Target profile for a physical vapor deposition chamber target

Description

FIG. 1 is a top perspective view of a target profile for a physical vapor deposition chamber target showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right elevation view thereof;

FIG. 6 is a left elevation view thereof;

FIG. 7 is a front elevation view thereof;

FIG. 8 is a back elevation view thereof; and,

FIG. 9 is an enlarged cross sectional view taken along line 9-9 in FIG. 4.

The dashed lines in FIGS. 1-9 represent unclaimed environment and form no part of the claimed design.

Claims

CLAIM The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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Inventors:	Johanson; William R. (Gilroy, CA), Savandaiah; Kirankumar Neelasandra (Bangalore, IN), Prabhu; Prashant Prabhakar (Karwar, IN)
Applicant:	Name City State Country Type APPLIED MATERIALS, INC. Santa Clara CA US
Assignee:	APPLIED MATERIALS, INC. (Santa Clara, CA)
Appl. No.:	D/726,094
Filed:	February 28, 2020

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Related U.S. Patent Documents

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	Application Number	Filing Date	Patent Number	Issue Date
	29639953	Mar 9, 2018	D877101

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Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;D15/144.1,144.2,199

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Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Moser Taboada

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