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Patent applications and USPTO patent grants for Rathi; Saket.The latest application filed is for "uniform in situ cleaning and deposition".
Patent | Date |
---|---|
Uniform In Situ Cleaning And Deposition App 20220310360 - Rathi; Saket ;   et al. | 2022-09-29 |
Cleaning Assemblies For Substrate Processing Chambers App 20220307129 - Zhang; Yuxing ;   et al. | 2022-09-29 |
Susceptor shaft Grant D965,044 - Patil , et al. September 27, 2 | 2022-09-27 |
Higher temperature vented susceptor Grant D958,764 - Rokkam , et al. July 26, 2 | 2022-07-26 |
Runout And Wobble Measurement Fixtures App 20220186369 - Patil; Aniket Nitin ;   et al. | 2022-06-16 |
High Temperature Face Plate For Deposition Application App 20220119950 - BANSAL; Amit Kumar ;   et al. | 2022-04-21 |
High temperature face plate for deposition application Grant 11,242,600 - Bansal , et al. February 8, 2 | 2022-02-08 |
High Temperature Face Plate For Deposition Application App 20210395881 - BANSAL; Amit Kumar ;   et al. | 2021-12-23 |
Higher temperature vented susceptor Grant D920,936 - Rokkam , et al. June 1, 2 | 2021-06-01 |
Susceptor For Semiconductor Substrate Processing App 20210125853 - Rathi; Saket ;   et al. | 2021-04-29 |
Vented susceptor Grant D914,620 - Rokkam , et al. March 30, 2 | 2021-03-30 |
Methods and apparatus for a microwave batch curing process Grant 10,945,313 - Rathi , et al. March 9, 2 | 2021-03-09 |
Vented Susceptor App 20200234996 - Rokkam; Uday Kiran ;   et al. | 2020-07-23 |
Batch processing apparatus Grant 10,373,860 - Sundararajan , et al. | 2019-08-06 |
Batch Processing Apparatus App 20170004982 - SUNDARARAJAN; Mukund ;   et al. | 2017-01-05 |
Methods And Apparatus For A Microwave Batch Curing Process App 20160353522 - RATHI; SAKET ;   et al. | 2016-12-01 |
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