Gas supply plate for semiconductor manufacturing apparatus

Description

FIG. 1 is a perspective view of a gas supply plate for semiconductor manufacturing apparatus showing my new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is an enlarged view of the portion labeled "FIG. 8" indicated in FIG. 6;

FIG. 9 is an enlarged view of the portion labeled "FIG. 9" indicated in FIG. 7; and,

FIG. 10 is a cross sectional view taken along line 10-10 in FIG. 9.

The even dashed broken lines shown in the drawings represent portions of the gas supply plate for semiconductor manufacturing apparatus that form no part of the claimed design. The dashed-dot-dashed lines represent the boundary between the claimed portions and unclaimed portions of the claimed design. The claimed portion is directed to the solid circles shown within the dashed-dot-dashed lines, which appear at the center region of the gas supply plate.

Claims

CLAIM The ornamental design for a gas supply plate for semiconductor manufacturing apparatus, as shown and described.

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Inventors:	Lee; Hak Joo (Gyeonggi-do, KR), Woo; Jeong Jun (Chungcheongnam-do, KR), Ahn; Jong Hyun (Gyeonggi-do, KR), Min; Yoon Ki (Seoul, KR)
Applicant:	Name City State Country Type ASM IP Holding B.V. Almere N/A NL
Assignee:	ASM IP Holding B.V. (Almere, NL)
Appl. No.:	D/646,377
Filed:	May 3, 2018

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Foreign Application Priority Data

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Feb 1, 2018 [KR]			30-2018-0005758

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;D23/213

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References Cited [Referenced By]

