U.S. patent number D643,055 [Application Number D/324,405] was granted by the patent office on 2011-08-09 for heater block for use in a semiconductor processing tool. This patent grant is currently assigned to ASM Japan K.K.. Invention is credited to Satoshi Takahashi.
United States Patent | D643,055 |
Takahashi | August 9, 2011 |
Inventors: | Takahashi; Satoshi (Hachioji, JP) |
---|---|
Assignee: | ASM Japan K.K. (Tokyo,
JP) |
Appl. No.: | D/324,405 |
Filed: | September 11, 2008 |
Current U.S. Class: | D15/199 |
Current International Class: | 1599 |
Field of Search: | ;D15/144,199 ;29/827,843 ;219/392 ;228/180.22 ;438/21,617 |
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US. Appl. No. 12/051,769, filed Mar. 19, 2008, Heater Block for Use in a Semiconductor Processing Tool, Satoshi Takahashi. cited by other. |
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