Wafer holding member

Description

FIG. 1 is front perspective view of a wafer holding member illustrating my new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom view thereof;

FIG. 4 is a front view thereof, the rear view being a mirror image;

FIG. 5 is a left side view thereof;

FIG. 6 is a right side view thereof;

FIG. 7 is a sectional view taken along line 7-7 of FIG. 2; and,

FIG. 8 is an enlarged view of portion 8 encircled in FIG. 7.

Claims

CLAIM The ornamental design for wafer holding member, as shown and described.

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Inventors:	Kajiwara; Hideki (Koshi, JP)
Applicant:	Name City State Country Type Kajiwara; Hideki Koshi N/A JP
Assignee:	Tokyo Electron Limited (Minato-Ku, JP)
Appl. No.:	D/396,050
Filed:	June 24, 2011

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Foreign Application Priority Data

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Jan 20, 2011 [JP]			2011-001006

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;118/500,725,728,729 ;294/103.1 ;414/217,222.01,416.03,941

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References Cited [Referenced By]

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U.S. Patent Documents

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Primary Examiner: Sikder; Selina
Attorney, Agent or Firm: Burr & Brown