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U.S. Patent Documents

D30036	January 1899	Rhind
D31889	November 1899	Gill
D56051	August 1920	Cohn
2059480	November 1936	Obermaier
2161626	June 1939	Loughner et al.
2266416	December 1941	Duclos
2280778	April 1942	Anderson
D142841	November 1945	D'Algodt
2410420	November 1946	Bennett
2563931	August 1951	Harrison
2660061	November 1953	Lewis
2745640	May 1956	Cushman
2990045	September 1959	Root
3038951	June 1962	Mead
3089507	May 1963	Drake et al.
3094396	June 1963	Flugge et al.
3232437	February 1966	Hultgren
3263502	August 1966	Springfield
3410349	November 1968	Troutman
3588192	June 1971	Drutchas et al.
3647387	March 1972	Benson
3647716	March 1972	Koches
3713899	January 1973	Sebestyen
3718429	February 1973	Williamson
3833492	September 1974	Bollyky
3854443	December 1974	Baerg
3862397	January 1975	Anderson et al.
3867205	February 1975	Schley
3885504	May 1975	Baermann
3887790	June 1975	Ferguson
3904371	September 1975	Neti
3913058	October 1975	Nishio et al.
3913617	October 1975	van Laar
3947685	March 1976	Meinel
3960559	June 1976	Suzuki
3997638	December 1976	Manning et al.
4054071	October 1977	Patejak
4058430	November 1977	Suntola et al.
4093491	June 1978	Whelpton et al.
D249341	September 1978	Mertz
4126027	November 1978	Smith et al.
4134425	January 1979	Gussefeld et al.
4145699	March 1979	Hu et al.
4164959	August 1979	Wurzburger
4176630	December 1979	Elmer
4181330	January 1980	Kojima
4194536	March 1980	Stine et al.
4217463	August 1980	Swearingen
4234449	November 1980	Wolson et al.
4322592	March 1982	Martin
4333735	June 1982	Hardy
4355912	October 1982	Haak
4389973	June 1983	Suntola et al.
4393013	July 1983	McMenamin
4401507	August 1983	Engle
4414492	November 1983	Hanlet
4436674	March 1984	McMenamin
4444990	April 1984	Villar
4454370	June 1984	Voznick
4455193	June 1984	Jeuch et al.
4466766	August 1984	Geren et al.
4479831	October 1984	Sandow
4499354	February 1985	Hill et al.
4512113	April 1985	Budinger
4527005	July 1985	McKelvey et al.
4537001	August 1985	Uppstrom
4548688	October 1985	Mathews
4570328	February 1986	Price et al.
4575636	March 1986	Caprari
4578560	March 1986	Tanaka et al.
4579378	April 1986	Snyders
4579623	April 1986	Suzuki et al.
4590326	May 1986	Woldy
4611966	September 1986	Johnson
4620998	November 1986	Lalvani
D288556	March 1987	Wallgren
4653541	March 1987	Oehlschlaeger et al.
4654226	March 1987	Jackson et al.
4664769	May 1987	Cuomo et al.
4681134	July 1987	Paris
4718637	January 1988	Contin
4721533	January 1988	Phillippi et al.
4722298	February 1988	Rubin et al.
4724272	February 1988	Raniere et al.
4735259	April 1988	Vincent
4749416	June 1988	Greenspan
4753192	June 1988	Goldsmith et al.
4753856	June 1988	Haluska et al.
4756794	July 1988	Yoder
4771015	September 1988	Kanai
4780169	October 1988	Stark et al.
4789294	December 1988	Sato et al.
4821674	April 1989	deBoer et al.
4827430	May 1989	Aid et al.
4830515	May 1989	Cortes
4837113	June 1989	Luttmer et al.
4837185	June 1989	Yau et al.
4854263	August 1989	Chang et al.
4854266	August 1989	Simson et al.
4857137	August 1989	Tashiro et al.
4857382	August 1989	Sheng et al.
4882199	November 1989	Sadoway et al.
4916091	April 1990	Freeman et al.
4934831	June 1990	Volbrecht
4949848	August 1990	Kos
D311126	October 1990	Crowley
4976996	December 1990	Monkowski et al.
4978567	December 1990	Miller
4984904	January 1991	Nakano et al.
4985114	January 1991	Okudaira
4986215	January 1991	Yamada
4987856	January 1991	Hey
4989992	February 1991	Piai
4991614	February 1991	Hammel
5013691	May 1991	Lory et al.
5027746	July 1991	Frijlink
5028366	July 1991	Harakal et al.
5057436	October 1991	Ball
5060322	October 1991	Delepine
5061083	October 1991	Grimm et al.
5062386	November 1991	Christensen
5065698	November 1991	Koike
5071258	December 1991	Usher et al.
5074017	December 1991	Toya et al.
5098638	March 1992	Sawada
5098865	March 1992	Machado
5104514	April 1992	Quartarone
5108192	April 1992	Mailliet et al.
5116018	May 1992	Friemoth et al.
D327534	June 1992	Manville
5119760	June 1992	McMillan et al.
5130003	July 1992	Conrad
5137286	August 1992	Whitford
5154301	October 1992	Kos
5158128	October 1992	Inoue et al.
5167716	December 1992	Boitnott et al.
5176451	January 1993	Sasada
5178682	January 1993	Tsukamoto et al.
5181779	January 1993	Shia et al.
5183511	February 1993	Yamazaki et al.
5192717	March 1993	Kawakami
5194401	March 1993	Adams et al.
5199603	April 1993	Prescott
5213650	May 1993	Wang et al.
5221556	June 1993	Hawkins et al.
5225366	July 1993	Yoder et al.
5226383	July 1993	Bhat
5228114	July 1993	Suzuki
5242539	September 1993	Kumihashi et al.
5243195	September 1993	Nishi
5243202	September 1993	Mori et al.
5246218	September 1993	Yap et al.
5246500	September 1993	Samata et al.
5259881	November 1993	Edwards et al.
5266526	November 1993	Aoyama
5271967	December 1993	Kramer et al.
5278494	January 1994	Obigane
5284519	February 1994	Gadgil
5288684	February 1994	Yamazaki et al.
5294778	March 1994	Carman et al.
5306666	April 1994	Izumi
5306946	April 1994	Yamamoto
5310456	May 1994	Kadomura
5314570	May 1994	Ikegaya et al.
5315092	May 1994	Takahashi et al.
5326427	July 1994	Jerbic
5336327	August 1994	Lee
5354580	October 1994	Goela et al.
5356478	October 1994	Chen et al.
5356672	October 1994	Schmitt et al.
5360269	November 1994	Ogawa et al.
5364667	November 1994	Rhieu
D353452	December 1994	Groenhoff
5374315	December 1994	Deboer et al.
5380367	January 1995	Bertone
5382311	January 1995	Ishikawa et al.
5388945	February 1995	Garric et al.
5404082	April 1995	Hernandez et al.
5407449	April 1995	Zinger
5413813	May 1995	Cruse et al.
5414221	May 1995	Gardner
5415753	May 1995	Hurwitt et al.
5421893	June 1995	Perlov
5422139	June 1995	Fischer
5423942	June 1995	Robbins et al.
5430011	July 1995	Tanaka et al.
5444217	August 1995	Moore
5453124	September 1995	Moslehi et al.
D363464	October 1995	Fukasawa
5494494	February 1996	Mizuno et al.
5496408	March 1996	Motoda et al.
5501740	March 1996	Besen et al.
5503875	April 1996	Imai et al.
5504042	April 1996	Cho et al.
5514439	May 1996	Sibley
5518549	May 1996	Hellwig
5523616	June 1996	Yasuhide
5527111	June 1996	Lysen et al.
5527417	June 1996	Iida et al.
5531835	July 1996	Fodor et al.
5540898	July 1996	Davidson
5558717	September 1996	Zhao et al.
5559046	September 1996	Oishi et al.
5574247	November 1996	Nishitani et al.
5576629	November 1996	Turner
5577331	November 1996	Suzuki
5583736	December 1996	Anderson et al.
5589002	December 1996	Su
5589110	December 1996	Motoda et al.
5595606	January 1997	Fujikawa et al.
5601641	February 1997	Stephens
5604410	February 1997	Vollkommer et al.
5616264	April 1997	Nishi et al.
5616947	April 1997	Tamura
5621982	April 1997	Yamashita
5632919	May 1997	MacCracken et al.
D380527	July 1997	Velez
5656093	August 1997	Burkhart et al.
5663899	September 1997	Zvonar et al.
5665608	September 1997	Chapple-Sokol et al.
5679215	October 1997	Barnes et al.
5681779	October 1997	Pasch et al.
5683517	November 1997	Shan
5695567	December 1997	Kordina
5697706	December 1997	Ciaravino et al.
5700729	December 1997	Lee et al.
5708825	January 1998	Sotomayor
5711811	January 1998	Suntola et al.
5716133	February 1998	Hosokawa et al.
5718574	February 1998	Shimazu
D392855	March 1998	Pillow
5724748	March 1998	Brooks
5728223	March 1998	Murakarni et al.
5730801	March 1998	Tepman et al.
5732744	March 1998	Barr et al.
5736314	April 1998	Hayes et al.
5753835	May 1998	Gustin
5761328	June 1998	Solberg et al.
5777838	July 1998	Tamagawa et al.
5779203	July 1998	Edlinger
5781693	July 1998	Balance et al.
5782979	July 1998	Kaneno
5791782	August 1998	Wooten et al.
5792272	August 1998	Van Os et al.
5796074	August 1998	Edelstein et al.
5801104	September 1998	Schuegraf et al.
5806980	September 1998	Berrian
5813851	September 1998	Nakao
5819092	October 1998	Ferguson et al.
5819434	October 1998	Herchen et al.
5827435	October 1998	Seiji
5827757	October 1998	Robinson, Jr. et al.
5836483	November 1998	Disel
5837058	November 1998	Chen et al.
5837320	November 1998	Hampden-Smith et al.
5844683	December 1998	Pavloski et al.
5846332	December 1998	Zhao et al.
5851294	December 1998	Young et al.
5852879	December 1998	Schumaier
5853484	December 1998	Jeong
5855680	January 1999	Soininen et al.
5855681	January 1999	Maydan et al.
5857777	January 1999	Schuh
5863123	January 1999	Lee
5865205	February 1999	Wilmer
5873942	February 1999	Park
5877095	March 1999	Tamura et al.
5879128	March 1999	Tietz et al.
5884640	March 1999	Fishkin et al.
D409894	May 1999	McClurg
D411516	June 1999	Imafuku
5908672	June 1999	Ryu
5916365	June 1999	Sherman
D412270	July 1999	Fredrickson
5920798	July 1999	Higuchi et al.
5937323	August 1999	Orczyk et al.
5947718	September 1999	Weaver
5954375	September 1999	Trickle et al.
5961775	October 1999	Fujimura
5968275	October 1999	Lee et al.
5970621	October 1999	Bazydola
5975492	November 1999	Brenes
5979506	November 1999	Aarseth
5982931	November 1999	Ishimaru
5984391	November 1999	Vanderpot et al.
5987480	November 1999	Donohue et al.
5997588	December 1999	Goodwin
5997768	December 1999	Scully
5998870	December 1999	Lee et al.
6001267	December 1999	Os et al.
D419652	January 2000	Hall et al.
6013553	January 2000	Wallace
6013920	January 2000	Gordon et al.
6015465	January 2000	Kholodenko et al.
6017779	January 2000	Miyasaka
6017818	January 2000	Lu
6024799	February 2000	Chen
6035101	March 2000	Sajoto et al.
6042652	March 2000	Hyun
6044860	April 2000	Nue
6045260	April 2000	Schwartz et al.
6048154	April 2000	Wytman
6050506	April 2000	Guo et al.
6054678	April 2000	Miyazaki
6060691	May 2000	Minami et al.
6060721	May 2000	Huang
6068441	May 2000	Raaijmakers et al.
6072163	June 2000	Armstrong
6073973	June 2000	Boscaljon et al.
6074443	June 2000	Venkatesh
6083321	July 2000	Lei et al.
6086677	July 2000	Umotoy et al.
6091062	July 2000	Pfahnl et al.
6093252	July 2000	Wengert et al.
6093253	July 2000	Lofgren
6096267	August 2000	Kishkovich
6099302	August 2000	Hong et al.
6102565	August 2000	Kita et al.
6104011	August 2000	Juliano
6104401	August 2000	Parsons
6106678	August 2000	Shufflebotham
6119710	September 2000	Brown
6121061	September 2000	Van Bilsen et al.
6121158	September 2000	Benchikha et al.
6122036	September 2000	Yamasaki et al.
6124600	September 2000	Moroishi et al.
6125789	October 2000	Gupta et al.
6126848	October 2000	Li et al.
6129044	October 2000	Zhao et al.
6129546	October 2000	Sada
6134807	October 2000	Komino
6137240	October 2000	Bogdan et al.
6140252	October 2000	Cho et al.
6148761	November 2000	Majewski et al.
6158941	December 2000	Muka et al.
6160244	December 2000	Ohashi
6161500	December 2000	Kopacz et al.
6162323	December 2000	Koshimizu et al.
6174809	January 2001	Kang et al.
6178918	January 2001	Van Os et al.
6180979	January 2001	Hofman et al.
6187672	February 2001	Zhao
6187691	February 2001	Fukuda
6190634	February 2001	Lieber et al.
6191399	February 2001	Van Bilsen
6194037	February 2001	Terasaki et al.
6201999	March 2001	Jevtic
6203613	March 2001	Gates et al.
6207932	March 2001	Yoo
6212789	April 2001	Kato
6214122	April 2001	Thompson
6217658	April 2001	Orczyk et al.
6218288	April 2001	Li et al.
6225020	May 2001	Jung et al.
6235858	May 2001	Swarup et al.
6242359	June 2001	Misra
6243654	June 2001	Johnson et al.
6245665	June 2001	Yokoyama
6247245	June 2001	Ishii
6250250	June 2001	Maishev et al.
6257758	July 2001	Culbertson
6264467	July 2001	Andreas et al.
6271148	August 2001	Kao
6274878	August 2001	Li et al.
6281098	August 2001	Wang
6281141	August 2001	Das et al.
6284050	September 2001	Shi et al.
6287965	September 2001	Kang et al.
6293700	September 2001	Lund et al.
D449873	October 2001	Bronson
6296909	October 2001	Spitsberg
6299133	October 2001	Waragai et al.
6302964	October 2001	Umotoy et al.
6303523	October 2001	Cheung
6305898	October 2001	Yamagishi et al.
6311016	October 2001	Yanagawa et al.
6312525	November 2001	Bright et al.
6315512	November 2001	Tabrizi et al.
6316162	November 2001	Jung et al.
6321680	November 2001	Cook et al.
D451893	December 2001	Robson
D452220	December 2001	Robson
6325858	December 2001	Wengert
6326597	December 2001	Lubomirsky et al.
6329297	December 2001	Balish
6342427	January 2002	Choi et al.
6344084	February 2002	Koinuma et al.
6344232	February 2002	Jones et al.
6347636	February 2002	Xia
6350391	February 2002	Livshits et al.
6352945	March 2002	Matsuki
D455024	April 2002	Mimick et al.
6367410	April 2002	Leahey et al.
6368773	April 2002	Jung et al.
6368987	April 2002	Kopacz et al.
6370796	April 2002	Zucker
6372583	April 2002	Tyagi
6374831	April 2002	Chandran
6375312	April 2002	Ikeda et al.
6375750	April 2002	Van Os et al.
6379466	April 2002	Sahin
D457609	May 2002	Piano
6383566	May 2002	Zagdoun
6383955	May 2002	Matsuki
6387207	May 2002	Janakiraman
6391803	May 2002	Kim et al.
6395650	May 2002	Callegari et al.
6398184	June 2002	Sowada et al.
6410459	June 2002	Blalock et al.
6413321	July 2002	Kim et al.
6413583	July 2002	Moghadam et al.
6420279	July 2002	Ono et al.
D461233	August 2002	Whalen
D461882	August 2002	Piano
6432849	August 2002	Endo et al.
6435798	August 2002	Satoh
6435865	August 2002	Tseng et al.
6436819	August 2002	Zhang
6437444	August 2002	Andideh
6438502	August 2002	Awtrey
6441350	August 2002	Stoddard et al.
6445574	September 2002	Saw et al.
6446573	September 2002	Hirayama et al.
6447232	September 2002	Davis et al.
6447651	September 2002	Ishikawa et al.
6448192	September 2002	Kaushik
6450757	September 2002	Saeki
6451713	September 2002	Tay et al.
6454860	September 2002	Metzner et al.
6455225	September 2002	Kong et al.
6455445	September 2002	Matsuki
6461435	October 2002	Littau et al.
6461436	October 2002	Campbell et al.
6468924	October 2002	Lee
6471779	October 2002	Nishio et al.
6472266	October 2002	Yu et al.
6475276	November 2002	Elers et al.
6475930	November 2002	Junker et al.
6478872	November 2002	Chae et al.
6482331	November 2002	Lu et al.
6482663	November 2002	Buckland
6483989	November 2002	Okada et al.
6494065	December 2002	Babbitt
6494998	December 2002	Brcka
6496819	December 2002	Bello et al.
6499533	December 2002	Yamada
6503079	January 2003	Kogano et al.
6503562	January 2003	Saito et al.
6503826	January 2003	Oda
6506253	January 2003	Sakuma
6507410	January 2003	Robertson et al.
6511539	January 2003	Raaijmakers
6514313	February 2003	Spiegelman
6514666	February 2003	Choi et al.
6521295	February 2003	Remington
6521547	February 2003	Chang et al.
6528430	March 2003	Kwan
6528767	March 2003	Bagley et al.
6531193	March 2003	Fonash et al.
6531412	March 2003	Conti et al.
6534133	March 2003	Kaloyeros et al.
6534395	March 2003	Werkhoven et al.
6536950	March 2003	Green
6540469	April 2003	Matsunaga et al.
6544906	April 2003	Rotondaro et al.
6552209	April 2003	Lei et al.
6558755	May 2003	Berry et al.
6559026	May 2003	Rossman et al.
6566278	May 2003	Harvey et al.
6569239	May 2003	Arai et al.
6569971	May 2003	Roh et al.
6573030	June 2003	Fairbairn et al.
6574644	June 2003	Hsu et al.
6576062	June 2003	Matsuse
6576064	June 2003	Griffiths et al.
6576300	June 2003	Berry et al.
6576564	June 2003	Agarwal
6578589	June 2003	Mayusumi
6579833	June 2003	McNallan et al.
6580050	June 2003	Miller et al.
6583048	June 2003	Vincent et al.
6589707	July 2003	Lee et al.
6589868	July 2003	Rossman
6590251	July 2003	Kang et al.
6594550	July 2003	Okrah
6596653	July 2003	Tan
6598559	July 2003	Vellore et al.
6607868	August 2003	Choi
6607948	August 2003	Sugiyama et al.
6608745	August 2003	Tsuruta et al.
6620251	September 2003	Kitano
6624064	September 2003	Sahin
6627268	September 2003	Fair et al.
6627503	September 2003	Ma et al.
6632478	October 2003	Gaillard et al.
6633364	October 2003	Hayashi
6635117	October 2003	Kinnard et al.
6638839	October 2003	Deng et al.
6645304	November 2003	Yamaguchi
6648974	November 2003	Ogliari et al.
6649921	November 2003	Cekic et al.
6652924	November 2003	Sherman
6656281	December 2003	Ueda
6660662	December 2003	Ishikawa et al.
6662817	December 2003	Yamagishi
6673196	January 2004	Oyabu
6676290	January 2004	Lu
6682971	January 2004	Tsuneda et al.
6682973	January 2004	Paton et al.
D486891	February 2004	Cronce
6684659	February 2004	Tanaka et al.
6688784	February 2004	Templeton
6689220	February 2004	Nguyen
6692575	February 2004	Omstead et al.
6692576	February 2004	Halpin et al.
6699003	March 2004	Saeki
6699399	March 2004	Qian et al.
6709989	March 2004	Ramdani et al.
6710364	March 2004	Guldi et al.
6710857	March 2004	Kondo
6713824	March 2004	Mikata
6716571	April 2004	Gabriel
6720260	April 2004	Fair et al.
6722837	April 2004	Inui
6723642	April 2004	Lim et al.
6730614	May 2004	Lim et al.
6732006	May 2004	Haanstra et al.
6734090	May 2004	Agarwala et al.
6740853	May 2004	Kitayama et al.
6743475	June 2004	Skarp et al.
6743738	June 2004	Todd et al.
6745095	June 2004	Ben-Dov
6753507	June 2004	Fure et al.
6755221	June 2004	Jeong et al.
6756085	June 2004	Waldfried
6756293	June 2004	Li et al.
6756318	June 2004	Nguyen et al.
6759098	July 2004	Han
6760981	July 2004	Leap
6784108	August 2004	Donohoe et al.
D497977	November 2004	Engelbrektsson
6811960	November 2004	Lee et al.
6815350	November 2004	Kim et al.
6820570	November 2004	Kilpela et al.
6821910	November 2004	Adomaitis et al.
6824665	November 2004	Shelnut et al.
6825134	November 2004	Law et al.
6828235	December 2004	Takano
6831004	December 2004	Byun
6835039	December 2004	Van Den Berg
6846146	January 2005	Inui
6846515	January 2005	Vrtis
6846742	January 2005	Rossman
6847014	January 2005	Benjamin et al.
6858524	February 2005	Haukka et al.
6858547	February 2005	Metzner
6863019	March 2005	Shamouilian
6863281	March 2005	Endou et al.
6864041	March 2005	Brown
6872258	March 2005	Park et al.
6872259	March 2005	Strang
6874247	April 2005	Hsu
6874480	April 2005	Ismailov
6875677	April 2005	Conley, Jr. et al.
6876017	April 2005	Goodner
6878402	April 2005	Chiang et al.
6884066	April 2005	Nguyen et al.
6884295	April 2005	Ishii
6884319	April 2005	Kim
D505590	May 2005	Greiner
6889211	May 2005	Yoshiura et al.
6889864	May 2005	Lindfors et al.
6895158	May 2005	Alyward et al.
6899507	May 2005	Yamagishi et al.
6909839	June 2005	Wang et al.
6911092	June 2005	Sneh
6913152	July 2005	Zuk
6913796	July 2005	Albano et al.
6917755	July 2005	Nguyen et al.
6924078	August 2005	Lee et al.
6929700	August 2005	Tan et al.
6930041	August 2005	Agarwal
6930059	August 2005	Conley, Jr. et al.
6935269	August 2005	Lee et al.
6939817	September 2005	Sandhu et al.
6942753	September 2005	Choi et al.
6951587	October 2005	Narushima
6953609	October 2005	Carollo
6955836	October 2005	Kumagai et al.
6972055	December 2005	Sferlazzo
6972478	December 2005	Waite et al.
6974781	December 2005	Timmermans et al.
6975921	December 2005	Verhaar
6976822	December 2005	Woodruff
6981832	January 2006	Zinger et al.
6982046	January 2006	Srivastava et al.
6984595	January 2006	Yamazaki
6985788	January 2006	Haanstra et al.
6987155	January 2006	Roh et al.
6990430	January 2006	Hosek
7005227	February 2006	Yueh et al.
7005391	February 2006	Min
7010580	March 2006	Fu et al.
7017514	March 2006	Shepherd et al.
7018941	March 2006	Cui et al.
7021881	April 2006	Yamagishi
7036453	May 2006	Ishikawa et al.
7041609	May 2006	Vaartstra
7045430	May 2006	Ahn et al.
7049247	May 2006	Gates et al.
7053009	May 2006	Conley, Jr. et al.
7055875	June 2006	Bonora
7062161	June 2006	Kusuda et al.
7070178	July 2006	Van Der Toorn et al.
7071051	July 2006	Jeon et al.
7073834	July 2006	Matsumoto et al.
7080545	July 2006	Dimeo et al.
7084060	August 2006	Furukawa
7084079	August 2006	Conti et al.
7085623	August 2006	Siegers
7088003	August 2006	Gates et al.
7090394	August 2006	Hashikura et al.
7092287	August 2006	Beulens et al.
7098149	August 2006	Lukas
7101763	September 2006	Anderson et al.
7109098	September 2006	Ramaswamy et al.
7109114	September 2006	Chen et al.
7111232	September 2006	Bascom
7115305	October 2006	Bronikowski et al.
7115838	October 2006	Kurara et al.
7122085	October 2006	Shero et al.
7122222	October 2006	Xiao et al.
7129165	October 2006	Basol et al.
7132360	November 2006	Schaeffer et al.
7135421	November 2006	Ahn et al.
7143897	December 2006	Guzman et al.
7147766	December 2006	Uzoh et al.
7153542	December 2006	Nguyen et al.
7156380	January 2007	Soininen
7163393	January 2007	Adachi et al.
7163721	January 2007	Zhang et al.
7163900	January 2007	Weber
7168852	January 2007	Linnarsson
7172497	February 2007	Basol et al.
7186648	March 2007	Rozbicki
7192824	March 2007	Ahn et al.
7192892	March 2007	Ahn et al.
7195693	March 2007	Cowans
7198447	April 2007	Morimitsu et al.
7201943	April 2007	Park et al.
7204887	April 2007	Kawamura et al.
7205246	April 2007	MacNeil et al.
7205247	April 2007	Lee et al.
7207763	April 2007	Lee
7208389	April 2007	Tipton et al.
7210925	May 2007	Adachi
7211524	May 2007	Ryu et al.
7211525	May 2007	Shanker
7214630	May 2007	Varadarajan et al.
7223014	May 2007	Lojen
7208413	June 2007	Byun et al.
7234476	June 2007	Arai
7235137	June 2007	Kitayama et al.
7235482	June 2007	Wu
7235501	June 2007	Ahn et al.
7238596	July 2007	Kouvetakis et al.
7238616	July 2007	Agarwal
7238653	July 2007	Lee et al.
7265061	September 2007	Cho et al.
7274867	September 2007	Peukert
D553104	October 2007	Oohashi et al.
7279256	October 2007	Son
7290813	November 2007	Bonora
7294581	November 2007	Haverkort et al.
7296460	November 2007	Dimeo et al.
7297641	November 2007	Todd et al.
7298009	November 2007	Yan et al.
D557226	December 2007	Uchino et al.
7307028	December 2007	Goto et al.
7307178	December 2007	Kiyomori et al.
7312148	December 2007	Ramaswamy et al.
7312162	December 2007	Ramaswamy et al.
7312494	December 2007	Ahn et al.
7320544	January 2008	Hsieh
7323401	January 2008	Ramaswamy et al.
7326657	February 2008	Xia et al.
7327948	February 2008	Shrinivasan
7329947	February 2008	Adachi et al.
7335611	February 2008	Ramaswamy et al.
7351057	April 2008	Berenbak et al.
7354847	April 2008	Chan et al.
7354873	April 2008	Fukazawa et al.
7356762	April 2008	van Driel
7357138	April 2008	Ji et al.
7361447	April 2008	Jung
7376520	May 2008	Wong
7379785	May 2008	Higashi et al.
7381644	June 2008	Soubramonium et al.
7387685	June 2008	Choi et al.
7393207	July 2008	Imai
7393418	July 2008	Yokogawa
7393736	July 2008	Ahn et al.
7393765	July 2008	Hanawa et al.
7396491	July 2008	Marking et al.
7399388	July 2008	Moghadam et al.
7399570	July 2008	Lee et al.
7402534	July 2008	Mahajani
7405166	July 2008	Liang et al.
7405454	July 2008	Ahn et al.
D575713	August 2008	Ratcliffe
7410290	August 2008	Tanaka
7410666	August 2008	Elers
7411352	August 2008	Madocks
7414281	August 2008	Fastow
D576001	September 2008	Brunderman
7422635	September 2008	Zheng et al.
7422653	September 2008	Blahnik et al.
7422775	September 2008	Ramaswamy et al.
7429532	September 2008	Ramaswamy et al.
7431966	October 2008	Derderian et al.
7432476	October 2008	Morita et al.
7437060	October 2008	Wang et al.
7442275	October 2008	Cowans
7467632	December 2008	Lee et al.
7475588	January 2009	Dimeo et al.
7476291	January 2009	Wang et al.
7479198	January 2009	Guffrey
7482247	January 2009	Papasouliotis
7482283	January 2009	Yamasaki et al.
D585968	February 2009	Elkins et al.
7489389	February 2009	Shibazaki et al.
7494882	February 2009	Vitale
7497614	March 2009	Gaff
7498242	March 2009	Kumar et al.
7501292	March 2009	Matsushita et al.
7501355	March 2009	Bhatia et al.
7503980	March 2009	Kida et al.
D590933	April 2009	Vansell
7514375	April 2009	Shanker et al.
7541297	April 2009	Mallick et al.
D593969	June 2009	Li
7547363	June 2009	Tomiyasu et al.
7547633	June 2009	Ravish et al.
7550396	June 2009	Frohberg et al.
7561982	July 2009	Rund et al.
7563715	July 2009	Haukka et al.
7566891	July 2009	Rocha-Alvarez et al.
7575968	August 2009	Sadaka et al.
7579285	August 2009	Zimmerman et al.
7579785	August 2009	DeVincentis et al.
D600223	September 2009	Aggarwal
7582555	September 2009	Lang
7582575	September 2009	Fukazawa et al.
7589003	September 2009	Kouvetakis et al.
7589029	September 2009	Derderian et al.
7591601	September 2009	Matsuoka et al.
D602575	October 2009	Breda
7598513	October 2009	Kouvetakis et al.
7601223	October 2009	Lindfors et al.
7601225	October 2009	Tuominen et al.
7601652	October 2009	Singh et al.
7611751	November 2009	Elers
7611980	November 2009	Wells et al.
7618226	November 2009	Takizawa
7621672	November 2009	Ripley
7622369	November 2009	Lee et al.
7622378	November 2009	Liu et al.
7623940	November 2009	Huskamp et al.
D606952	December 2009	Lee
7625820	December 2009	Papasouliotis
7629277	December 2009	Ghatnagar
7632549	December 2009	Goundar
7640142	December 2009	Tachikawa et al.
7645341	January 2010	Kennedy et al.
7645484	January 2010	Ishizaka
7648927	January 2010	Singh et al.
7651269	January 2010	Comendant
7651583	January 2010	Kent et al.
7651955	January 2010	Ravish et al.
7651959	January 2010	Fukazawa et al.
7651961	January 2010	Clark
D609652	February 2010	Nagasaka
D609655	February 2010	Sugimoto
7661299	February 2010	Kusunoki
7678197	March 2010	Maki
7678715	March 2010	Mungekar et al.
7682454	March 2010	Sneh
7682657	March 2010	Sherman
D613829	April 2010	Griffin et al.
D614153	April 2010	Fondurulia et al.
D614267	April 2010	Breda
D614268	April 2010	Breda
D614593	April 2010	Lee
7690881	April 2010	Yamagishi
7691205	April 2010	Ikedo
7692171	April 2010	Kaszuba et al.
7695808	April 2010	Tuma
7713874	May 2010	Milligan
7716993	May 2010	Ozawa et al.
7720560	May 2010	Menser et al.
7723648	May 2010	Tsukamoto et al.
7727864	June 2010	Elers
7732343	June 2010	Niroomand et al.
7736437	June 2010	Cadwell et al.
7736528	June 2010	Okita et al.
7740437	June 2010	de Ridder et al.
7740705	June 2010	Li
7745346	June 2010	Hausmann et al.
7748760	July 2010	Kushida
7749563	July 2010	Zheng et al.
7753584	July 2010	Gambino et al.
7754621	July 2010	Putjkonen
7763869	July 2010	Matsushita et al.
7767262	August 2010	Clark
7771796	August 2010	Kohno et al.
7780440	August 2010	Shibagaki et al.
7781352	August 2010	Fukazawa et al.
7789559	September 2010	Waser et al.
7789965	September 2010	Matsushita et al.
7790633	September 2010	Tarafdar et al.
7798096	September 2010	Mahajani et al.
7803722	September 2010	Liang
7806587	October 2010	Kobayashi
7807566	October 2010	Tsuji et al.
7807578	October 2010	Bencher et al.
7816278	October 2010	Reed et al.
7824492	November 2010	Tois et al.
7825040	November 2010	Fukazawa et al.
7829460	November 2010	Streck et al.
7833353	November 2010	Furukawahara et al.
7838084	November 2010	Derderian et al.
7842518	November 2010	Miyajima
7842622	November 2010	Lee et al.
D629874	December 2010	Hermans
7850449	December 2010	Yang et al.
7851019	December 2010	Tuominen et al.
7851232	December 2010	van Schravendijk et al.
7858519	December 2010	Liu et al.
7858533	December 2010	Liu et al.
7865070	January 2011	Nakamura
7871198	January 2011	Rempe et al.
7874726	January 2011	Jacobs et al.
7884918	February 2011	Hattori
7888233	February 2011	Gauri
D634329	March 2011	Wastrom
D634719	March 2011	Yasuda et al.
7897215	March 2011	Fair et al.
7897217	March 2011	Faguet
7902582	March 2011	Forbes et al.
7906174	March 2011	Wu et al.
7910288	March 2011	Abatchev et al.
7915139	March 2011	Lang
7915667	March 2011	Knoefler et al.
7919416	April 2011	Lee et al.
7925378	April 2011	Gilchrist et al.
7935940	May 2011	Smargiassi
7939447	May 2011	Bauer et al.
7942969	May 2011	Riker et al.
7946762	May 2011	Yednak
7951262	May 2011	Koshiishi et al.
7955516	June 2011	Chandrachood
7955650	June 2011	Tsuji
7957708	June 2011	Karschnia et al.
7963736	June 2011	Takizawa et al.
7967913	June 2011	Hua et al.
7972980	July 2011	Lee et al.
7977256	July 2011	Liu et al.
7981751	July 2011	Zhu et al.
D643055	August 2011	Takahashi
7989736	August 2011	Park et al.
7992318	August 2011	Kawaji
7994721	August 2011	Espiau et al.
7997795	August 2011	Schwagerman et al.
7998875	August 2011	DeYoung
8003174	August 2011	Fukazawa
8003919	August 2011	Goto et al.
8004198	August 2011	Bakre et al.
8020315	September 2011	Nishimura
8030129	October 2011	Jeong
8033771	October 2011	Gage et al.
8038835	October 2011	Hayashi et al.
8041197	October 2011	Kasai et al.
8041450	October 2011	Takizawa et al.
8043972	October 2011	Liu et al.
8046193	October 2011	Yetter et al.
8048783	November 2011	Chung et al.
8055378	November 2011	Numakura
8060252	November 2011	Gage et al.
8083853	November 2011	Choi et al.
D651291	December 2011	Liebson et al.
8071451	December 2011	Uzoh
8071452	December 2011	Raisanen
8072578	December 2011	Yasuda et al.
8076230	December 2011	Wei
8076237	December 2011	Uzoh
8076250	December 2011	Rajagopalan
8076251	December 2011	Akae et al.
8078310	December 2011	Nishimoto et al.
8082946	December 2011	Laverdiere et al.
8084104	December 2011	Shinriki et al.
8084372	December 2011	You et al.
D652896	January 2012	Gether
8092604	January 2012	Tomiyasu et al.
8100583	January 2012	Aggarwal
D653734	February 2012	Sisk
D654882	February 2012	Honma
D654884	February 2012	Honma
D655055	February 2012	Toll
8110099	February 2012	Hersey et al.
8114734	February 2012	Yang et al.
8119466	February 2012	Avouris
D655260	March 2012	Honma
D655261	March 2012	Honma
8129290	March 2012	Balseanu et al.
8137462	March 2012	Fondurulia et al.
8137465	March 2012	Shrinivasan et al.
8138104	March 2012	Balseanu et al.
8138676	March 2012	Mills
8142862	March 2012	Lee et al.
8143174	March 2012	Xia et al.
8147242	April 2012	Shibagaki et al.
8158512	April 2012	Ji et al.
8172947	May 2012	Shibata et al.
8173554	May 2012	Lee et al.
8178436	May 2012	King et al.
8187679	May 2012	Dickey et al.
8187951	May 2012	Wang
8272516	May 2012	Salvador
8192901	June 2012	Kageyama
8196234	June 2012	Glunk
8197915	June 2012	Oka et al.
8198168	June 2012	Tanioku
8206506	June 2012	Kadkhodayan
8216380	July 2012	White et al.
8231799	July 2012	Bera et al.
D665055	August 2012	Yanagisawa et al.
8241991	August 2012	Hsieh et al.
8242028	August 2012	van Schravendijk et al.
8242031	August 2012	Mallick et al.
8246900	August 2012	Kasai et al.
8252114	August 2012	Vukovic
8252659	August 2012	Huyghabaert et al.
8252691	August 2012	Beynet et al.
8267633	September 2012	Obikane
8278176	October 2012	Bauer et al.
8282769	October 2012	Iizuka
8282847	October 2012	Romano
8287648	October 2012	Reed et al.
8293016	October 2012	Bahng et al.
8293642	October 2012	Kim
8298951	October 2012	Nakano
8307472	November 2012	Saxon et al.
8309173	November 2012	Tuominen et al.
8323413	December 2012	Son
8328939	December 2012	Choi et al.
8329599	December 2012	Fukazawa et al.
8334219	December 2012	Lee et al.
8349083	January 2013	Takasuka et al.
D676943	February 2013	Kluss
8367528	February 2013	Bauer et al.
8372204	February 2013	Nakamura
8378464	February 2013	Kato et al.
8393091	March 2013	Kawamoto
8394466	March 2013	Hong et al.
8398773	March 2013	Jdira et al.
8402918	March 2013	Kadkhodayan
8404499	March 2013	Moffatt
8415258	April 2013	Akae
8415259	April 2013	Lee et al.
8419959	April 2013	Bettencourt
8440259	May 2013	Chiang et al.
8444120	May 2013	Gregg et al.
8445075	May 2013	Xu et al.
8450191	May 2013	Wang
8465811	June 2013	Ueda
8466411	June 2013	Arai
8470187	June 2013	Ha
8484846	July 2013	Dhindsa
8492170	July 2013	Xie et al.
8496377	July 2013	Harr et al.
8496756	July 2013	Cruse et al.
8497213	July 2013	Yasui et al.
8501599	August 2013	Ueno et al.
8506162	August 2013	Schick et al.
8506713	August 2013	Takagi
8529701	September 2013	Morita
8535767	September 2013	Kimura
D691974	October 2013	Osada et al.
8551892	October 2013	Nakano
8562272	October 2013	Lenz
8563443	October 2013	Fukazawa
8569184	October 2013	Oka
8573152	November 2013	de la Llera
8586484	November 2013	Matsuyama et al.
8591659	November 2013	Fang et al.
8592005	November 2013	Ueda
8608885	November 2013	Goto et al.
D694790	December 2013	Matsumoto
D695240	December 2013	Iida et al.
8614047	December 2013	Ayothi et al.
8616765	December 2013	Darabnia et al.
8617411	December 2013	Singh
D697038	January 2014	Matsumoto
8633115	January 2014	Chang et al.
D698904	February 2014	Milligan et al.
8642488	February 2014	Liu et al.
8647722	February 2014	Kobayashi et al.
8664627	March 2014	Ishikawa et al.
8667654	March 2014	Gros-Jean
8668957	March 2014	Dussarrat et al.
8669185	March 2014	Onizawa
8679958	March 2014	Takamure et al.
D702188	April 2014	Jacobs
8683943	April 2014	Onodera et al.
8710580	April 2014	Sakuma et al.
8711338	April 2014	Liu et al.
D705745	May 2014	Kurs et al.
D705762	May 2014	Yu
8664127	May 2014	Bhatia et al.
8720965	May 2014	Hino et al.
8721791	May 2014	Choi et al.
8722510	May 2014	Watanabe et al.
8722546	May 2014	Fukazawa et al.
8726837	May 2014	Patalay et al.
8728832	May 2014	Raisanen et al.
8742668	June 2014	Nakano et al.
8759223	June 2014	Sapre et al.
8764085	July 2014	Urabe
8771807	July 2014	Xiao et al.
8779502	July 2014	Sakuma et al.
8784950	July 2014	Fukazawa et al.
8784951	July 2014	Fukazawa et al.
8785215	July 2014	Kobayashi et al.
8785311	July 2014	Miyoshi
8790743	July 2014	Omari
8790749	July 2014	Omori et al.
8802201	August 2014	Raisanen et al.
8820809	September 2014	Ando et al.
8821640	September 2014	Cleary et al.
8841182	September 2014	Chen et al.
8845806	September 2014	Aida et al.
8846502	September 2014	Haukka et al.
D715410	October 2014	Lohmann
8864202	October 2014	Schrameyer
D716742	November 2014	Jang et al.
8877655	November 2014	Shero et al.
8882923	November 2014	Saido et al.
8883270	November 2014	Shero et al.
8901016	December 2014	Ha et al.
8911553	December 2014	Baluja et al.
8911826	December 2014	Adachi et al.
8912101	December 2014	Tsuji et al.
D720838	January 2015	Yamagishi et al.
8927906	January 2015	Tadokoro et al.
8933375	January 2015	Dunn et al.
8940646	January 2015	Chandrasekharan
D723153	February 2015	Borkholder
8945305	February 2015	Marsh
8945306	February 2015	Tsuda
8945339	February 2015	Kakimoto
8946830	February 2015	Jung et al.
8956971	February 2015	Huakka
8956983	February 2015	Swaminathan
D723330	March 2015	York
D724553	March 2015	Choi
D724701	March 2015	Yamagishi et al.
D725168	March 2015	Yamagishi
8967608	March 2015	Mitsumori et al.
8974868	March 2015	Ishikawa et al.
8986456	March 2015	Fondurulia et al.
8991214	March 2015	Hoshino et al.
8991887	March 2015	Shin et al.
8993054	March 2015	Jung et al.
8993457	March 2015	Ramkumar et al.
D726365	April 2015	Weigensberg
D726884	April 2015	Yamagishi et al.
8999102	April 2015	Miyoshi et al.
9005539	April 2015	Halpin et al.
9017481	April 2015	Pettinger et al.
9017933	April 2015	Liu et al.
9018093	April 2015	Tsuji et al.
9018111	April 2015	Milligan et al.
9018567	April 2015	de Ridder et al.
9021985	May 2015	Alokozai et al.
9023737	May 2015	Beynet et al.
9023738	May 2015	Kato et al.
9029253	May 2015	Milligan et al.
9029272	May 2015	Nakano
D732145	June 2015	Yamagishi
D732644	June 2015	Yamagishi et al.
D733257	June 2015	Schoenherr
D733261	June 2015	Yamagishi et al.
D733262	July 2015	Yamagishi et al.
D733843	July 2015	Yamagishi
D734377	July 2015	Hirakida
D735836	August 2015	Yamagishi
D736348	August 2015	Tan
9096931	August 2015	Yednak et al.
9099505	August 2015	Kusakabe et al.
9111972	August 2015	Takeshita et al.
9117657	August 2015	Nakano et al.
9117866	August 2015	Marquardt et al.
D739222	September 2015	Chadbourne
9123510	September 2015	Nakano et al.
9123577	September 2015	Fujimoto et al.
9129897	September 2015	Pore et al.
9136108	September 2015	Matsushita et al.
9136180	September 2015	Machkaoutsan
9142393	September 2015	Okabe et al.
9142437	September 2015	Fosnight et al.
9153441	October 2015	Takamure et al.
9166012	October 2015	Sim et al.
9169975	October 2015	Sarin et al.
9171714	October 2015	Mori
9171716	October 2015	Fukuda
D742202	November 2015	Cyphers et al.
D743357	November 2015	Vyne
D743513	November 2015	Yamagishi
9174178	November 2015	Yudovsky et al.
9175394	November 2015	Berger et al.
9177784	November 2015	Raisanen et al.
9184047	November 2015	Liu et al.
9190263	November 2015	Ishikawa et al.
9190264	November 2015	Yuasa et al.
9196483	November 2015	Lee et al.
D745641	December 2015	Blum
9202727	December 2015	Dunn et al.
9214333	December 2015	Sims et al.
9228259	January 2016	Haukka et al.
9240412	January 2016	Xie et al.
9245742	January 2016	Haukka
9252024	February 2016	Lam et al.
9257274	February 2016	Kang et al.
9263298	February 2016	Matsumoto et al.
9267850	February 2016	Aggarwal
D751176	March 2016	Schoenherr
9281277	March 2016	Baek et al.
9284642	March 2016	Nakano
9297705	March 2016	Aggarwal
9299557	March 2016	Tolle et al.
9299595	March 2016	Dunn et al.
D753269	April 2016	Yamagishi et al.
D753629	April 2016	Plattard
9305836	April 2016	Gates et al.
9312155	April 2016	Mori
9315897	April 2016	Byun
9324811	April 2016	Weeks
9324846	April 2016	Camillo
9337054	May 2016	Hunks et al.
9341296	May 2016	Yednak
9343297	May 2016	Fukazawa et al.
9343308	May 2016	Isii
9343343	May 2016	Mori
9343350	May 2016	Arai
9349620	May 2016	Kamata et al.
9353441	May 2016	Chung
9355876	May 2016	Rejuter et al.
9365924	June 2016	Nonaka
9368352	June 2016	Takamure et al.
9370863	June 2016	Tsuji et al.
9384987	July 2016	Jung et al.
9390909	July 2016	Pasquale et al.
9394608	July 2016	Shero et al.
9396934	July 2016	Tolle
9396956	July 2016	Fukazawa
9404587	August 2016	Shugrue
9412564	August 2016	Milligan
9412582	August 2016	Sasaki et al.
9425078	August 2016	Tang et al.
9443725	September 2016	Liu et al.
9447498	September 2016	Shiba et al.
9449793	September 2016	Shaji et al.
9455138	September 2016	Fukazawa
9464352	October 2016	Nakano et al.
9478414	October 2016	Kobayashi et al.
9478415	October 2016	Kimura
D770993	November 2016	Yoshida et al.
9484191	November 2016	Winkler
9514927	December 2016	Tolle et al.
9514932	December 2016	Mallick et al.
9543180	January 2017	Kamiya
9556516	January 2017	Takamure
9558931	January 2017	Tang
9564314	February 2017	Takamure et al.
9574268	February 2017	Dunn et al.
9589770	March 2017	Winkler
9605342	March 2017	Alokozai et al.
9605343	March 2017	Winkler
9607837	March 2017	Namba
D783351	April 2017	Fujino et al.
9613801	April 2017	Carcasi et al.
9627221	April 2017	Zaitsu et al.
D785766	May 2017	Sato
D787458	May 2017	Kim et al.
9640416	May 2017	Arai
9640448	May 2017	Ikegawa et al.
9647114	May 2017	Margetis
9657845	May 2017	Shugrue
9659799	May 2017	Lawson
9663857	May 2017	Nakano et al.
D789888	June 2017	Jang et al.
9685320	June 2017	Kang et al.
9691771	June 2017	Lansalot-Matras
9698031	July 2017	Kobayashi et al.
9708707	July 2017	Ditizio et al.
9708708	July 2017	Isobe et al.
9711345	July 2017	Shiba et al.
D793352	August 2017	Hill
D793572	August 2017	Kozuka et al.
9735024	August 2017	Zaitsu
9741559	August 2017	Shimura et al.
9748145	August 2017	Kannan et al.
D796458	September 2017	Jang et al.
9754779	September 2017	Ishikawa
9754818	September 2017	Shin et al.
9759489	September 2017	Kaneko
9790595	October 2017	Jung et al.
9793115	October 2017	Tolle
9793135	October 2017	Zaitsu et al.
9793148	October 2017	Yamagishi et al.
D802546	November 2017	Jang et al.
9808246	November 2017	Shelton et al.
9812319	November 2017	Fukazawa et al.
9812320	November 2017	Pore et al.
9859151	January 2018	Niskanen
9875891	January 2018	Henri et al.
9887082	February 2018	Pore et al.
9890456	February 2018	Tolle et al.
9891521	February 2018	Kang et al.
9892908	February 2018	Pettinger et al.
9892913	February 2018	Margetis et al.
9895715	February 2018	Haulcka et al.
9899291	February 2018	Kato
9899405	February 2018	Kim
9905420	February 2018	Margetis et al.
9909492	February 2018	Tang
9909214	March 2018	Suemori
9911676	March 2018	Tang
9916980	March 2018	Knaepen
9929011	March 2018	Hawryluk et al.
9960072	May 2018	Coomer
9984869	May 2018	Blanquart
10032628	June 2018	Xie et al.
10023960	July 2018	Alokozai
10032792	July 2018	Kim et al.
10043661	August 2018	Kato et al.
10053774	August 2018	Tolle et al.
10083836	September 2018	Milligan
10087522	October 2018	Raisanen et al.
10087525	October 2018	Schmotzer et al.
10090316	October 2018	Ootsuka
10103040	October 2018	Oosterlaken et al.
10134757	November 2018	Chun et al.
RE47170	December 2018	Beynet et al.
10167557	January 2019	Hawkins et al.
2001/0001953	May 2001	Griffiths et al.
2001/0003191	June 2001	Kovacs et al.
2001/0006070	July 2001	Shang
2001/0007645	July 2001	Honma
2001/0014514	August 2001	Geusic
2001/0017103	August 2001	Takeshita et al.
2001/0018267	August 2001	Shinriki et al.
2001/0019777	September 2001	Tanaka et al.
2001/0019900	September 2001	Hasegawa
2001/0020715	September 2001	Yamasaki
2001/0028924	October 2001	Sherman
2001/0031535	October 2001	Agnello et al.
2001/0038783	November 2001	Nakashima et al.
2001/0040511	November 2001	Bushner et al.
2001/0046765	November 2001	Cappellani et al.
2001/0048981	December 2001	Suzuki
2001/0049080	December 2001	Asano
2001/0049202	December 2001	Maeda et al.
2002/0001974	January 2002	Chan
2002/0001976	January 2002	Danek
2002/0005400	January 2002	Gat et al.
2002/0009119	January 2002	Matthew et al.
2002/0011210	January 2002	Satoh et al.
2002/0011211	January 2002	Halpin
2002/0013792	January 2002	Imielinski et al.
2002/0014204	February 2002	Pyo
2002/0014483	February 2002	Suzuki et al.
2002/0016829	February 2002	Defosse
2002/0023677	February 2002	Zheng
2002/0031644	March 2002	Malofsky et al.
2002/0041931	April 2002	Suntola et al.
2002/0043337	April 2002	Goodman et al.
2002/0081826	April 2002	Rotondaro et al.
2002/0064592	May 2002	Datta et al.
2002/0064598	May 2002	Wang et al.
2002/0069222	June 2002	McNeely
2002/0076507	June 2002	Chiang et al.
2002/0078893	June 2002	Os et al.
2002/0079714	June 2002	Soucy et al.
2002/0088542	July 2002	Nishikawa et al.
2002/0096211	July 2002	Zheng
2002/0098627	July 2002	Pomarede et al.
2002/0108670	August 2002	Baker et al.
2002/0109115	August 2002	Cederstav et al.
2002/0110695	August 2002	Yang et al.
2002/0110991	August 2002	Li
2002/0112114	August 2002	Blair et al.
2002/0114886	August 2002	Chou et al.
2002/0115252	August 2002	Haukka et al.
2002/0124883	September 2002	Zheng
2002/0127350	September 2002	Ishikawa et al.
2002/0134511	September 2002	Ushioda et al.
2002/0136214	September 2002	Do et al.
2002/0136909	September 2002	Yang
2002/0139775	October 2002	Chang
2002/0146512	October 2002	Rossman
2002/0151327	October 2002	Levitt
2002/0152244	October 2002	Dean et al.
2002/0155219	October 2002	Wang et al.
2002/0164420	November 2002	Derderian et al.
2002/0172768	November 2002	Endo et al.
2002/0174106	November 2002	Martin
2002/0179011	December 2002	Jonnalagadda et al.
2002/0184111	December 2002	Swanson
2002/0187650	December 2002	Blalock et al.
2002/0187656	December 2002	Tan et al.
2002/0197849	December 2002	Mandal
2003/0002562	January 2003	Yerlikaya et al.
2003/0003607	January 2003	Kagoshima
2003/0003635	January 2003	Paranjpe et al.
2003/0003696	January 2003	Gelatos et al.
2003/0010451	January 2003	Tzu
2003/0010452	January 2003	Park et al.
2003/0012632	January 2003	Saeki
2003/0015294	January 2003	Wang
2003/0015596	January 2003	Evans
2003/0017268	January 2003	Hu
2003/0019428	January 2003	Ku et al.
2003/0019580	January 2003	Strang
2003/0022468	January 2003	Shioya et al.
2003/0022523	January 2003	Irino et al.
2003/0023338	January 2003	Chin et al.
2003/0024901	February 2003	Ishikawa
2003/0025146	February 2003	Narwankar et al.
2003/0029303	February 2003	Hasegawa et al.
2003/0029381	February 2003	Nishibayashi
2003/0029475	February 2003	Hua et al.
2003/0035002	February 2003	Moles
2003/0036272	February 2003	Shamouilian et al.
2003/0040158	February 2003	Saitoh
2003/0040841	February 2003	Nasr et al.
2003/0042419	March 2003	Katsumata et al.
2003/0049375	March 2003	Nguyen et al.
2003/0049937	March 2003	Suzuki
2003/0054670	March 2003	Wang et al.
2003/0059535	March 2003	Luo et al.
2003/0059980	March 2003	Chen et al.
2003/0065413	April 2003	Liteplo et al.
2003/0066541	April 2003	Sun et al.
2003/0066826	April 2003	Lee et al.
2003/0071015	April 2003	Chinn et al.
2003/0075925	April 2003	Lindfors et al.
2003/0082296	May 2003	Elers et al.
2003/0082307	May 2003	Chung et al.
2003/0091938	May 2003	Fairbairn et al.
2003/0094133	May 2003	Yoshidome et al.
2003/0109107	June 2003	Hsieh et al.
2003/0109951	June 2003	Hsiung et al.
2003/0111963	June 2003	Tolmachev et al.
2003/0116087	June 2003	Nguyen
2003/0168750	June 2003	Basceri et al.
2003/0121608	July 2003	Chen
2003/0133854	July 2003	Tabata et al.
2003/0134038	July 2003	Paranjpe
2003/0141820	July 2003	White et al.
2003/0143328	July 2003	Chen
2003/0157436	August 2003	Manger et al.
2003/0159656	August 2003	Tan
2003/0162412	August 2003	Chung
2003/0168001	September 2003	Sneh
2003/0168699	September 2003	Honda
2003/0170583	September 2003	Nakashima
2003/0173490	September 2003	Lappen
2003/0180458	September 2003	Sneh
2003/0183156	October 2003	Dando
2003/0183856	October 2003	Wieczorek et al.
2003/0188685	October 2003	Wang
2003/0192875	October 2003	Bieker et al.
2003/0198587	October 2003	Kaloyeros
2003/0201541	October 2003	Kim
2003/0205202	November 2003	Funaki et al.
2003/0209323	November 2003	Yokogaki
2003/0209326	November 2003	Lee et al.
2003/0209746	November 2003	Horii
2003/0211735	November 2003	Rossman
2003/0217915	November 2003	Ouellet
2003/0219972	November 2003	Green
2003/0226840	December 2003	Dalton
2003/0228772	December 2003	Cowans
2003/0231698	December 2003	Yamaguchi
2003/0232138	December 2003	Tuominen et al.
2003/0232491	December 2003	Yamaguchi
2004/0002224	January 2004	Chono et al.
2004/0009307	January 2004	Koh et al.
2004/0009679	January 2004	Yeo et al.
2004/0010772	January 2004	McKenna et al.
2004/0013577	January 2004	Ganguli et al.
2004/0013818	January 2004	Moon et al.
2004/0016637	January 2004	Yang
2004/0018304	January 2004	Chung et al.
2004/0018307	January 2004	Park et al.
2004/0018723	January 2004	Byun et al.
2004/0018750	January 2004	Sophie et al.
2004/0023516	February 2004	Londergan et al.
2004/0026372	February 2004	Takenaka et al.
2004/0029052	February 2004	Park et al.
2004/0036129	February 2004	Forbes et al.
2004/0037675	February 2004	Zinger et al.
2004/0048439	March 2004	Soman
