Ueda; Takehiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ueda; Takehiro.The latest application filed is for "vacuum processing apparatus and maintenance apparatus".

Company Profile

10.57.67

Ueda; Takehiro - Miyagi JP
Ueda; Takehiro - Tokyo JP
UEDA; Takehiro - Kurokawa-gun JP
Ueda; Takehiro - Shiga JP
Ueda; Takehiro - Yamanashi JP
Ueda; Takehiro - Kanagawa JP
Ueda; Takehiro - Kawasaki N/A JP
Ueda; Takehiro - Nirasaki N/A JP
Ueda; Takehiro - Nirasaki-shi JP
Ueda; Takehiro - Yamanashi-ken JP
Ueda; Takehiro - Kanawaga JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate support and plasma processing apparatus Grant 11,443,925 - Ueda , et al. September 13, 2	2022-09-13
Semiconductor device with electrode plating deposition Grant 11,387,334 - Ueda July 12, 2	2022-07-12
Vacuum Processing Apparatus And Maintenance Apparatus App 20220216035 - UEDA; Takehiro ; et al.	2022-07-07
Vacuum processing apparatus and maintenance apparatus Grant 11,309,168 - Ueda , et al. April 19, 2	2022-04-19
Substrate Support, Substrate Processing Apparatus, And Substrate Processing Method App 20220108879 - UEDA; Takehiro	2022-04-07
Support assembly and support assembly assembling method Grant 11,201,038 - Ueda December 14, 2	2021-12-14
Mounting apparatus for object to be processed and processing apparatus Grant 11,201,039 - Ueda December 14, 2	2021-12-14
Plasma Processing Apparatus App 20210358779 - UEDA; Takehiro	2021-11-18
Semiconductor device Grant 11,175,321 - Ueda November 16, 2	2021-11-16
Substrate Support Assembly, Substrate Processing Apparatus, And Substrate Processing Method App 20210335645 - UEDA; Takehiro	2021-10-28
Semiconductor Device App 20210336017 - UEDA; Takehiro	2021-10-28
Plasma processing apparatus Grant 11,121,010 - Ueda September 14, 2	2021-09-14
Stage And Plasma Processing Apparatus App 20210280449 - UEDA; Takehiro	2021-09-09
Substrate support, substrate processing apparatus, substrate processing system, and method of detecting erosion of adhesive in substrate support Grant 11,037,767 - Ueda June 15, 2	2021-06-15
Gas cylinder Grant 10,968,925 - Ueda , et al. April 6, 2	2021-04-06
Maintenance Device App 20200402764 - UEDA; Takehiro ; et al.	2020-12-24
Substrate Support And Plasma Processing Apparatus App 20200365380 - UEDA; Takehiro ; et al.	2020-11-19
Substrate Support, Substrate Processing Apparatus, Substrate Processing System, And Method Of Detecting Erosion Of Adhesive In S App 20200185204 - UEDA; Takehiro	2020-06-11
Mounting Table And Charge Neutralization Method For Target Object App 20200163193 - UEDA; Takehiro	2020-05-21
Camera module Grant 10,423,051 - Tahara , et al. Sept	2019-09-24
Vacuum Processing Apparatus And Exhaust Control Method App 20190273004 - Ueda; Takehiro	2019-09-05
Semiconductor device and method of manufacturing semiconductor device Grant 10,396,153 - Ueda A	2019-08-27
Semiconductor device and method of manufacturing semiconductor device Grant 10,396,190 - Ueda , et al. A	2019-08-27
Plasma Processing Apparatus App 20190252218 - UEDA; Takehiro	2019-08-15
Mounting Apparatus For Object To Be Processed And Processing Apparatus App 20190252159 - UEDA; Takehiro	2019-08-15
Plasma Etching Apparatus And Plasma Etching Method App 20190198298 - HIROSE; Jun ; et al.	2019-06-27
Support Assembly And Support Assembly Assembling Method App 20190172688 - UEDA; Takehiro	2019-06-06
Gas Cylinder App 20190010967 - UEDA; Takehiro ; et al.	2019-01-10
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20190006500 - UEDA; Takehiro ; et al.	2019-01-03
Switching device with surge recirculation device and surge recirculation line Grant 10,135,435 - Ueda November 20, 2	2018-11-20
Plasma Processing Apparatus App 20180315640 - UEDA; Takehiro ; et al.	2018-11-01
Semiconductor Device And Method Of Manufacturing Semiconductor Device App 20180286948 - UEDA; Takehiro	2018-10-04
Camera Module App 20180231872 - TAHARA; HIROYUKI ; et al.	2018-08-16
Vacuum Processing Apparatus And Maintenance Apparatus App 20180233328 - UEDA; Takehiro ; et al.	2018-08-16
Plasma Processing Apparatus App 20180190501 - UEDA; Takehiro	2018-07-05
