Absorption board for an electric chuck used in semiconductor manufacture

Description

FIG. 1 is a perspective view of an absorption board for an electric chuck used in semiconductor manufacture.

FIG. 2 is a front elevational view thereof.

FIG. 3 is a rear elevational view thereof.

FIG. 4 is a right side elevational view thereof, the left side elevational view being a mirror image and not shown; and,

FIG. 5 is a top plan view thereof, the bottom plan view being a mirror image and not shown.

Claims

CLAIM We claim the ornamental design for an absorption board for an electric chuck used in semiconductor manufacture, as shown.

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Inventors:	Oohashi; Kaoru (Nirasaki, JP), Mizukami; Shunsuke (Nirasaki, JP), Ueda; Takehiro (Nirasaki, JP)
Assignee:	Tokyo Electron Limited (Tokyo, JP)
Appl. No.:	D/215,644
Filed:	October 19, 2004

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Foreign Application Priority Data

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Apr 21, 2004 [JP]			2004-012083

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;156/345.53 ;279/128 ;361/234

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References Cited [Referenced By]

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U.S. Patent Documents

3078565	February 1963	Sanders
4502094	February 1985	Lewin et al.
5350479	September 1994	Collins et al.
5671116	September 1997	Husain
6033478	March 2000	Kholodenko
6278600	August 2001	Shamouilian et al.
6628503	September 2003	Sogard
6721162	April 2004	Weldon et al.
2002/0027762	March 2002	Yamaguchi
2002/0159217	October 2002	Tsuruta et al.
2004/0177927	September 2004	Kikuchi et al.
2004/0179323	September 2004	Litman et al.
2004/0190215	September 2004	Weldon et al.
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2005/0146277	July 2005	Ueda et al.
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2006/0164785	July 2006	Pellegrin
2006/0221539	October 2006	Morita et al.

Foreign Patent Documents

	D1041644		Jun 1999		JP
	2004-047653		Feb 2004		JP
	D1197395		Feb 2004		JP

Primary Examiner: Sikder; Selina
Attorney, Agent or Firm: Ladas and Parry LLP