiltration Synthesis Apparatus And A Method Of Forming A Patterned Structure
App 20210071298A1 - | 2021-03-11 |
Exhaust Component Cleaning Method And Substrate Processing Apparatus Including Exhaust Component
App 20210071296A1 - | 2021-03-11 |
Fill Vessels And Connectors For Chemical Sublimators
App 20210071301A1 - | 2021-03-11 |
Substrate Processing Apparatus
App 20210074527A1 - | 2021-03-11 |
Photoactive Devices And Materials
App 20210074865A1 - | 2021-03-11 |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
Grant 10941490 - | 2021-03-09 |
Methods for thermally calibrating reaction chambers
Grant 10943771 - | 2021-03-09 |
Synthesis and use of precursors for ALD of group VA element containing thin films
Grant 10941487 - | 2021-03-09 |
Methods For Selective Deposition Using A Sacrificial Capping Layer
App 20210066079A1 - | 2021-03-04 |
Methods And Apparatus For Depositing A Chalcogenide Film And Structures Including The Film
App 20210066080A1 - | 2021-03-04 |
Structures Including Dielectric Layers And Methods Of Forming Same
App 20210066075A1 - | 2021-03-04 |
Method For Depositing A Ruthenium-containing Film On A Substrate By A Cyclical Deposition Process
App 20210066083A1 - | 2021-03-04 |
Method For Depositing A Material Film On A Substrate Within A Reaction Chamber By A Cyclical Deposition Process And Related Device Structures
App 20210066084A1 - | 2021-03-04 |
Gas supply unit and substrate processing apparatus including the gas supply unit
Grant 10934619 - | 2021-03-02 |
Methods for preparing self-assembled monolayers
Grant 10937645 - | 2021-03-02 |
Substrate Supporting Plate, Thin Film Deposition Apparatus Including The Same, And Thin Film Deposition Method
App 20210054519A1 - | 2021-02-25 |
Methods For Forming A Polycrystalline Molybdenum Film Over A Surface Of A Substrate And Related Structures Including A Polycrystalline Molybdenum Film
App 20210054500A1 - | 2021-02-25 |
Method For Forming A Structure With A Hole
App 20210057275A1 - | 2021-02-25 |
Film-forming Material Mixed-gas Forming Device And Film Forming Device
App 20210054504A1 - | 2021-02-25 |
Methods For Depositing A Molybdenum Nitride Film On A Surface Of A Substrate By A Cyclical Deposition Process And Related Semiconductor Device Structures Including A Molybdenum Nitride Film
App 20210057223A1 - | 2021-02-25 |
Method For Depositing Silicon Oxide Film Having Improved Quality By Peald Using Bis(diethylamino)silane
App 20210057214A1 - | 2021-02-25 |
Systems and methods for atomic layer deposition
Grant 10927459 - | 2021-02-23 |
Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same
Grant 10928731 - | 2021-02-23 |
Apparatus And Method To Process Wafers
App 20210050231A1 - | 2021-02-18 |
Methods for forming a semiconductor structure and related semiconductor structures
Grant 10923344 - | 2021-02-16 |
Deposition of organic films
Grant 10923361 - | 2021-02-16 |
Heater Assembly Including Cooling Apparatus And Method Of Using Same
App 20210040613A1 - | 2021-02-11 |
Temperature-controlled Chemical Delivery System And Reactor System Including Same
App 20210040615A1 - | 2021-02-11 |
Liquid Level Sensor For A Chemical Source Vessel
App 20210041284A1 - | 2021-02-11 |
Method For Reforming Amorphous Carbon Polymer Film
App 20210043444A1 - | 2021-02-11 |
Thin-film deposition method and manufacturing method of semiconductor device
Grant 10914004 - | 2021-02-09 |
Substrate Processing Apparatus
App 20210035785A1 - | 2021-02-04 |
Substrate Processing Apparatus
App 20210035786A1 - | 2021-02-04 |
Substrate Processing Apparatus And Method
App 20210033977A1 - | 2021-02-04 |
Showerhead Assembly And Components Thereof
App 20210032754A1 - | 2021-02-04 |
Substrate Processing Method And Device Manufactured By The Same
App 20210035988A1 - | 2021-02-04 |
Vertical Batch Furnace Assembly
App 20210035824A1 - | 2021-02-04 |
