Patent | Date |
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Method For Manufacturing Silicon Carbide Semiconductor Device And Silicon Carbide Semiconductor Device App 20220231129 - TAMASO; Hideto | 2022-07-21 |
Method For Producing Silicon Carbide Semiconductor Device And Silicon Carbide Semiconductor Device App 20220208971 - TAMASO; Hideto | 2022-06-30 |
Semiconductor device Grant 10,453,952 - Shiomi , et al. Oc | 2019-10-22 |
Silicon carbide semiconductor device Grant 10,424,642 - Shiomi , et al. Sept | 2019-09-24 |
Method for manufacturing silicon carbide semiconductor device and silicon carbide semiconductor device Grant 10,381,453 - Tanaka , et al. A | 2019-08-13 |
Silicon Carbide Semiconductor Device And Method For Manufacturing Same App 20190140056 - Wada; Keiji ;   et al. | 2019-05-09 |
Silicon carbide semiconductor device and method for manufacturing same Grant 10,192,960 - Wada , et al. Ja | 2019-01-29 |
Silicon Carbide Semiconductor Device App 20180331209 - Shiomi; Hiromu ;   et al. | 2018-11-15 |
Semiconductor Device App 20180315813 - Shiomi; Hiromu ;   et al. | 2018-11-01 |
Silicon carbide semiconductor device having a trench with side walls and method for manufacturing same Grant 10,014,376 - Masuda , et al. July 3, 2 | 2018-07-03 |
Method For Manufacturing Silicon Carbide Semiconductor Device And Silicon Carbide Semiconductor Device App 20170243948 - Tanaka; So ;   et al. | 2017-08-24 |
Method for manufacturing silicon carbide semiconductor device Grant 9,620,358 - Tamaso April 11, 2 | 2017-04-11 |
Silicon Carbide Semiconductor Device And Method For Manufacturing Same App 20160204206 - Masuda; Takeyoshi ;   et al. | 2016-07-14 |
Method of manufacturing silicon carbide semiconductor device Grant 9,384,981 - Tamaso , et al. July 5, 2 | 2016-07-05 |
Silicon Carbide Semiconductor Device And Method For Manufacturing Same App 20160181372 - Wada; Keiji ;   et al. | 2016-06-23 |
Method For Manufacturing Silicon Carbide Semiconductor Device App 20160118250 - TAMASO; Hideto | 2016-04-28 |
Method Of Manufacturing Silicon Carbide Semiconductor Device App 20160056041 - TAMASO; Hideto ;   et al. | 2016-02-25 |
Method of manufacturing silicon carbide semiconductor device Grant 9,263,347 - Tamaso February 16, 2 | 2016-02-16 |
Method Of Manufacturing Silicon Carbide Semiconductor Device App 20150303119 - TAMASO; Hideto | 2015-10-22 |
Semiconductor Device And Method For Manufacturing Same App 20150287598 - Wada; Keiji ;   et al. | 2015-10-08 |
Silicon carbide semiconductor device and method for manufacturing same Grant 9,129,804 - Tamaso September 8, 2 | 2015-09-08 |
Semiconductor device Grant 8,963,163 - Wada , et al. February 24, 2 | 2015-02-24 |
Method for manufacturing semiconductor device Grant 8,916,462 - Kitabayashi , et al. December 23, 2 | 2014-12-23 |
Method for manufacturing semiconductor device Grant 8,883,619 - Tamaso , et al. November 11, 2 | 2014-11-11 |
Silicon carbide semiconductor device and method for manufacturing same Grant 8,866,156 - Yamada , et al. October 21, 2 | 2014-10-21 |
Silicon carbide semiconductor device and method for manufacturing same Grant 8,847,237 - Tamaso September 30, 2 | 2014-09-30 |
Method of manufacturing an ohmic electrode containing titanium, aluminum and silicon on a silicon carbide surface Grant 8,846,531 - Tamaso , et al. September 30, 2 | 2014-09-30 |
Semiconductor device and method of manufacturing the same Grant 8,823,017 - Tamaso September 2, 2 | 2014-09-02 |
Silicon Carbide Semiconductor Device And Method For Manufacturing Same App 20140170841 - Tamaso; Hideto | 2014-06-19 |
Silicon carbide semiconductor device Grant 8,729,567 - Yamada , et al. May 20, 2 | 2014-05-20 |
Method for manufacturing silicon carbide semiconductor device Grant 8,716,129 - Tamaso May 6, 2 | 2014-05-06 |
