Electrode member for a plasma processing apparatus

Description

FIG. 1 is a front view of an electrode member for a plasma processing apparatus showing my new design, the rear view being identical.

FIG. 2 is a right side view of the electrode member for a plasma processing apparatus of FIG. 1, the left side view being identical.

FIG. 3 is a top plan view of the electrode member for a plasma processing apparatus of FIG. 1.

FIG. 4 is a bottom plan view of the electrode member for a plasma processing apparatus of FIG. 1.

FIG. 5 is a cross sectional view of the electrode member for a plasma processing apparatus of FIG. 1 taken along line 1-1 of FIG. 3; and,

FIG. 6 is a perspective view of the electrode member for a plasma processing apparatus of FIG. 1.

Claims

CLAIM The ornamental design for a electrode member for a plasma processing apparatus, as shown and described.

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Inventors:	Nagakubo; Keiichi (Nirasaki, JP)
Applicant:	Name City State Country Type Nagakubo; Keiichi Nirasaki N/A JP
Assignee:	Tokyo Electron Limited (Tokyo, JP)
Appl. No.:	D/417,071
Filed:	March 29, 2012

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Foreign Application Priority Data

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Sep 30, 2011 [JP]			D2011-022449

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;D15/144,144.1,199 ;118/715 ;414/935-941,147,217 ;156/345.53 ;279/128 ;361/230,233,234 ;204/193,194,279,280,281,282,283,284,285,286.1,297.01 ;205/118,123 ;200/293,302.1,308

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References Cited [Referenced By]

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U.S. Patent Documents

D363464	October 1995	Fukasawa
D404370	January 1999	Kimura
D404372	January 1999	Ishii
6815352	November 2004	Tamura et al.
6818097	November 2004	Yamaguchi et al.
D546784	July 2007	Hayashi
D548705	August 2007	Hayashi
D556704	December 2007	Nakamura et al.
D557226	December 2007	Uchino et al.
7479304	January 2009	Sun et al.
D606952	December 2009	Lee et al.
D609652	February 2010	Nagasaka et al.
D609655	February 2010	Sugimoto
D614593	April 2010	Lee et al.
D648289	November 2011	Mayer et al.
D654883	February 2012	Honma et al.
D654884	February 2012	Honma et al.
D655257	March 2012	Honma et al.
D655259	March 2012	Honma et al.
2003/0066484	April 2003	Morikage et al.

Foreign Patent Documents

	471052		Jan 2002		TW
	201001525		Jan 2010		TW

Other References

Taiwan Office Action, Application D101301750, mailed Oct. 24, 2012. cited by applicant.

Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Leydig, Voit & Mayer, Ltd.