2004/0048492	March 2004	Ishikawa et al.
2004/0050325	March 2004	Samoilov
2004/0062081	April 2004	Drewes
2004/0063289	April 2004	Ohta
2004/0071897	April 2004	Verplancken et al.
2004/0077182	April 2004	Lim et al.
2004/0079960	April 2004	Shakuda
2004/0080697	April 2004	Song
2004/0082171	April 2004	Shin et al.
2004/0087141	May 2004	Ramanathan et al.
2004/0094402	May 2004	Gopalraja
2004/0099213	May 2004	Adomaitis et al.
2004/0101622	May 2004	Park et al.
2004/0103914	June 2004	Cheng et al.
2004/0106249	June 2004	Huotari
2004/0124131	July 2004	Aitchison
2004/0124549	July 2004	Curran
2004/0126990	July 2004	Ohta
2004/0129211	July 2004	Blonigan et al.
2004/0129671	July 2004	Ji et al.
2004/0134429	July 2004	Yamanaka
2004/0144311	July 2004	Chen
2004/0144980	July 2004	Ahn et al.
2004/0146644	July 2004	Xia et al.
2004/0151844	August 2004	Zhang et al.
2004/0151845	August 2004	Nguyen et al.
2004/0152287	August 2004	Sherrill et al.
2004/0159343	August 2004	Shimbara et al.
2004/0168627	September 2004	Conley et al.
2004/0169032	September 2004	Murayama et al.
2004/0187777	September 2004	Okamoto et al.
2004/0187790	September 2004	Bader
2004/0187928	September 2004	Ambrosina
2004/0198069	October 2004	Metzner et al.
2004/0200499	October 2004	Harvey et al.
2004/0203251	October 2004	Kawaguchi et al.
2004/0206305	October 2004	Choi et al.
2004/0209477	October 2004	Buxbaum et al.
2004/0211357	October 2004	Gadgil
2004/0212947	October 2004	Nguyen
2004/0213921	October 2004	Leu
2004/0214399	October 2004	Ahn et al.
2004/0214445	October 2004	Shimizu et al.
2004/0217217	November 2004	Han et al.
2004/0219793	November 2004	Hishiya et al.
2004/0221807	November 2004	Verghese et al.
2004/0231600	November 2004	Lee
2004/0238523	December 2004	Kuibira et al.
2004/0241998	December 2004	Hanson
2004/0247779	December 2004	Selvamanickam et al.
2004/0250600	December 2004	Bevers et al.
2004/0253867	December 2004	Matsumoto
2004/0261712	December 2004	Hayashi et al.
2004/0266011	December 2004	Lee et al.
2005/0000428	January 2005	Shero et al.
2005/0003662	January 2005	Jurisch et al.
2005/0008799	January 2005	Tomiyasu et al.
2005/0019026	January 2005	Wang et al.
2005/0019494	January 2005	Moghadam et al.
2005/0020071	January 2005	Sonobe et al.
2005/0023624	February 2005	Ahn et al.
2005/0034674	February 2005	Ono
2005/0037154	February 2005	Koh et al.
2005/0037610	February 2005	Cha
2005/0042778	February 2005	Peukert
2005/0048797	March 2005	Fukazawa
2005/0051093	March 2005	Makino et al.
2005/0054228	March 2005	March
2005/0056218	March 2005	Sun
2005/0059262	March 2005	Yin et al.
2005/0064207	March 2005	Senzaki et al.
2005/0064719	March 2005	Liu
2005/0066893	March 2005	Soininen
2005/0069651	March 2005	Miyoshi
2005/0070123	March 2005	Hirano
2005/0070729	March 2005	Kiyomori et al.
2005/0072357	April 2005	Shero et al.
2005/0074983	April 2005	Shinriki et al.
2005/0092247	May 2005	Schmidt
2005/0092249	May 2005	Kilpela et al.
2005/0092733	May 2005	Ito et al.
2005/0095770	May 2005	Kumagai et al.
2005/0098107	May 2005	Du Bois et al.
2005/0100669	May 2005	Kools et al.
2005/0101154	May 2005	Huang
2005/0101843	May 2005	Quinn et al.
2005/0106893	May 2005	Wilk
2005/0110069	May 2005	Kil et al.
2005/0118804	June 2005	Byun et al.
2005/0118837	June 2005	Todd
2005/0120805	June 2005	Lane
2005/0120962	June 2005	Ushioda et al.
2005/0123690	June 2005	Derderian et al.
2005/0130427	June 2005	Seok-Jun
2005/0132957	June 2005	El-Raghy
2005/0133161	June 2005	Carpenter et al.
2005/0141591	June 2005	Sakano
2005/0142361	June 2005	Nakanishi
2005/0145338	July 2005	Park et al.
2005/0153571	July 2005	Senzaki
2005/0172895	August 2005	Kijima et al.
2005/0173003	August 2005	Laverdiere et al.
2005/0175789	August 2005	Helms
2005/0181535	August 2005	Yun et al.
2005/0181555	August 2005	Haukka et al.
2005/0187647	August 2005	Wang et al.
2005/0191828	September 2005	Al-Bayati et al.
2005/0199013	September 2005	Vandroux et al.
2005/0208718	September 2005	Lim et al.
2005/0211167	September 2005	Gunji
2005/0212119	September 2005	Shero
2005/0214457	September 2005	Schmitt et al.
2005/0214458	September 2005	Meiere
2005/0208778	October 2005	Li
2005/0218462	October 2005	Ahn et al.
2005/0221021	October 2005	Strang
2005/0221618	October 2005	AmRhein et al.
2005/0223982	October 2005	Park et al.
2005/0223994	October 2005	Blomiley et al.
2005/0227502	October 2005	Schmitt et al.
2005/0229848	October 2005	Shinriki
2005/0229849	October 2005	Silvetti et al.
2005/0229972	October 2005	Hoshi et al.
2005/0233477	October 2005	Yamazaki et al.
2005/0241176	November 2005	Shero et al.
2005/0241763	November 2005	Huang et al.
2005/0245058	November 2005	Lee et al.
2005/0249876	November 2005	Kawahara et al.
2005/0250340	November 2005	Chen et al.
2005/0251990	November 2005	Choi
2005/0252447	November 2005	Zhao
2005/0252449	November 2005	Nguyen et al.
2005/0255257	November 2005	Choi et al.
2005/0258280	November 2005	Goto et al.
2005/0260347	November 2005	Narwankar et al.
2005/0260850	November 2005	Loke
2005/0263072	December 2005	Balasubramanian et al.
2005/0263075	December 2005	Wang et al.
2005/0263932	December 2005	Heugel
2005/0271813	December 2005	Kher et al.
2005/0274323	December 2005	Seidel et al.
2005/0277271	December 2005	Beintner
2005/0282101	December 2005	Adachi
2005/0285097	December 2005	Shang et al.
2005/0287725	December 2005	Kitagawa
2005/0287771	December 2005	Seamons et al.
2006/0000411	January 2006	Seo
2006/0013674	January 2006	Elliott et al.
2006/0013946	January 2006	Park et al.
2006/0014384	January 2006	Lee et al.
2006/0014397	January 2006	Seamons et al.
2006/0016783	January 2006	Wu et al.
2006/0019033	January 2006	Muthukrishnan et al.
2006/0019502	January 2006	Park et al.
2006/0021572	February 2006	Wolden
2006/0021703	February 2006	Umotoy et al.
2006/0024439	February 2006	Tuominen et al.
2006/0026314	February 2006	Franchuk et al.
2006/0040054	February 2006	Pearlstein et al.
2006/0040508	February 2006	Ji
2006/0046518	March 2006	Hill et al.
2006/0051520	March 2006	Behle et al.
2006/0051925	March 2006	Ahn et al.
2006/0057828	March 2006	Omura
2006/0060930	March 2006	Metz et al.
2006/0062910	March 2006	Meiere
2006/0063346	March 2006	Lee et al.
2006/0068104	March 2006	Ishizaka
2006/0068121	March 2006	Lee et al.
2006/0068125	March 2006	Radhakrishnan
2006/0087638	April 2006	Hirayanagi
2006/0096540	May 2006	Choi
2006/0099782	May 2006	Ritenour
2006/0105566	May 2006	Waldfried et al.
2006/0107898	May 2006	Blomberg
2006/0110934	May 2006	Fukuchi
2006/0113675	June 2006	Chang et al.
2006/0113806	June 2006	Tsuji et al.
2006/0128142	June 2006	Whelan et al.
2006/0128168	June 2006	Ahn et al.
2006/0130767	June 2006	Herchen
2006/0137609	June 2006	Puchacz et al.
2006/0147626	July 2006	Blomberg
2006/0148180	July 2006	Ahn et al.
2006/0154424	July 2006	Yang et al.
2006/0156981	July 2006	Fondurulia
2006/0163612	July 2006	Kouvetakis et al.
2006/0166428	July 2006	Kamioka
2006/0172531	August 2006	Lin et al.
2006/0175669	August 2006	Kim et al.
2006/0177855	August 2006	Utermohlen
2006/0182885	August 2006	Lei et al.
2006/0188360	August 2006	Bonora et al.
2006/0191555	August 2006	Yoshida et al.
2006/0193979	August 2006	Meiere et al.
2006/0196420	September 2006	Ushakov et al.
2006/0199357	September 2006	Wan et al.
2006/0205223	September 2006	Smayling
2006/0205231	September 2006	Chou et al.
2006/0208215	September 2006	Metzner et al.
2006/0211243	September 2006	Ishizaka et al.
2006/0211259	September 2006	Maes
2006/0213439	September 2006	Ishizaka
2006/0216942	September 2006	Kim et al.
2006/0219169	October 2006	Chen et al.
2006/0223301	October 2006	Vanhaelemeersch et al.
2006/0226117	October 2006	Bertram et al.
2006/0228496	October 2006	Choi
2006/0228863	October 2006	Zhang et al.
2006/0228888	October 2006	Lee et al.
2006/0236934	October 2006	Choi et al.
2006/0240574	October 2006	Yoshie
2006/0240662	October 2006	Conley et al.
2006/0249253	November 2006	Dando
2006/0251827	November 2006	Nowak
2006/0252228	November 2006	Jeng
2006/0252351	November 2006	Kundracik
2006/0257563	November 2006	Doh et al.
2006/0257584	November 2006	Derderian et al.
2006/0258078	November 2006	Lee et al.
2006/0258173	November 2006	Xiao et al.
2006/0260545	November 2006	Ramaswamy et al.
2006/0263522	November 2006	Byun
2006/0264060	November 2006	Ramaswamy et al.
2006/0264066	November 2006	Bartholomew
2006/0266289	November 2006	Verghese et al.
2006/0269690	November 2006	Watanabe et al.
2006/0269692	November 2006	Balseanu
2006/0275933	December 2006	Du Bois et al.
2006/0278524	December 2006	Stowell
2006/0283629	December 2006	Kikuchi et al.
2006/0286774	December 2006	Singh et al.
2006/0286775	December 2006	Singh et al.
2006/0286817	December 2006	Kato et al.
2006/0286818	December 2006	Wang et al.
2006/0286819	December 2006	Seutter
2006/0291982	December 2006	Tanaka
2007/0006806	January 2007	Imai
2007/0010072	January 2007	Bailey et al.
2007/0012402	January 2007	Sneh
2007/0020167	January 2007	Han et al.
2007/0020830	January 2007	Speranza
2007/0020953	January 2007	Tsai et al.
2007/0022954	February 2007	Iizuka et al.
2007/0026148	February 2007	Arai et al.
2007/0028842	February 2007	Inagawa et al.
2007/0031598	February 2007	Okuyama et al.
2007/0031599	February 2007	Gschwandtner et al.
2007/0032045	February 2007	Kasahara et al.
2007/0032082	February 2007	Ramaswamy et al.
2007/0034477	February 2007	Inui
2007/0037343	February 2007	Colombo et al.
2007/0037412	February 2007	Dip et al.
2007/0042117	February 2007	Kupurao et al.
2007/0049053	March 2007	Mahajani
2007/0054499	March 2007	Jang
2007/0056843	March 2007	Ye et al.
2007/0056850	March 2007	Ye et al.
2007/0059948	March 2007	Metzner et al.
2007/0062439	March 2007	Wada et al.
2007/0062453	March 2007	Ishikawa
2007/0065578	March 2007	McDougall
2007/0066010	March 2007	Ando
2007/0066079	March 2007	Kolster et al.
2007/0066084	March 2007	Wajda et al.
2007/0077355	April 2007	Chacin et al.
2007/0082132	April 2007	Shinriki
2007/0082500	April 2007	Norman et al.
2007/0084405	April 2007	Kim
2007/0087579	April 2007	Kitayama et al.
2007/0089670	April 2007	Ikedo
2007/0096194	May 2007	Streck et al.
2007/0098527	May 2007	Hall et al.
2007/0107845	May 2007	Ishizawa et al.
2007/0111470	May 2007	Smythe
2007/0111545	May 2007	Lee et al.
2007/0116873	May 2007	Li et al.
2007/0116888	May 2007	Faguet
2007/0119370	May 2007	Ma et al.
2007/0123037	May 2007	Lee et al.
2007/0123189	May 2007	Saito et al.
2007/0125762	June 2007	Cui et al.
2007/0128538	June 2007	Fairbairn et al.
2007/0128876	June 2007	Fukiage
2007/0128888	June 2007	Goto et al.
2007/0129621	June 2007	Kellogg et al.
2007/0131168	June 2007	Gomi
2007/0134942	June 2007	Ahn et al.
2007/0137794	June 2007	Qiu et al.
2007/0146621	June 2007	Yeom
2007/0148350	June 2007	Rahtu
2007/0148990	June 2007	Deboer et al.
2007/0155138	July 2007	Tomasini et al.
2007/0157466	July 2007	Kida et al.
2007/0158026	July 2007	Amikura
2007/0163440	July 2007	Kim et al.
2007/0163625	July 2007	Lee
2007/0166457	July 2007	Yamoto et al.
2007/0166966	July 2007	Todd et al.
2007/0166999	July 2007	Vaarstra
2007/0173071	July 2007	Afzali-Ardakani et al.
2007/0175393	August 2007	Nishimura et al.
2007/0175397	August 2007	Tomiyasu et al.
2007/0178235	August 2007	Yamada et al.
2007/0186849	August 2007	Furuya
2007/0186952	August 2007	Honda et al.
2007/0187363	August 2007	Oka et al.
2007/0202678	August 2007	Plombon et al.
2007/0207275	September 2007	Nowak et al.
2007/0209590	September 2007	Li
2007/0210890	September 2007	Hsu et al.
2007/0215048	September 2007	Suzuki et al.
2007/0218200	September 2007	Suzuki et al.
2007/0218705	September 2007	Matsuki et al.
2007/0224777	September 2007	Hamelin
2007/0224833	September 2007	Morisada et al.
2007/0232031	October 2007	Singh et al.
2007/0232071	October 2007	Balseanu et al.
2007/0232501	October 2007	Tonomura
2007/0234955	October 2007	Suzuki et al.
2007/0237697	October 2007	Clark
2007/0237698	October 2007	Clark
2007/0237699	October 2007	Clark
2007/0241688	October 2007	DeVincentis et al.
2007/0248767	October 2007	Okura
2007/0249131	October 2007	Allen et al.
2007/0251444	November 2007	Gros-Jean et al.
2007/0251456	November 2007	Herchen et al.
2007/0252244	November 2007	Srividya et al.
2007/0252532	November 2007	DeVincentis et al.
2007/0258506	November 2007	Schwagerman et al.
2007/0264807	November 2007	Leone et al.
2007/0266945	November 2007	Shuto et al.
2007/0269983	November 2007	Sneh
2007/0275166	November 2007	Thridandam et al.
2007/0277735	December 2007	Mokhesi et al.
2007/0281082	December 2007	Mokhesi et al.
2007/0281105	December 2007	Mokhesi et al.
2007/0281496	December 2007	Ingle et al.
2007/0298362	December 2007	Rocha-Alvarez et al.
2008/0003824	January 2008	Padhi et al.
2008/0003838	January 2008	Haukka et al.
2008/0006208	January 2008	Ueno et al.
2008/0018004	January 2008	Steidl
2008/0020591	January 2008	Balseanu et al.
2008/0020593	January 2008	Wang et al.
2008/0023436	January 2008	Gros-Jean et al.
2008/0026574	January 2008	Brcka
2008/0026597	January 2008	Munro et al.
2008/0029790	February 2008	Ahn et al.
2008/0031708	February 2008	Bonora et al.
2008/0036354	February 2008	Letz et al.
2008/0038485	February 2008	Fukazawa et al.
2008/0038934	February 2008	Vrtis et al.
2008/0042165	February 2008	Sugizaki
2008/0043803	February 2008	Bandoh
2008/0050536	February 2008	Aing et al.
2008/0050538	February 2008	Hirata
2008/0054332	March 2008	Kim et al.
2008/0054813	March 2008	Espiau et al.
2008/0056860	March 2008	Natume
2008/0057659	March 2008	Forbes et al.
2008/0061667	March 2008	Gaertner et al.
2008/0066778	March 2008	Matsushita et al.
2008/0069955	March 2008	Hong et al.
2008/0075562	March 2008	Maria et al.
2008/0075881	March 2008	Won et al.
2008/0076070	March 2008	Koh et al.
2008/0076266	March 2008	Fukazawa et al.
2008/0081104	April 2008	Hasebe et al.
2008/0081113	April 2008	Clark
2008/0081121	April 2008	Morita et al.
2008/0085226	April 2008	Fondurulia et al.
2008/0092815	April 2008	Chen et al.
2008/0102203	May 2008	Wu
2008/0113094	May 2008	Casper
2008/0113096	May 2008	Mahajani
2008/0113097	May 2008	Mahajani et al.
2008/0118334	May 2008	Bonora
2008/0121177	May 2008	Bang et al.
2008/0121626	May 2008	Thomas et al.
2008/0124197	May 2008	van der Meulen et al.
2008/0124908	May 2008	Forbes et al.
2008/0124946	May 2008	Xiao et al.
2008/0132046	June 2008	Walther
2008/0133154	June 2008	Krauss et al.
2008/0142483	June 2008	Hua
2008/0149031	June 2008	Chu et al.
2008/0149593	June 2008	Bai et al.
2008/0152463	June 2008	Chidambaram et al.
2008/0153311	June 2008	Padhi et al.
2008/0157157	July 2008	Tonomura
2008/0157365	July 2008	Ott et al.
2008/0173237	July 2008	Collins
2008/0173238	July 2008	Nakashima et al.
2008/0173240	July 2008	Furukawahara
2008/0173326	July 2008	Gu et al.
2008/0176375	July 2008	Erben et al.
2008/0178805	July 2008	Paterson et al.
2008/0179104	July 2008	Zhang
2008/0179715	July 2008	Coppa
2008/0182075	July 2008	Chopra
2008/0182390	July 2008	Lemmi et al.
2008/0191193	August 2008	Li et al.
2008/0199977	August 2008	Weigel et al.
2008/0202416	August 2008	Provencher
2008/0202689	August 2008	Kim
2008/0203487	August 2008	Hohage et al.
2008/0205483	August 2008	Rempe et al.
2008/0211423	September 2008	Shinmen et al.
2008/0211526	September 2008	Shinma
2008/0216077	September 2008	Emani et al.
2008/0216742	September 2008	Takebayashi
2008/0220619	September 2008	Matsushita et al.
2008/0224240	September 2008	Ahn et al.
2008/0228306	September 2008	Yetter et al.
2008/0233288	September 2008	Clark
2008/0237572	October 2008	Chui et al.
2008/0241384	October 2008	Jeong
2008/0241387	October 2008	Keto
2008/0242116	October 2008	Clark
2008/0248310	October 2008	Kim et al.
2008/0257494	October 2008	Hayashi et al.
2008/0260963	October 2008	Yoon et al.
2008/0261413	October 2008	Mahajani
2008/0264337	October 2008	Sano et al.
2008/0267598	October 2008	Nakamura
2008/0268635	October 2008	Yu et al.
2008/0277715	November 2008	Ohmi et al.
2008/0282970	November 2008	Heys et al.
2008/0283962	November 2008	Dyer
2008/0289574	November 2008	Jacobs et al.
2008/0291964	November 2008	Shrimpling
2008/0295872	December 2008	Riker et al.
2008/0298945	December 2008	Cox
2008/0299326	December 2008	Fukazawa
2008/0299758	December 2008	Harada et al.
2008/0302303	December 2008	Choi et al.
2008/0305014	December 2008	Honda
2008/0305246	December 2008	Choi et al.
2008/0305443	December 2008	Nakamura
2008/0315292	December 2008	Ji et al.
2008/0317972	December 2008	Hendriks
2009/0000550	January 2009	Tran et al.
2009/0000551	January 2009	Choi et al.
2009/0011145	January 2009	Yun
2009/0011608	January 2009	Nabatame
2009/0017631	January 2009	Bencher
2009/0020072	January 2009	Mizunaga et al.
2009/0023229	January 2009	Matsushita
2009/0029503	January 2009	Arai
2009/0029528	January 2009	Sanchez et al.
2009/0029564	January 2009	Yamashita et al.
2009/0033907	February 2009	Watson
2009/0035947	February 2009	Horii
2009/0041952	February 2009	Yoon et al.
2009/0041984	February 2009	Mayers et al.
2009/0042344	February 2009	Ye et al.
2009/0042408	February 2009	Maeda
2009/0045829	February 2009	Awazu
2009/0050621	February 2009	Awazu
2009/0052498	February 2009	Halpin et al.
2009/0053023	February 2009	Wakabayashi
2009/0053906	February 2009	Miya et al.
2009/0056629	March 2009	Katz et al.
2009/0057269	March 2009	Katz et al.
2009/0061083	March 2009	Chiang et al.
2009/0061644	March 2009	Chiang et al.
2009/0061647	March 2009	Mallick et al.
2009/0075491	March 2009	Liu et al.
2009/0084317	April 2009	Wu
2009/0085156	April 2009	Dewey et al.
2009/0090382	April 2009	Morisada
2009/0093094	April 2009	Ye et al.
2009/0095221	April 2009	Tam et al.
2009/0104351	April 2009	Kakegawa
2009/0104789	April 2009	Mallick et al.
2009/0107404	April 2009	Ogliari et al.
2009/0108308	April 2009	Yang et al.
2009/0112458	April 2009	Nakai
2009/0115064	May 2009	Sandhu et al.
2009/0120580	May 2009	Kagoshima et al.
2009/0122293	May 2009	Shibazaki
2009/0122458	May 2009	Lischer et al.
2009/0124131	May 2009	Breunsbach et al.
2009/0130331	May 2009	Asai
2009/0130859	May 2009	Itatani et al.
2009/0136668	May 2009	Gregg et al.
2009/0136683	May 2009	Fukasawa et al.
2009/0139657	June 2009	Lee et al.
2009/0142905	June 2009	Yamazaki
2009/0142935	June 2009	Fukazawa et al.
2009/0146322	June 2009	Weling et al.
2009/0156015	June 2009	Park et al.
2009/0159000	June 2009	Aggarwal et al.
2009/0159002	June 2009	Bera
2009/0159424	June 2009	Liu et al.
2009/0162996	June 2009	Ramaswarmy et al.
2009/0163038	June 2009	Miyoshi
2009/0165715	July 2009	Oh
2009/0179365	July 2009	Lerner et al.
2009/0186571	July 2009	Haro
2009/0197015	August 2009	Kudela et al.
2009/0200494	August 2009	Hatem
2009/0204403	August 2009	Hollander et al.
2009/0206056	August 2009	Xu
2009/0209081	August 2009	Matero
2009/0211523	August 2009	Kuppurao et al.
2009/0211525	August 2009	Sarigiannis et al.
2009/0227094	September 2009	Bateman
2009/0230211	September 2009	Kobayashi et al.
2009/0236014	September 2009	Wilson
2009/0236276	September 2009	Kurth et al.
2009/0239386	September 2009	Suzaki et al.
2009/0242957	October 2009	Ma et al.
2009/0246374	October 2009	Vukovic
2009/0246399	October 2009	Goundar
2009/0246971	October 2009	Reid et al.
2009/0250955	October 2009	Aoki
2009/0255901	October 2009	Okita
2009/0261331	October 2009	Yang et al.
2009/0269506	October 2009	Okura et al.
2009/0269941	October 2009	Raisanen
2009/0275205	November 2009	Kiehlbauch et al.
2009/0277510	November 2009	Shikata
2009/0283041	November 2009	Tomiyasu et al.
2009/0283217	November 2009	Lubomirsky et al.
2009/0284156	November 2009	Hanna et al.
2009/0286400	November 2009	Heo et al.
2009/0286402	November 2009	Xia et al.
2009/0289300	November 2009	Sasaki et al.
2009/0302434	December 2009	Pallem et al.
2009/0304558	December 2009	Patton
2009/0308315	December 2009	de Ridder
2009/0308425	December 2009	Yednak
2009/0311857	December 2009	Todd et al.
2009/0315093	December 2009	Li et al.
2009/0320754	December 2009	Oya
2009/0324971	December 2009	De Vries et al.
2009/0325391	December 2009	De Vusser et al.
2009/0325469	December 2009	Koo et al.
2010/0001409	January 2010	Humbert et al.
2010/0003406	January 2010	Lam et al.
2010/0006031	January 2010	Choi et al.
2010/0006923	January 2010	Fujitsuka
2010/0014479	January 2010	Kim
2010/0015813	January 2010	McGinnis et al.
2010/0018460	January 2010	Singh et al.
2010/0024727	February 2010	Kim et al.
2010/0024872	February 2010	Kishimoto
2010/0025796	February 2010	Dabiran
2010/0032587	February 2010	Hosch et al.
2010/0032842	February 2010	Herdt et al.
2010/0040441	February 2010	Obikane
2010/0041179	February 2010	Lee
2010/0041243	February 2010	Cheng et al.
2010/0050943	March 2010	Kato et al.
2010/0051597	March 2010	Morita et al.
2010/0055312	March 2010	Kato et al.
2010/0055442	March 2010	Kellock
2010/0058984	March 2010	Marubayashi
2010/0065758	March 2010	Liu et al.
2010/0068009	March 2010	Kimura
2010/0068891	March 2010	Hatanaka et al.
2010/0075037	March 2010	Marsh et al.
2010/0075507	March 2010	Chang et al.
2010/0081094	April 2010	Hasebe et al.
2010/0089320	April 2010	Kim
2010/0089870	April 2010	Hiroshima et al.
2010/0090149	April 2010	Thompson et al.
2010/0092696	April 2010	Shinriki
2010/0093187	April 2010	Lee et al.
2010/0098862	April 2010	Xu et al.
2010/0102417	April 2010	Ganguli et al.
2010/0105936	April 2010	Tada et al.
2010/0112496	May 2010	Nakajima et al.
2010/0116207	May 2010	Givens
2010/0116209	May 2010	Kato
2010/0124610	May 2010	Aikawa et al.
2010/0124618	May 2010	Kobayashi et al.
2010/0124621	May 2010	Kobayashi et al.
2010/0126415	May 2010	Ishino et al.
2010/0126539	May 2010	Lee et al.
2010/0126605	May 2010	Stones
2010/0129990	May 2010	Nishizawa et al.
2010/0130015	May 2010	Nakajima et al.
2010/0130017	May 2010	Luo et al.
2010/0130105	May 2010	Lee
2010/0134023	June 2010	Mills
2010/0136216	June 2010	Tsuei et al.
2010/0140221	June 2010	Kikuchi et al.
2010/0143609	June 2010	Fukazawa et al.
2010/0144162	June 2010	Lee et al.
2010/0144968	June 2010	Lee et al.
2010/0145547	June 2010	Darabnia et al.
2010/0151206	June 2010	Wu et al.
2010/0159638	June 2010	Jeong
2010/0162752	July 2010	Tabata et al.
2010/0162956	July 2010	Murakami et al.
2010/0163524	July 2010	Arai
2010/0163937	July 2010	Clendenning
2010/0168404	July 2010	Girolami et al.
2010/0170441	July 2010	Won et al.
2010/0170868	July 2010	Lin et al.
2010/0173432	July 2010	White et al.
2010/0178137	July 2010	Chintalapati et al.
2010/0178423	July 2010	Shimizu et al.
2010/0180819	July 2010	Hatanaka et al.
2010/0183825	July 2010	Becker et al.
2010/0184302	July 2010	Lee et al.
2010/0186669	July 2010	Shin et al.
2010/0193501	August 2010	Zucker et al.
2010/0195392	August 2010	Freeman
2010/0202860	August 2010	Reed
2010/0221452	September 2010	Kang
2010/0229795	September 2010	Tanabe
2010/0230051	September 2010	Iizuka
2010/0230863	September 2010	Moench et al.
2010/0233885	September 2010	Kushibiki et al.
2010/0233886	September 2010	Yang et al.
2010/0236691	September 2010	Yamazaki
2010/0243166	September 2010	Hayashi et al.
2010/0244688	September 2010	Braun et al.
2010/0248465	September 2010	Yi et al.
2010/0255198	October 2010	Cleary et al.
2010/0255218	October 2010	Oka et al.
2010/0255625	October 2010	De Vries
2010/0255658	October 2010	Aggarwal
2010/0259152	October 2010	Yasuda et al.
2010/0266765	October 2010	White et al.
2010/0267248	October 2010	Ma et al.
2010/0270675	October 2010	Harada
2010/0246630	November 2010	Kaszynski et al.
2010/0275846	November 2010	Kitagawa
2010/0282163	November 2010	Aggarwal et al.
2010/0282170	November 2010	Nishizawa
2010/0282645	November 2010	Wang
2010/0285237	November 2010	Ditizio et al.
2010/0285319	November 2010	Kwak et al.
2010/0294199	November 2010	Tran et al.
2010/0297391	November 2010	Kley
2010/0301752	December 2010	Bakre et al.
2010/0304047	December 2010	Yang et al.
2010/0307415	December 2010	Shero et al.
2010/0317198	December 2010	Antonelli
2010/0322604	December 2010	Fondurulia et al.
2010/0326358	December 2010	Choi
2011/0000619	January 2011	Suh
2011/0006402	January 2011	Zhou
2011/0006406	January 2011	Urbanowicz et al.
2011/0014359	January 2011	Hashim
2011/0014795	January 2011	Lee
2011/0027725	February 2011	Tsutsumi et al.
2011/0027999	February 2011	Sparks et al.
2011/0034039	February 2011	Liang et al.
2011/0045610	February 2011	van Schravendijk
2011/0046314	February 2011	Klipp et al.
2011/0048642	March 2011	Mihara et al.
2011/0048769	March 2011	Fujwara
2011/0049100	March 2011	Han et al.
2011/0052833	March 2011	Hanawa et al.
2011/0053383	March 2011	Shero et al.
2011/0056513	March 2011	Hombach et al.
2011/0056626	March 2011	Brown et al.
2011/0057248	March 2011	Ma et al.
2011/0061810	March 2011	Ganguly et al.
2011/0070380	March 2011	Shero et al.
2011/0081519	April 2011	Dillingh
2011/0083496	April 2011	Lin et al.
2011/0086516	April 2011	Lee et al.
2011/0089469	April 2011	Merckling
2011/0097901	April 2011	Banna et al.
2011/0107512	May 2011	Gilbert
2011/0108194	May 2011	Yoshioka et al.
2011/0108741	May 2011	Ingram
2011/0108929	May 2011	Meng
2011/0117490	May 2011	Bae et al.
2011/0117737	May 2011	Agarwala et al.
2011/0117749	May 2011	Sheu
2011/0124196	May 2011	Lee
2011/0139272	June 2011	Matsumoto et al.
2011/0139748	June 2011	Donnelly et al.
2011/0140172	June 2011	Chu
2011/0143032	June 2011	Vrtis et al.
2011/0143461	June 2011	Fish et al.
2011/0159202	June 2011	Matsushita
2011/0159673	June 2011	Hanawa et al.
2011/0159680	June 2011	Yoo
2011/0168330	July 2011	Sakaue et al.
2011/0171775	July 2011	Yamamoto et al.
2011/0175011	July 2011	Ehrne et al.
2011/0180233	July 2011	Bera et al.
2011/0183079	July 2011	Jackson et al.
2011/0183269	July 2011	Zhu
2011/0183527	July 2011	Cho
2011/0192820	August 2011	Yeom et al.
2011/0198417	August 2011	Detmar et al.
2011/0198736	August 2011	Shero et al.
2011/0210468	September 2011	Shannon et al.
2011/0220874	September 2011	Hanrath
2011/0236600	September 2011	Fox et al.
2011/0237040	September 2011	Ng et al.
2011/0239936	October 2011	Suzaki et al.
2011/0253044	October 2011	Tam et al.
2011/0254052	October 2011	Kouvetakis
2011/0256675	October 2011	Avouris
2011/0256726	October 2011	Lavoie et al.
2011/0256727	October 2011	Beynet et al.
2011/0256734	October 2011	Hausmann et al.
2011/0263107	October 2011	Chung et al.
2011/0265549	November 2011	Cruse et al.
2011/0265715	November 2011	Keller
2011/0265725	November 2011	Tsuji
2011/0265951	November 2011	Xu et al.
2011/0275018	November 2011	Matteo et al.
2011/0275166	November 2011	Shero et al.
2011/0277690	November 2011	Rozenzon et al.
2011/0281417	November 2011	Gordon et al.
2011/0283933	November 2011	Makarov et al.
2011/0291243	December 2011	Seamons
2011/0294075	December 2011	Chen et al.
2011/0294288	December 2011	Lee et al.
2011/0298062	December 2011	Ganguli et al.
2011/0300720	December 2011	Fu
2011/0308453	December 2011	Su et al.
2011/0308460	December 2011	Hong et al.
2011/0312191	December 2011	Ohkura et al.
2012/0003500	January 2012	Yoshida et al.
2012/0006489	January 2012	Okita
2012/0009802	January 2012	Lavoie
2012/0024227	February 2012	Takasuka et al.
2012/0024479	February 2012	Palagashvili et al.
2012/0028454	February 2012	Swaminathan et al.
2012/0031333	February 2012	Kurita et al.
2012/0032311	February 2012	Gates
2012/0033695	February 2012	Hayashi et al.
2012/0036732	February 2012	Varadarajan
2012/0040528	February 2012	Kim et al.
2012/0043556	February 2012	Dube et al.
2012/0046421	February 2012	Darling et al.
2012/0052681	March 2012	Marsh
2012/0058630	March 2012	Quinn
2012/0064690	March 2012	Hirota et al.
2012/0068242	March 2012	Shin et al.
2012/0070136	March 2012	Koelmel et al.
2012/0070997	March 2012	Larson
2012/0074533	March 2012	Aoyama
2012/0077349	March 2012	Li et al.
2012/0080756	April 2012	Suzuki
2012/0090704	April 2012	Laverdiere et al.
2012/0098107	April 2012	Raisanen et al.
2012/0100464	April 2012	Kageyama
2012/0103264	May 2012	Choi et al.
2012/0103522	May 2012	Hohenwater
2012/0103939	May 2012	Wu et al.
2012/0107607	May 2012	Takaki et al.
2012/0108039	May 2012	Zajaji
2012/0114877	May 2012	Lee
2012/0115250	May 2012	Ariga et al.
2012/0115257	May 2012	Matsuyam et al.
2012/0119337	May 2012	Sasaki et al.
2012/0121823	May 2012	Chhabra
2012/0122275	May 2012	Koo et al.
2012/0122302	May 2012	Weisman et al.
2012/0128897	May 2012	Xiao et al.
2012/0135145	May 2012	Je et al.
2012/0149213	June 2012	Nittala
2012/0156108	June 2012	Fondurulia et al.
2012/0156890	June 2012	Yim et al.
2012/0160172	June 2012	Wamura et al.
2012/0161405	June 2012	Mohn
2012/0164327	June 2012	Sato
2012/0164837	June 2012	Tan et al.
2012/0164842	June 2012	Watanabe
2012/0170170	July 2012	Gros-Jean
2012/0171391	July 2012	Won
2012/0171874	July 2012	Thridandam et al.
2012/0175751	July 2012	Gatineau et al.
2012/0180954	July 2012	Yang et al.
2012/0183689	July 2012	Suzuki et al.
2012/0187083	July 2012	Hashizume
2012/0187305	July 2012	Elam et al.
2012/0190178	July 2012	Wang et al.
2012/0190185	July 2012	Rogers
2012/0196048	August 2012	Ueda
2012/0196450	August 2012	Balseanu et al.
2012/0207456	August 2012	Kim et al.
2012/0212121	August 2012	Lin
2012/0214318	August 2012	Fukazawa et al.
2012/0216743	August 2012	Itoh et al.
2012/0219824	August 2012	Prolier
2012/0220139	August 2012	Lee et al.
2012/0225561	September 2012	Watanabe
2012/0231771	September 2012	Marcus
2012/0238074	September 2012	Santhanam et al.
2012/0240858	September 2012	Taniyama et al.
2012/0241411	September 2012	Darling et al.
2012/0252229	October 2012	Timans et al.
2012/0263876	October 2012	Haukka et al.
2012/0264051	October 2012	Angelov et al.
2012/0270339	October 2012	Xie et al.
2012/0270393	October 2012	Pore et al.
2012/0289053	November 2012	Holland et al.
2012/0289057	November 2012	DeDontney
2012/0295427	November 2012	Bauer
2012/0304935	December 2012	Oosterlaken et al.
2012/0305026	December 2012	Nomura et al.
2012/0305196	December 2012	Mori et al.
2012/0305987	December 2012	Hirler et al.
2012/0310440	December 2012	Darabnia et al.
2012/0315113	December 2012	Hiroki
2012/0318334	December 2012	Bedell et al.
2012/0321786	December 2012	Satitpunwaycha et al.
2012/0322252	December 2012	Son et al.
2012/0325148	December 2012	Yamagishi et al.
2012/0328780	December 2012	Yamagishi et al.
2013/0005122	January 2013	Schwarzenbach et al.
2013/0011983	January 2013	Tsai
2013/0014697	January 2013	Kanayama
2013/0014896	January 2013	Shoji et al.
2013/0019944	January 2013	Hekmatshoar-Tabai et al.
2013/0019945	January 2013	Hekmatshoar-Tabai et al.
2013/0020246	January 2013	Hoots et al.
2013/0023129	January 2013	Reed
2013/0025786	January 2013	Davidkovich et al.
2013/0026451	January 2013	Bangsaruntip et al.
2013/0037858	February 2013	Hong et al.
2013/0037886	February 2013	Tsai et al.
2013/0048606	February 2013	Mao et al.
2013/0052585	February 2013	Ayothi et al.
2013/0061755	March 2013	Frederick
2013/0064973	March 2013	Chen et al.
2013/0065189	March 2013	Yoshii et al.
2013/0068727	March 2013	Okita
2013/0068970	March 2013	Matsushita
2013/0069052	March 2013	Sandhu
2013/0078392	March 2013	Xiao et al.
2013/0081702	April 2013	Mohammed et al.
2013/0082274	April 2013	Yang
2013/0084156	April 2013	Shimamoto
2013/0084714	April 2013	Oka et al.
2013/0089716	April 2013	Krishnamurthy et al.
2013/0095664	April 2013	Matero et al.
2013/0095973	April 2013	Kroneberger et al.
2013/0104988	May 2013	Yednak et al.
2013/0104992	May 2013	Yednak et al.
2013/0115383	May 2013	Lu et al.
2013/0115763	May 2013	Takamure et al.
2013/0115768	May 2013	Pore et al.
2013/0119018	May 2013	Kanarik et al.
2013/0122712	May 2013	Kim et al.
2013/0126515	May 2013	Shero et al.
2013/0129577	May 2013	Halpin et al.
2013/0134148	May 2013	Tachikawa
2013/0143401	June 2013	Yu et al.
2013/0157409	June 2013	Vaidya
2013/0160709	June 2013	White
2013/0161629	June 2013	Han et al.
2013/0168354	July 2013	Kanarik
2013/0171818	July 2013	Kim et al.
2013/0175596	July 2013	Cheng et al.
2013/0180448	July 2013	Sakaue et al.
2013/0183814	July 2013	Huang et al.
2013/0189854	July 2013	Hausmann et al.
2013/0196507	August 2013	Ma et al.
2013/0203266	August 2013	Hintze
2013/0209940	August 2013	Sakamoto et al.
2013/0210241	August 2013	Lavoie et al.
2013/0214232	August 2013	Tendulkar et al.
2013/0217239	August 2013	Mallick et al.
2013/0217240	August 2013	Mallick et al.
2013/0217241	August 2013	Underwood et al.
2013/0217243	August 2013	Underwood et al.
2013/0224964	August 2013	Fukazawa
2013/0230814	September 2013	Dunn et al.
2013/0256265	October 2013	Darling et al.
2013/0256838	October 2013	Sanchez et al.
2013/0256962	October 2013	Ranish
2013/0264659	October 2013	Jung
2013/0269612	October 2013	Cheng et al.
2013/0270676	October 2013	Lindert et al.
2013/0276978	October 2013	Bluck et al.
2013/0285155	October 2013	Glass
2013/0287526	October 2013	Bluck et al.
2013/0288480	October 2013	Sanchez et al.
2013/0288485	October 2013	Liang et al.
2013/0292047	November 2013	Tian et al.
2013/0292676	November 2013	Milligan et al.
2013/0292807	November 2013	Raisanen et al.
2013/0295779	November 2013	Chandra et al.
2013/0302999	November 2013	Won et al.
2013/0303803	November 2013	Doerr et al.
2013/0313656	November 2013	Tong
2013/0319290	December 2013	Xiao et al.
2013/0320429	December 2013	Thomas
2013/0323435	December 2013	Xiao et al.
2013/0330165	December 2013	Wimplinger
2013/0330911	December 2013	Huang et al.
2013/0330933	December 2013	Fukazawa et al.
2013/0333619	December 2013	Omari
2013/0337583	December 2013	Kobayashi et al.
2013/0337653	December 2013	Kovalgin et al.
2013/0340619	December 2013	Tammera
2013/0344248	December 2013	Clark
2014/0000843	January 2014	Dunn et al.
2014/0001520	January 2014	Glass
2014/0014642	January 2014	Elliot et al.
2014/0014644	January 2014	Akiba et al.
2014/0015186	January 2014	Wessel et al.
2014/0020619	January 2014	Vincent et al.
2014/0023794	January 2014	Mahajani et al.
2014/0027884	January 2014	Tang et al.
2014/0033978	February 2014	Adachi et al.
2014/0036274	February 2014	Marquardt et al.
2014/0047705	February 2014	Singh
2014/0048765	February 2014	Ma et al.
2014/0056679	February 2014	Yamabe et al.
2014/0056770	February 2014	Bedard et al.
2014/0057454	February 2014	Subramonium
2014/0058179	February 2014	Stevens et al.
2014/0060147	March 2014	Sarin et al.
2014/0061770	March 2014	Lee
2014/0062304	March 2014	Nakano et al.
2014/0065841	March 2014	Matero
2014/0067110	March 2014	Lawson et al.
2014/0073143	March 2014	Alokozai et al.
2014/0076861	March 2014	Cornelius et al.
2014/0077240	March 2014	Roucka et al.
2014/0084341	March 2014	Weeks
2014/0087544	March 2014	Tolle
2014/0094027	April 2014	Azumo et al.
2014/0096716	April 2014	Chung et al.
2014/0097468	April 2014	Okita
2014/0099798	April 2014	Tsuji
2014/0103145	April 2014	White et al.
2014/0106574	April 2014	Kang et al.
2014/0110798	April 2014	Cai
2014/0113457	April 2014	Sims
2014/0116335	May 2014	Tsuji et al.
2014/0117380	May 2014	Loboda et al.
2014/0120487	May 2014	Kaneko
2014/0120723	May 2014	Fu et al.
2014/0120738	May 2014	Jung
2014/0127907	May 2014	Yang
2014/0138779	May 2014	Xie et al.
2014/0141625	May 2014	Fuzazawa et al.
2014/0144500	May 2014	Cao et al.
2014/0158786	June 2014	Santo
2014/0159170	June 2014	Raisanen et al.
2014/0167187	June 2014	Kuo et al.
2014/0174354	June 2014	Arai
2014/0175054	June 2014	Carlson et al.
2014/0182053	July 2014	Huang
2014/0191389	July 2014	Lee et al.
2014/0193983	July 2014	Lavoie
2014/0202386	July 2014	Taga
2014/0202388	July 2014	Um et al.
2014/0209976	July 2014	Yang et al.
2014/0217065	August 2014	Winkler et al.
2014/0220247	August 2014	Haukka et al.
2014/0225065	August 2014	Rachmady et al.
2014/0227072	August 2014	Lee et al.
2014/0227861	August 2014	Wu et al.
2014/0227881	August 2014	Lubomirsky et al.
2014/0234550	August 2014	Winter et al.
2014/0245948	September 2014	Nguyen et al.
2014/0251953	September 2014	Winkler et al.
2014/0251954	September 2014	Winkler et al.
2014/0252134	September 2014	Chen
2014/0252479	September 2014	Utomo et al.
2014/0260684	September 2014	Christmann
2014/0264902	September 2014	Ting et al.
2014/0272194	September 2014	Xiao et al.
2014/0273428	September 2014	Shero
2014/0273477	September 2014	Niskanen
2014/0273510	September 2014	Chen et al.
2014/0273528	September 2014	Niskanen
2014/0273530	September 2014	Nguyen
2014/0273531	September 2014	Niskanen
2014/0283747	September 2014	Kasai et al.
2014/0346142	November 2014	Chapuis et al.
2014/0346650	November 2014	Raisanen et al.
2014/0349033	November 2014	Nonaka et al.
2014/0363980	December 2014	Kawamata et al.
2014/0363983	December 2014	Nakano et al.
2014/0363985	December 2014	Jang et al.
2014/0367043	December 2014	Bishara et al.
2014/0367642	December 2014	Guo
2014/0377960	December 2014	Koiwa
2015/0004316	January 2015	Thompson et al.
2015/0004317	January 2015	Dussarrat et al.
2015/0004798	January 2015	Chandrasekharan et al.
2015/0007770	January 2015	Chandrasekharan et al.
2015/0010381	January 2015	Cai
2015/0014632	January 2015	Kim et al.
2015/0014823	January 2015	Mallikaijunan et al.
2015/0017794	January 2015	Takamure
2015/0021599	January 2015	Ridgeway
2015/0024609	January 2015	Milligan et al.
2015/0041431	February 2015	Zafiropoulo et al.
2015/0048485	February 2015	Tolle
2015/0056815	February 2015	Fernandez
2015/0072509	March 2015	Chi et al.
2015/0078874	March 2015	Sansoni
2015/0079311	March 2015	Nakano
2015/0086316	March 2015	Greenberg
2015/0087154	March 2015	Guha et al.
2015/0091057	April 2015	Xie et al.
2015/0096973	April 2015	Dunn et al.
2015/0099065	April 2015	Canizares et al.
2015/0099072	April 2015	Takamure et al.
2015/0099342	April 2015	Tsai
2015/0102466	April 2015	Colinge
2015/0111374	April 2015	Bao
2015/0111395	April 2015	Hashimoto et al.
2015/0122180	May 2015	Chang et al.
2015/0132212	May 2015	Winkler et al.
2015/0140210	May 2015	Jung et al.
2015/0147483	May 2015	Fukazawa
2015/0147488	May 2015	Choi et al.
2015/0147877	May 2015	Jung
2015/0162168	June 2015	Oehrlien
2015/0162185	June 2015	Pore
2015/0162214	June 2015	Thompson
2015/0167159	June 2015	Halpin et al.
2015/0170914	June 2015	Haukka et al.
2015/0170947	June 2015	Bluck
2015/0170954	June 2015	Agarwal
2015/0171177	June 2015	Cheng et al.
2015/0174768	June 2015	Rodnick
2015/0179501	June 2015	Jhaveri et al.
2015/0179564	June 2015	Lee et al.
2015/0184291	July 2015	Alokozai et al.
2015/0187559	July 2015	Sano
2015/0187568	July 2015	Pettinger et al.
2015/0217330	August 2015	Haukka
2015/0217456	August 2015	Tsuji et al.
2015/0218695	August 2015	Odedra
2015/0225850	August 2015	Arora et al.
2015/0228572	August 2015	Yang et al.
2015/0240359	August 2015	Jdira et al.
2015/0243542	August 2015	Yoshihara et al.
2015/0243545	August 2015	Tang
2015/0243658	August 2015	Joshi et al.
2015/0255385	September 2015	Lee et al.
2015/0259790	September 2015	Newman
2015/0263033	September 2015	Aoyama
2015/0267295	September 2015	Hill et al.
2015/0267297	September 2015	Shiba
2015/0267298	September 2015	Saitou et al.
2015/0267299	September 2015	Hawkins
2015/0267301	September 2015	Hill et al.
2015/0270140	September 2015	Gupta et al.
2015/0270146	September 2015	Yoshihara et al.
2015/0279681	October 2015	Knoops
2015/0279708	October 2015	Kobayashi et al.
2015/0284848	October 2015	Nakano et al.
2015/0287626	October 2015	Arai
2015/0287710	October 2015	Yun et al.
2015/0292088	October 2015	Canizares
2015/0299848	October 2015	Haukka et al.
2015/0308586	October 2015	Shugrue et al.
2015/0303056	November 2015	Varadarajan et al.
2015/0315704	November 2015	Nakano et al.
2015/0340247	November 2015	Balakrishnan et al.
2015/0340500	November 2015	Brunco
2015/0343741	December 2015	Shibata et al.
2015/0348755	December 2015	Han et al.
2015/0361553	December 2015	Murakawa
2015/0364371	December 2015	Yen
2015/0367253	December 2015	Kanyal et al.
2015/0376211	December 2015	Girard
2015/0376785	December 2015	Knaapen et al.
2015/0380296	December 2015	Antonelli et al.
2016/0013022	January 2016	Ayoub
2016/0013024	January 2016	Milligan et al.
2016/0020092	January 2016	Kang
2016/0024656	January 2016	White et al.
2016/0035566	February 2016	LaVoie
2016/0051964	February 2016	Tolle et al.
2016/0056074	February 2016	Na
2016/0079054	March 2016	Chen et al.
2016/0097123	April 2016	Shugrue et al.
2016/0099150	April 2016	Tsai
2016/0102214	April 2016	Dietz et al.
2016/0111272	April 2016	Girard
2016/0111438	April 2016	Tsutsumi et al.
2016/0115590	April 2016	Haukka et al.
2016/0133307	May 2016	Lee et al.
2016/0133628	May 2016	Xie
2016/0141172	May 2016	Kang
2016/0145738	May 2016	Liu et al.
2016/0148811	May 2016	Nakatani et al.
2016/0148821	May 2016	Singh
2016/0155629	June 2016	Hawryluk et al.
2016/0163556	June 2016	Briggs et al.
2016/0163561	June 2016	Hudson et al.
2016/0163711	June 2016	Arndt et al.
2016/0168699	June 2016	Fukazawa et al.
2016/0181128	June 2016	Mori
2016/0181368	June 2016	Weeks
2016/0190137	June 2016	Tsai et al.
2016/0211135	July 2016	Noda et al.
2016/0211147	July 2016	Fukazawa
2016/0217857	July 2016	Paudel
2016/0225607	August 2016	Yamamoto et al.
2016/0245704	August 2016	Osaka et al.
2016/0256187	September 2016	Shelton et al.
2016/0268102	September 2016	White
2016/0268107	September 2016	White
2016/0276148	September 2016	Qian et al.
2016/0284542	September 2016	Noda et al.
2016/0289828	October 2016	Shero et al.
2016/0293398	October 2016	Danek et al.
2016/0307766	October 2016	Jongbloed et al.
2016/0312360	October 2016	Rasheed et al.
2016/0314964	October 2016	Tang et al.
2016/0334709	November 2016	Huli et al.
2016/0358772	December 2016	Xie
2016/0362783	December 2016	Tolle et al.
2016/0362813	December 2016	Bao et al.
2016/0365280	December 2016	Brink et al.
2016/0372365	December 2016	Tang et al.
2016/0372744	December 2016	Essaki et al.
2016/0376700	December 2016	Haukka
2016/0376704	December 2016	Raisanen
2016/0379851	December 2016	Swaminathan et al.
2016/0381732	December 2016	Moench et al.
2017/0011889	January 2017	Winkler et al.
2017/0011950	January 2017	Schmotzer
2017/0018477	January 2017	Kato
2017/0025280	January 2017	Milligan
2017/0025291	January 2017	Lin
2017/0029945	February 2017	Kamakura
2017/0033004	February 2017	Siew et al.
2017/0037513	February 2017	Haukka
2017/0040164	February 2017	Wang et al.
2017/0040206	February 2017	Schmotzer et al.
2017/0047446	February 2017	Margetis et al.
2017/0051408	February 2017	Kosuke et al.
2017/0053811	February 2017	Fung et al.
2017/0062204	March 2017	Suzuki et al.
2017/0062209	March 2017	Shiba
2017/0062258	March 2017	Bluck
2017/0091320	March 2017	Psota et al.
2017/0092469	March 2017	Kurita et al.
2017/0092531	March 2017	Coomer
2017/0092847	March 2017	Kim et al.
2017/0100742	April 2017	Pore et al.
2017/0103907	April 2017	Chu et al.
2017/0107621	April 2017	Suemori
2017/0110313	April 2017	Tang et al.
2017/0114464	April 2017	Iriuda et al.
2017/0117141	April 2017	Zhu et al.
2017/0117202	April 2017	Tang et al.
2017/0117203	April 2017	Tang et al.
2017/0117222	April 2017	Kim et al.
2017/0130332	May 2017	Stumpf
2017/0136578	May 2017	Yoshimura
2017/0154757	June 2017	Winkler et al.
2017/0173696	June 2017	Sheinman
2017/0178899	June 2017	Kabansky et al.
2017/0186754	June 2017	Blomberg et al.
2017/0191164	July 2017	Alokozai et al.
2017/0196562	July 2017	Shelton
2017/0216762	August 2017	Shugrue et al.
2017/0232457	August 2017	Toshiki et al.
2017/0243734	August 2017	Ishikawa et al.
2017/0250068	August 2017	Ishikawa et al.
2017/0250075	August 2017	Caymax et al.
2017/0256429	September 2017	Lawson et al.
2017/0260649	September 2017	Coomer
2017/0263437	September 2017	Li et al.
2017/0267527	September 2017	Kim et al.
2017/0267531	September 2017	Huakka
2017/0271256	September 2017	Inatsuka
2017/0271501	September 2017	Avci et al.
2017/0278707	September 2017	Margetis et al.
2017/0287681	October 2017	Nitadori et al.
2017/0294318	October 2017	Yoshida et al.
2017/0306478	October 2017	Raisanen et al.
2017/0306479	October 2017	Raisanen et al.
2017/0306480	October 2017	Zhu et al.
2017/0316933	November 2017	Xie et al.
2017/0316940	November 2017	Ishikawa
2017/0317194	November 2017	Tang et al.
2017/0338192	November 2017	Lee et al.
2017/0342559	November 2017	Fukazawa et al.
2017/0343896	November 2017	Darling et al.
2017/0358670	December 2017	Kub et al.
2017/0372884	December 2017	Margetis et al.
2018/0010247	January 2018	Niskanen
2018/0025890	January 2018	Choi
2018/0025939	January 2018	Kovalgin et al.
2018/0033616	February 2018	Masaru
2018/0033625	February 2018	Yoo
2018/0033645	February 2018	Saido et al.
2018/0033674	February 2018	Jeong
2018/0033679	February 2018	Pore
2018/0040746	February 2018	Johnson et al.
2018/0047749	February 2018	Kim
2018/0057937	March 2018	Lee et al.
2018/0061628	March 2018	Ou et al.
2018/0061851	March 2018	Ootsuka
2018/0069019	March 2018	Kim et al.
2018/0076021	March 2018	Fukushima et al.
2018/0083435	March 2018	Redler
2018/0087152	March 2018	Yoshida
2018/0087154	March 2018	Pore et al.
2018/0087156	March 2018	Kohei et al.
2018/0102276	April 2018	Zhu et al.
2018/0105930	April 2018	Kang et al.
2018/0108587	April 2018	Jiang
2018/0114680	April 2018	Kim et al.
2018/0119283	May 2018	Fukazawa
2018/0122642	May 2018	Raisanen
2018/0122709	May 2018	Xie
2018/0122959	May 2018	Calka et al.
2018/0127876	May 2018	Tolle
2018/0130652	May 2018	Pettinger et al.
2018/0130701	May 2018	Chun
2018/0135173	May 2018	Kim et al.
2018/0135179	May 2018	Toshiyuki et al.
2018/0142353	May 2018	Tetsuya et al.
2018/0142357	May 2018	Yoshikazu
2018/0151346	May 2018	Blanquart
2018/0151358	May 2018	Margetis et al.
2018/0158688	June 2018	Chen
2018/0166258	June 2018	Kim et al.
2018/0166315	June 2018	Coomer
2018/0171475	June 2018	Maes et al.
2018/0171477	June 2018	Kim et al.
2018/0174826	June 2018	Raaijmakers et al.
2018/0182613	June 2018	Blanquart et al.
2018/0182618	June 2018	Blanquart et al.
2018/0189923	July 2018	Zhong et al.
2018/0195174	July 2018	Kim et al.
2018/0223429	August 2018	Fukazawa et al.
2018/0233372	August 2018	Vayrynen et al.
2018/0286663	October 2018	Kobayashi et al.
2018/0286675	October 2018	Blomberg et al.
2018/0286711	October 2018	Oosterlaken et al.