Mounting Table And Plasma Processing Apparatus App 20180166259 - Ueda; Takehiro	2018-06-14
Switching Device App 20180159525 - UEDA; Takehiro	2018-06-07
Plasma processor and plasma processing method Grant 9,728,381 - Kikuchi , et al. August 8, 2	2017-08-08
Semiconductor device having a fuse element Grant 9,620,449 - Ueda April 11, 2	2017-04-11
Plasma processor and plasma processing method Grant 9,437,402 - Kikuchi , et al. September 6, 2	2016-09-06
Semiconductor Device Having A Fuse Element App 20160035673 - UEDA; Takehiro	2016-02-04
Semiconductor device having a fuse element Grant 9,177,912 - Ueda November 3, 2	2015-11-03
Semiconductor device, method of cutting electrical fuse, and method of determining electrical fuse state Grant 9,000,559 - Ueda April 7, 2	2015-04-07
Plasma Processor And Plasma Processing Method App 20150083333 - KIKUCHI; Akihiro ; et al.	2015-03-26
Plasma Processor And Plasma Processing Method App 20150083332 - KIKUCHI; Akihiro ; et al.	2015-03-26
Plasma processor and plasma processing method Grant 8,904,957 - Kikuchi , et al. December 9, 2	2014-12-09
Method of manufacturing a semiconductor device including concave portion Grant 8,871,592 - Ueda , et al. October 28, 2	2014-10-28
Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism Grant 8,869,376 - Ueda , et al. October 28, 2	2014-10-28
Semiconductor device Grant 8,742,465 - Ueda June 3, 2	2014-06-03
Semiconductor Device Having A Fuse Element App 20140077335 - UEDA; Takehiro	2014-03-20
Semiconductor device having a fuse element Grant 8,610,178 - Ueda December 17, 2	2013-12-17
Substrate Mounting Table And Method For Manufacturing Same, Substrate Processing Apparatus, And Fluid Supply Mechanism App 20130299083 - UEDA; Takehiro ; et al.	2013-11-14
Apparatus and method for evaluating a substrate mounting device Grant 8,573,836 - Sasaki , et al. November 5, 2	2013-11-05
Semiconductor Device With Gate Electrode Including A Concave Portion App 20130288445 - Ueda; Takehiro ; et al.	2013-10-31
Substrate Mounting Table And Plasma Etching Apparatus App 20130220545 - Koizumi; Katsuyuki ; et al.	2013-08-29
Substrate mounting table and method for manufacturing same, substrate processing apparatus, and fluid supply mechanism Grant 8,491,752 - Ueda , et al. July 23, 2	2013-07-23
Plasma Processor And Plasma Processing Method App 20130174983 - KIKUCHI; Akihiro ; et al.	2013-07-11
Semiconductor device with gate electrode including a concave portion Grant 8,476,701 - Ueda , et al. July 2, 2	2013-07-02
Semiconductor Device Having A Fuse Element App 20130105940 - UEDA; Takehiro	2013-05-02
Plasma processor and plasma processing method Grant 8,387,562 - Kikuchi , et al. March 5, 2	2013-03-05
Method for cutting an electric fuse Grant 8,372,730 - Ueda February 12, 2	2013-02-12
Semiconductor Device App 20130026613 - UEDA; Takehiro	2013-01-31
Semiconductor device having a fuse element Grant 8,362,524 - Ueda January 29, 2	2013-01-29
Semiconductor device and method of cutting electrical fuse Grant 8,299,569 - Ueda October 30, 2	2012-10-30
Semiconductor Device With Electric Fuse Having A Flowing-out Region App 20120267755 - UEDA; Takehiro	2012-10-25
Method for cutting electric fuse Grant 8,236,622 - Ueda August 7, 2	2012-08-07
Plasma Processor And Plasma Processing Method App 20120006492 - KIKUCHI; Akihiro ; et al.	2012-01-12
Semiconductor device and method of manufacturing the semiconductor device App 20110284951 - Ueda; Takehiro ; et al.	2011-11-24
Plasma procesor and plasma processing method Grant 8,056,503 - Kikuchi , et al. November 15, 2	2011-11-15
Semiconductor Device Having A Fuse Element App 20110266653 - UEDA; Takehiro	2011-11-03
Semiconductor Device And Method Of Cutting Electrical Fuse App 20110267136 - UEDA; Takehiro	2011-11-03
Method For Cutting An Electric Fuse App 20110250735 - Ueda; Takehiro	2011-10-13
Method of cutting electrical fuse Grant 7,998,798 - Ueda August 16, 2	2011-08-16
Semiconductor device having a fuse element Grant 7,994,544 - Ueda August 9, 2	2011-08-09
Semiconductor device and method for cutting electric fuse Grant 7,989,913 - Ueda August 2, 2	2011-08-02
Semiconductor device and method of fabricating the same Grant 7,835,211 - Ueda November 16, 2	2010-11-16