Wafer holder for stepper Grant D703,162 - Tamaso April 22, 2 | 2014-04-22 |
Semiconductor device and method of manufacturing the same Grant 8,691,679 - Tamaso April 8, 2 | 2014-04-08 |
Silicon carbide semiconductor device and method for manufacturing same Grant 8,674,374 - Tamaso March 18, 2 | 2014-03-18 |
Silicon Carbide Semiconductor Device And Method For Manufactuing Same App 20140042461 - Tamaso; Hideto | 2014-02-13 |
Method For Manufacturing Silicon Carbide Semiconductor Device App 20140045322 - Tamaso; Hideto | 2014-02-13 |
Semiconductor device and method for manufacturing the same Grant 8,643,065 - Fujikawa , et al. February 4, 2 | 2014-02-04 |
Ohmic electrode for SiC semiconductor, method of manufacturing ohmic electrode for SiC semiconductor, semiconductor device, and method of manufacturing semiconductor device Grant 8,623,752 - Fujikawa , et al. January 7, 2 | 2014-01-07 |
Silicon Carbide Semiconductor Device App 20130341647 - Yamada; Shunsuke ;   et al. | 2013-12-26 |
Silicon Carbide Semiconductor Device And Method For Manufacturing Same App 20130341646 - Yamada; Shunsuke ;   et al. | 2013-12-26 |
Method For Manufacturing Semiconductor Device App 20130143398 - Kitabayashi; Hiroyuki ;   et al. | 2013-06-06 |
Semiconductor device Grant 8,395,163 - Tamaso March 12, 2 | 2013-03-12 |
Method For Manufacturing Silicon Carbide Semiconductor Device And Device For Manufacturing Silicon Carbide Semiconductor Device App 20130045592 - Miyazaki; Tomihito ;   et al. | 2013-02-21 |
Semiconductor device and method of manufacturing the same Grant 8,373,176 - Tamaso February 12, 2 | 2013-02-12 |
Semiconductor Device And Method Of Manufacturing The Same App 20120326167 - Tamaso; Hideto | 2012-12-27 |
Semiconductor Device And Method Of Manufacturing The Same App 20120319135 - Tamaso; Hideto | 2012-12-20 |
Semiconductor Device, Combined Substrate, And Methods For Manufacturing Them App 20120211770 - Shiomi; Hiromu ;   et al. | 2012-08-23 |
Semiconductor Device App 20120175638 - HIYOSHI; Toru ;   et al. | 2012-07-12 |
Silicon Carbide Semiconductor Device And Method For Manufacturing Same App 20120126250 - Tamaso; Hideto | 2012-05-24 |
Method Of Manufacturing Semiconductor Device App 20120129343 - Tamaso; Hideto ;   et al. | 2012-05-24 |
Method For Manufacturing Semiconductor Device App 20120129326 - TAMASO; Hideto ;   et al. | 2012-05-24 |
Silicon Carbide Substrate, Epitaxial Layer Provided Substrate, Semiconductor Device, And Method For Manufacturing Silicon Carbide Substrate App 20120119225 - Shiomi; Hiromu ;   et al. | 2012-05-17 |
Method For Manufacturing Silicon Carbide Substrate And Silicon Carbide Substrate App 20120068195 - Harada; Shin ;   et al. | 2012-03-22 |
Method For Manufacturing Silicon Carbide Substrate And Silicon Carbide Substrate App 20120032191 - Harada; Shin ;   et al. | 2012-02-09 |
Semiconductor Device And Method For Manufacturing Same App 20120007104 - Wada; Keiji ;   et al. | 2012-01-12 |
Method For Manufacturing Semiconductor Substrate App 20120003811 - Sasaki; Makoto ;   et al. | 2012-01-05 |
Semiconductor Device App 20110227096 - Wada; Keiji ;   et al. | 2011-09-22 |
Silicon Carbide Semiconductor Device App 20110175111 - Harada; Shin ;   et al. | 2011-07-21 |
Semiconductor Device And Method Of Manufacturing The Same App 20110031507 - Tamaso; Hideto | 2011-02-10 |
Semiconductor Device App 20110031506 - Tamaso; Hideto | 2011-02-10 |
Semiconductor Device And Method For Manufacturing The Same App 20110001144 - Fujikawa; Kuzuhiro ;   et al. | 2011-01-06 |
Ohmic Electrode For Sic Semiconductor, Method Of Manufacturing Ohmic Electrode For Sic Semiconductor, Semiconductor Device, And Method Of Manufacturing Semiconductor Device App 20100102331 - Fujikawa; Kazuhiro ;   et al. | 2010-04-29 |
Method Of Manufacturing Semiconductor Device App 20100035420 - Tamaso; Hideto ;   et al. | 2010-02-11 |