Foreign Patent Documents

	2588350		Nov 2003		CN
	1563483		Jan 2005		CN
	1664987		Sep 2005		CN
	1714168		Dec 2005		CN
	1825535		Aug 2006		CN
	101330015		Dec 2008		CN
	101515563		Aug 2009		CN
	101522943		Sep 2009		CN
	101681873		Mar 2010		CN
	101423937		Sep 2011		CN
	102383106		Mar 2012		CN
	102008052750		Jun 2009		DE
	0887632		Dec 1998		EP
	1889817		Feb 2008		EP
	2036600		Mar 2009		EP
	2426233		Jul 2012		EP
	1408266		Aug 1965		FR
	2233614		Jan 1975		FR
	752-277		Jul 1956		GB
	58-19462		Apr 1983		JP
	59-211779		Nov 1984		JP
	61038863		Feb 1986		JP
	H01296613		Nov 1989		JP
	H0293071		Apr 1990		JP
	H02-185038		Jul 1990		JP
	2845163		Jan 1991		JP
	03-044472		Feb 1991		JP
	H03-155625		Jul 1991		JP
	H03-248427		Nov 1991		JP
	H04029313		Jan 1992		JP
	H04115531		Apr 1992		JP
	H05-023079		Mar 1993		JP
	H05-118928		May 1993		JP
	05171446		Jul 1993		JP
	06-053210		Feb 1994		JP
	H06-052210		Feb 1994		JP
	H0684888		Mar 1994		JP
	H06-338497		Dec 1994		JP
	H0729836		Jan 1995		JP
	H07297271		Jan 1995		JP
	H07-109576		Apr 1995		JP
	07-130731		May 1995		JP
	07-034936		Aug 1995		JP
	H07-034936		Aug 1995		JP
	7-272694		Oct 1995		JP
	H07283149		Oct 1995		JP
	H07-209093		Nov 1995		JP
	08-181135		Jul 1996		JP
	H08181135		Jul 1996		JP
	H08335558		Dec 1996		JP
	9-89676		Apr 1997		JP
	H09148322		Jun 1997		JP
	H10041096		Feb 1998		JP
	10-064696		Mar 1998		JP
	H10-153494		Jun 1998		JP
	H10-227793		Aug 1998		JP
	10-0261620		Sep 1998		JP
	11097163		Apr 1999		JP
	H11-118615		Apr 1999		JP
	H11-183264		Jul 1999		JP
	H11-183265		Jul 1999		JP
	H11-195688		Jul 1999		JP
	H11-287715		Oct 1999		JP
	2001023872		Jan 2001		JP
	2001207265		Jul 2001		JP
	2001207268		Jul 2001		JP
	2001210602		Aug 2001		JP
	2001220677		Aug 2001		JP
	2001342570		Dec 2001		JP
	2002164342		Jun 2002		JP
	2002170781		Jun 2002		JP
	2003035574		Feb 2003		JP
	2003133300		May 2003		JP
	2003153706		May 2003		JP
	2003303814		Oct 2003		JP
	2004014952		Jan 2004		JP
	2004023043		Jan 2004		JP
	2004091848		Mar 2004		JP
	2004113270		Apr 2004		JP
	2004128019		Apr 2004		JP
	2004134553		Apr 2004		JP
	2004294638		Oct 2004		JP
	2004310019		Nov 2004		JP
	2004538374		Dec 2004		JP
	2005033221		Feb 2005		JP
	2005079254		Mar 2005		JP
	2005507030		Mar 2005		JP
	2005172489		Jun 2005		JP
	2006059931		Mar 2006		JP
	2006090762		Apr 2006		JP
	2006153706		Jun 2006		JP
	2006186271		Jul 2006		JP
	2006188729		Jul 2006		JP
	2006278058		Oct 2006		JP
	2006319261		Nov 2006		JP
	2007027777		Feb 2007		JP
	3140111		Mar 2008		JP
	2008060304		Mar 2008		JP
	2008066159		Mar 2008		JP
	2008172083		Jul 2008		JP
	2008527748		Jul 2008		JP
	2008202107		Sep 2008		JP
	2009016815		Jan 2009		JP
	2009088421		Apr 2009		JP
	2009239082		Apr 2009		JP
	2009099938		May 2009		JP
	2009194248		Aug 2009		JP
	2009251216		Oct 2009		JP
	2010067940		Mar 2010		JP
	2010097834		Apr 2010		JP
	2010205967		Sep 2010		JP
	2010251444		Oct 2010		JP
	2011049592		Mar 2011		JP
	2011162830		Aug 2011		JP
	2011181681		Sep 2011		JP
	2012089837		May 2012		JP
	2012146939		Aug 2012		JP
	2013026479		Feb 2013		JP
	2013235912		Nov 2013		JP
	2014522104		Aug 2014		JP
	2016174158		Sep 2016		JP
	10-2000-0031098		Jun 2000		KR
	10-2000-0045257		Jul 2000		KR
	10-0295043		Apr 2001		KR
	10-2002-0064028		Aug 2002		KR
	2002-0086763		Nov 2002		KR
	10-0377095		Mar 2003		KR
	2003-0092305		Dec 2003		KR
	10-2005-0054122		Jun 2005		KR
	10-0547248		Jan 2006		KR
	10-0593960		Jun 2006		KR
	10-0688484		Feb 2007		KR
	10-2007-0084683		Aug 2007		KR
	10-2009-0055443		Jun 2009		KR
	10-20100020834		Feb 2010		KR
	10-20100032812		Mar 2010		KR
	10-1114219		Feb 2012		KR
	10-1114219		Mar 2012		KR
	10-1535573		Jul 2015		KR
	10-20180054366		May 2018		KR
	538327		Jun 2003		TW
	I226380		Jan 2005		TW
	M292692		Jun 2006		TW
	200701301		Jan 2007		TW
	200731357		Aug 2007		TW
	201247690		Dec 2012		TW
	201330086		Jul 2013		TW
	W1996017107		Jun 1996		WO
	1997003223		Jan 1997		WO
	1998032893		Jul 1998		WO
	1999023690		May 1999		WO
	DM/048579		Jul 1999		WO
	2004008491		Jul 2002		WO
	2004008827		Jan 2004		WO
	2004010467		Jan 2004		WO
	2004106584		Dec 2004		WO
	2005112082		Nov 2005		WO
	2006054854		May 2006		WO
	2006056091		Jun 2006		WO
	2006078666		Jul 2006		WO
	2006080782		Aug 2006		WO
	2006101857		Sep 2006		WO
	2006114781		Nov 2006		WO
	2007024720		Mar 2007		WO
	2007027165		Mar 2007		WO
	2007117718		Oct 2007		WO
	2007140376		Dec 2007		WO
	2008045972		Apr 2008		WO
	2008091900		Jul 2008		WO
	2008121463		Oct 2008		WO
	2008147731		Dec 2008		WO
	2009028619		Mar 2009		WO
	2009039251		Mar 2009		WO
	2009099776		Aug 2009		WO
	2009154889		Dec 2009		WO
	2009154896		Dec 2009		WO
	2010039363		Apr 2010		WO
	2010077533		Jul 2010		WO
	2010100702		Sep 2010		WO
	2010129428		Nov 2010		WO
	2010129430		Nov 2010		WO
	2010129431		Nov 2010		WO
	2010118051		Jan 2011		WO
	2011019950		Feb 2011		WO
	2011149640		Dec 2011		WO
	2012077590		Jun 2012		WO
	2013078065		May 2013		WO
	2013078066		May 2013		WO
	2014107290		Jul 2014		WO
	2015026230		Feb 2015		WO
	2015107009		Jul 2015		WO
	2018109553		Jun 2016		WO
	2018109554		Jun 2016		WO
	2017108713		Jun 2017		WO
	2017108714		Jun 2017		WO
	2017212546		Dec 2017		WO
	2018003072		Jan 2018		WO
	2018008088		Jan 2018		WO
	2018020316		Feb 2018		WO
	2018020318		Feb 2018		WO
	2018020320		Feb 2018		WO
	2018020327		Feb 2018		WO
	2008045972		Apr 2018		WO
	2018109551		Jun 2018		WO
	2018109552		Jun 2018		WO

