Wafer holder for stepper

Description

FIG. 1 is a front view of a wafer holder for a stepper showing my new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a front perspective view thereof, wherein each of the three pins leans toward the center of the holder;

FIG. 8 is a cross sectional view taken along line 8-8 of FIG. 3;

FIG. 9 is an enlarged portion view taken along line 9-9 of FIG. 6;

FIG. 10 is an enlarged portion view taken along line 10-10 of FIG. 5; and,

FIG. 11 is an enlarged portion view taken along line 11-11 of FIG. 1.

The broken lines shown in the drawings represent portions of the wafer holder for a stepper that form no part of the claimed design.

Claims

CLAIM The ornamental design for a wafer holder for a stepper, as shown and described.

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Inventors:	Tamaso; Hideto (Osaka, JP)
Applicant:	Name City State Country Type Sumitomo Electric Industries, Ltd. Osaka N/A JP
Assignee:	Sumitomo Electric Industries, Ltd. (Osaka-shi, JP)
Appl. No.:	D/448,577
Filed:	March 13, 2013

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Foreign Application Priority Data

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Oct 17, 2012 [JP]			2012-025225

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;118/500,728,729 ;414/217,222.01,416.03,935,936,937,938,939,940,941 ;156/345.51,345.52,345.53

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References Cited [Referenced By]

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Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Venable LLP Sartori; Michael A. Aga; Tamatane J.