U.S. patent number D703,162 [Application Number D/448,577] was granted by the patent office on 2014-04-22 for wafer holder for stepper.
This patent grant is currently assigned to Sumitomo Electric Industries, Ltd.. The grantee listed for this patent is Sumitomo Electric Industries, Ltd.. Invention is credited to Hideto Tamaso.
United States Patent |
D703,162 |
Tamaso |
April 22, 2014 |
Wafer holder for stepper
Claims
CLAIM The ornamental design for a wafer holder for a stepper, as
shown and described.
Inventors: |
Tamaso; Hideto (Osaka,
JP) |
Applicant: |
Name |
City |
State |
Country |
Type |
Sumitomo Electric Industries, Ltd. |
Osaka |
N/A |
JP |
|
|
Assignee: |
Sumitomo Electric Industries,
Ltd. (Osaka-shi, JP)
|
Appl.
No.: |
D/448,577 |
Filed: |
March 13, 2013 |
Foreign Application Priority Data
|
|
|
|
|
Oct 17, 2012 [JP] |
|
|
2012-025225 |
|
Current U.S.
Class: |
D13/182 |
Current International
Class: |
1303 |
Field of
Search: |
;D13/182
;118/500,728,729 ;414/217,222.01,416.03,935,936,937,938,939,940,941
;156/345.51,345.52,345.53 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Venable LLP Sartori; Michael A.
Aga; Tamatane J.
Description
FIG. 1 is a front view of a wafer holder for a stepper showing my
new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is a front perspective view thereof, wherein each of the
three pins leans toward the center of the holder;
FIG. 8 is a cross sectional view taken along line 8-8 of FIG.
3;
FIG. 9 is an enlarged portion view taken along line 9-9 of FIG.
6;
FIG. 10 is an enlarged portion view taken along line 10-10 of FIG.
5; and,
FIG. 11 is an enlarged portion view taken along line 11-11 of FIG.
1.
The broken lines shown in the drawings represent portions of the
wafer holder for a stepper that form no part of the claimed
design.
* * * * *