Semiconductor device Grant 7,795,699 - Ueda September 14, 2	2010-09-14
Method Of Cutting An Electrical Fuse App 20100159673 - Ueda; Takehiro	2010-06-24
Semiconductor device and method of cutting electrical fuse Grant 7,728,407 - Ueda June 1, 2	2010-06-01
Semiconductor device and method for determining fuse state Grant 7,679,871 - Okada , et al. March 16, 2	2010-03-16
Method For Cutting Electric Fuse App 20100037454 - UEDA; Takehiro	2010-02-18
Electrostatic chuck Grant 7,646,581 - Sasaki , et al. January 12, 2	2010-01-12
Semiconductor device with electric fuse having a flowing-out region Grant 7,635,907 - Ueda December 22, 2	2009-12-22
Semiconductor device Grant 7,619,264 - Ueda November 17, 2	2009-11-17
Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system Grant 7,592,261 - Ueda , et al. September 22, 2	2009-09-22
Semiconductor device and method of fabricating the same App 20090174029 - Ueda; Takehiro	2009-07-09
Semiconductor Device App 20090146251 - UEDA; Takehiro	2009-06-11
Semiconductor device and method of fabricating the same Grant 7,529,147 - Ueda May 5, 2	2009-05-05
Semiconductor device Grant 7,515,497 - Ueda April 7, 2	2009-04-07
Semiconductor device and method of manufacturing the same Grant 7,489,230 - Ueda February 10, 2	2009-02-10
Apparatus And Method For Testing A Temperature Monitoring Substrate App 20080212640 - Sasaki; Yasuharu ; et al.	2008-09-04
Semiconductor device Grant 7,411,851 - Ueda August 12, 2	2008-08-12
Method For Manufacturing Substrate Mounting Table App 20080145556 - NAGAYAMA; Nobuyuki ; et al.	2008-06-19
Substrate Mounting Table And Method For Manufacturing Same, Substrate Processing Apparatus, And Fluid Supply Mechanism App 20080142160 - UEDA; Takehiro ; et al.	2008-06-19
Semiconductor Device And Method Of Cutting Electrical Fuse App 20080122027 - Ueda; Takehiro	2008-05-29
Semiconductor device including fuse and method for testing the same capable of suppressing erroneous determination Grant 7,376,036 - Ueda May 20, 2	2008-05-20
Mounting Device, Plasma Processing Apparatus And Plasma Processing Method App 20080106842 - ITO; Hiroharu ; et al.	2008-05-08
Apparatus And Method For Evaluating A Substrate Mounting Device App 20080098833 - Sasaki; Yasuharu ; et al.	2008-05-01
Semiconductor device and method for determining fuse state App 20070278617 - Okada; Norio ; et al.	2007-12-06
Semiconductor device, method of cutting electrical fuse, and method of determining electrical fuse state App 20070278616 - Ueda; Takehiro	2007-12-06
Semiconductor device and method for cutting electric fuse App 20070262414 - Ueda; Takehiro	2007-11-15
Semiconductor device and method for cutting electric fuse App 20070262357 - Ueda; Takehiro	2007-11-15
Semiconductor device Grant 7,282,751 - Ueda October 16, 2	2007-10-16
Absorption board for an electric chuck used in semiconductor manufacture Grant D553,104 - Oohashi , et al. October 16, 2	2007-10-16
Semiconductor device having a fuse element App 20070222029 - Ueda; Takehiro	2007-09-27
Electrostatic Chuck App 20070217114 - Sasaki; Yasuharu ; et al.	2007-09-20
Semiconductor device and method of fabricating the same App 20070108550 - Ueda; Takehiro	2007-05-17
Semiconductor device App 20070052063 - Ueda; Takehiro	2007-03-08
Semiconductor device and method of manufacturing the same App 20070052515 - Ueda; Takehiro	2007-03-08
Semiconductor device including fuse and method for testing the same capable of suppressing erroneous determination App 20060200717 - Ueda; Takehiro	2006-09-07
Semiconductor device App 20060171228 - Ueda; Takehiro	2006-08-03
Semiconductor device App 20060171229 - Ueda; Takehiro	2006-08-03
Method for suppressing charging of component in vacuum processing chamber of plasma processing system and plasma processing system App 20050146277 - Ueda, Takehiro ; et al.	2005-07-07
Semiconductor device App 20050029620 - Ueda, Takehiro	2005-02-10
Semiconductor device App 20040262710 - Ueda, Takehiro	2004-12-30
Semiconductor storage device App 20040245555 - Ueda, Takehiro	2004-12-09
Plasma procesor and plasma processing method App 20040177927 - Kikuchi, Akihiro ; et al.	2004-09-16