Other References

USPTO; Office Action dated Aug. 27, 2010 in U.S. Appl. No. 12/118,596. cited by applicant . USPTO; Office Action dated Feb. 15, 2011 in U.S. Appl. No. 12/118,596. cited by applicant . USPTO; Notice of Allowance dated Aug. 4, 2011 in U.S. Appl. No. 12/118,596. cited by applicant . USPTO; Non-Final Office Action dated Apr. 1, 2010 in U.S. Appl. No. 12/357,174. cited by applicant . USPTO; Final Office Action dated Sep. 1, 2010 in U.S. Appl. No. 12/357,174. cited by applicant . USPTO; Notice of Allowance dated Dec. 13, 2010 in U.S. Appl. No. 12/357,174. cited by applicant . USPTO; Non-Final Office Action dated Dec. 29, 2010 in U.S. Appl. No. 12/362,023. cited by applicant . USPTO; Non-Final Office Action dated Jul. 26, 2011 in U.S. Appl. No. 12/416,809. cited by applicant . USPTO; Final Office Action dated Dec. 6, 2011 in U.S. Appl. No. 12/416,809. cited by applicant . USPTO; Notice of Allowance dated Jun. 16, 2011 in U.S. Appl. No. 12/430,751. cited by applicant . USPTO; Notice of Allowance dated Jul. 27, 2011 in U.S. Appl. No. 12/730,751. cited by applicant . USPTO; Notice of Allowance dated Oct. 1, 2010 in U.S. Appl. No. 12/467,017. cited by applicant . USPTO; Non-Final Office Action dated Mar. 18, 2010 in U.S. Appl. No. 12/489,252. cited by applicant . USPTO; Notice of Allowance dated Sep. 2, 2010 in U.S. Appl. No. 12/489,252. cited by applicant . USPTO; Non-Final Office Action dated Dec. 15, 2010 in U.S. Appl. No. 12/553,759. cited by applicant . USPTO; Final Office Action dated May 4, 2011 in U.S. Appl. No. 12/553,759. cited by applicant . USPTO; Non-Final Office Action dated Sep. 6, 2011 in U.S. Appl. No. 12/553,759. cited by applicant . USPTO; Notice of Allowance dated Jan. 24, 2012 in U.S. Appl. No. 12/553,759. cited by applicant . USPTO; Non-Final Office Action dated Oct. 19, 2012 in U.S. Appl. No. 12/618,355. cited by applicant . USPTO; Final Office Action dated May 8, 2013 in U.S. Appl. No. 12/618,355. cited by applicant . USPTO; Non-Final Office Action dated Apr. 8, 2015 in U.S. Appl. No. 12/618,355. cited by applicant . USPTO; Final Office Action dated Oct. 22, 2015 in U.S. Appl. No. 12/618,355. cited by applicant . USPTO; Non-Final Offcie Action dated Jun. 30, 2016 in U.S. Appl. No. 12/618,355. cited by applicant . USPTO; Final Office Action dated Feb. 10, 2017 in U.S. Appl. No. 12/618,355. cited by applicant . USPTO; Non-Final Office Action dated Nov. 29, 2017 in U.S. Appl. No. 12/618,355. cited by applicant . USPTO; Non-Final Office Action dated Feb. 16, 2012 in U.S. Appl. No. 12/618,419. cited by applicant . USPTO; Final Office Action dated Jun. 22, 2012 in U.S. Appl. No. 12/618,419. cited by applicant . USPTO; Non-Final Office Action dated Jun. 27, 2012 in U.S. Appl. No. 12/618,419. cited by applicant . USPTO; Notice of Allowance dated Apr. 12, 2013 in U.S. Appl. No. 12/618,419. cited by applicant . USPTO; Non-Final Office Action dated Dec. 6, 2011 in U.S. Appl. No. 12/718,731. cited by applicant . USPTO; Notice of Allowance dated Mar. 16, 2012 in U.S. Appl. No. 12/718,731. cited by applicant . USPTO; Restriction Requirement dated Jan. 15, 2013 in U.S. Appl. No. 12/754,223. cited by applicant . USPTO; Office Action dated Feb. 26, 2013 in U.S. Appl. No. 12/754,223. cited by applicant . USPTO; Final Office Action dated Jun. 28, 2013 in U.S. Appl. No. 12/754,223. cited by applicant . USPTO; Office Action dated Feb. 25, 2014 in U.S. Appl. No. 12/754,223. cited by applicant . USPTO; Final Office Action dated Jul. 14, 2014 in U.S. Appl. No. 12/754,223. cited by applicant . USPTO; Non-Final Office Action dated Mar. 25, 2015 in U.S. Appl. No. 12/754,223. cited by applicant . USPTO; Final Office Action dated Aug. 12, 2015 in U.S. Appl. No. 12/754,223. cited by applicant . USPTO; Notice of Allowance dated May 23, 2016 in U.S. Appl. No. 12/754,223. cited by applicant . USPTO; Office Action dated Apr. 23, 2013 in U.S. Appl. No. 12/763,037. cited by applicant . USPTO; Final Office Action dated Oct. 21, 2013 in U.S. Appl. No. 12/763,037. cited by applicant . USPTO; Office Action dated Oct. 8, 2014 in U.S. Appl. No. 12/763,037. cited by applicant . USPTO; Notice of Allowance dated Jan. 27, 2015 in U.S. Appl. No. 12/763,037. cited by applicant . USPTO; Non-Final Office Action dated Jan. 24, 2011 in U.S. Appl. No. 12/778,808. cited by applicant . USPTO; Notice of Allowance dated May 9, 2011 in U.S. Appl. No. 12/778,808. cited by applicant . USPTO; Notice of Allowance dated Oct. 12, 2012 in U.S. Appl. No. 12/832,739. cited by applicant . USPTO; Non-Final Office Action dated Oct. 16, 2012 in U.S. Appl. No. 12/847,848. cited by applicant . USPTO; Final Office Action dated Apr. 22, 2013 in U.S. Appl. No. 12/847,848. cited by applicant . USPTO; Notice of Allowance dated Jan. 16, 2014 in U.S. Appl. No. 12/847,848. cited by applicant . USPTO; Restriction Requirement dated Sep. 25, 2012 in U.S. Appl. No. 12/854,818. cited by applicant . USPTO; Office Action dated Dec. 6, 2012 in U.S. Appl. No. 12/854,818. cited by applicant . USPTO; Final Office Action dated Mar. 13, 2013 in U.S. Appl. No. 12/854,818. cited by applicant . USPTO; Office Action dated Aug. 30, 2013 in U.S. Appl. No. 12/854,818. cited by applicant . USPTO; Final Office Action dated Mar. 26, 2014 in U.S. Appl. No. 12/854,818. cited by applicant . USPTO; Office Action dated Jun. 3, 2014 in U.S. Appl. No. 12/854,818. cited by applicant . USPTO; Non-Final Office Action dated Jul. 11, 2012 in U.S. Appl. No. 12/875,889. cited by applicant . USPTO; Notice of Allowance dated Jan. 4, 2013 in U.S. Appl. No. 12/875,889. cited by applicant . USPTO; Notice of Allowance dated Jan. 9, 2012 in U.S. Appl. No. 12/901,323. cited by applicant . USPTO; Non-Final Office Action dated Nov. 20, 2013 in U.S. Appl. No. 12/910,607. cited by applicant . USPTO; Final Office Action dated Apr. 28, 2014 in U.S. Appl. No. 12/910,607. cited by applicant . USPTO; Notice of Allowance dated Aug. 15, 2014 in U.S. Appl. No. 12/910,607. cited by applicant . USPTO; Non-Final Office Action dated Oct. 24, 2012 in U.S. Appl. No. 12/940,906. cited by applicant . USPTO; Final Office Action dated Feb. 13, 2013 in U.S. Appl. No. 12/940,906. cited by applicant . USPTO; Notice of Allowance dated Apr. 23, 2013 in U.S. Appl. No. 12/940,906. cited by applicant . USPTO; Non-Final Office Action dated Dec. 7, 2012 in U.S. Appl. No. 12/953,870. cited by applicant . USPTO; Final Office Action dated Apr. 22, 2013 in U.S. Appl. No. 12/953,870. cited by applicant . USPTO; Non-Final Office Action dated Sep. 19, 2012 in U.S. Appl. No. 13/016,735. cited by applicant . USPTO; Final Office Action dated Feb. 11, 2013 in U.S. Appl. No. 13/016,735. cited by applicant . USPTO; Notice of Allowance dated Apr. 24, 2013 in U.S. Appl. No. 13/016,735. cited by applicant . USPTO; Non-Final Office Action dated Apr. 4, 2012 in U.S. Appl. No. 13/030,438. cited by applicant . USPTO; Final Office Action dated Aug. 22, 2012 in U.S. Appl. No. 13/030,438. cited by applicant . USPTO; Notice of Allowance dated Oct. 24, 2012 in U.S. Appl. No. 13/030,438. cited by applicant . USPTO; Non-Final Office Action dated Dec. 3, 2012 in U.S. Appl. No. 13/040,013. cited by applicant . USPTO; Notice of Allowance dated May 3, 2013 in U.S. Appl. No. 13/040,013. cited by applicant . USPTO; Notice of Allowance dated Sep. 13, 2012 in U.S. Appl. No. 13/085,698. cited by applicant . USPTO; Non-Final Office Action dated Mar. 29, 2013 in U.S. Appl. No. 13/094,402. cited by applicant . USPTO; Final Office Action dated Jul. 17, 2013 in U.S. Appl. No. 13/094,402. cited by applicant . USPTO; Notice of Allowance dated Sep. 30, 2013 in U.S. Appl. No. 13/094,402. cited by applicant . USPTO; Restriction Requirement dated May 8, 2013 in U.S. Appl. No. 13/102,980. cited by applicant . USPTO; Office Action dated Oct. 7, 2013 in U.S. Appl. No. 13/102,980. cited by applicant . USPTO; Final Office Action dated Mar. 25, 2014 in U.S. Appl. No. 13/102,980. cited by applicant . USPTO; Notice of Allowance dated Jul. 3, 2014 in U.S. Appl. No. 13/102,980. cited by applicant . USPTO; Non-Final Office Action dated Jul. 17, 2014 in U.S. Appl. No. 13/154,271. cited by applicant . USPTO; Final Office Action dated Jan. 2, 2015 in U.S. Appl. No. 13/154,271. cited by applicant . USPTO; Non-Final Office Action dated May 27, 2015 in U.S. Appl. No. 13/154,271. cited by applicant . USPTO; Final Office Action dated Nov. 23, 2015 in U.S. Appl. No. 13/154,271. cited by applicant . USPTO; Notice of Allowance dated Feb. 10, 2016 in U.S. Appl. No. 13/154,271. cited by applicant . USPTO; Non-Final Office Action dated Jun. 27, 2016 in U.S. Appl. No. 13/166,367. cited by applicant . USPTO; Final Office Action dated Dec. 30, 2016 in U.S. Appl. No. 13/166,367. cited by applicant . USPTO; Non-Final Office Action dated Oct. 27, 2014 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Final Office Action dated May 26, 2015 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Non-Final Office Action dated Sep. 1, 2015 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Final Office Action dated Mar. 3, 2016 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Non-Final Office Action dated Jun. 9, 2016 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Final Office Action dated Dec. 9, 2016 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Non-Final Office Action dated Apr. 26, 2017 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Final Office Action dated Nov. 2, 2017 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Non-Final Office Action dated Apr. 6, 2018 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Non-Final Office Action dated Jun. 24, 2014 in U.S. Appl. No. 13/181,407. cited by applicant . USPTO; Final Office Action dated Sep. 24, 2014 in U.S. Appl. No. 13/181,407. cited by applicant . USPTO; Non-Final Office Action dated Jan. 2, 2015 in U.S. Appl. No. 13/181,407. cited by applicant . USPTO; Final Office Action dated Apr. 8, 2015 in U.S. Appl. No. 13/181,407. cited by applicant . USPTO; Non-Final Office Action dated Jan. 23, 2013 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Final Office Action dated Jul. 29, 2013 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Non-Final Office Action dated Jul. 16, 2014 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Final Office Action dated Feb. 17, 2015 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Non-Final Office Action dated Aug. 10, 2015 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Final Office Action dated Feb. 12, 2016 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Non-Final Office Action dated Dec. 15, 2016 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Final Office Action dated Jun. 15, 2017 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Non-Final Office Action dated Sep. 17, 2014 in U.S. Appl. No. 13/187,300. cited by applicant . USPTO; Final Office Action dated Apr. 15, 2015 in U.S. Appl. No. 13/187,300. cited by applicant . USPTO; Non-Final Office Action dated Apr. 7, 2016 in U.S. Appl. No. 13/187,300. cited by applicant . USPTO; Final Office Acton dated Sep. 23, 2016 in U.S. Appl. No. 13/187,300. cited by applicant . USPTO; Non-Final Office Action dated Jan. 30, 2017 in U.S. Appl. No. 13/187,300. cited by applicant . USPTO; Final Office Action dated Aug. 9, 2017 in U.S. Appl. No. 13/187,300. cited by applicant . USPTO; Non-Final Office Action dated Oct. 1, 2012 in U.S. Appl. No. 13/191,762. cited by applicant . USPTO; Final Office Action dated Apr. 10, 2013 in U.S. Appl. No. 13/191,762. cited by applicant . USPTO; Notice of Allowance dated Aug. 15, 2013 in U.S. Appl. No. 13/191,762. cited by applicant . USPTO; Non-Final Office Action dated Oct. 22, 2012 in U.S. Appl. No. 13/238,960. cited by applicant . USPTO; Final Office Action dated May 3, 2013 in U.S. Appl. No. 13/238,960. cited by applicant . USPTO; Non-Final Office Action dated Apr. 26, 2013 in U.S. Appl. No. 13/250,721. cited by applicant . USPTO; Notice of Allowance dated Sep. 11, 2013 in U.S. Appl. No. 13/250,721. cited by applicant . USPTO; Non-Final Office Action dated Jul. 2, 2014 in U.S. Appl. No. 13/283,408. cited by applicant . USPTO; Final Office Action dated Jan. 29, 2015 in U.S. Appl. No. 13/283,408. cited by applicant . USPTO; Non-Final Office Action dated Jun. 17, 2015 in U.S. Appl. No. 13/283,408. cited by applicant . USPTO; Final Office Action dated Dec. 18, 2015 in U.S. Appl. No. 13/283,408. cited by applicant . USPTO; Notice of Allowance dated Mar. 28, 2016 in U.S. Appl. No. 13/283,408. cited by applicant . USPTO; Restriction Requirement dated Dec. 16, 2013 in U.S. Appl. No. 13/284,642. cited by applicant . USPTO; Restriction Requirement dated Apr. 21, 2014 in U.S. Appl. No. 13/284,642. cited by applicant . USPTO; Office Action dated Jul. 30, 2014 in U.S. Appl. No. 13/284,642. cited by applicant . USPTO; Notice of Allowance dated Feb. 11, 2015 in U.S. Appl. No. 13/284,642. cited by applicant . USPTO; Office Action dated Jan. 28, 2014 in U.S. Appl. No. 13/312,591. cited by applicant . USPTO; Final Office Action dated May 14, 2014 in U.S. Appl. No. 13/312,591. cited by applicant . USPTO; Non-Final Office Action dated Nov. 26, 2014 in U.S. Appl. No. 13/312,591. cited by applicant . USPTO; Final Office Action dated Mar. 20, 2015 in U.S. Appl. No. 13/312,591. cited by applicant . USPTO; Notice of Allowance dated May 14, 2015 in U.S. Appl. No. 13/312,591. cited by applicant . USPTO; Non-Final Office Action dated Apr. 9, 2014 in U.S. Appl. No. 13/333,420. cited by applicant . USPTO; Notice of Allowance dated Sep. 15, 2014 in U.S. Appl. No. 13/333,420. cited by applicant . USPTO; Office Action dated Jan. 10, 2013 in U.S. Appl. No. 13/339,609. cited by applicant . USPTO; Office Action dated Feb. 11, 2013 in U.S. Appl. No. 13/339,609. cited by applicant . USPTO; Final Office Action dated May 17, 2013 in U.S. Appl. No. 13/339,609. cited by applicant . USPTO; Office Action dated Aug. 29, 2013 in U.S. Appl. No. 13/339,609. cited by applicant . USPTO; Final Office Action dated Dec. 18, 2013 in U.S. Appl. No. 13/339,609. cited by applicant . USPTO; Notice of Allowance dated Apr. 7, 2014 in U.S. Appl. No. 13/339,609. cited by applicant . USPTO; Non-Final Office Action dated Oct. 10, 2012 in U.S. Appl. No. 13/406,791. cited by applicant . USPTO; Final Office Action dated Jan. 31, 2013 in U.S. Appl. No. 13/406,791. cited by applicant . USPTO; Non-Final Office Action dated Apr. 25, 2013 in U.S. Appl. No. 13/406,791. cited by applicant . USPTO; Final Office Action dated Aug. 23, 2013 in U.S. Appl. No. 13/406,791. cited by applicant . USPTO; Non-Final Office Action dated Dec. 4, 2013 in U.S. Appl. No. 13/406,791. cited by applicant . USPTO; Final Office Action dated Apr. 21, 2014 in U.S. Appl. No. 13/406,791. cited by applicant . USPTO; Non-Final Office Action dated Jan. 14, 2013 in U.S. Appl. No. 13/410,970. cited by applicant . USPTO; Notice of Allowance dated Feb. 14, 2013 in U.S. Appl. No. 13/410,970. cited by applicant . USPTO; Non-Final Office Action dated Feb. 13, 2014 in U.S. Appl. No. 13/411,271. cited by applicant . USPTO; Non-Final Office Action dated Jul. 31, 2014 in U.S. Appl. No. 13/411,271. cited by applicant . USPTO; Final Office Action dated Jan. 16, 2015 in U.S. Appl. No. 13/411,271. cited by applicant . USPTO; Notice of Allowance dated Oct. 6, 2015 in U.S. Appl. No. 13/411,271. cited by applicant . USPTO; Restriction Requirment dated Oct. 29, 2013 in U.S. Appl. No. 13/439,528. cited by applicant . USPTO; Office Action dated Feb. 4, 2014 in U.S. Appl. No. 13/439,528. cited by applicant . USPTO; Final Office Action dated Jul. 8, 2014 in U.S. Appl. No. 13/439,528. cited by applicant . USPTO; Notice of Allowance dated Oct. 21, 2014 in U.S. Appl. No. 13/439,528. cited by applicant . USPTO; Non-Final Office Action dated Apr. 11, 2013 in U.S. Appl. No. 13/450,368. cited by applicant . USPTO; Notice of Allowance dated Jul. 17, 2013 in U.S. Appl. No. 13/450,368. cited by applicant . USPTO; Office Action dated May 23, 2013 in U.S. Appl. No. 13/465,340. cited by applicant . USPTO; Final Office Action dated Oct. 30, 2013 in U.S. Appl. No. 13/465,340. cited by applicant . USPTO; Notice of Allowance dated Feb. 12, 2014 in U.S. Appl. No. 13/465,340. cited by applicant . USPTO; Non-Final Office Action dated Oct. 17, 2013 in U.S. Appl. No. 13/493,897. cited by applicant . USPTO; Notice of Allowance dated Mar. 20, 2014 in U.S. Appl. No. 13/493,897. cited by applicant . USPTO; Office Action dated Dec. 20, 2013 in U.S. Appl. No. 13/535,214. cited by applicant . USPTO; Final Office Action dated Jun. 18, 2014 in U.S. Appl. No. 13/535,214. cited by applicant . USPTO; Notice of Allowance dated Oct. 23, 2014 in U.S. Appl. No. 13/535,214. cited by applicant . USPTO; Non-Final Office Action dated Sep. 11, 2013 in U.S. Appl. No. 13/550,419. cited by applicant . USPTO; Final Office Action dated Jan. 27, 2014 in U.S. Appl. No. 13/550,419. cited by applicant . USPTO; Notice of Allowance dated May 29, 2014 in U.S. Appl. No. 13/550,419. cited by applicant . USPTO; Non-Final Office Action dated Aug. 8, 2014 in U.S. Appl. No. 13/563,066. cited by applicant . USPTO; Final Office Action dated Feb. 12, 2015 in U.S. Appl. No. 13/563,066. cited by applicant . USPTO; Notice of Allowance dated Jun. 12, 2015 in U.S. Appl. No. 13/563,066. cited by applicant . USPTO; Notice of Allowance dated Jul. 16, 2015 in U.S. Appl. No. 13/563,066. cited by applicant . USPTO; Non-Final Office Action dated Nov. 7, 2013 in U.S. Appl. No. 13/565,564. cited by applicant . USPTO; Final Office Action dated Feb. 28, 2014 in U.S. Appl. No. 13/565,564. cited by applicant . USPTO; Non-Final Office Action dated Jul. 2, 2014 in U.S. Appl. No. 13/565,564. cited by applicant . USPTO; Notice of Allowance dated Nov. 3, 2014 in U.S. Appl. No. 13/565,564. cited by applicant . USPTO; Non-Final Office Action dated Aug. 30, 2013 in U.S. Appl. No. 13/570,067. cited by applicant . USPTO; Notice of Allowance dated Jan. 6, 2014 in U.S. Appl. No. 13/570,067. cited by applicant . USPTO; Non-Final Office Action dated Oct. 15, 2014 in U.S. Appl. No. 13/597,043. cited by applicant . USPTO; Final Office Action dated Mar. 13, 2015 in U.S. Appl. No. 13/597,043. cited by applicant . USPTO;; Notice of Allowance dated Aug. 28, 2015 in U.S. Appl. No. 13/597,043. cited by applicant . USPTO; Non-Final Office Action dated Feb. 12, 2015 in U.S. Appl. No. 13/597,108. cited by applicant . USPTO; Final Office Action dated Jun. 1, 2015 in U.S. Appl. No. 13/597,108. cited by applicant . USPTO; Non-Final Office Action dated Dec. 8, 2015 in U.S. Appl. No. 13/597,108. cited by applicant . USPTO; Final Office Action dated Jun. 2, 2016 in U.S. Appl. No. 13/597,108. cited by applicant . USPTO; Non-Final Office Action dated Sep. 15, 2016 in U.S. Appl. No. 13/597,108. cited by applicant . USPTO; Notice of Allowance dated Mar. 27, 2014 in U.S. Appl. No. 13/604,498. cited by applicant . USPTO; Office Action dated Nov. 15, 2013 in U.S. Appl. No. 13/612,538. cited by applicant . USPTO; Office Action dated Jul. 10, 2014 in U.S. Appl. No. 13/612,538. cited by applicant . USPTO; Non-Final Office Action dated Apr. 15, 2015 in U.S. Appl. No. 13/646,403. cited by applicant . USPTO; Final Office Action dated Oct. 15, 2015 in U.S. Appl. No. 13/646,403. cited by applicant . USPTO; Notice of Allowance dated Feb. 2, 2016 in U.S. Appl. No. 13/646,403. cited by applicant . USPTO; Non-Final Office Action dated May 15, 2014 in U.S. Appl. No. 13/646,471. cited by applicant . USPTO; Final Office Action dated Aug. 18, 2014 in U.S. Appl. No. 13/646,471. cited by applicant . USPTO; Non-Final Office Action dated Dec. 16, 2014 in U.S. Appl. No. 13/646,471. cited by applicant . USPTO; Final Office Action dated Apr. 21, 2015 in U.S. Appl. No. 13/646,471. cited by applicant . USPTO; Non-Final Office Action dated Aug. 19, 2015 in U.S. Appl. No. 13/646,471. cited by applicant . USPTO; Final Office Action dated Jan. 22, 2016 in U.S. Appl. No. 13/646,471. cited by applicant . USPTO; Non-Final Office Action dated Jun. 2, 2016 in U.S. Appl. No. 13/646,471. cited by applicant . USPTO; Non-Final Office Action dated May 28, 2015 in U.S. Appl. No. 13/651,144. cited by applicant . USPTO; Final Office Action dated Dec. 14, 2017 in U.S. Appl. No. 13/651,144. cited by applicant . USPTO; Final Office Acton dated Sep. 30, 2016 in Application No. 14/808,979. cited by applicant . USPTO; Final Office Action dated Nov. 19, 2015 in U.S. Appl. No. 13/651,144. cited by applicant . USPTO; Non-Final Office Action dated May 10, 2016 in U.S. Appl. No. 13/651,144. cited by applicant . USPTO; Final Office Action dated Sep. 20, 2016 in U.S. Appl. No. 13/651,144. cited by applicant . USPTO; Non-Final Office Action dated May 17, 2017 in U.S. Appl. No. 13/651,144. cited by applicant . USPTO; Non-Final Office Action dated Dec. 14, 2017 in U.S. Appl. No. 13/651,144. cited by applicant . USPTO; Non-Final Office Action dated Nov. 19, 2015 in U.S. Appl. No. 14/659,437. cited by applicant . USPTO; Final Office Action dated Mar. 17, 2016 in U.S. Appl. No. 14/659,437. cited by applicant . USPTO; Notice of Allowance dated May 31, 2016 in U.S. Appl. No. 14/659,437. cited by applicant . USPTO; Non-Final Office Action dated Jun. 18, 2015 in U.S. Appl. No. 13/665,366. cited by applicant . USPTO; Non-Final Office Action dated Apr. 3, 2015 in U.S. Appl. No. 13/677,133. cited by applicant . USPTO; Notice of Allowance dated Aug. 4, 2015 in U.S. Appl. No. 13/677,133. cited by applicant . USPTO; Office Action dated Jun. 2, 2014 in U.S. Appl. No. 13/677,151. cited by applicant . USPTO; Final Office Action dated Nov. 14, 2014 in U.S. Appl. No. 13/677,151. cited by applicant . USPTO; Notice of Allowance dated Feb. 26, 2015 in U.S. Appl. No. 13/677,151. cited by applicant . USPTO; Non-Final Office Action dated Aug. 20, 2013 in U.S. Appl. No. 13/679,502. cited by applicant . USPTO; Final Office Action dated Feb. 25, 2014 in U.S. Appl. No. 13/679,502. cited by applicant . USPTO; Notice of Allowance dated May 2, 2014 in U.S. Appl. No. 13/679,502. cited by applicant . USPTO; Non-Final Office Action dated Jul. 21, 2015 in U.S. Appl. No. 13/727,324. cited by applicant . USPTO; Final Office Action dated Jan. 22, 2016 in U.S. Appl. No. 13/727,324. cited by applicant . USPTO; Non-Final Office Action dated May 25, 206 in U.S. Appl. No. 13/727,324. cited by applicant . USPTO; Final Office Action dated Dec. 1, 2016 in U.S. Appl. No. 13/727,324. cited by applicant . USPTO; Notice of Allowance dated Mar. 1, 2017 in U.S. Appl. No. 13/727,324. cited by applicant . USPTO; Non-Final Office Action dated Oct. 24, 2013 in U.S. Appl. No. 13/749,878. cited by applicant . USPTO; Non-Final Office Action dated Jun. 18, 2014 in U.S. Appl. No. 13/749,878 cited by applicant . USPTO; Final Office Action dated Dec. 10, 2014 in U.S. Appl. No. 13/749,878. cited by applicant . USPTO; Notice of Allowance Mar. 13, 2015 dated in U.S. Appl. No. 13/749,878. cited by applicant . USPTO; Office Action dated Apr. 23, 2014 in U.S. Appl. No. 13/784,362. cited by applicant . USPTO; Notice of Allowance dated Aug. 13, 2014 in U.S. Appl. No. 13/784,362. cited by applicant . USPTO; Non-Final Office Action dated Dec. 19, 2013 in U.S. Appl. No. 13/784,388. cited by applicant . USPTO; Notice of Allowance dated Jun. 4, 2014 in U.S. Appl. No. 13/784,388. cited by applicant . USPTO; Restriction Requirement dated May 8, 2014 in U.S. Appl. No. 13/791,246. cited by applicant . USPTO; Non-Final Office Action dated Sep. 19, 2014 in U.S. Appl. No. 13/791,246. cited by applicant . USPTO; Final Office Action dated Mar. 25, 2015 in U.S. Appl. No. 13/791,246. cited by applicant . USPTO; Non-Final Office Action dated Oct. 26, 2015 in U.S. Appl. No. 13/791,246. cited by applicant . USPTO; Final Office Action dated Apr. 20, 2016 in U.S. Appl. No. 13/791,246. cited by applicant . USPTO; Non-Final Office Action dated Aug. 11, 2016 in U.S. Appl. No. 13/791,246. cited by applicant . USPTO; Notice of Allowance dated Nov. 25, 2016 in U.S. Appl. No. 13/791,246. cited by applicant . USPTO; Non-Final Office Action dated Nov. 6, 2015 in U.S. Appl. No. 13/791,339. cited by applicant . USPTO; Final Office Action dated Apr. 12, 2016 in U.S. Appl. No. 13/791,339. cited by applicant . USPTO; Notice of Allowance dated Aug. 24, 2016 in U.S. Appl. No. 13/791,339. cited by applicant . USPTO; Non-Final Office Action dated Mar. 21, 2014 in U.S. Appl. No. 13/799,708. cited by applicant . USPTO; Notice of Allowance dated Oct. 31, 2014 in U.S. Appl. No. 13/799,708. cited by applicant . USPTO; Non-Final Office Action dated Sep. 1, 2016 in U.S. Appl. No. 14/827,177. cited by applicant . USPTO; Restriction Requirement dated Jun. 26, 2014 in U.S. Appl. No. 13/874,708. cited by applicant . USPTO; Non-Final Office Action dated Oct. 9, 2014 in U.S. Appl. No. 13/874,708. cited by applicant . USPTO; Notice of Allowance dated Mar. 10, 2015 in U.S. Appl. No. 13/874,708. cited by applicant . USPTO; Notice of Allowance dated Apr. 10, 2014 in U.S. Appl. No. 13/901,341. cited by applicant . USPTO; Notice of Allowance dated Jun. 6, 2014 in U.S. Appl. No. 13/901,341. cited by applicant . USPTO; Non-Final Office Action dated Jan. 2, 2015 in U.S. Appl. No. 13/901,372. cited by applicant . USPTO; Final Office Action dated Apr. 16, 2015 in U.S. Appl. No. 13/901,372. cited by applicant . USPTO; Non-Final Office Action dated Jul. 8, 2015 in U.S. Appl. No. 13/901,400. cited by applicant . USPTO; Final Office Action dated Jan. 14, 2016 in U.S. Appl. No. 13/901,400. cited by applicant . USPTO; Notice of Allowance dated Apr. 12, 2016 in U.S. Appl. No. 13/901,400. cited by applicant . USPTO; Notice of Allowance dated Aug. 5, 2015 in U.S. Appl. No. 13/901,372. cited by applicant . USPTO; Non-Final Office Action dated Apr. 24, 2014 in U.S. Appl. No. 13/912,666. cited by applicant . USPTO; Final Office Action dated Sep. 25, 2014 in U.S. Appl. No. 13/912,666. cited by applicant . USPTO; Non-Final Office Action dated Jan. 26, 2015 in U.S. Appl. No. 13/912,666. cited by applicant . USPTO; Notice of Allowance dated Jun. 25, 2015 in U.S. Appl. No. 13/912,666. cited by applicant . USPTO; Non-Final Office Action dated Dec. 16, 2014 in U.S. Appl. No. 13/915,732. cited by applicant . USPTO; Final Office Action dated Apr. 10, 2015 in U.S. Appl. No. 13/915,732. cited by applicant . USPTO; Notice of Allowance dated Jun. 19, 2015 in U.S. Appl. No. 13/915,732. cited by applicant . USPTO; Notice of Allowance dated Mar. 17, 2015 in U.S. Appl. No. 13/923,197. cited by applicant . USPTO; Non-Final Office Action dated Sep. 12, 2014 in U.S. Appl. No. 13/941,134. cited by applicant . USPTO; Notice of Allowance dated Jan. 20, 2015 in U.S. Appl. No. 13/941,134. cited by applicant . USPTO; Restriction Requirement dated Apr. 30, 2015 in U.S. Appl. No. 13/941,216. cited by applicant . USPTO; Non-Final Office Action dated Jul. 30, 2015 in U.S. Appl. No. 13/941,216. cited by applicant . USPTO; Non-Final Office Action dated Jun. 15, 2016 in U.S. Appl. No. 13/941,216. cited by applicant . USPTO; Notice of Allowance dated Sep. 13, 2016 in U.S. Appl. No. 13/941,216. cited by applicant . USPTO; Restriction Requirement dated Sep. 16, 2014 in U.S. Appl. No. 13/948,055. cited by applicant . USPTO; Non-Final Office Action dated Oct. 30, 2014 in U.S. Appl. No. 13/948,055. cited by applicant . USPTO; Non-Final Office Action dated Jun. 29, 2015 in U.S. Appl. No. 13/966,782. cited by applicant . USPTO; Final Office Action dated Jan. 4, 2016 in U.S. Appl. No. 13/966,782. cited by applicant . USPTO; Notice of Allowance dated Oct. 7, 2015 in U.S. Appl. No. 13/973,777. cited by applicant . USPTO; Non-Final Office Action dated Feb. 20, 2015 in U.S. Appl. No. 14/018,231. cited by applicant . USPTO; Notice of Allowance dated Jul. 20, 2015 in U.S. Appl. No. 14/018,231. cited by applicant . USPTO; Restriction Requirement Action dated Jan. 28, 2015 in U.S. Appl. No. 14/018,345. cited by applicant . USPTO; Non-Final Office Action dated Apr. 7, 2015 in U.S. Appl. No. 14/018,345. cited by applicant . USPTO; Final Office Action dated Sep. 14, 2015 in U.S. Appl. No. 14/018,345. cited by applicant . USPTO; Notice of Allowance dated Jan. 14, 2016 in U.S. Appl. No. 14/018,345. cited by applicant . USPTO; Notice of Allowance dated Mar. 17, 2016 in U.S. Appl. No. 14/018,345. cited by applicant . USPTO; Non-Final Office Action dated Mar. 26, 2015 in U.S. Appl. No. 14/031,982. cited by applicant . USPTO; Final Office Action dated Aug. 28, 2015 in U.S. Appl. No. 14/031,982. cited by applicant . USPTO; Notice of Allowance dated Nov. 17, 2015 in U.S. Appl. No. 14/031,982. cited by applicant . USPTO; Non-Final Office Action dated Apr. 28, 2015 in U.S. Appl. No. 14/040,196. cited by applicant . USPTO; Notice of Allowance dated Sep. 11, 2015 in U.S. Appl. No. 14/040,196. cited by applicant . USPTO; Non-Final Action dated Dec. 3, 2015 in U.S. Appl. No. 14/050,150. cited by applicant . USPTO; Final Office Action dated Jun. 15, 2016 in U.S. Appl. No. 14/050,150. cited by applicant . USPTO; Final Office Action dated Jul. 8, 2016 in U.S. Appl. No. 14/050,150. cited by applicant . USPTO; Notice of Allowance dated Oct. 20, 2016 in U.S. Appl. No. 14/050,150. cited by applicant . USPTO; Non-Final Office Action dated Dec. 15, 2014 in U.S. Appl. No. 14/065,114. cited by applicant . USPTO; Final Office Action dated Jun. 19, 2015 in U.S. Appl. No. 14/065,114. cited by applicant . USPTO; Non-Final Office Action dated Oct. 7, 2015 in U.S. Appl. No. 14/065,114. cited by applicant . USPTO; Notice of Allowance dated Feb. 22, 2016 in U.S. Appl. No. 14/065,114. cited by applicant . USPTO; Non-Final Office Action dated Nov. 14, 2014 in U.S. Appl. No. 14/069,244. cited by applicant . USPTO; Notice of Allowance dated Mar. 25, 2015 in U.S. Appl. No. 14/069,244. cited by applicant . USPTO; Non-Final Office Action dated Mar. 19, 2015 in U.S. Appl. No. 14/079,302. cited by applicant . USPTO; Final Office Action dated Sep. 1, 2015 in U.S. Appl. No. 14/079,302. cited by applicant . USPTO; Non-Final Office Action dated Apr. 27, 2016 in U.S. Appl. No. 14/079,302. cited by applicant . USPTO; Final Office Action dated Aug. 22, 2016 in U.S. Appl. No. 14/079,302. cited by applicant . USPTO; Notice of Allowance dated Dec. 14, 2016 in U.S. Appl. No. 14/079,302. cited by applicant . USPTO; Non-Final Office Action dated Jun. 14, 2016 in U.S. Appl. No. 14/090,750. cited by applicant . USPTO; Final Office Action dated Sep. 28, 2016 in U.S. Appl. No. 14/090,750. cited by applicant . USPTO; Non Final Office Action dated Jun. 23, 2017 in U.S. Appl. No. 14/090,750. cited by applicant . USPTO; Final Office Action dated Nov. 17, 2017 in U.S. Appl. No. 14/090,750. cited by applicant . USPTO; Non-Final Office Action dated Mar. 12, 2018 in U.S. Appl. No. 14/090,750. cited by applicant . USPTO; Non-Final Office Action dated Mar. 19, 2015 in U.S. Appl. No. 14/166,462. cited by applicant . USPTO; Notice of Allowance dated Sep. 3, 2015 in U.S. Appl. No. 14/166,462. cited by applicant . USPTO; Non-Final Office Action dated Nov. 17, 2015 in U.S. Appl. No. 14/172,220. cited by applicant . USPTO; Office Action dated May 29, 2014 in U.S. Appl. No. 14/183,187. cited by applicant . USPTO; Final Office Action dated Nov. 7, 2014 in U.S. Appl. No. 14/183,187. cited by applicant . USPTO; Non-Final Office Action dated Mar. 16, 2015 in U.S. Appl. No. 14/183,187. cited by applicant . USPTO; Final Office Action dated Jul. 10, 2015 in U.S. Appl. No. 14/183,187. cited by applicant . USPTO; Non-Final Office Action dated Jan. 11, 2016 in U.S. Appl. No. 14/188,760. cited by applicant . USPTO; Final Office Action dated Aug. 25, 2016 in U.S. Appl. No. 14/188,760. cited by applicant . USPTO; Non-Final Office Action dated Mar. 23, 2017 in U.S. Appl. No. 14/188,760. cited by applicant . USPTO; Final Office Action dated Oct. 5, 2017 in U.S. Appl. No. 14/188,760. cited by applicant . USPTO; Non-Final Office Action dated Apr. 18, 2018 in U.S. Appl. No. 14/188,760. cited by applicant . USPTO; Non-Final Office Action dated Oct. 8, 2015 in U.S. Appl. No. 14/218,374. cited by applicant . USPTO; Final Office Action dated Feb. 23, 2016 in U.S. Appl. No. 14/218,374. cited by applicant . USPTO; Restriction Requirement dated May 20, 2016 in U.S. Appl. No. 14/218,690. cited by applicant . USPTO; Non-Final Office Action dated Jul. 15, 2016 in U.S. Appl. No. 14/218,690. cited by applicant . USPTO; Final Office Action dated Nov. 14, 2016 in U.S. Appl. No. 14/218,690. cited by applicant . USPTO; Non-Final Office Action dated Apr. 6, 2017 in U.S. Appl. No. 14/218,690. cited by applicant . USPTO; Final Office Action dated Jul. 20, 2017 in U.S. Appl. No. 14/218,690. cited by applicant . USPTO; Non-Final Office Action dated Jan. 11, 2018 in U.S. Appl. No. 14/218,690. cited by applicant . USPTO; Final Office Action dated May 24, 2018 in U.S. Appl. No. 14/218,690. cited by applicant . USPTO; Non-Final Office Action dated Sep. 22, 2015 in U.S. Appl. No. 14/219,839. cited by applicant . USPTO; Final Office Action dated Mar. 25, 2016 in U.S. Appl. No. 14/219,839. cited by applicant . USPTO; Non-Final Office Action dated Dec. 22, 2016 in U.S. Appl. No. 14/219,839. cited by applicant . USPTO; Final Office Action dated Jul. 6, 2017 in U.S. Appl. No. 14/219,839. cited by applicant . USPTO; Non-Final Office Action dated Mar. 27, 2018 in U.S. Appl. No. 14/219,839. cited by applicant . USPTO; Non-Final Office Action dated Nov. 25, 2015 in U.S. Appl. No. 14/219,879. cited by applicant . USPTO; Non-Final Office Action dated Dec. 23, 2016 in U.S. Appl. No. 14/219,879. cited by applicant . USPTO; Advisory Action dated Oct. 5, 2017 in U.S. Appl. No. 14/219,879. cited by applicant . USPTO; Non-Final Office Action dated Apr. 6, 2018 in U.S. Appl. No. 14/219,879. cited by applicant . USPTO; Non-Final Office Action dated Sep. 18, 2015 in U.S. Appl. No. 14/244,689. cited by applicant . USPTO; Notice of Allowance dated Feb. 11, 2016 in U.S. Appl. No. 14/244,689. cited by applicant . USPTO; Non-Final Office Action dated Oct. 7, 2015 in U.S. Appl. No. 14/246,969. cited by applicant . USPTO; Final Office Action dated May 4, 2016 in U.S. Appl. No. 14/246,969. cited by applicant . USPTO; Non Final Office Action dated Aug. 12, 2016 in U.S. Appl. No. 14/246,969. cited by applicant . USPTO; Non-Final Office Action dated Nov. 20, 2015 in U.S. Appl. No. 14/260,701. cited by applicant . USPTO; Notice of Allowance dated Jun. 2, 2016 in U.S. Appl. No. 14/260,701. cited by applicant . USPTO; Notice of Allowance dated Feb. 23, 2016 in U.S. Appl. No. 14/327,134. cited by applicant . USPTO; Non-Final Office Action dated Aug. 19, 2015 in U.S. Appl. No. 14/268,348. cited by applicant . USPTO; Non-Final Office Action dated Jan. 6, 2016 in U.S. Appl. No. 14/268,348. cited by applicant . USPTO; Final Office Action dated Apr. 29, 2016 in U.S. Appl. No. 14/268,348. cited by applicant . USPTO; Non-Final Office Action dated Oct. 20, 2015 in U.S. Appl. No. 14/281,477. cited by applicant . USPTO; Non-Final Office Action dated Jan. 13, 2017 in U.S. Appl. No. 14/444,744. cited by applicant . USPTO; Final Office Action dated Jul. 10, 2017 in U.S. Appl. No. 14/444,744. cited by applicant . USPTO; Non-Final Office Action dated Nov. 29, 2017 in U.S. Appl. No. 14/444,744. cited by applicant . USPTO; Final Office Action dated Mar. 28, 2018 in U.S. Appl. No. 14/444,744. cited by applicant . USPTO; Non-Final Office Action dated May 18, 2016 in U.S. Appl. No. 14/449,838. cited by applicant . USPTO; Non-Final Office Action dated Feb. 12, 2015 in U.S. Appl. No. 14/457,058. cited by applicant . USPTO; Final Office Action dated Jul. 14, 2015 in U.S. Appl. No. 14/457,058. cited by applicant . USPTO; Non-Final Office Action dated Nov. 6, 2015 in U.S. Appl. No. 14/457,058. cited by applicant . USPTO; Final Office Acton dated Jun. 17, 2016 in U.S. Appl. No. 14/457,058. cited by applicant . USPTO; Non-Final Office Action dated Oct. 6, 2016 in U.S. Appl. No. 14/457,058. cited by applicant . USPTO; Final Office Acton dated May 4, 2017 in U.S. Appl. No. 14/457,058. cited by applicant . USPTO; Non-Final Office Action dated Oct. 19, 2017 in U.S. Appl. No. 14/457,058. cited by applicant . USPTO; Non-Final Office Action dated Sep. 16, 2016 in U.S. Appl. No. 14/465,252. cited by applicant . USPTO; Final Office Action dated Nov. 1, 2016 in U.S. Appl. No. 14/465,252. cited by applicant . USPTO; Non-Final Office Action dated Mar. 6, 2017 in U.S. Appl. No. 14/465,252. cited by applicant . USPTO; Final Office Action dated Jun. 9, 2017 in U.S. Appl. No. 14/465,252. cited by applicant . USPTO; Notice of Allowance dated Oct. 3, 2017 in U.S. Appl. No. 14/465,252. cited by applicant . USPTO; Non-Final Office Action dated May 31, 2018 in U.S. Appl. No. 15/491,726. cited by applicant . USPTO; Non-Final Office Action dated Nov. 24, 2015 in U.S. Appl. No. 14/498,036. cited by applicant . USPTO; Final Office Action dated Apr. 5, 2016 in U.S. Appl. No. 14/498,036. cited by applicant . USPTO; Non-Final Office Action dated Apr. 10, 2015 in U.S. Appl. No. 14/505,290. cited by applicant . USPTO; Notice of Allowance dated Aug. 21, 2015 in U.S. Appl. No. 14/505,290. cited by applicant . USPTO; Non-Final Office Action dated Dec. 17, 2015 in U.S. Appl. No. 14/508,296. cited by applicant . USPTO; Final Office Action dated May 26, 2016 in U.S. Appl. No. 14/508,296. cited by applicant . USPTO; Non-Final Office Action dated Sep. 8, 2016 in U.S. Appl. No. 14/508,296. cited by applicant . USPTO; Final Office Action dated Dec. 7, 2016 in U.S. Appl. No. 14/508,296. cited by applicant . USPTO; Restriction for Requirement dated Dec. 30, 2016 in U.S. Appl. No. 14/508,489. cited by applicant . USPTO; Non-Final Office Action dated Apr. 6, 2017 in U.S. Appl. No. 14/508,489. cited by applicant . USPTO; Final Office Action dated Oct. 4, 2017 in U.S. Appl. No. 14/508,489. cited by applicant . USPTO; Non-Final Office Action dated May 5, 2018 in U.S. Appl. No. 14/508,489. cited by applicant . USPTO; Non-Final Office Action dated Jan. 16, 2015 in U.S. Appl. No. 14/563,044. cited by applicant . USPTO; Final Office Action dated Jul. 16, 2015 in U.S. Appl. No. 14/563,044. cited by applicant . USPTO; Notice of Allowance dated Oct. 15, 2015 in U.S. Appl. No. 14/563,044. cited by applicant . USPTO; Notice of Allowance dated Dec. 2, 2015 in U.S. Appl. No. 14/563,044. cited by applicant . USPTO; Non-Final Office Action dated May 4, 2016 in U.S. Appl. No. 14/568,647. cited by applicant . USPTO; Final Office Action dated Sep. 29, 2016 in U.S. Appl. No. 14/568,647. cited by applicant . USPTO; Non-Final Office Action dated Feb. 2, 2017 in U.S. Appl. No. 14/568,647. cited by applicant . USPTO; Final Office Action dated May 19, 2017 in U.S. Appl. No. 14/568,647. cited by applicant . USPTO; Non-Final Office Action dated Sep. 14, 2017 in U.S. Appl. No. 14/568,647. cited by applicant . USPTO; Final Office Action dated Jan. 23, 2018 in U.S. Appl. No. 14/568,647. cited by applicant . USPTO; Non-Final Office Action dated May 25, 2018 in U.S. Appl. No. 14/568,647. cited by applicant . USPTO; Non-Final Office Action dated Oct. 1, 2015 in U.S. Appl. No. 14/571,126. cited by applicant . USPTO; Final Office Action dated Feb. 22, 2016 in U.S. Appl. No. 14/571,126. cited by applicant . USPTO; Notice of Allowance dated Jun. 2, 2016 in U.S. Appl. No. 14/571,126. cited by applicant . USPTO; Non-Final Office Action dated Nov. 25, 2015 in U.S. Appl. No. 14/598,532. cited by applicant . USPTO; Notice of Allowance dated May 16, 2016 in U.S. Appl. No. 14/598,532. cited by applicant . USPTO; Non-Final Office Action dated Jan. 15, 2016 in U.S. Appl. No. 14/606,364. cited by applicant . USPTO; Final Office Action dated Jan. 12, 2017 in U.S. Appl. No. 14/606,364. cited by applicant . USPTO; Non-Final Office Action dated May 10, 2017 in U.S. Appl. No. 14/606,364. cited by applicant . USPTO; Non-Final Office Action dated Mar. 3, 2016 in U.S. Appl. No. 14/622,603. cited by applicant . USPTO; Non-Final Office Action dated Oct. 19, 2017 in U.S. Appl. No. 14/645,234. cited by applicant . USPTO; Non-Final Office Action dated May 16, 2018 in U.S. Appl. No. 14/645,234. cited by applicant . USPTO; Non-Final Office Action dated Jun. 7, 2017 in U.S. Appl. No. 14/656,588. cited by applicant . USPTO; Final Office Action dated Dec. 26, 2017 in U.S. Appl. No. 14/656,588. cited by applicant . USPTO; Non-Final Office Action dated Apr. 6, 2018 in U.S. Appl. No. 14/656,588. cited by applicant . USPTO; Non-Final Office Action dated Mar. 21, 2016 in U.S. Appl. No. 14/659,152. cited by applicant . USPTO; Final Office Action dated Jul. 29, 2016 in U.S. Appl. No. 14/659,152. cited by applicant . USPTO; Notice of Allowance dated Nov. 22, 2016 in U.S. Appl. No. 14/659,152. cited by applicant . USPTO; Non-Final Office Action dated Sep. 7, 2017 in U.S. Appl. No. 14/660,755. cited by applicant . USPTO; Restriction Requirement dated Sep. 11, 2017 in U.S. Appl. No. 14/660,755. cited by applicant . USPTO; Notice of Allowance dated Oct. 2, 2017 in U.S. Appl. No. 14/660,755. cited by applicant . USPTO; Notice of Allowance dated Mar. 25, 2016 in U.S. Appl. No. 14/693,138. cited by applicant . USPTO; Requirement for Restriction dated Jul. 5, 2017 in U.S. Appl. No. 14/752,712. cited by applicant . USPTO; Non-Final Office Action dated Aug. 3, 2017 in U.S. Appl. No. 14/752,712. cited by applicant . USPTO; Final Office Action dated Nov. 29, 2017 in U.S. Appl. No. 14/752,712. cited by applicant . USPTO; Advisory Action dated Feb. 15, 2018 in U.S. Appl. No. 14/752,712. cited by applicant . USPTO; Non-Final Office Action dated Mar. 21, 2018 in U.S. Appl. No. 14/752,712. cited by applicant . USPTO; Non-Final Office Action dated Nov. 29, 2017 in U.S. Appl. No. 14/793,323. cited by applicant . USPTO; Final Office Action dated Mar. 29, 2018 in U.S. Appl. No. 14/793,323. cited by applicant . USPTO; Non-Final Office Action dated Jun. 16, 2017 in U.S. Appl. No. 14/798,136. cited by applicant . USPTO; Notice of Allowance dated Oct. 5, 2017 in U.S. Appl. No. 14/798,136. cited by applicant . USPTO; Non-Final Office Action dated Mar. 30, 2016 in U.S. Appl. No. 14/808,979. cited by applicant . USPTO; Final Office Acton dated Sep. 30, 2016 in U.S. Appl. No. 14/808,979. cited by applicant . USPTO; Non-Final Office Action dated Dec. 20, 2016 in U.S. Appl. No. 14/808,979. cited by applicant . USPTO; Final Office Action dated Jun. 8, 2017 in U.S. Appl. No. 14/808,979. cited by applicant . USPTO; Non-Final Office Action dated Sep. 21, 2017 in U.S. Appl. No. 14/808,979. cited by applicant . USPTO; Final Office Action dated Mar. 14, 2018 in U.S. Appl. No. 14/808,979. cited by applicant . USPTO; Non-Final Office Action dated Feb. 23, 2018 in U.S. Appl. No. 14/817,953. cited by applicant . USPTO; Non-Final Office Action dated Sep. 9, 2016 in U.S. Appl. No. 14/829,565. cited by applicant . USPTO; Final Office Action dated Feb. 9, 2017 in U.S. Appl. No. 14/829,565. cited by applicant . USPTO; Non-Final Office Action dated Sep. 19, 2017 in U.S. Appl. No. 14/829,565. cited by applicant . USPTO; Final Office Action dated Mar. 5, 2018 in U.S. Appl. No. 14/829,565. cited by applicant . USPTO; Non-Final Office Action dated Apr. 29, 2016 in U.S. Appl. No. 14/835,637. cited by applicant . USPTO; Final Office Action dated Nov. 25, 2016 in U.S. Appl. No. 14/835,637. cited by applicant . USPTO; Non-Final Office Action dated Jul. 29, 2016 in U.S. Appl. No. 14/884,695. cited by applicant . USPTO; Non-Final Office Action dated May 18, 2017 in U.S. Appl. No. 14/886,571. cited by applicant . USPTO; Non-Final Office Action dated Dec. 1, 2016 in U.S. Appl. No. 14/919,536. cited by applicant . USPTO; Final Office Action dated Mar. 28, 2017 in U.S. Appl. No. 14/919,536. cited by applicant . USPTO; Non-Final Office Action dated Aug. 29, 2017 in U.S. Appl. No. 14/919,536. cited by applicant . USPTO; Final Office Action dated May 11, 2018 in U.S. Appl. No. 14/919,536. cited by applicant . USPTO; Non-Final Office Action dated Dec. 15, 2016 in U.S. Appl. No. 14/938,180. cited by applicant . USPTO; Notice of Allowance dated Nov. 9, 2017 in U.S. Appl. No. 14/938,180. cited by applicant . USPTO; Non-Final Office Action dated Apr. 14, 2017 in U.S. Appl. No. 14/956,115. cited by applicant . USPTO; Final Office Action dated Jul. 21, 2017 in U.S. Appl. No. 14/956,115. cited by applicant . USPTO; Notice of Allowance dated Dec. 14, 2017 in U.S. Appl. No. 14/956,115. cited by applicant . USPTO; Notice of Allowance dated Feb. 3, 2017 in U.S. Appl. No. 14/977,291. cited by applicant . USPTO; Non-Final Office Action dated Aug. 12, 2016 in U.S. Appl. No. 14/981,434. cited by applicant . USPTO; Non-Final Office Action dated Jan. 12, 2017 in U.S. Appl. No. 14/981,468. cited by applicant . USPTO; Non-Final Office Action dated Mar. 22, 2016 in U.S. Appl. No. 14/987,420. cited by applicant . USPTO; Non-Final Office Action dated Dec. 14, 2016 in U.S. Appl. No. 14/997,683. cited by applicant . USPTO; Final Office Action dated Apr. 14, 2017 in U.S. Appl. No. 14/997,683. cited by applicant . USPTO; Non-Final Office Action dated Sep. 1, 2017 in U.S. Appl. No. 14/997,683. cited by applicant . USPTO; Final Office Action dated Feb. 6, 2018 in U.S. Appl. No. 14/997,683. cited by applicant . USPTO; Advisory Action dated May 2, 2018 in U.S. Appl. No. 14/997,683. cited by applicant . USPTO; Non-Final Office Action dated Sep. 23, 2016 in U.S. Appl. No. 15/048,422. cited by applicant . USPTO; Notice of Allowance dated May 4, 2017 in U.S. Appl. No. 15/048,422. cited by applicant . USPTO; Requirement for Restriction dated Apr. 19, 2017 in U.S. Appl. No. 15/050,159. cited by applicant . USPTO; Non-Final Office Action dated Aug. 4, 2017 in U.S. Appl. No. 15/050,159. cited by applicant . USPTO; Notice of Allowance dated Feb. 7, 2018 in U.S. Appl. No. 15/050,159. cited by applicant . USPTO; Non-Final Office Action dated Feb. 20, 2018 in U.S. Appl. No. 15/060,412. cited by applicant . USPTO; Requirement for Restriction dated Jun. 4, 2018 in U.S. Appl. No. 15/067,028. cited by applicant . USPTO; Non-Final Office Action dated Jan. 9, 2018 in U.S. Appl. No. 15/135,224. cited by applicant . USPTO; Non-Final Office Action dated Jan. 9, 2018 in U.S. Appl. No. 15/135,258. cited by applicant . USPTO; Non-Final Office Action dated Jan. 9, 2018 in U.S. Appl. No. 15/135,333. cited by applicant . USPTO; Non Final Office Action dated Nov. 21, 2016 in U.S. Appl. No. 15/144,481. cited by applicant . USPTO; Final Office Action dated May 26, 2017 in U.S. Appl. No. 15/144,481. cited by applicant . USPTO; Non-Final Office Action dated Sep. 21, 2017 in U.S. Appl. No. 15/144,481. cited by applicant . USPTO; Notice of Allowance dated Apr. 11, 2018 in U.S. Appl. No. 15/144,481. cited by applicant . USPTO; Non-Final Office Action dated Apr. 13, 2017 in U.S. Appl. No. 15/144,506. cited by applicant . USPTO; Final Office Action dated Oct. 10, 2017 in U.S. Appl. No. 15/144,506. cited by applicant . USPTO; Non-Final Office Action dated Nov. 28, 2016 in U.S. Appl. No. 15/203,632. cited by applicant . USPTO; Final Office Action dated Jun. 7, 2017 in U.S. Appl. No. 15/203,632. cited by applicant . USPTO; Notice of Allowance dated Sep. 20, 2017 in U.S. Appl. No. 15/203,632. cited by applicant . USPTO; Non-Final Office Action dated Nov. 29, 2016 in U.S. Appl. No. 15/203,642. cited by applicant . USPTO; Final Office Action dated Apr. 13, 2017 in U.S. Appl. No. 15/203,642. cited by applicant . USPTO; Advisory Action dated Jun. 22, 2017 in U.S. Appl. No. 15/203,642. cited by applicant . USPTO; Notice of Allowance dated Aug. 7, 2017 in U.S. Appl. No. 15/203,642. cited by applicant . USPTO; Non-Final Office Action dated Jun. 1, 2017 in U.S. Appl. No. 15/205,827. cited by applicant . USPTO; Final Office Action dated Oct. 16, 2017 in U.S. Appl. No. 15/205,827. cited by applicant . USPTO; Non-Final Office Action dated May 14, 2018 in U.S. Appl. No. 15/205,827. cited by applicant . USPTO; Non-Final Office Action dated Mar. 31, 2017 in U.S. Appl. No. 15/205,890. cited by applicant . USPTO; Notice of Allowance dated Oct. 16, 2017 in U.S. Appl. No. 15/205,890. cited by applicant . USPTO; Non-Final Office Action dated Jan. 20, 2017 in U.S. Appl. No. 15/210,256. cited by applicant . USPTO; Notice of Allowance dated May 18, 2017 in U.S. Appl. No. 15/210,256. cited by applicant . USPTO; Notice of Allowance dated Jul. 24, 2017 in U.S. Appl. No. 15/210,256. cited by applicant . USPTO; Non Final Office Action dated Apr. 21, 2017 in U.S. Appl. No. 15/222,715. cited by applicant . USPTO; Non-Final Office Action dated Feb. 3, 2017 in U.S. Appl. No. 15/222,738. cited by applicant . USPTO; Non-Final Office Action dated Jan. 17, 2017 in U.S. Appl. No. 15/222,749. cited by applicant . USPTO; Final Office Action dated May 5, 2017 in U.S. Appl. No. 15/222,749. cited by applicant . USPTO; Non-Final Office Action dated Sep. 7, 2017 in U.S. Appl. No. 15/222,749. cited by applicant . USPTO: Final Office Action dated Jun. 4, 2018 in U.S. Appl. No. 15/222,749. cited by applicant . USPTO; Non-Final Office Action dated Jan. 3, 2017 in U.S. Appl. No. 15/222,780. cited by applicant . USPTO; Final Office Action dated May 5, 2017 in U.S. Appl. No. 15/222,780. cited by applicant . USPTO; Non-Final Office Action dated Sep. 7, 2017 in U.S. Appl. No. 15/222,780. cited by applicant . USPTO; Final Office Action dated May 17, 2018 in U.S. Appl. No. 15/222,780. cited by applicant . USPTO; Non-Final Office Action dated Aug. 28, 2017 in U.S. Appl. No. 15/254,724. cited by applicant . USPTO; Notice of Allowance dated Jan. 17, 2018 in U.S. Appl. No. 15/254,724. cited by applicant . USPTO; Non-Final Office Action dated May 22, 2018 in U.S. Appl. No. 15/262,990. cited by applicant . USPTO; Non-Final Office Action dated Oct. 23, 2017 in U.S. Appl. No. 15/377,439. cited by applicant . USPTO; Final Office Action dated Apr. 16, 2018 in U.S. Appl. No. 15/377,439. cited by applicant . USPTO; Notice of Allowance dated Aug. 8, 2017 in U.S. Appl. No. 15/380,395. cited by applicant . USPTO; Non-Final Office Action dated Jan. 4, 2018 in U.S. Appl. No. 15/380,921. cited by applicant . USPTO; Non-Final Office Action dated Aug. 11, 2017 in U.S. Appl. No. 15/397,237. cited by applicant . USPTO; Non-Final Office Action dated Apr. 12, 2017 in U.S. Appl. No. 15/397,319. cited by applicant . USPTO; Final Office Action dated Jul. 12, 2017 in U.S. Appl. No. 15/397,319. cited by applicant . USPTO; Notice of Allowance dated Dec. 15, 2017 in U.S. Appl. No. 15/397,319. cited by applicant . USPTO; Non-Final Office Action dated Apr. 6, 2018 in U.S. Appl. No. 15/434,051. cited by applicant . USPTO; Notice of Allowance dated Oct. 6, 2017 in U.S. Appl. No. 15/450,199. cited by applicant . USPTO; Non-Final Office Action dated Dec. 15, 2017 in U.S. Appl. No. 15/466,149. cited by applicant . USPTO; Non-Final Office Action dated Dec. 6, 2017 in U.S. Appl. No. 15/476,035. cited by applicant . USPTO; Non-Final Office Action dated Oct. 4, 2017 in U.S. Appl. No. 15/489,453. cited by applicant . USPTO; Final Office Action dated Apr. 19, 2018 in U.S. Appl. No. 15/489,453. cited by applicant . USPTO; Non-Final Office Action dated Jan. 16, 2018 in U.S. Appl. No. 15/499,647. cited by applicant . USPTO; Non-Final Office Action dated May 3, 2018 in U.S. Appl. No. 15/589,861. cited by applicant . USPTO; Non-Final Office Action dated Apr. 4, 2018 in U.S. Appl. No. 15/592,730. cited by applicant . USPTO; Non-Final Office Action dated Apr. 25, 2018 in U.S. Appl. No. 15/673,278. cited by applicant . USPTO; Non-Final Office Action dated Jan. 18, 2018 in U.S. Appl. No. 15/683,701. cited by applicant . USPTO; Requirement for Restriction dated May 11, 2018 in U.S. Appl. No. 15/711,989. cited by applicant . USPTO; Non-Final Office Action dated Jun. 14, 2018 in U.S. Appl. No. 15/711,989. cited by applicant . USPTO; Non-Final Office Action dated May 29, 2018 in U.S. Appl. No. 15/719,208. cited by applicant . USPTO; Non-Final Office Action dated Apr. 19, 2018 in U.S. Appl. No. 15/726,959. cited by applicant . USPTO; Non-Final Office Action dated Dec. 26, 2017 in U.S. Appl. No. 15/798,120. cited by applicant . USPTO; Requirement for Restriction dated Apr. 6, 2018 in U.S. Appl. No. 15/798,201. cited by applicant . USPTO; Non-Final Office Action dated Mar. 16, 2015 in U.S. Appl. No. 29/447,298. cited by applicant . USPTO; Notice of Allowance dated Jul. 6, 2015 in U.S. Appl. No. 29/447,298. cited by applicant . USPTO; Notice of Allowance dated Nov. 26, 2014 in U.S. Appl. No. 29/481,301. cited by applicant . USPTO; Notice of Allowance dated Feb. 17, 2015 in U.S. Appl. No. 29/481,308. cited by applicant . USPTO; Notice of Allowance dated Jan. 12, 2015 in U.S. Appl. No. 29/481,312. cited by applicant . USPTO; Notice of Allowance dated Apr. 30, 2015 in U.S. Appl. No. 29/481,315. cited by applicant . USPTO; Notice of Allowance dated May 11, 2015 in U.S. Appl. No. 29/511,011. cited by applicant . USPTO; Notice of Allowance dated May 11, 2015 in U.S. Appl. No. 29/514,153. cited by applicant . USPTO; Notice of Allowance dated Dec. 14, 2015 in U.S. Appl. No. 29/514,264. cited by applicant . USPTO; Notice of Allowance dated Jun. 16, 2017 in U.S. Appl. No. 29/570,711. cited by applicant . PCT; International Search report and Written Opinion dated Nov. 12, 2010 in Application No. PCT/US2010/030126. cited by applicant . PCT; International Preliminary Report on Patentability dated Oct. 11, 2011 Application No. PCT/US2010/030126. cited by applicant . PCT; International Search report and Written Opinion dated Jan. 20, 2011 in Application No. PCT/US2010/045368. cited by applicant . PCT; International Search report and Written Opinion dated Feb. 6, 2013 in Application No. PCT/US2012/065343. cited by applicant . PCT; International Search report and Written Opinion dated Feb. 13, 2013 in Application No. PCT/US2012/065347. cited by applicant . PCT; International Search Report and Written Opinion dated Nov. 16, 2017 in Application No. PCT/IB2017/001015. cited by applicant . PCT; International Search Report and Written Opinion dated Nov. 13, 2017 in Application No. PCT/IB2017/001050. cited by applicant . PCT; International Search Report and Written Opinion dated Nov. 30, 2017 in Application No. PCT/IB2017/001070. cited by applicant . PCT; International Search Report and Written Opinion dated Jan. 25, 2018 in Application No. PCT/IB2017/001262. cited by applicant . PCT: International Search Report and Written Opinion dated Jun. 1, 2018 in Application No. PCT/IB2017/001644. cited by applicant . PCT: International Search Report and Written Opinion dated Jun. 1, 2018 in Application No. PCT/IB2017/001656. cited by applicant . Chinese Patent Office; Office Action dated Jan. 10, 2013 in Application No. 201080015699.9. cited by applicant . Chinese Patent Office; Office Action dated Jan. 12, 2015 in Application No. 201080015699.9. cited by applicant . Chinese Patent Office; Office Action dated May 24, 2013 in Application No. 201080036764.6. cited by applicant . Chinese Patent Office; Office Action dated Jan. 2, 2014 in Application No. 201080036764.6. cited by applicant . Chinese Patent Office; Office Action dated Jul. 1, 2014 in Application No. 201080036764.6. cited by applicant . Chinese Patent Office; Office Action dated Feb. 8, 2014 in Application No. 201110155056. cited by applicant . Chinese Patent Office; Office Action dated Sep. 16, 2014 in Application No. 201110155056. cited by applicant . Chinese Patent Office; Office Action dated Feb. 9, 2015 in Application No. 201110155056. cited by applicant . Japanese Patent Office; Office Action dated Jan. 25, 2014 in Application No. 2012-504786. cited by applicant . Japanese Patent Office; Office Action dated Dec. 1, 2014 in Application No. 2012-504786. cited by applicant . Korean Patent Office; Office Action dated Dec. 10, 2015 in Application No. 10-2010-0028336. cited by applicant . Taiwan Patent Office; Office Action dated Jul. 4, 2014 in Application No. 099110511. cited by applicant . Taiwan Patent Office; Office Action dated Dec. 19, 2014 in Taiwan Application No. 099127063. cited by applicant . Taiwan Patent Office; Office Action dated May 13, 2016 in Taiwan Application No. 101142582. cited by applicant . Bearzotti, et al., "Fast Humidity Response of a Metal Halide-Doped Novel Polymer," Sensors and Actuators B, 7, pp. 451-454, (1992). cited by applicant . Becker et al., "Atomic Layer Deposition of Insulating Hafnium and Zirconium Nitrides," Chem. Mater., 16, 3497-3501 (2004). cited by applicant . Bhatnagar et al., "Copper Interconnect Advances to Meet Moore's Law Milestones," Solid State Technology, 52, 10 (2009). cited by applicant . Buriak, "Organometallic Chemistry on Silicon and Germanium Surfaces," Chemical Reviews, 102, 5 (2002). cited by applicant . Cant et al., "Chemisorption Sites on Porous Silica Glass and on Mixed-Oxide Catalysis," Can. J. Chem. 46, 1373 (1968). cited by applicant . Chang et al. "Small-Subthreshold-Swing and Low-Voltage Flexible Organic Thin-Film Transistors Which Use HfLaO as the Gate Dielectric," IEEE Electron Device Letters, Feb. 2009, pp. 133-135; vol. 30, No. 2; IEEE Electron Device Society. cited by applicant . Chatterjee et al., "Sub-100nm Gate Length Metal Gate NMOS Transistors Fabricated by a Replacement by a Replacement Gate Process," IEEE Semiconductor Process and Device Center, 821-824 (1997). cited by applicant . Chen et al., "A Self-Aligned Airgap Interconnect Scheme," IEEE International Interconnect Technology Conference, vol. 1-3, 146-148 (2009). cited by applicant . Choi et al., "Improvement of Silicon Direct Bonding using Surfaces Activated by Hydrogen Plasma Treatment," Journal of the Korean Physical Society, 37, 6, 878-881 (2000). cited by applicant . Choi et al., "Low Temperature Formation of Silicon Oxide Thin Films by Atomic Layer Deposition Using NH3/O2 Plasma," ECS Solid State Letters, 2(12) p. 114-p. 116 (2013). cited by applicant . Coates, "Process Analytical Technology: Spectroscopic Tools and Implementation Strategies for the Chemical and Pharmaceutical Industries." Blackwell Publishing Ltd, 91-132, (2005). cited by applicant . Crowell, "Chemical methods of thin film deposition: Chemical vapor deposition, atomic layer deposition, and related technologies," Journal of Vacuum Science & Technology A 21.5, (2003): S88-S95. cited by applicant . Cui et al., "Impact of Reductive N2/H2 Plasma on Porous Low-Dielectric Constant SiCOH Thin Films," Journal of Applied Physics 97, 113302, 1-8 (2005). cited by applicant . Dingemans et al., "Comparison Between Aluminum Oxide Surface Passivation Films Deposited with Thermal Aid," Plasma Aid and Pecvd, 35th IEEE PVCS, Jun. 2010. cited by applicant . Drummond et al., "Hydrophobic Radiofrequency Plasma-Deposited Polymer Films: Dielectric Properties and Surface Forces," Colloids and Surfaces A, 129-130, 117-129 (2006). cited by applicant . Easley et al., "Thermal Isolation of Microchip Reaction Chambers for Rapid Non-Contact DNA Amplification," J. Micromech. Microeng. 17, 1758-1766 (2007). cited by applicant . Elam et al., "New Insights into Sequential Infiltration Synthesis", ECS Transactions, vol. 69, pp. 147-157 (2015). cited by applicant . Ge et al., "Carbon Nanotube-Based Synthetic Gecko Tapes," Department of Polymer Science, PNAS, 10792-10795 (2007). cited by applicant . George et al., "Atomic Layer Deposition: An Overview," Chem. Rev. 110, 111-131 (2010). cited by applicant . Grill et al., "The Effect of Plasma Chemistry on the Damage Induced Porous SiCOH Dielectrics," IBM Research Division, RC23683 (W0508-008), Materials Science, 1-19 (2005). cited by applicant . Gupta et al., "Conversion of Metal Carbides to Carbide Derived Carbon by Reactive Ion Etching in Halogen Gas," Proceedings of SPIE--The International Society for Optical Engineering and Nanotechnologies for Space Applications, ISSN: 0277-786X (2006). cited by applicant . Harrison et al., "Poly-gate Replacement Through Contact Hole (PRETCH): A New Method for High-K/ Metal Gate and Multi-Oxide Implementation on Chip," IEEE (2004). cited by applicant . Heo et al., "Structural Characterization of Nanoporous Low-Dielectric Constant SiCOH Films Using Organosilane Precursors," NSTI-Nanotech, vol. 4, 122-123 (2007). cited by applicant . Henke et al.., "X-Ray Interactions: Photo absorption, Scattering, Transmission, and Reflection at E=50-30,000 eV, Z=1-92," Atomic Data and Nuclear Data Tables, 54, 181-342 (1993). cited by applicant . H.J. Yun et al., "Comparison of Atomic Scale Etching of Poly-Si in Inductively Coupled Ar and He Plasmas", Korean Journal of Chemical Engineering, vol. 24, 670-673 (2007). cited by applicant . Hubert et al., "A Stacked SONOS Technology, up to 4 Levels and 6nm Crystalline Nanowires, With Gate-All-Around or Independent Gates (-Flash), Suitable for Full 3D Integration," Minatec, IEDM09-637-640 (2009). cited by applicant . Jones et al., "Growth of Aluminum Films by Low Pressure Chemical Vapour Deposition Using Tritertiarybutylaluminium," Journal of Crystal Growth 135, pp. 285-289, Elsevier Science B.V. (1994). cited by applicant . Jones et al., "Recent Developments in Metalorganic Precursors for Metalorganic Chemical Vapour Deposition," Journal of Crystal Growth 146, pp. 503-510, Elsevier Science B.V. (1995). cited by applicant . Jung et al., "Double Patterning of Contact Array with Carbon Polymer," Proc. of SPIE, 6924, 69240C, 1-10 (2008). cited by applicant . Katamreddy et al., "Ald and Characterization of Aluminum Oxide Deposited on Si(100) using Tris(diethylamino) Aluminum and Water Vapor," Journal of the Electrochemical Society, 153 (10) C701-C706 (2006). cited by applicant . Kim et al., "Passivation Effect on Low-k S/OC Dielectrics by H2 Plasma Treatment," Journal of the Korean Physical Society, 40, 1, 94-98 (2002). cited by applicant . Kim et al., "Characteristics of Low Temperature High Quality Silicon Oxide by Plasma. Enhanced Atomic Layer Deposition with In-Situ Plasma Densification Process," The Electrochemical Society, ECS Transactions, College of Information and Communication Engineering, Sungkyunkwan University, 53(1), 321-329 (2013). cited by applicant . King, Plasma Enhanced Atomic Layer Deposition of SiNx: H and SiO2, J. Vac. Sci. Technol., A29(4) (2011). cited by applicant . Klug et al., "Atomic Layer Deposition of Amorphous Niobium Carbide-Based Thin Film Superconductors," The Journal of Physical Chemistry C, vol. 115, pp. 25063-25071, (2011). cited by applicant . Kobayshi, et al., "Temperature Dependence of SiO2 Film Growth with Plasma-Enhanced Atomic Layer Deposition," regarding Thin Solid Films, published by Elsevier in the International Journal on the Science and Technology of Condensed Matter, in vol. 520, No. 11, 3994-3998 (2012). cited by applicant . Koo et al., "Characteristics of Al2O3 Thin Films Deposited Using Dimethylaluminum Isopropoxide and Trimethylaluminum Precursors by the Plasma-Enhanced Atomic-Layer Deposition Method," Journal of Physical Society, 48, 1, 131-136 (2006). cited by applicant . Koutsokeras et al. "Texture and Microstructure Evolution in Single-Phase TixTal--xN Alloys of Rocksalt Structure," Journal of Applied Physics, 110, pp. 043535-1-043535-6, (2011). cited by applicant . Knoops et al., "Atomic Layer Deposition of Silicon Nitride from Bis(tert-butyloamino) silane and N2 Plasma," Applied Materials & Interfaces, American Chemical Society, A-E (2015). cited by applicant . Krenek et al. "IR Laser CVD of Nanodisperse Ge--Si--Sn Alloys Obtained by Dielectric Breakdown of GeH4/SiH4/SnH4 Mixtures", NanoCon 2014, Nov. 5-7, Brno, Czech Republic, EU. cited by applicant . Kurosawa et al., "Synthesis and Characterization of Plasma-Polymerized Hexamethyldisiloxane Films," Thin Solid Films, 506-507, 176-179 (2006). cited by applicant . Lanford et al., "The Hydrogen Content of Plasmadeposited Silicon Nitride," J. Appl. Phys., 49, 2473 (1978). cited by applicant . Lee et al., Layer Selection by Multi-Level Permutation in 3-D Stacked NAND Flash Memory, IEEE Electron Device Letters, vol. 37, No. 7, 866-869 (2016). cited by applicant . Lieberman, et al., "Principles of Plasma Discharges and Materials Processing," Second Edition, 368-381. cited by applicant . Lim et al., "Low-Temperature Growth of SiO2 Films by Plasma-Enhanced Atomic Layer Deposition," ETRI Journal, 27 (1), 118-121 (2005). cited by applicant . Liu et al., "Research, Design, and Experiment of End Effector for Wafer Transfer Robot," Industrial Robot: An International Journal, 79-91 (2012). cited by applicant . Longrie et al., "Plasma-Enhanced ALD of Platinum with O2, N2 and NH3 Plasmas", ECS Journal of Solid State Science and Technology, vol. 1, pp. Q123-Q129 (2012). cited by applicant . Mackus et al., "Optical Emission Spectroscopy as a Tool for Studying Optimizing and Monitoring Plasma-Assisted Atomic Layer Deposition Processes," Journal of Vacuum Science and Technology, 77-87 (2010). cited by applicant . Maeno, "Gecko Tape Using Carbon Nanotubes," Nitto Denko Gihou, 47, 48-51. cited by applicant . Maeng et al. Electrical properties of atomic layer disposition Hf02 and Hf0xNy on Si substrates with various crystal orientations, Journal of the Electrochemical Society, Apr. 2008, p. H267-H271, vol. 155, No. 4, Department of Materials Science and Engineering, Pohang University of Science and Technology, Pohang, Korea. cited by applicant . Marsik et al., "Effect of Ultraviolet Curing Wavelength on Low-k Dielectric Material Properties and Plasma Damage Resistance," Sciencedirect.com, 519, 11, 3619-3626 (2011). cited by applicant . Mason et al., "Hydrolysis of Tri-tert-butylaluminum: The First Structural Characterization of Alkylalumoxanes [(R2Al)2O]n and (RAIO)n," J. American Chemical Society, vol. 115, No. 12, pp. 4971-4984 (1993). cited by applicant . Massachusetts Institute of Technology Lincoln Laboratory, "Solid State Research," Quarterly Technical Report (1995). cited by applicant . Maydannik et al., "Spatial atomic layer deposition: Performance of low temperature H2O and 03oxidant chemistry for flexible electronics encapsulation", Journal of Vacuum Science and Technology: Part A AVS/ AIP, vol. 33 (1901). cited by applicant . Meng et al., "Atomic Layer of Deposition of Silicon Nitride Thin Films: A Review of Recent Progress, Challenges, and Outlooks," Materials, 9, 1007 (2016). cited by applicant . Moeen, "Design, Modelling and Characterization of Si/SiGe Structures for IR Bolometer Applications," KTH Royal Institute of Technology. Information and Communication Technology, Department of Integrated Devices and Circuits, Stockholm Sweden (2015). cited by applicant . Morishige et al., "Thermal Desorption and Infrared Studies of Ammonia Amines and Pyridines Chemisorbed on Chromic Oxide," J. Chem. Soc., Faraday Trans. 