Methods For Selective Deposition Utilizing N-type Dopants And/or Alternative Dopants To Achieve High Dopant Incorporation
App 20210035802A1 - | 2021-02-04 |
Method Of Forming A Structure Using Fluorine Removal
App 20210035854A1 - | 2021-02-04 |
Cassette Lid Opening Device
App 20210035842A1 - | 2021-02-04 |
Vertical Batch Furnace Assembly
App 20210035841A1 - | 2021-02-04 |
Vertical Batch Furnace Assembly
App 20210035839A1 - | 2021-02-04 |
Vertical Batch Furnace Assembly
App 20210035840A1 - | 2021-02-04 |
Method of selectively depositing a capping layer structure on a semiconductor device structure
Grant 10910262 - | 2021-02-02 |
Plasma Atomic Layer Deposition
App 20210025059A1 - | 2021-01-28 |
Method Of Forming An Electrode On A Substrate And A Semiconductor Device Structure Including An Electrode
App 20210028021A1 - | 2021-01-28 |
Passivation against vapor deposition
Grant 10900120 - | 2021-01-26 |
Selective deposition of aluminum and nitrogen containing material
Grant 10903113 - | 2021-01-26 |
Apparatus for semiconductor wafer processing
Grant 10900122 - | 2021-01-26 |
Methods Of Forming Silicon Germanium Structures
App 20210020429A1 - | 2021-01-21 |
Method Of Forming Structures Using A Neutral Beam, Structures Formed Using The Method And Reactor System For Performing The Method
App 20210017648A1 - | 2021-01-21 |
Radical Assist Ignition Plasma System And Method
App 20210020467A1 - | 2021-01-21 |
Method Of Forming Topology-controlled Amorphous Carbon Polymer Film
App 20210020432A1 - | 2021-01-21 |
Method Of Forming Topology-controlled Amorphous Carbon Polymer Film
App 20210020431A1 - | 2021-01-21 |
Substrate Processing Device
App 20210020470A1 - | 2021-01-21 |
Semiconductor Vapor Etching Device With Intermediate Chamber
App 20210020469A1 - | 2021-01-21 |
Showerhead Device For Semiconductor Processing System
App 20210020468A1 - | 2021-01-21 |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
Grant 10896820 - | 2021-01-19 |
Substrate Support Assembly And Substrate Processing Device Including The Same
App 20210013085A1 - | 2021-01-14 |
Structure Including A Photoresist Underlayer And Method Of Forming Same
App 20210013037A1 - | 2021-01-14 |
Plasma Device Using Coaxial Waveguide, And Substrate Treatment Method
App 20210013010A1 - | 2021-01-14 |
Methods For Forming A Metallic Film On A Substrate By Cyclical Deposition And Related Semiconductor Device Structures
App 20210013042A1 - | 2021-01-14 |
Methods for forming a silicon nitride film on a substrate and related semiconductor device structures
Grant 10892156 - | 2021-01-12 |
Method Of Forming A Structure On A Substrate
App 20210005449A1 - | 2021-01-07 |
Methods For Forming A Metal Silicate Film On A Substrate In A Reaction Chamber And Related Semiconductor Device Structures
App 20210005723A1 - | 2021-01-07 |
Temperature Control Assembly For Substrate Processing Apparatus And Method Of Using Same
App 20210002762A1 - | 2021-01-07 |
Vapor Phase Deposition Of Organic Films
App 20210001373A1 - | 2021-01-07 |
Methods For Depositing A Transition Metal Chalcogenide Film On A Substrate By A Cyclical Deposition Process
App 20210005450A1 - | 2021-01-07 |
Liquid Vaporizer
App 20210002767A1 - | 2021-01-07 |
Vertical furnace for processing substrates and a liner for use therein
Grant 10883175 - | 2021-01-05 |
Methods for forming low temperature semiconductor layers and related semiconductor device structures
Grant 10886123 - | 2021-01-05 |
Tritertbutyl aluminum reactants for vapor deposition
Grant 10875774 - | 2020-12-29 |
Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method
Grant 10876218 - | 2020-12-29 |
Reactant vaporizer and related systems and methods
Grant 10876205 - | 2020-12-29 |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
Grant 10872771 - | 2020-12-22 |
Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
