OOHASHI; Kaoru

Patent Applications and Registrations

Patent applications and USPTO patent grants for OOHASHI; Kaoru.The latest application filed is for "plasma processing apparatus and heater temperature control method".

Company Profile

2.20.17

OOHASHI; Kaoru - Miyagi JP
Oohashi; Kaoru - Yamanashi JP
Oohashi; Kaoru - Kurokawa-gun JP
Oohashi; Kaoru - Miyagi-gun JP
Oohashi; Kaoru - Nirasaki N/A JP
Oohashi; Kaoru - Nirasaki-shi JP
Oohashi; Kaoru - Okazaki JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma Processing Apparatus And Heater Temperature Control Method App 20200219740 - OOHASHI; Kaoru	2020-07-09
Plasma processing apparatus and heater temperature control method Grant 10,629,464 - Oohashi	2020-04-21
Assembly Provided With Coolant Flow Channel, Method Of Controlling Assembly Provided With Coolant Flow Channel, And Substrate Processing Apparatus App 20190066985 - HIROSE; Jun ; et al.	2019-02-28
Plasma Processing Apparatus And Heater Temperature Control Method App 20180301362 - OOHASHI; Kaoru	2018-10-18
Plasma processing apparatus and heater temperature control method Grant 10,026,631 - Oohashi July 17, 2	2018-07-17
Plasma processor and plasma processing method Grant 9,728,381 - Kikuchi , et al. August 8, 2	2017-08-08
Plasma Processing Apparatus And Heater Temperature Control Method App 20170213751 - OOHASHI; Kaoru	2017-07-27
Plasma processor and plasma processing method Grant 9,437,402 - Kikuchi , et al. September 6, 2	2016-09-06
Electrostatic chuck device Grant 9,412,635 - Sasaki , et al. August 9, 2	2016-08-09
Plasma Processing Apparatus And Heater Temperature Control Method App 20150132863 - Oohashi; Kaoru	2015-05-14
Plasma Processor And Plasma Processing Method App 20150083332 - KIKUCHI; Akihiro ; et al.	2015-03-26
Plasma Processor And Plasma Processing Method App 20150083333 - KIKUCHI; Akihiro ; et al.	2015-03-26
Electrostatic Chuck Device App 20140376148 - Sasaki; Yasuharu ; et al.	2014-12-25
Plasma processor and plasma processing method Grant 8,904,957 - Kikuchi , et al. December 9, 2	2014-12-09
Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism Grant 8,869,376 - Ueda , et al. October 28, 2	2014-10-28
Substrate Mounting Table And Method For Manufacturing Same, Substrate Processing Apparatus, And Fluid Supply Mechanism App 20130299083 - UEDA; Takehiro ; et al.	2013-11-14
Apparatus and method for evaluating a substrate mounting device Grant 8,573,836 - Sasaki , et al. November 5, 2	2013-11-05
Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism Grant 8,491,752 - Ueda , et al. July 23, 2	2013-07-23
Plasma Processor And Plasma Processing Method App 20130174983 - KIKUCHI; Akihiro ; et al.	2013-07-11
Plasma processor and plasma processing method Grant 8,387,562 - Kikuchi , et al. March 5, 2	2013-03-05
Plasma Processor And Plasma Processing Method App 20120006492 - KIKUCHI; Akihiro ; et al.	2012-01-12
Plasma procesor and plasma processing method Grant 8,056,503 - Kikuchi , et al. November 15, 2	2011-11-15
Substrate mounting table, substrate processing apparatus and substrate processing method Grant 7,815,740 - Oohashi , et al. October 19, 2	2010-10-19
Substrate supporting member and substrate processing apparatus Grant 7,718,007 - Oohashi , et al. May 18, 2	2010-05-18
Substrate Mounting Table And Method For Manufacturing Same, Substrate Processing Apparatus, And Fluid Supply Mechanism App 20080142160 - UEDA; Takehiro ; et al.	2008-06-19
Method For Manufacturing Substrate Mounting Table App 20080145556 - NAGAYAMA; Nobuyuki ; et al.	2008-06-19
Apparatus And Method For Evaluating A Substrate Mounting Device App 20080098833 - Sasaki; Yasuharu ; et al.	2008-05-01
Absorption board for an electric chuck used in semiconductor manufacture Grant D553,104 - Oohashi , et al. October 16, 2	2007-10-16
Substrate supporting member and substrate processing apparatus App 20060207507 - Oohashi; Kaoru ; et al.	2006-09-21
Substrate mounting table, substrate processing apparatus and substrate processing method App 20060207725 - Oohashi; Kaoru ; et al.	2006-09-21
Plasma procesor and plasma processing method App 20040177927 - Kikuchi, Akihiro ; et al.	2004-09-16
Vehicle height control system Grant 4,618,156 - Kato , et al. October 21, 1	1986-10-21
Vehicle height control system Grant 4,611,815 - Sasage , et al. September 16, 1	1986-09-16
Vehicle height control system Grant 4,593,920 - Natsume , et al. June 10, 1	1986-06-10

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