1, 78, 2947-2957 (1982). cited by applicant . Mosleh et al., "Enhancement of Material Quality of (Si)GeSn Films Grown by SnCl4 Precursor," ECS Transactions, 69 (5), 279-285 (2015). cited by applicant . Mukai et al., "A Study of CD Budget in Spacer Patterning Technology," Proc. of SPIE, 6924, 1-8 (2008). cited by applicant . Nigamananda et al., "Low-Temperature (<200oC) Plasma Enhanced Atomic Deposition of Dense Titanium Nitride Thin Films." cited by applicant . Nogueira et al., "Production of Highly Hydrophobic Films Using Low Frequency and High Density Plasma," Revista Brasileira de Aplicacoes de Vacuo, 25(1), 45-53 (2006). cited by applicant . Novaro et al. Theoretical Study on a Reaction Pathway of Ziegler-Natta-Type Catalysis, J. Chem. Phys. 68(5), Mar. 1, 1978 p. 2337-2351. cited by applicant . S. Okamoto et al., "Luminescent Properties of Pr3+--sensitized LaPO4: Gd3+ Ultraviolet-B Phosphor Under Vacuum-Ultraviolet Light Excitation," J. App. Phys. 106, 013522 (2009). cited by applicant . Park "Substituted Aluminum Metal Gate on High-K Dielectric for Low Work-Function and Fermi-Level Pinning Free," 4 pages, IEEE 0-7803-8684-1/04 (2004). cited by applicant . Portet et al., "Impact of Synthesis Conditions on Surface Chemistry and Structure of Carbide-Derived Carbons," Thermochimica Acta, 497, 137-142 (2010). cited by applicant . Potts et al., "Low Temperature Plasma-Enhanced Atomic Layer Deposition of metal Oxide Thin Films," Journal of the Electrochemical Society, 157, 66-74 (2010). cited by applicant . Potts et al., "Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD", Chemical Vapor Deposition, vol. 19, pp. 125-133 (2013). cited by applicant . Presser, et al., "Effect of Pore Size on Carbon Dioxide Sorption by Carbide Derived Carbon," Energy & Environmental Science 4.8, 3059-3066 (2011). cited by applicant . Provine et al., "Correlation of Film Density and Wet Etch Rate in Hydrofluoric Acid of Plasma Enhanced Atomic Layer Deposited Silicon Nitride," AIP Advances, 6 (2016). cited by applicant . Radamson et al. "Growth of Sn-alloyed Group IV Materials for Photonic and Electronic Applications", Chapter 5 pp. 129-144, Manufacturing Nano Structures. cited by applicant . Sakuma et al., "Highly Scalable Horizontal Channel 3-D NAND Memory Excellent in Compatibility with Conventional Fabrication Technology," IEEE Electron Device Letters, vol. 34, No. 9, 1142-1144 (2013). cited by applicant . Salim, "In-situ Fourier Transform Infrared Spectroscopy of Chemistry and Growth in Chemical Vapor Deposition," Massachusetts Institute of Technology, 187 pages (1995). cited by applicant . Salim et al., "In Situ Concentration Monitoring in a Vertical OMVPE Reactor by Fiber-Optics-Based Fourier Transform Infrared Spectroscopy," Journal of Crystal Growth 169, pp. 443-449, Elsevier Science B.V. (1996). cited by applicant . Schmatz et al., "Unusual Isomerization Reactions in 1.3-Diaza-2-Silcyclopentanes," Organometallics, 23, 1180-1182 (2004). cited by applicant . Scientific and Technical Information Center EIC 2800 Search Report dated Feb. 16, 2012. cited by applicant . Selvaraj et al., "Selective Atomic Layer Deposition of Zirconia on Copper Patterned Silicon Substrates Using Ethanol as Oxygen Source as Well as Copper Reductant," J. Vac. Sci. Technol. A32(1), (2014). cited by applicant . Selvaraj et al., "Surface Selective Atomic Layer Deposition of Hafnium Oxide for Copper Diffusion Barrier Application Using Tetrakis (diethylamino) Hafnium and Ethanol," 225th ECS Meeting, Meeting Abstract, (May 12, 2014). cited by applicant . S.D. Athavale and D.J. Economou, "Realization of Atomic Layer Etching of Silicon", Journal of Vacuum Science and Technology B, vol. 14, year 1996, pp. 3702-3705. cited by applicant . Shamma et al., "PDL Oxide Enabled Doubling," Proc. of SPIE, 6924, 69240D, 1-10 (2008). cited by applicant . Tseng et al., "Etch Properties of Resists Modified by Sequential Infiltration Synthesis," American Vacuum Society (2011). cited by applicant . Tseng et al., "Enhanced Block Copolymer Lithography Using Sequntial Infiltration Synthesis," Journal of Physical Chemistry, vol. 5, 17725-17729 (2011). cited by applicant . Varma, et al., "Effect of Metal Halides on Thermal, Mechanical, and Electrical Properties of Polypyromelitimide Films," Journal of Applied Polymer Science, vol. 32, pp. 3987-4000, (1986). cited by applicant . Voltaix, "Meterial Safety Data Sheet for: Trisilylamine", pp. 1-8, (2014). cited by applicant . Wang et al., "Tritertiarybutylaluminum as an Organometallic Source for Epitaxial Growth of AlGaSb," Appl. Phys. Lett. 67 (10), Sep. 4, pp. 1384-1386, American Institute of Physics (1995). cited by applicant . Wirths, et al, "SiGeSn Growth tudies Using Reduced Pressure Chemical Vapor Deposition Towards Optoeleconic Applications," This Soid Films, 557, 183-187 (2014). cited by applicant . Yoshida, et al., Threshold Voltage Tuning for 10NM and Beyond CMOS Integration, Solid State Technology, 57(7): 23-25 (2014). cited by applicant . Yu et al., "Modulation of the Ni FUSI Workfunction by Yb Doping: from Midgap to N-Type Band-Edge," 4 pages, IEEE 0-7803-9269-8/05 (2005). cited by applicant . Yun et al., "Behavior of Various Organosilicon Molecules in PECVD Processes for Hydrocarbon-Doped Silicon Oxide Films," Solid State Phenomena, vol. 124-126, 347-350 (2007). cited by applicant . Yun et al., "Single-Crystalline Si Stacked Array (STAR) NAND Flash Memory," IEEE Transactions on Electron Devices, vol. 58, No. 4, 1006-1014 (2011). cited by applicant . Yun et al., "Effect of Plasma on Characteristics of Zirconium Oxide Films Deposited by Plasma-Enhanced Atomic Layer Deposition," Electrochemical and Solid State Letters, 8(11) F47-F50 (2005). cited by applicant . Yushin et al., "Carbon-Derived Carbon," Department of Materials Science and Engineering, Taylor & Francis Group, LLC (2006). cited by applicant . Chemistry Stack Exchange, "Why is CF4 Non-Polar and CHF Polar," https://chemistry.stackexchange.com/questions/31604/why-is-cf4-non-polar-- and-chf3-polar, (2015). cited by applicant . PCT; International Preliminary Report on Patentability dated Nov. 24, 2009 and International Search Report dated Jul. 31, 208 in Application No. PCT/US2008/063919. cited by applicant . PCT; International Preliminary Report on Patentability dated Feb. 24, 2010 in Application No. PCT/US2008/074063. cited by applicant . PCT; International Preliminary Report on Patentability dated Nov. 26, 2009 in Application No. PCT/US2009/043454. cited by applicant . PCT; International Preliminary Report on Patentability dated Jun. 14, 2011 in Application No. PCT/US2009/066377. cited by applicant . PCT; International Preliminary Report on Patentability dated Nov. 9, 2011 in Application No. PCT/US2010/033244. cited by applicant . PCT; International Preliminary Report on Patentability dated Nov. 9, 2011 in Application No. PCT/US2010/033248. cited by applicant . PCT; International Preliminary Report on Patentability dated Nov. 9, 2011 in Application No. PCT/US2010/033252. cited by applicant . USPTO; Notice of Allowance dated Jul. 26, 2005 in U.S. Appl. No. 10/033,058. cited by applicant . USPTO; Non-Final Office Action dated Aug. 25, 2005 in U.S. Appl. No. 10/191,635. cited by applicant . USPTO; Final Office Action dated Apr. 25, 2006 in U.S. Appl. No. 10/191,635. cited by applicant . USPTO; Non-Final Office Action dated Nov. 20, 2006 in U.S. Appl. No. 10/191,635. cited by applicant . USPTO; Notice of Allowance dated May 21, 2007 in U.S. Appl. No. 10/191,635. cited by applicant . USPTO; Notice of Allowance dated Feb. 20, 2008 in U.S. Appl. No. 10/191,635. cited by applicant . USPTO; Non-Final Office Action dated May 13, 2003 in U.S. Appl. No. 10/222,229. cited by applicant . USPTO; Non-Final Office Action dated Oct. 22, 2003 in U.S. Appl. No. 10/222,229. cited by applicant . USPTO; Final Office Action dated Mar. 22, 2004 in U.S. Appl. No. 10/222,229. cited by applicant . USPTO; Advisory Action dated Oct. 7, 2004 in U.S. Appl. No. 10/222,229. cited by applicant . USPTO; Non-Final Office Action dated Dec. 22, 2004 in U.S. Appl. No. 10/222,229. cited by applicant . USPTO; Final Office Action dated Jun. 20, 2005 in U.S. Appl. No. 10/222,229. cited by applicant . USPTO; Advisory Action dated Nov. 16, 2005 in U.S. Appl. No. 10/222,229. cited by applicant . USPTO; Notice of Allowance dated Mar. 8, 2006 in U.S. Appl. No. 10/222,229. cited by applicant . USPTO; Non-Final Office Action dated Jan. 26, 2005 in U.S. Appl. No. 10/838,510. cited by applicant . USPTO; Notice of Allowance dated Jul. 12, 2005 in U.S. Appl. No. 10/838,510. cited by applicant . USPTO; Non-Final Office Action dated Mar. 28, 2010 in U.S. Appl. No. 12/121,085. cited by applicant . USPTO; Notice of Allowance dated Jul. 26, 2010 in U.S. Appl. No. 12/121,085. cited by applicant . USPTO; Notice of Allowance dated Oct. 4, 2010 in U.S. Appl. No. 12/121,085. cited by applicant . USPTO; Final Office Action dated Dec. 28, 2010 in U.S. Appl. No. 12/140,809. cited by applicant . USPTO; Notice of Allowance dated Mar. 17, 2011 in U.S. Appl. No. 12/140,809. cited by applicant . USPTO; Requirement for Restriction dated Sep. 10, 2010 in U.S. Appl. No. 12/148,956. cited by applicant . USPTO; Non-Final Office Action dated Mar. 15, 2011 in U.S. Appl. No. 12/193,924. cited by applicant . USPTO; Final Office Action dated Sep. 30, 2011 in U.S. Appl. No. 12/193,924. cited by applicant . USPTO; Non-Final Office Action dated Oct. 24, 2012 in U.S. Appl. No. 12/193,924. cited by applicant . USPTO; Final Office Action dated Apr. 17, 2013 in U.S. Appl. No. 12/193,924. cited by applicant . USPTO; Advisory Action dated Jul. 9, 2013 in U.S. Appl. No. 12/193,924. cited by applicant . USPTO ; Non-Final Office Action dated Jul. 28, 2011 in U.S. Appl. No. 12/330,096. cited by applicant . USPTO ; Final Office Action dated Jan. 13, 2012 in U.S. Appl. No. 12/330,096. cited by applicant . USPTO; Notice of Allowance dated Mar. 6, 2012 in U.S. Appl. No. 12/330,096. cited by applicant . USPTO; Non-Final Office Action dated Mar. 20, 2012 in U.S. Appl. No. 12/330,096. cited by applicant . USPTO; Notice of Allowance dated Jun. 7, 2012 in U.S. Appl. No. 12/330,096. cited by applicant . USPTO; Notice of Allowance dated Apr. 2, 2012 in U.S. Appl. No. 12/416,809. cited by applicant . USPTO; Advisory Action dated Feb. 3, 2012 in U.S. Appl. No. 12/416,809. cited by applicant . USPTO; Non-Final Office Action dated Aug. 3, 2011 in U.S. Appl. No. 12/436,300. cited by applicant . USPTO; Final Office Action dated Jan. 23, 2012 in U.S. Appl. No. 12/436,300. cited by applicant . USPTO; Advisory Action dated Mar. 6, 2012 in U.S. Appl. No. 12/436,300. cited by applicant . USPTO; Non-Final Office Action dated May 22, 2012 in U.S. Appl. No. 12/436,300. cited by applicant . USPTO; Notice of Allowance dated Nov. 28, 2012 in U.S. Appl. No. 12/436,300. cited by applicant . USPTO; Restriction Requirement dated Dec. 20, 2011 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Non-Final Office Action dated Apr. 11, 2012 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Final Office Action dated Sep. 26, 2012 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Non-Final Office Action dated May 31, 2013 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Final Office Action dated Oct. 17, 2013 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Advisory Action dated Oct. 1, 2014 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Non-Final Office Action dated Feb. 4, 2014 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Final Office Action dated Jun. 23, 2014 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Non- Final Office Action dated Feb. 3, 2015 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Final Office Action dated May 13, 2015 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Non-Final Office Action dated Oct. 14, 2015 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Final Office Action dated Dec. 31, 2015 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Notice of Allowance dated Feb. 3, 2016 in U.S. Appl. No. 12/436,306. cited by applicant . USPTO; Non-Final Office Action dated Aug. 3, 2011 in U.S. Appl. No. 12/436,315. cited by applicant . USPTO; Notice of Allowance dated Nov. 17, 2011 in U.S. Appl. No. 12/436,315. cited by applicant . USPTO; Advisory Action dated Jul. 13, 2011 in U.S. Appl. No. 12/553,759. cited by applicant . USPTO; Advisory Action dated Jul. 23, 2013 in U.S. Appl. No. 12/618,355. cited by applicant . USPTO; Advisory Action dated Mar. 4, 2016 in U.S. Appl. No. 12/618,355. cited by applicant . USPTO; Advisory Action dated May 16, 2017 in U.S. Appl. No. 12/618,355. cited by applicant . USPTO; Final Office Action dated Aug. 10, 2018 in U.S. Appl. No. 12/618,355. cited by applicant . USPTO; Advisory Action dated Aug. 9, 2012 in U.S. Appl. No. 12/618,419. cited by applicant . USPTO; Notice of Allowance dated Oct. 9, 2013 in U.S. Appl. No. 12/618,419. cited by applicant . USPTO; Requirement for Restriction dated Sep. 12, 2011 in U.S. Appl. No. 12/718,731. cited by applicant . USPTO; Advisory Action dated Jul. 1, 2013 in U.S. Appl. No. 12/847,848. cited by applicant . USPTO; Requirement for Restriction dated Jul. 22, 2013 in U.S. Appl. No. 12/910,607. cited by applicant . USPTO; Advisory Action dated Jul. 9, 2014 in U.S. Appl. No. 12/910,607. cited by applicant . USPTO; Advisory Action dated Jul. 8, 2013 in U.S. Appl. No. 12/953,870. cited by applicant . USPTO; Non-Final Office Action dated Aug. 28, 2013 in U.S. Appl. No. 12/953,870. cited by applicant . USPTO; Final Office Action dated Apr. 17, 2014 in U.S. Appl. No. 12/953,870. cited by applicant . USPTO; Advisory Action dated Jun. 12, 2014 in U.S. Appl. No. 13/102,980. cited by applicant . USPTO; Notice of Allowance dated Sep. 17, 2014 in U.S. Appl. No. 13/102,980. cited by applicant . USPTO; Requirement for Restriction dated Jun. 5, 2014 in U.S. Appl. No. 13/154,271. cited by applicant . USPTO; Requirement for Restriction dated Apr. 6, 2016 in U.S. Appl. No. 13/166,367. cited by applicant . USPTO; Advisory Action dated Apr. 21, 2017 in U.S. Appl. No. 13/166,367. cited by applicant . USPTO; Requirement for Restriction dated Jun. 18, 2014 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Advisory Action dated May 13, 2016 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Advisory Action dated Feb. 15, 2017 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Advisory Action dated Feb. 8, 2018 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Advisory Action dated Dec. 17, 2014 in U.S. Appl. No. 13/181,407. cited by applicant . USPTO; Requirement for Restriction Sep. 25, 2012 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Advisory Action dated Nov. 7, 2013 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Advisory Action dated May 18, 2015 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Advisory Action dated Oct. 4, 2017 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Non-Final Office Action dated Jul. 26, 2018 in U.S. Appl. No. 13/184,351. cited by applicant . USPTO; Restriction Requirement dated Aug. 21, 2014 in U.S. Appl. No. 13/187,300. cited by applicant . USPTO; Advisory Action dated Mar. 28, 2016 in U.S. Appl. No. 13/283,408. cited by applicant . USPTO; Restriction Requirement dated Oct. 2, 2013 in U.S. Appl. No. 13/312,591. cited by applicant . USPTO; Advisory Action dated Aug. 26, 2014 in U.S. Appl. No. 13/312,591. cited by applicant . USPTO; Notice of Allowance dated Jun. 11, 2015 in U.S. Appl. No. 13/312,591. cited by applicant . USPTO; Requirement for Restriction dated Nov. 26, 2013 in U.S. Appl. No. 13/333,420. cited by applicant . USPTO; Advisory Action dated Mar. 27, 2013 in U.S. Appl. No. 13/406,791. cited by applicant . USPTO; Advisory Action dated Oct. 29, 2013 in U.S. Appl. No. 13/406,791. cited by applicant . USPTO; Advisory Action dated Apr. 22, 2015 in U.S. Appl. No. 13/411,271. cited by applicant . USPTO; Advisory Action dated Mar. 31, 2014 in U.S. Appl. No. 13/550,419. cited by applicant . USPTO; Advisory Action dated Apr. 16, 2015 in U.S. Appl. No. 13/563,066. cited by applicant . USPTO; Non-Final Office Action dated May 28, 2013 in U.S. Appl. No. 13/563,274. cited by applicant . USPTO; Notice of Allowance dated Sep. 27, 2013 in U.S. Appl. No. 13/563,274. cited by applicant . USPTO; Advisory Action dated May 5, 2014 in U.S. Appl. No. 13/565,564. cited by applicant . USPTO; Notice of Allowance dated Sep. 13, 2013 in U.S. Appl. No. 13/566,069. cited by applicant . USPTO; Advisory Action dated Sep. 2, 2015 in U.S. Appl. No. 13/597,108. cited by applicant . USPTO; Notice of Allowance dated Mar. 7, 2017 in U.S. Appl. No. 13/597,108. cited by applicant . USPTO; Restriction Requirement dated Jul. 9, 2013 in U.S. Appl. No. 13/612,538. cited by applicant . USPTO; Notice of Allowance dated Feb. 25, 2015 in U.S. Appl. No. 13/612,538. cited by applicant . USPTO; Requirement for Restriction dated Feb. 4, 2015 in U.S. Appl. No. 13/646,403. cited by applicant . USPTO; Requirement for Restriction dated Apr. 11, 2014 in U.S. Appl. No. 13/646,471. cited by applicant . USPTO; Advisory Action dated Nov. 14, 2014 in U.S. Appl. No. 13/646,471. cited by applicant . USPTO; Advisory Action dated Apr. 15, 2016 in U.S. Appl. No. 13/646,471. cited by applicant . USPTO; Final Office Action dated Oct. 20, 2016 in U.S. Appl. No. 13/646,471. cited by applicant . USPTO; Restriction Requirement dated Mar. 4, 2015 in U.S. Appl. No. 13/651,144. cited by applicant . USPTO; Advisory Action dated Apr. 19, 2018 in U.S. Appl. No. 13/651,144. cited by applicant . USPTO; Requirement for Restriction dated Dec. 24, 2014 in U.S. Appl. No. 13/665,366. cited by applicant . USPTO; Final Office Action dated Mar. 1, 2016 in U.S. Appl. No. 13/665,366. cited by applicant . USPTO; Advisory Action dated May 13, 2016 in U.S. Appl. No. 13/665,366. cited by applicant . USPTO; Non-Final Office Action dated Jun. 17, 2016 in U.S. Appl. No. 13/665,366. cited by applicant . USPTO; Final Office Action dated May 3, 2017 in U.S. Appl. No. 13/665,366. cited by applicant . USPTO; Notice of Allowance dated Aug. 24, 2015 in U.S. Appl. No. 13/677,133. cited by applicant . USPTO; Notice of Allowance dated Mar. 17, 2015 in U.S. Appl. No. 13/677,151. cited by applicant . USPTO; Advisory Action dated Apr. 6, 2016 in U.S. Appl. No. 13/727,324. cited by applicant . USPTO; Non-Final Office Action dated Sep. 16, 2013 in U.S. Appl. No. 13/760,160. cited by applicant . USPTO; Final Office Action dated Dec. 27, 2013 in U.S. Appl. No. 13/760,160. cited by applicant . USPTO; Non-Final Office Action dated Jun. 4, 2014 in U.S. Appl. No. 13/760,160. cited by applicant . USPTO; Final Office Action dated Sep. 25, 2014 in U.S. Appl. No. 13/760,160. cited by applicant . USPTO; Final Office Action dated Jan. 28, 2015 in U.S. Appl. No. 13/760,160. cited by applicant . USPTO; Final Office Action dated May 12, 2015 in U.S. Appl. No. 13/760,160. cited by applicant . USPTO; Notice of Allowance dated Oct. 21, 2015 in U.S. Appl. No. 13/760,160. cited by applicant . USPTO; Notice of Allowance dated Jan. 20, 2016 in U.S. Appl. No. 13/760,160. cited by applicant . USPTO; Advisory Action dated Jul. 13, 2016 in U.S. Appl. No. 13/791,246. cited by applicant . USPTO; Notice of Allowance dated Oct. 19, 2016 in U.S. Appl. No. 13/791,246. cited by applicant . USPTO; Advisory Action dated Jul. 14, 2016 in U.S. Appl. No. 13/791,339. cited by applicant . USPTO; Advisory Action dated Jun. 29, 2015 in U.S. Appl. No. 13/901,372. cited by applicant . USPTO; Advisory Action dated Dec. 11, 2014 in U.S. Appl. No. 13/912,666. cited by applicant . USPTO; Requirement for Restriction dated Sep. 4, 2014 in U.S. Appl. No. 13/915,732. cited by applicant . USPTO; Non-Final Office Action dated Jan. 14, 2014 in U.S. Appl. No. 13/941,226. cited by applicant . USPTO; Non-Final Office Action dated Jul. 8, 2014 in U.S. Appl. No. 13/941,226. cited by applicant . USPTO; Non-Final Office Action dated Feb. 3, 2015 in U.S. Appl. No. 13/941,226. cited by applicant . USPTO; Final Office Action dated Feb. 12, 2016 in U.S. Appl. No. 13/941,226. cited by applicant . USPTO; Advisory Action dated Jul. 29, 2016 in U.S. Appl. No. 13/941,226. cited by applicant . USPTO; Non-Final Office Action dated Aug. 8, 2017 in U.S. Appl. No. 13/941,226. cited by applicant . USPTO; Notice of Allowance dated Feb. 27, 2015 in U.S. Appl. No. 13/948,055. cited by applicant . USPTO; Notice of Allowance dated Mar. 31, 2015 in U.S. Appl. No. 13/948,055. cited by applicant . USPTO; Notice of Allowance dated Mar. 21, 2016 in U.S. Appl. No. 13/966,782. cited by applicant . USPTO; Non-Final Office Action Restriction dated Jan. 2, 2015 in U.S. Appl. No. 14/040,196. cited by applicant . USPTO; Advisory Action dated Aug. 24, 2015 in U.S. Appl. No. 14/065,114. cited by applicant . USPTO; Non-Final Office Action dated Dec. 23, 2015 in U.S. Appl. No. 14/079,302. cited by applicant . USPTO; Requirement for Restriction dated Aug. 11, 2015 in U.S. Appl. No. 14/090,750. cited by applicant . USPTO; Non-Final Office Action dated Sep. 9, 2015 in U.S. Appl. No. 14/090,750. cited by applicant . USPTO; Final Office Action dated Feb. 11, 2016 in U.S. Appl. No. 14/090,750. cited by applicant . USPTO; Advisory Action dated May 5, 2016 in U.S. Appl. No. 14/090,750. cited by applicant . USPTO; Advisory Action dated Dec. 21, 2016 in U.S. Appl. No. 14/090,750. cited by applicant . USPTO; Advisory Action dated Jan. 30, 2018 in U.S. Appl. No. 14/090,750. cited by applicant . USPTO; Advisory Action dated Feb. 20, 2015 in U.S. Appl. No. 14/183,187. cited by applicant . USPTO; Notice of Allowance dated Aug. 31, 2015 in U.S. Appl. No. 14/183,187. cited by applicant . USPTO; Requirement for Restriction dated Sep. 24, 2015 in U.S. Appl. No. 14/188,760. cited by applicant . USPTO; Advisory Action dated Jan. 12, 2017 in U.S. Appl. No. 14/188,760. cited by applicant . USPTO; Advisory Action dated Jan. 3, 2018 in U.S. Appl. No. 14/188,760. cited by applicant . USPTO; Advisory Action dated Apr. 29, 2016 in U.S. Appl. No. 14/218,374. cited by applicant . USPTO; Notice of Allowance dated Aug. 5, 2016 in U.S. Appl. No. 14/218,374. cited by applicant . USPTO; Advisory Action dated Jun. 30, 2016 in U.S. Appl. No. 14/219,839. cited by applicant . USPTO; Final Office action dated May 19, 2016 in U.S. Appl. No. 14/219,879. cited by applicant . USPTO; Advisory Action dated Aug. 22, 2016 in U.S. Appl. No. 14/219,879. cited by applicant . USPTO; Final Office action dated Jul. 6, 2017 in U.S. Appl. No. 14/219,879. cited by applicant . USPTO; Advisory Action dated Aug. 2, 2016 in U.S. Appl. No. 14/246,969. cited by applicant . USPTO; Notice of Allowance dated Feb. 27, 2017 in U.S. Appl. No. 14/246,969. cited by applicant . USPTO; Requirement for Restriction dated Jun. 15, 2015 in U.S. Appl. No. 14/268,348. cited by applicant . USPTO; Notice of Allowance dated Aug. 30, 2016 in U.S. Appl. No. 14/268,348. cited by applicant . USPTO; Requirement for Restriction dated May 21, 2015 in U.S. Appl. No. 14/281,477. cited by applicant . USPTO; Advisory Action dated Mar. 28, 2016 in U.S. Appl. No. 14/281,477. cited by applicant . USPTO; Non-Final Office Action dated Jul. 27, 2018 in U.S. Appl. No. 14/444,744. cited by applicant . USPTO; Notice of Allowance dated Nov. 28, 2016 in U.S. Appl. No. 14/449,838. cited by applicant . USPTO; Advisory Action dated Sep. 21, 2016 in U.S. Appl. No. 14/457,058. cited by applicant . USPTO; Final Office Action dated Jun. 14, 2018 in U.S. Appl. No. 14/457,058. cited by applicant . USPTO; Requirement for Restriction dated Sep. 3, 2015 in U.S. Appl. No. 14/498,036. cited by applicant . USPTO; Advisory Action dated Jun. 16, 2016 in U.S. Appl. No. 14/498,036. cited by applicant . USPTO; Notice of Allowance dated Aug. 17, 2016 in U.S. Appl. No. 14/498,036. cited by applicant . USPTO; Requirement for Restriction dated Mar. 20, 2015 in U.S. Appl. No. 14/505,290. cited by applicant . USPTO; Advisory Action dated Aug. 17, 2016 in U.S. Appl. No. 14/508,296. cited by applicant . USPTO; Notice of Allowance dated Jan. 27, 2017 in U.S. Appl. No. 14/508,296. cited by applicant . USPTO; Advisory Action dated Dec. 21, 2016 in U.S. Appl. No. 14/568,647. cited by applicant . USPTO; Advisory Action dated Apr. 12, 2018 in U.S. Appl. No. 14/568,647. cited by applicant . USPTO; Notice of Allowance dated May 18, 2016 in U.S. Appl. No. 14/571,126. cited by applicant . USPTO; Restriction Requirement dated Mar. 7, 2016 in U.S. Appl. No. 14/606,364. cited by applicant . USPTO; Final Office Action dated Jun. 14, 2016 in U.S. Appl. No. 14/606,364. cited by applicant . USPTO; Advisory Action dated Aug. 25, 2016 in U.S. Appl. No. 14/606,364. cited by applicant . USPTO; Non-Final Office Action dated Sep. 27, 2016 in U.S. Appl. No. 14/606,364. cited by applicant . USPTO; Notice of Allowance dated Aug. 2, 2016 in U.S. Appl. No. 14/622,603. cited by applicant . USPTO; Notice of Allowance dated Feb. 16, 2016 in U.S. Appl. No. 14/634,342. cited by applicant . USPTO; Final Office Action dated Aug. 10, 2018 in U.S. Appl. No. 14/645,234. cited by applicant . USPTO; Requirement for Restriction dated Oct. 26, 2015 in U.S. Appl. No. 14/659,152. cited by applicant . USPTO; Non-Final Office Action dated Aug. 10, 2018 in U.S. Appl. No. 14/793,323. cited by applicant . USPTO; Notice of Allowance dated Jun. 27, 2018 in U.S. Appl. No. 14/808,979. cited by applicant . USPTO; Notice of Allowance dated Jul. 11, 2018 in U.S. Appl. No. 14/817,953. cited by applicant . USPTO; Requirement for Restriction dated Mar. 17, 2016 in U.S. Appl. No. 14/827,177. cited by applicant . USPTO; Notice of Allowance dated Jan. 27, 2017 in U.S. Appl. No. 14/827,177. cited by applicant . USPTO; Requirement for Restriction dated Aug. 8, 2016 in U.S. Appl. No. 14/829,565. cited by applicant . USPTO; Advisory Action dated Apr. 20, 2017 in U.S. Appl. No. 14/829,565. cited by applicant . USPTO; Advisory Action dated Feb. 14, 2017 in U.S. Appl. No. 14/835,637. cited by applicant . USPTO; Notice of Allowance dated Apr. 25, 2017 in U.S. Appl. No. 14/835,637. cited by applicant . USPTO; Final Office Action dated Feb. 9, 2017 in U.S. Appl. No. 14/884,695. cited by applicant . USPTO; Advisory Action dated Apr. 20, 2017 in U.S. Appl. No. 14/884,695. cited by applicant . USPTO; Non-Final Office Action dated May 18, 2017 in U.S. Appl. No. 14/884,695. cited by applicant . USPTO; Requirement for Restriction dated Dec. 1, 2016 in U.S. Appl. No. 14/886,571. cited by applicant . USPTO; Final Office Action dated Sep. 21, 2017 in U.S. Appl. No. 14/886,571. cited by applicant . USPTO; Notice of Allowance dated Dec. 6, 2017 in U.S. Appl. No. 14/886,571. cited by applicant . USPTO; Requirement for Restriction dated Sep. 20, 2016 in U.S. Appl. No. 14/919,536. cited by applicant . USPTO; Non-Final Office Action dated May 3, 2016 in U.S. Appl. No. 14/937,053. cited by applicant . USPTO; Notice of Allowance dated Jul. 26, 2016 in U.S. Appl. No. 14/937,053. cited by applicant . USPTO; Requirement for Restriction dated Sep. 15, 2016 in U.S. Appl. No. 14/938,180. cited by applicant . USPTO; Notice of Allowance dated Nov. 21, 2016 in U.S. Appl. No. 14/981,434. cited by applicant . USPTO; Notice of Allowance dated Jun. 7, 2017 in U.S. Appl. No. 14/981,468. cited by applicant . USPTO; Non-Final Office Action dated Jun. 20, 2018 in U.S. Appl. No. 14/997,683. cited by applicant . USPTO; Non-Final Office Action dated Apr. 22, 2016 in U.S. Appl. No. 15/055,122. cited by applicant . USPTO; Notice of Allowance dated Sep. 15, 2016 in U.S. Appl. No. 15/055,122. cited by applicant . USPTO; Requirement for Restriction dated Jun. 28, 2018 in U.S. Appl. No. 15/074,813. cited by applicant . USPTO; Notice of Allowance dated Jun. 29, 2018 in U.S. Appl. No. 15/135,224. cited by applicant . USPTO; Final Office Action dated Jul. 6, 2018 in U.S. Appl. No. 15/135,258. cited by applicant . USPTO; Final Office Action dated Jul. 26, 2018 in U.S. Appl. No. 15/144,506. cited by applicant . USPTO; Requirement for Restriction dated Jun. 22, 2018 in U.S. Appl. No. 15/182,504. cited by applicant . USPTO; Advisory Action dated Aug. 23, 2017 in U.S. Appl. No. 15/203,632. cited by applicant . USPTO; Requirement for Restriction dated Jan. 26, 2017 in U.S. Appl. No. 15/205,890. cited by applicant . USPTO; Requirement for Restriction dated Apr. 3, 2017 in U.S. Appl. No. 15/222,715. cited by applicant . USPTO; Notice of Allowance dated Jul. 14, 2017 in U.S. Appl. No. 15/222,715. cited by applicant . USPTO; Notice of Allowance dated Sep. 27, 2017 in U.S. Appl. No. 15/222,715. cited by applicant . USPTO; Notice of Allowance dated Feb. 3, 2017 in U.S. Appl. No. 15/222,738. cited by applicant . USPTO; Notice of Allowance dated Aug. 23, 2017 in U.S. Appl. No. 15/222,738. cited by applicant . USPTO; Requirement for Restriction dated Dec. 5, 2017 in U.S. Appl. No. 15/254,605. cited by applicant . USPTO; Notice of Allowance dated Jul. 12, 2018 in U.S. Appl. No. 15/254,605. cited by applicant . USPTO; Notice of Allowance dated Apr. 2, 2018 in U.S. Appl. No. 15/254,724. cited by applicant . USPTO; Non-Final Office Action dated Aug. 3, 2018 in U.S. Appl. No. 15/273,488. cited by applicant . USTPO; Non-Final Office Action dated Jul. 2, 2018 in U.S. Appl. No. 15/286,503. cited by applicant . USPTO; Requirement for Restriction dated Sep. 12, 2017 in U.S. Appl. No. 15/377,439. cited by applicant . USPTO; Advisory Action dated Aug. 8, 2018 in U.S. Appl. No. 15/377,439. cited by applicant . USPTO; Notice of Allowance dated Oct. 11, 2017 in U.S. Appl. No. 15/380,895. cited by applicant . USPTO; Requirement for Restriction dated Sep. 21, 2017 in U.S. Appl. No. 15/380,921. cited by applicant . USPTO; Final Office Action dated Jun. 28, 2018 in U.S. Appl. No. 15/380,921. cited by applicant . USPTO; Final Office Action dated May 15, 2018 in U.S. Appl. No. 15/388,410. cited by applicant . USPTO; Notice of Allowance dated Dec. 22, 2017 in U.S. Appl. No. 15/397,237. cited by applicant . USPTO; Non-Final Office Action dated Aug. 7, 2018 in U.S. Appl. No. 15/428,808. cited by applicant . USPTO; Notice of Allowance dated Apr. 20, 2018 in U.S. Appl. No. 15/466,149. cited by applicant . USPTO; Non-Final Office Action dated Apr. 6, 2018 in U.S. Appl. No. 15/472,750. cited by applicant . USPTO; Notice of Allowance dated Mar. 21, 2018 in U.S. Appl. No. 15/476,035. cited by applicant . USPTO; Notice of Allowance dated Aug. 14, 2018 in U.S. Appl. No. 15/476,035. cited by applicant . USPTO; Notice of Allowance dated Dec. 19, 2017 in U.S. Appl. No. 15/489,660. cited by applicant . USPTO; Notice of Allowance dated May 23, 2018 in U.S. Appl. No. 15/499,647. cited by applicant . USPTO; Non-Final Office Action dated Jun. 21, 2018 in U.S. Appl. No. 15/499,647. cited by applicant . USPTO; Requirement of Restriction dated Mar. 30, 2018 in U.S. Appl. No. 15/589,849. cited by applicant . USPTO; Office Action dated Aug. 30, 2018 in U.S. Appl. No. 15/589,849. cited by applicant . USPTO; Office Action dated May 3, 2018 in U.S. Appl. No. 15/589,861. cited by applicant . USPTO; Requirement for Restriction dated Aug. 1, 2018 in U.S. Appl. No. 15/627,189. cited by applicant . USPTO; Non-Final Office Action dated Jun. 5, 2018 in U.S. Appl. No. 15/650,686. cited by applicant . USPTO; Requirement for Restriction dated Apr. 6, 2018 in U.S. Appl. No. 15/659,631. cited by applicant . USPTO; Non-Final Office Action dated Aug. 9, 2018 in U.S. Appl. No. 15/660,805. cited by applicant . USPTO; Non-Final Office Action dated Jul. 27, 2018 in U.S. Appl. No. 15/673,110. cited by applicant . USPTO; Final Office Action dated Aug. 24, 2018 in U.S. Appl. No. 15/683,701. cited by applicant . USPTO; Non-Final Office Action dated Aug. 9, 2018 in U.S. Appl. No. 15/691,241. cited by applicant . USPTO; Requirement for Restriction dated Jul. 11, 2018 in U.S. Appl. No. 