Top cover of a load lock chamber

Description

FIG. 1 is a perspective view of a first embodiment of the top cover of a load lock chamber;

FIG. 2 is a front view of the first embodiment;

FIG. 3 is a rear view of the first embodiment;

FIG. 4 is a right side view of the first embodiment;

FIG. 5 is a left side view of the first embodiment;

FIG. 6 is a top view of the first embodiment;

FIG. 7 is a bottom view of the first embodiment;

FIG. 8 is a sectional view of the first embodiment taken along line VIII-VIII of FIG. 2;

FIG. 9 is a perspective view of a second embodiment of the top cover of a load lock chamber;

FIG. 10 is a front view of the second embodiment;

FIG. 11 is a rear view of the second embodiment;

FIG. 12 is a right side view of the second embodiment;

FIG. 13 is a left side view of the second embodiment;

FIG. 14 is a top view of the second embodiment;

FIG. 15 is a bottom view of the second embodiment; and,

FIG. 16 is a sectional view of the second embodiment taken along line XVI-XVI of FIG. 10.

Claims

CLAIM The ornamental design for a top cover for a load lock chamber, as shown and described.

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Inventors:	Hirakida; Junichi (Shinagawa-ku, JP)
Applicant:	Name City State Country Type HIRATA CORPORATION Shinagawa-ku N/A JP
Assignee:	HIRATA CORPORATION (Shinagawa-Ku, Tokyo, JP)
Appl. No.:	D/468,197
Filed:	September 27, 2013

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Foreign Application Priority Data

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Mar 28, 2013 [JP]			2013-007035
Mar 28, 2013 [JP]			2013-007036

Current U.S. Class:	D15/138
Current International Class:	1509
Field of Search:	;D13/182 ;D15/138

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References Cited [Referenced By]

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Other References

http://www.arios.co.jp/products/ed.html; Product Introduction of Arios Kabushiki Kaisha and English translation (4 pages). cited by applicant . RORZE with English translation (2 pages). cited by applicant . RORZE Vacuum Platform (1 page). cited by applicant.

Primary Examiner: Palasik; Patricia
Attorney, Agent or Firm: Buchanan Ingersoll & Rooney PC