U.S. patent number D553,104 [Application Number D/215,644] was granted by the patent office on 2007-10-16 for absorption board for an electric chuck used in semiconductor manufacture.
This patent grant is currently assigned to Tokyo Electron Limited. Invention is credited to Shunsuke Mizukami, Kaoru Oohashi, Takehiro Ueda.
United States Patent |
D553,104 |
Oohashi , et al. |
October 16, 2007 |
Absorption board for an electric chuck used in semiconductor
manufacture
Claims
CLAIM We claim the ornamental design for an absorption board for an
electric chuck used in semiconductor manufacture, as shown.
Inventors: |
Oohashi; Kaoru (Nirasaki,
JP), Mizukami; Shunsuke (Nirasaki, JP),
Ueda; Takehiro (Nirasaki, JP) |
Assignee: |
Tokyo Electron Limited (Tokyo,
JP)
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Appl.
No.: |
D/215,644 |
Filed: |
October 19, 2004 |
Foreign Application Priority Data
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Apr 21, 2004 [JP] |
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2004-012083 |
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Current U.S.
Class: |
D13/182 |
Current International
Class: |
1303 |
Field of
Search: |
;D13/182 ;156/345.53
;279/128 ;361/234 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
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D1041644 |
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Jun 1999 |
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JP |
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2004-047653 |
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Feb 2004 |
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JP |
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D1197395 |
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Feb 2004 |
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JP |
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Primary Examiner: Sikder; Selina
Attorney, Agent or Firm: Ladas and Parry LLP
Description
FIG. 1 is a perspective view of an absorption board for an electric
chuck used in semiconductor manufacture.
FIG. 2 is a front elevational view thereof.
FIG. 3 is a rear elevational view thereof.
FIG. 4 is a right side elevational view thereof, the left side
elevational view being a mirror image and not shown; and,
FIG. 5 is a top plan view thereof, the bottom plan view being a
mirror image and not shown.
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