Grant 10872804 - | 2020-12-22 |
Selective layer formation using deposition and removing
Grant 10872765 - | 2020-12-22 |
Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
Grant 10872803 - | 2020-12-22 |
Substrate Treatment Apparatus And Method Of Cleaning Inside Of Chamber
App 20200395199A1 - | 2020-12-17 |
Method Of Forming An Electronic Structure Using Reforming Gas, System For Performing The Method, And Structure Formed Using The Method
App 20200395209A1 - | 2020-12-17 |
Method For Depositing A Phosphorus Doped Silicon Arsenide Film And Related Semiconductor Device Structures
App 20200395444A1 - | 2020-12-17 |
Plasma Enhanced Deposition Processes For Controlled Formation Of Oxygen Containing Thin Films
App 20200395211A1 - | 2020-12-17 |
Substrate processing method
Grant 10867786 - | 2020-12-15 |
Deposition of metal borides and silicides
Grant 10865475 - | 2020-12-15 |
Method of forming a structure on a substrate
Grant 10867788 - | 2020-12-15 |
Method For Cleaning Quartz Epitaxial Chambers
App 20200385861A1 - | 2020-12-10 |
Method Of Using A Gas-phase Reactor System Including Analyzing Exhausted Gas
App 20200385868A1 - | 2020-12-10 |
Gas-phase Reactor System Including A Gas Detector
App 20200385867A1 - | 2020-12-10 |
Showerhead assembly and components thereof
Grant 10858737 - | 2020-12-08 |
Photoactive devices and materials
Grant 10861986 - | 2020-12-08 |
Deposition of metal borides
Grant 10851456 - | 2020-12-01 |
Sulfur-containing thin films
Grant 10854444 - | 2020-12-01 |
Wafer-supporting device and method for producing same
Grant 10854498 - | 2020-12-01 |
Metal clamp
Grant D0903477 - | 2020-12-01 |
Deposition of organic films
Grant 10854460 - | 2020-12-01 |
Systems And Methods For Controlling Vapor Phase Processing
App 20200370179A1 - | 2020-11-26 |
Substrate Susceptor Using Edge Purging
App 20200373187A1 - | 2020-11-26 |
Apparatus Operating Method And Substrate Processing Apparatus
App 20200370175A1 - | 2020-11-26 |
Method For Depositing Silicon-free Carbon-containing Film As Gap-fill Layer By Pulse Plasma-assisted Deposition
App 20200373152A1 - | 2020-11-26 |
Semiconductor processing reactor and components thereof
Grant 10844486 - | 2020-11-24 |
Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
Grant 10844484 - | 2020-11-24 |
Selective deposition of aluminum and nitrogen containing material
Grant 10847361 - | 2020-11-24 |
Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
Grant 10847366 - | 2020-11-24 |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
Grant 10847371 - | 2020-11-24 |
Method of forming conformal silicon carbide film by cyclic CVD
Grant 10847365 - | 2020-11-24 |
Substrate processing method and device manufactured by the same
Grant 10847529 - | 2020-11-24 |
Chemical Source Vessel With Dip Tube
App 20200354836A1 - | 2020-11-12 |
Method Of Depositing Material Onto A Surface And Structure Formed According To The Method
App 20200357631A1 - | 2020-11-12 |
Diaphragm Valves, Valve Components, And Methods For Forming Valve Components
App 20200355296A1 - | 2020-11-12 |
Gas distribution device for a wafer processing apparatus
Grant 10829852 - | 2020-11-10 |
Process feed management for semiconductor substrate processing
Grant 10832903 - | 2020-11-10 |
A Storage Device For Storing Wafer Cassettes For Use With A Batch Furnace
App 20200350193A1 - | 2020-11-05 |
Thin film deposition apparatus
Grant 10822695 - | 2020-11-03 |
Plasma atomic layer deposition
Grant 10822700 - | 2020-11-03 |
Substrate processing apparatus, recording medium, and method of processing substrates
Grant 10822698 - | 2020-11-03 |
Selective Deposition Of Tungsten
App 20200343134A1 - | 2020-10-29 |
Methods For Forming A Semiconductor Device Structure And Related Semiconductor Device Structures
App 20200343358A1 - | 2020-10-29 |
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