U.S. patent number D616,394 [Application Number D/342,854] was granted by the patent office on 2010-05-25 for support of wafer boat for manufacturing semiconductor wafers.
This patent grant is currently assigned to Tokyo Electron Limited. Invention is credited to Izumi Sato.
United States Patent |
D616,394 |
Sato |
May 25, 2010 |
Support of wafer boat for manufacturing semiconductor wafers
Claims
CLAIM The ornamental design for a support of wafer boat for
manufacturing semiconductor wafers, as shown and described.
Inventors: |
Sato; Izumi (Oshu,
JP) |
Assignee: |
Tokyo Electron Limited
(Minato-Ku, JP)
|
Appl.
No.: |
D/342,854 |
Filed: |
September 2, 2009 |
Foreign Application Priority Data
|
|
|
|
|
Mar 6, 2009 [JP] |
|
|
2009-004989 |
|
Current U.S.
Class: |
D13/182 |
Current International
Class: |
1303 |
Field of
Search: |
;D13/182 ;206/454,711
;118/728,729 ;211/41.18 ;432/240,241,253,258 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Sikder; Selina
Attorney, Agent or Firm: Burr & Brown
Description
FIG. 1 is front perspective view of a support of wafer boat for
manufacturing semiconductor wafers illustrating my new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof; and,
FIG. 8 is a cross-sectional view taken through line 8--8 of FIG.
2.
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