Vented susceptor

Rokkam , et al. March 30, 2

Patent Grant D914620

U.S. patent number D914,620 [Application Number D/677,183] was granted by the patent office on 2021-03-30 for vented susceptor. This patent grant is currently assigned to ASM IP Holding B.V.. The grantee listed for this patent is ASM IP HOLDING B.V.. Invention is credited to Dakai Bian, Sam Kim, Saket Rathi, Uday Kiran Rokkam.


United States Patent D914,620
Rokkam ,   et al. March 30, 2021

Vented susceptor

Claims

CLAIM The ornamental design for a vented susceptor, as shown and described.
Inventors: Rokkam; Uday Kiran (San Diego, CA), Kim; Sam (Chandler, AZ), Rathi; Saket (Tempe, AZ), Bian; Dakai (Tempe, AZ)
Applicant:
Name City State Country Type

ASM IP HOLDING B.V.

Almere

N/A

NL
Assignee: ASM IP Holding B.V. (Almere, NL)
Appl. No.: D/677,183
Filed: January 17, 2019

Current U.S. Class: D13/182
Current International Class: 1303
Field of Search: ;D13/182,199 ;D25/199 ;438/6,67,107,149 ;257/625 ;118/715,720,724,725,728,729 ;204/192.1,298.01

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"Shaping the Future in Semiconductor Processing." Advertisement for Morton International, Inc., Ceramic Solutions. vol. 73, No. 7, Jul. 1994: advertisements (circa 1993). cited by applicant.

Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Knobbe, Martens, Olson & Bear, LLP

Description



FIG. 1 is a front perspective view of a vented susceptor showing our design;

FIG. 2 is a back perspective view thereof;

FIG. 3 is a left side view thereof; and,

FIG. 4 is a right side perspective view thereof.

The even dashed circular ring that crosses the triangular panels in FIG. 1 is unclaimed, but the surrounding surface area shown in solid lines is part of the claimed design. All other even dashed broken lines in FIGS. 1-4 form no part of the claimed design.

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