15/707,786. cited by applicant . USPTO; Non-Final Office Action dated May 17, 2018 in U.S. Appl. No. 15/729,485. cited by applicant . USPTO; Non-Final Office Action dated Jun. 26, 2018 in U.S. Appl. No. 15/796,593. cited by applicant . USPTO; Notice of Allowance dated Jun. 13, 2018 in U.S. Appl. No. 15/798,120. cited by applicant . USPTO; Non-Final Office Action dated Aug. 9, 2018 in U.S. Appl. No. 15/798,201. cited by applicant . USPTO; Non-Final Office Action dated Jul. 2, 2018 in U.S. Appl. No. 15/815,483. cited by applicant . USPTO; Requirement for Restriction dated Mar. 21, 2018 in U.S. Appl. No. 15/863,340. cited by applicant . USPTO; Non-Final Office Action dated Jul. 23, 2018 in U.S. Appl. No. 15/863,340. cited by applicant . USPTO; Notice of Allowance dated May 14, 2012 in U.S. Appl. No. 29/411,637. cited by applicant . USPTO; Notice of Allowance dated Oct. 2, 2013 in U.S. Appl. No. 29/412,887. cited by applicant . USPTO; Notice of Allowance dated Dec. 19, 2013 in U.S. Appl. No. 29/448,094. cited by applicant . USPTO; Requirement for Restriction dated Dec. 1, 2014 in U.S. Appl. No. 29/481,312. cited by applicant . USPTO; Requirement for Restriction dated Dec. 4, 2014 in U.S. Appl. No. 29/481,315. cited by applicant . USPTO; Notice of Allowance dated Jun. 26, 2018 in U.S. Appl. No. 29/604,288. cited by applicant . Chinese Patent Office; Office Action dated Aug. 1, 2013 in Application No. 201080015699.9. cited by applicant . Chinese Patent Office; Office Action dated Jan. 21, 2014 in Application No. 201080015699.9. cited by applicant . Chinese Patent Office; Office Action dated Jul. 24, 2014 in Application No. 201080015699.9. cited by applicant . Chinese Patent Office; Office Action dated Dec. 10, 2013 in Application No. 201080020267.7. cited by applicant . Chinese Patent Office; Office Action dated Jan. 21, 2013 in Application No. 201080020268.1. cited by applicant . Chinese Patent Office; Office Action dated Sep. 26, 2013 in Application No. 201080020268.1. cited by applicant . Chinese Patent Office; Office Action dated Apr. 3, 2014 in Application No. 201080020268.1. cited by applicant . Chinese Patent Office; Office Action dated Sep. 23, 2014 in Application No. 201080020268.1. cited by applicant . Chinese Patent Office; Office Action dated Apr. 7, 2015 in Application No. 201080020268.1. cited by applicant . Chinese Patent Office; Office Action dated Dec. 4, 2015 in Application No. 201210201995.9. cited by applicant . Chinese Patent Office; Office Action dated Jul. 14, 2016 in Application No. 201210201995.9. cited by applicant . Chinese Patent Office; Office Action dated Jan. 20, 2017 in Application No. 201210201995.9. cited by applicant . Chinese Patent Office; Office Action dated Dec. 24, 2015 in Application No. 201280057466.4. cited by applicant . Chinese Patent Office; Office Action dated Dec. 4, 2015 in Application No. 201280057542.1. cited by applicant . Chinese Patent Office; Office Action dated May 16, 2016 in Application No. 201280057542.1. cited by applicant . Chinese Patent Office; Office Action dated Sep. 9, 2016 in Application No. 201280057542.1. cited by applicant . Chinese Patent Office; Office Action dated Dec. 5, 2016 in Application No. 201310412808.6. cited by applicant . Chinese Patent Office; Office Action dated Feb. 5, 2018 in Application No. 201410331047.6. cited by applicant . European Patent Office; Supplementary European Search Report and Opinion dated Nov. 9, 2012 in Application No. 08798519.8. cited by applicant . European Patent Office; Office Action dated Jul. 18, 2016 in Application No. 08798519.8. cited by applicant . European Patent Office; Extended European Search Report dated Dec. 9, 2016 in Application No. 9767208.3. cited by applicant . European Patent Office; Supplementary European Search Report and Opinion dated Jan. 5, 2017 in Application No. 09836647.9. cited by applicant . European Patent Office; Office Action dated Feb. 28, 2018 in Application No. 09836647.9. cited by applicant . Japanese Patent Office; Office Action dated Dec. 20, 2011 in Application No. 2010-522075. cited by applicant . Japanese Patent Office; Office Action dated Apr. 11, 2012 in Application No. 2010-522075. cited by applicant . Japanese Patent Office; Office Action dated May 31, 2012 in Application No. 2011-514650. cited by applicant . Japanese Patent Office; Office Action dated Sep. 11, 2012 in Application No. 2011-514650. cited by applicant . Japanese Patent Office; Office Action dated Dec. 25, 2013 in Application No. 2012-504786. cited by applicant . Japanese Patent Office; Office Action dated Mar. 11, 2013 in Application No. 2012-509857. cited by applicant . Korean Patent Office; Final Office Action dated Jun. 29, 2016 in Application No. 10-2010-0028336. cited by applicant . Korean Patent Office; Office Action dated Mar. 3, 2016 in Application No. 10-2010-0067768. cited by applicant . Korean Patent Office; Office Action dated Aug. 1, 2016 in Application No. 10-2010-0067768. cited by applicant . Korean Patent Office; Office Action dated May 2, 2016 in Application No. 10-2010-0082446. cited by applicant . Korean Patent Office; Office Action dated Sep. 19, 2016 in Application No. 10-2010-0082446. cited by applicant . Korean Patent Office; Office Action dated Nov. 24, 2017 in Application No. 10-20110036449. cited by applicant . Korean Patent Office; Office Action dated May 23, 2017 in Application No. 10-20110036449. cited by applicant . Korean Patent Office; Office Action dated Dec. 11, 2015 in Application No. 10-20117023416. cited by applicant . Korean Patent Office; Office Action dated Mar. 13, 2016 in Application No. 10-20117023416. cited by applicant . Korean Patent Office; Office Action dated Sep. 4, 2017 in Application No. 10-2011-0087600. cited by applicant . Korean Patent Office; Office Action dated Oct. 23, 2017 in Application No. 10-2011-0142924. cited by applicant . Korean Patent Office; Office Action dated Oct. 30, 2017 in Application No. 10-2012-0041878. cited by applicant . Korean Patent Office; Office Action dated Mar. 21, 2018 in Application No. 10-20120042518. cited by applicant . Korean Patent Office; Office Action dated Mar. 21, 2018 in Application No. 10-2012-0064526. cited by applicant . Korean Patent Office; Office Action dated Mar. 30, 2018 in Application No. 10-2012-0076564. cited by applicant . Korean Patent Office; Office Action dated Apr. 30, 2018 in Application No. 10-2012-0103114. cited by applicant . Korean Patent Office; Office Action dated Oct. 24, 2016 in Application No. 10-20127004062. cited by applicant . Korean Patent Office; Office Action dated Jul. 24, 2017 in Application No. 10-20127004062. cited by applicant . Korean Patent Office; Office Action dated Sep. 28, 2017 in Application No. 10-20147017112. cited by applicant . Korean Patent Office; Office Action dated Nov. 9, 2016 in Application No. 10-20167023913. cited by applicant . Korean Patent Office; Office Action dated Sep. 15, 2017 in Application No. 30-2017-0001320. cited by applicant . Korean Patent Office; Office Action dated Jul. 11, 2018 in Application No. 30-2018-006016. cited by applicant . Taiwanese Patent Office; Office Action dated Aug. 30, 2013 in Application No. 97132391. cited by applicant . Taiwanese Patent Office; Office Action dated Dec. 20, 2013 in Application No. 98117513. cited by applicant . Taiwanese Patent Office; Office Action dated Aug. 27, 2014 in Application No. 99114329. cited by applicant . Taiwanese Patent Office; Office Action dated Dec. 26, 2014 in Application No. 99114330. cited by applicant . Taiwanese Patent Office; Office Action dated Aug. 14, 2014 in Application No. 99114331. cited by applicant . Taiwanese Patent Office; Office Action received in Application No. 100113130. cited by applicant . Taiwanese Patent Office; Office Action dated Aug. 1, 2016 in Application No. 101124745. cited by applicant . Taiwanese Patent Office; Office Action received in Application No. 102113028. cited by applicant . Taiwanese Patent Office; Office Action received in Application No. 102115605. cited by applicant . Taiwanese Patent Office; Office Action dated Feb. 24, 2017 in Application No. 102115605. cited by applicant . Taiwanese Patent Office; Office Action received in Application No. 102125191. cited by applicant . Taiwanese Patent Office; Office Action dated Dec. 6, 2016 in Application No. 102126071. cited by applicant . Taiwanese Patent Office; Office Action dated May 17, 2018 in Application No. 102126071. cited by applicant . Taiwanese Patent Office; Office Action dated Feb. 10, 2017 in Application No. 102127065. cited by applicant . Taiwanese Patent Office; Office Action dated Mar. 11, 2016 in Application No. 102129262. cited by applicant . Taiwanese Patent Office; Office Action dated Dec. 29, 2016 in Application No. 102129397. cited by applicant . Taiwanese Patent Office; Office Action dated Nov. 4, 2016 in Application No. 102131839. cited by applicant . Taiwanese Patent Office; Office Action dated Nov. 11, 2016 in Application No. 102132952. cited by applicant . Taiwanese Patent Office; Office Action dated Dec. 2, 2016 in Application No. 102136496. cited by applicant . Taiwanese Patent Office; Office Action dated Jan. 10, 2018 in Application No. 102136496. cited by applicant . Taiwanese Patent Office; Office Action dated Jul. 17, 2017 in Application No. 103101400. cited by applicant . Taiwanese Patent Office; Office Action dated Feb. 23, 2017 in Application No. 103102563. cited by applicant . Taiwanese Patent Office; Office Action dated Mar. 3, 2017 in Application No. 103105251. cited by applicant . Taiwanese Patent Office; Office Action received in Application No. 103106021. cited by applicant . Taiwanese Patent Office; Office Action dated Oct. 31, 2017 in Application No. 103106022. cited by applicant . Taiwanese Patent Office; Office Action dated Jul. 5, 2017 in Application No. 103117477. cited by applicant . Taiwanese Patent Office; Office Action dated Nov. 22, 2017 in Application No. 103117478. cited by applicant . Taiwanese Patent Office; Office Action dated May 19, 2017 in Application No. 103120478. cited by applicant . Taiwanese Patent Office; Office Action dated Nov. 8, 2017 in Application No. 103124509. cited by applicant . Taiwanese Patent Office; Office Action dated Nov. 20, 2017 in Application No. 103127588. cited by applicant . Taiwanese Patent Office; Office Action dated Sep. 19, 2017 in Application No. 103127734. cited by applicant . Taiwanese Patent Office; Office Action dated Nov. 22, 2017 in Application No. 103134537. cited by applicant . Taiwanese Patent Office; Office Action dated Aug. 24, 2017 in Application No. 103136251. cited by applicant . Taiwanese Patent Office; Office Action dated Feb. 26, 2018 in Application No. 103138510. cited by applicant . Taiwanese Patent Office; Office Action dated May 21, 2018 in Application No. 103139014. cited by applicant . Taiwanese Patent Office; Office Action dated Jun. 22, 2018 in Application No. 104105533. cited by applicant . Taiwanese Patent Office; Office Action dated Jun. 13, 2018 in Application No. 104111910. cited by applicant . Taiwanese Patent Office; Office Action received in Application No. 106117181. cited by applicant . Guan et al., "Voltage gated ion and molecule transport in engineered nanochannels: theory, fabrication and applications," Nanotechnology 25 (2014) 122001. cited by applicant . Hudis, "Surface Crosslinking of Polyethylene Using a Hydrogen Glow Discharge," J. Appl. Polym. Sci., 16 (1972) 2397. cited by applicant . Mix et al., "Characterization of plasma-polymerized allyl alcohol polymers and copolymers with styrene," Adhes. Sci. Technol., 21 (2007), S. 487-507. cited by applicant . USPTO; Notice of Allowance dated Jun. 28, 2017 in U.S. Appl. No. 13/166,367. cited by applicant . USPTO; Non-Final Office Action dated Sep. 20, 2018 in U.S. Appl. No. 13/651,144. cited by applicant . USPTO; Notice of Allowance dated Aug. 13, 2018 in U.S. Appl. No. 13/941,226. cited by applicant . USPTO; Notice of Allowance dated Oct. 3, 2018 in U.S. Appl. No. 13/941,226. cited by applicant . USPTO; Notice of Allowance dated Aug. 29, 2018 in U.S. Appl. No. 14/090,750. cited by applicant . USPTO; Notice of Allowance dated Sep. 24, 2018 in U.S. Appl. No. 14/218,690. cited by applicant . USPTO; Final Office Action dated Sep. 5, 2018 in U.S. Appl. No. 14/752,712. cited by applicant . USPTO; Advisory Action dated Aug. 10, 2018 in U.S. Appl. No.14/829,565. cited by applicant . USPTO; Non-Final Office Action dated Sep. 6, 2018 in U.S. Appl. No. 14/829,565. cited by applicant . USPTO; Notice of Allowance dated Oct. 20, 2017 in U.S. Appl. No. 14/884,695. cited by applicant . USPTO; Notice of Allowance dated Oct. 4, 2018 in U.S. Appl. No. 14/919,536. cited by applicant . USPTO; Non-Final Office Action dated Aug. 27, 2018 in U.S. Appl. No. 15/067,028. cited by applicant . USPTO; Notice of Allowance dated Oct. 14, 2018 in U.S. Appl. No. 15/135,333. cited by applicant . USPTO; Notice of Allowance dated May 22, 2017 in U.S. Appl. No. 15/222,738. cited by applicant . USPTO; Notice of Allowance dated Sep. 10, 2018 in U.S. Appl. No. 15/222,749. cited by applicant . USPTO; Non-Final Office Action dated Oct. 1, 2018 in U.S. Appl. No. 15/222,780. cited by applicant . USPTO; Non-Final Office Action dated Sep. 13, 2018 in U.S. Appl. No. 15/262,990. cited by applicant . USPTO; Non-Final Office Action dated Oct. 3, 2017 in U.S. Appl. No. 15/388,410. cited by applicant . USPTO; Non-Final Office Action dated Sep. 20, 2018 in U.S. Appl. No. 15/410,503. cited by applicant . USPTO; Final Office Action dated Aug. 29, 2018 in U.S. Appl. No. 15/434,051. cited by applicant . USPTO; Non-Final Office Action dated Sep. 10, 2018 in U.S. Appl. No. 15/489,453. cited by applicant . USPTO; Notice of Allowance dated Jul. 18, 2018 in U.S. Appl. No. 15/640,239. cited by applicant . USPTO; Notice of Allowance dated Aug. 30, 2018 in U.S. Appl. No. 15/640,239. cited by applicant . USPTO; Non-Final Office Action dated Sep. 21, 2017 in U.S. Appl. No. 15/659,631. cited by applicant . USPTO; Non-Final Office Action dated Aug. 27, 2018 in U.S. Appl. No. 15/662,107. cited by applicant . USPTO; Requirement for Restriction dated Sep. 11, 2018 in U.S. Appl. No. 15/672,063. cited by applicant . USPTO; Requirement for Restriction dated Aug. 14, 2018 in U.S. Appl. No. 15/705,955. cited by applicant . USPTO; Non-Final Office Action dated Oct. 4, 2018 in U.S. Appl. No. 15/726,222. cited by applicant . USPTO; Restriction Requirement dated Aug. 31, 2018 in U.S. Appl. No. 15/795,056. cited by applicant . USPTO; Non-Final Office Action dated Jun. 26, 2018 in U.S. Appl. No. 15/796,693. cited by applicant . USPTO; Non-Final Office Action dated Sep. 10, 2018 in U.S. Appl. No. 15/836,547. cited by applicant . European Patent Office; Office Action dated Aug. 10, 2018 in Application No. 09767208.3. cited by applicant . Korean Patent Office; Office Action dated Apr. 2, 2018 in Application No. 10-2011-0036449. cited by applicant . Korean Patent Office; Office Action dated Sep. 18, 2018 in Application No. 10-2012-0064526. cited by applicant . Korean Patent Office; Office Action dated Sep. 27, 2018 in Application No. 10-2012-0076564. cited by applicant . Korean Patent Office; Office Action dated Sep. 28, 2017 in Application No. 10-2017-7023740. cited by applicant . Taiwanese Patent Office; Office Action dated Sep. 26, 2018 in Application No. 103132230. cited by applicant . Taiwanese Patent Office; Office Action dated May 21, 2018 Application No. 103139014. cited by applicant . Taiwanese Patent Office; Office Action dated Jul. 9, 2018 in Application No. 104107876. cited by applicant . Taiwanese Patent Office; Office Action dated Aug. 7, 2018 Application No. 104107888. cited by applicant . Taiwanese Patent Office; Office Action dated Jul. 9, 2018 in Application No. 104110326. cited by applicant . Taiwanese Patent Office; Office Action dated Jul. 11, 2018 in Application No. 104124377. cited by applicant . Taiwanese Patent Office; Office Action dated Jun. 25, 2018 in Application No. 106138800. cited by applicant . Taiwanese Patent Office; Office Action dated Aug. 31, 2018 in Application No. 10720809210. cited by applicant . WIPO; International Search Report and Written Opinion dated Jul. 9, 2018 in Application No. PCT/IB2018/000419. cited by applicant . WIPO; International Search Report and Written Opinion dated Sep. 14, 2018 in Application No. PCT/IB2017/001640. cited by applicant . Crystal IS "Application Note: Using UV Reflective Materials to Maximize Disinfection"; AN011; Jun. 16, 2016. cited by applicant . Kukli et al., "Properties of hafnium oxide films grown by atomic layer deposition from hafnium tetraiodide and oxygen". Journal of Applied Physics, vol. 92, No. 10, Nov. 15, 2002, pp. 5698-5703. cited by applicant . Liang et al. "Conversion of Metal Carbides to Carbide Derived Carbon by Reactive Ion Eching in Halogen Gas" Micro (MEMS) and Nanotechnologies for Space Applications, Thomas George et al. vol. 6223, 2006 pp. 62230J-I to 62230J-11 lines 3-14 in the "Abstract" section and lines 7-9 in the "Introduction" section of p. 1, lines 3-4 in the "Introduction" section and lines 3-4 in the "Experimental Procedure" sction of p. 2. cited by applicant . "Polyurethane HF"; webpage; no date. Cited in Notice of References dated May 18, 2017 in U.S. Appl. No. 14/884,695. cited by applicant . Xu et al., "14NM Metal Gate Film Stack Development and Challenges," SMIC et al. (2016). cited by applicant . EPO; Extended European Search Report dated Apr. 28, 2014 in Application No. 11162225.4. cited by applicant . EPO; Notice of Allowance dated Feb. 3, 2015 in Application No. 11162225.4. cited by applicant . IPOS; Notice of Allowance dated Aug. 14, 2017 in Application No. 10201401237. cited by applicant . JPO; Office Action dated Mar. 27, 2012 in Application No. 2009-532567. cited by applicant . JPO; Notice of Allowance dated Jul. 31, 2012 in Application No. 2009-532567. cited by applicant . JPO; Office Action dated May 9, 2013 in Application No. 2010058415. cited by applicant . JPO; Office Action dated Nov. 5, 2013 in Application No. 2010058415. cited by applicant . JPO; Office Action dated Aug. 29, 2014 in Application No. 2010058415. cited by applicant . JPO; Notice of Allowance dated Dec. 24, 2014 in Application No. 2010058415. cited by applicant . JPO; Office Action dated Aug. 26, 2013 in Application No. 2010-153754. cited by applicant . JPO; Office Action dated Nov. 5, 2013 in Application No. 2010-193285. cited by applicant . JPO; Notice of Allowance dated Apr. 2, 2013 in Application No. 2010-509478. cited by applicant . JPO; Office Action dated Aug. 31, 2015 in Application No. 2011-284831. cited by applicant . JPO; Notice of Allowance dated Mar. 9, 2016 in Application No. 2011-284831. cited by applicant . JPO; Notice of Allowance dated Dec. 21, 2012 in Application No. 2011-514650. cited by applicant . JPO; Office Action dated Dec. 15, 2014 in Application No. 2011090067. cited by applicant . JPO; Notice of Allowance dated May 1, 2015 in Application No. 2011090067. cited by applicant . JPO; Office Action dated Jul. 19, 2016 in Application No. 2012-153698. cited by applicant . JPO; Notice of Allowance dated Oct. 26, 2016 in Application No. 2012-153698. cited by applicant . JPO; Notice of Allowance dated Jun. 12, 2015 in Application No. 2012-504786. cited by applicant . JPO; Notice of Allowance dated Jul. 2, 2013 in Application No. 2012-509857. cited by applicant . JPO; Office Action dated May 31, 2017 in Application No. 2013-160173. cited by applicant . JPO; Notice of Allowance dated Aug. 25, 2017 in Application No. 2013-160173. cited by applicant . JPO; Office Action dated Jun. 15, 2017 in Application No. 2013-178344. cited by applicant . JPO; Office Action dated Jan. 29, 2018 in Application No. 2013-178344. cited by applicant . JPO; Notice of Allowance dated Aug. 21, 2018 in Application No. 2013-178344. cited by applicant . JPO; Office Action dated Apr. 10, 2018 in Application No. 2014-120675. cited by applicant . JPO; Notice of Allowance dated Jun. 12, 2018 in Application No. 2014-120675. cited by applicant . JPO; Office Action dated Apr. 3, 2018 in Application No. 2014-188835. cited by applicant . JPO; Notice of Allowance dated Jun. 12, 2018 in Application No. 2014-88835. cited by applicant . JPO; Office Action dated May 8, 2018 in Application No. 2014-205548. cited by applicant . JPO; Notice of Allowance dated May 22, 2018 in Application No. 2014-216540. cited by applicant . JPO; Office Action dated Jul. 31, 2018 in Application No. 2015-034774. cited by applicant . KIPO; Notice of Allowance dated Sep. 29, 2016 in Application No. 10-2010-0028336. cited by applicant . KIPO; Notice of Allowance dated Dec. 1, 2016 in Application No. 10-2010-0067768. cited by applicant . KIPO; Notice of Allowance dated Mar. 7, 2017 in Application No. 10-2010-0082446. cited by applicant . KIPO; Office Action dated Mar. 13, 2017 in Application No. 20110034612. cited by applicant . KIPO; Office Action dated Jul. 20, 2017 in Application No. 20110034612. cited by applicant . KIPO; Notice of Allowance dated Sep. 1, 2017 in Application No. 20110034612. cited by applicant . KIPO; Notice of Allowance dated Oct. 24, 2018 in Application No. 10-2011-0036449. cited by applicant . KIPO; Notice of Allowance dated Jan. 11, 2018 in Application No. 10-2011-0087600. cited by applicant . KIPO; Notice of Allowance dated Mar. 14, 2018 in Application No. 10-2011-0142924. cited by applicant . KIPO; Notice of Allowance dated Jun. 2, 0216 in Application No. 10-2011-7023416. cited by applicant . KIPO; Notice of Allowance dated Feb. 28, 2018 in Application No. 10-2012-0041878. cited by applicant . KIPO; Notice of Allowance dated May 30, 2018 in Application No. 10-2012-0042518. cited by applicant . KIPO; Office Action dated Dec. 13, 2018 in Application No. 10-2012-0064526. cited by applicant . KIPO; Notice of Allowance dated Nov. 22, 2018 in Application No. 10-2012-0103114. cited by applicant . KIPO; Notice of Allowance dated Feb. 23, 2018 in Application No. 10-2014-7017112. cited by applicant . KIPO; Notice of Allowance dated May 30, 2017 in Application No. 10-2016-7023913. cited by applicant . KIPO; Notice of Allowance dated Feb. 27, 2018 in Application No. 10-2017-0175442. cited by applicant . KIPO; Notice of Allowance dated Jul. 19, 2018 in Application No. 20187013945. cited by applicant . KIPO; Notice of Allowance dated Jan. 19, 2018 in Application No. 30-2017-0001320. cited by applicant . KIPO; Notice of Allowance dated Jul. 1, 2018 in Application No. 30-2017-0052872. cited by applicant . KIPO; Notice of Allowance dated Oct. 16, 2018 in Application No. 30-2018-0006016. cited by applicant . SIPO; Notice of Allowance dated May 8, 2015 in Application No. 201080015699.9. cited by applicant . SIPO; Notice of Allowance dated Aug. 22, 2014 in Application No. 201080020267.7. cited by applicant . SIPO; Notice of Allowance dated Oct. 16, 2015 in Application No. 201080020268.1. cited by applicant . SIPO; Notice of Allowance dated Oct. 24, 2014 in Application No. 201080036764.6. cited by applicant . SIPO; Notice of Allowance dated Aug. 26, 2015 in Application No. 201110155056. cited by applicant . SIPO; Notice of Allowance dated Apr. 13, 2017 in Application No. 201210201995.9. cited by applicant . SIPO; Notice of Allowance dated Jun. 16, 2016 in Application No. 201280057466.4. cited by applicant . SIPO; Notice of Allowance dated Jan. 3, 2017 in Application No. 201280057542.1. cited by applicant . SIPO; Notice of Allowance dated Jul. 20, 2017 in Application No. 201310412808.6. cited by applicant . SIPO; Notice of Allowance dated May 25, 2017 in Application No. 201730010308.9. cited by applicant . SIPO; Notice of Allowance dated Oct. 24, 2018 in Application No. 201830060972.9. cited by applicant . TIPO; Notice of Allowance dated Jun. 12, 2014 in Application No. 98117513. cited by applicant . TIPO; Notice of Allowance dated Feb. 24, 2016 in Application No. 99110511. cited by applicant . TIPO; Notice of Allowance dated Apr. 28, 2015 in Application No. 99114330. cited by applicant . TIPO; Notice of Allowance dated Oct. 16, 2015 in Application No. 99114331. cited by applicant . TIPO; Notice of Allowance dated Mar. 14, 2016 in Application No. 99127063. cited by applicant . TIPO; Notice of Allowance dated Jun. 29, 2016 in Applicaton No. 100113130. cited by applicant . TIPO; Notice of Allowance dated Oct. 14, 2015 in Application No. 100130472. cited by applicant . TIPO; Notice of Allowance dated Oct. 19, 2016 in Application No. 101124745. cited by applicant . TIPO; Notice of Allowance dated Nov. 2, 2016 in Application No. 101142581. cited by applicant . TIPO; Notice of Allowance dated Sep. 9, 2016 in Application No. 101142582. cited by applicant . TIPO; Notice of Allowance dated Feb. 13, 2017 in Application No. 102113028. cited by applicant . TIPO; Notice of Allowance dated Dec. 26, 2017 in Application No. 102115605. cited by applicant . TIPO; Notice of Allowance dated May 3, 2017 in Application No. 102129262. cited by applicant . TIPO; Notice of Allowance dated Aug. 24, 2018 in Application No. 102126071. cited by applicant . TIPO; Notice of Allowance dated Jul. 18, 2017 in Application No. 102127065. cited by applicant . TIPO; Notice of Allowance dated Aug. 29, 2017 in Application No. 102129397. cited by applicant . TIPO; Notice of Allowance dated Jan. 26, 2017 in Application No. 102131839. cited by applicant . TIPO; Notice of Allowance dated Apr. 19, 2017 in Application No. 102132952. cited by applicant . TIPO; Notice of Allowance dated Jan. 24, 2018 in Application No. 103101400. cited by applicant . TIPO; Notice of Allowance dated Nov. 30, 2017 in Application No. 103102563. cited by applicant . TIPO; Notice of Allowance dated Oct. 20, 2017 in Application No. 103105251. cited by applicant . TIPO; Notice of Allowance dated Apr. 10, 2018 in Application No. 103106021. cited by applicant . TIPO; Notice of Allowance dated Apr. 10, 2018 in Application No. 103106022. cited by applicant . TIPO; Notice of Allowance dated Jan. 22, 2018 in Application No. 103117477. cited by applicant . TIPO; Notice of Allowance dated Mar. 13, 2018 in Application No. 103117478. cited by applicant . TIPO; Notice of Allowance dated Sep. 25, 2017 in Application No. 103120478. cited by applicant . TIPO; Office Action dated Sep. 20, 2018 in Application No. 103123439. cited by applicant . TIPO; Office Action dated Apr. 25, 2018 in Application No. 103124509. cited by applicant . TIPO; Notice of Allowance dated Jun. 19, 2018 in Application No. 103127588. cited by applicant . TIPO; Notice of Allowance dated Dec. 11, 2017 in Application No. 103127734. cited by applicant . TIPO; Notice of Allowance dated Apr. 19, 2018 in Application No. 103134537. cited by applicant . TIPO; Notice of Allowance dated Oct. 17, 2017 in Application No. 103136251. cited by applicant . TIPO; Notice of Allowance dated Jun. 13, 2018 in Application No. 103138510. cited by applicant . TIPO; Notice of Allowance dated Sep. 11, 2018 in Application No. 103139014. cited by applicant . TIPO; Notice of Allowance dated Sep. 18, 2018 in Application No. 104111910. cited by applicant . TIPO; Notice of Allowance dated Dec. 5, 2017 in Application No. 105308015. cited by applicant . TIPO; Notice of Allowance dated Jun. 5, 2018 in Application No. 106117181. cited by applicant . TIPO; Office Action dated Sep. 28, 2018 in Application No. 106119537. cited by applicant . TIPO; Office Action dated Aug. 31, 2018 in Application No. 106138119. cited by applicant . TIPO; Office Action dated Oct. 3, 2018 in Application No. 106142731. cited by applicant . TIPO; Office Action dated Sep. 28, 2018 in Application No. 107112951. cited by applicant . TIPO; Notice of Allowance dated Aug. 29, 2018 in Application No. 107300633. cited by applicant . TIPO; Notice of Allowance dated Apr. 11, 2018 in Application No. 105308015D01. cited by applicant . USPTO; Non-Final Office Action dated Feb. 15, 2012 in U.S. Appl. No. 13/085,531. cited by applicant . USPTO; Notice of Allowance dated Jul. 12, 2012 in U.S. Appl. No. 13/085,531. cited by applicant . USPTO; Final Office Action dated Nov. 2, 2018 in U.S. Appl. No. 13/169,951. cited by applicant . USPTO; Final Office Action dated Nov. 1, 2018 in U.S. Appl. No. 14/219,839. cited by applicant . USPTO; Final Office Action dated Nov. 2, 2018 in U.S. Appl. No. 14/219,879. cited by applicant . USPTO; Final Office Action dated Nov. 28, 2018 in U.S. Appl. No. 14/508,489. cited by applicant . USPTO; Notice of Allowance dated Nov. 19, 2018 in U.S. Appl. No. 14/656,588. cited by applicant . USPTO; Notice of Allowance dated Nov. 19, 2018 in U.S. Appl. No. 14/919,536. cited by applicant . USPTO; Final Office Action dated Dec. 10, 2018 in U.S. Appl. No. 14/997,683. cited by applicant . USPTO; Final Office Action dated Oct. 19, 2018 in U.S. Appl. No. 15/060,412. cited by applicant . USPTO; Non-Final Office Action dated Sep. 26, 2018 in U.S. Appl. No. 15/074,813. cited by applicant . USPTO; Non-Final Office Action dated Nov. 23, 2018 in U.S. Appl. No. 15/135,258. cited by applicant . USPTO; Non-Final Office Action dated Oct. 9, 2018 in U.S. Appl. No. 15/182,504. cited by applicant . USPTO; Final Office Action dated Oct. 9, 2018 in U.S. Appl. No. 15/205,827. cited by applicant . USPTO; Non-Final Office Action dated Nov. 14, 2018 in U.S. Appl. No. 15/377,439. cited by applicant . USPTO; Notice of Allowance dated Nov. 14, 2018 in U.S. Appl. No. 15/388,410. cited by applicant . USPTO; Notice of Allowance dated Dec. 28, 2018 in U.S. Appl. No. 15/388,410. cited by applicant . USPTO; Restriction Requirement dated Dec. 5, 2018 in U.S. Appl. No. 15/402,993. cited by applicant . USPTO; Advisory Action dated Dec. 4, 2018 in U.S. Appl. No. 15/434,051. cited by applicant . USPTO; Notice of Allowance dated Nov. 30, 2018 in U.S. Appl. No. 15/472,750. cited by applicant . USPTO; Notice of Allowance dated Nov. 1, 2018 in U.S. Appl. No. 15/499,647. cited by applicant . USPTO; Notice of Allowance dated Nov. 15, 2018 in U.S. Appl. No. 15/499,647. cited by applicant . USPTO; Final Office Action dated Nov. 16, 2018 in U.S. Appl. No. 15/592,730. cited by applicant . USPTO; Restriction Requirement dated Oct. 10, 2018 in U.S. Appl. No. 15/615,489. cited by applicant . USPTO; Non-Final Office Action dated Nov. 9, 2018 in U.S. Appl. No. 15/636,307. cited by applicant . USPTO; Final Office Action dated Nov. 20, 2018 in U.S. Appl. No. 15/650,686. cited by applicant . USPTO; Non-Final Office Action dated Dec. 4, 2018 in U.S. Appl. No. 15/672,063. cited by applicant . USPTO; Restriction Requirement dated Oct. 15, 2018 in U.S. Appl. No. 15/672,119. cited by applicant . USPTO; Advisory Action dated Nov. 26, 2018 in U.S. Appl. No. 15/683,701. cited by applicant . USPTO; Non-Final Office Action dated Dec. 18, 2018 in U.S. Appl. No. 15/690,017. cited by applicant . USPTO; Non-Final Office Action dated Dec. 6, 2018 in U.S. Appl. No. 15/705,955. cited by applicant . USPTO; Notice of Allowance dated Dec. 6, 2018 in U.S. Appl. No. 15/711,989. cited by applicant . USPTO; Final Office Action dated Dec. 13, 2018 in U.S. Appl. No. 15/719,208. cited by applicant . USPTO; Final Office Action dated Nov. 14, 2018 in U.S. Appl. No. 15/726,959. cited by applicant . USPTO; Non-Final Office Action dated Nov. 28, 2018 in U.S. Appl. No. 15/795,056. cited by applicant . USPTO; Non-Final Office Action dated Sep. 26, 2018 in U.S. Appl. No. 15/832,188. cited by applicant . USPTO; Notice of Allowance dated Dec. 10, 2018 in U.S. Appl. No. 15/863,340. cited by applicant . USPTO; Restriction Requirement dated Dec. 13, 2018 in U.S. Appl. No. 15/886,225. cited by applicant . USPTO; Non-Final Office Action dated Nov. 15, 2018 in U.S. Appl. No. 15/890,037. cited by applicant . USPTO; Restriction Requirement dated Oct. 9, 2018 in U.S. Appl. No. 15/892,756. cited by applicant . USPTO; Restriction Requirement dated Nov. 26, 2018 in U.S. Appl. No. 15/917,262. cited by applicant . USPTO; Restriction Requirement dated Nov. 2, 2018 in U.S. Appl. No. 16/018,692. cited by applicant . WIPO; International Search Report and Written Opinion dated Nov. 6, 2018 in Application No. PCT/IB2017/001652. cited by applicant . Beynet et al. "Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning," Proceedings of SPIE, 7520, (2009). cited by applicant . Gupta et al., "Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes," Journal of Applied Physics, 124, 084503 (2018). cited by applicant . MacKenzie et al. "Stress Control of Si-Based PEVCD Dielectrics," Proc. Symp. Silicon Nitrode and Silicon Dioxide Thin Insulating Films & Other Emerging Dielectrics VIII, 148-159 (2005). cited by applicant.

Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Snell & Wilmer L.L.P.

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