| Patent | Date |
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Isolated Volume Seals And Method Of Forming An Isolated Volume Within A Processing Chamber
App 20220270898 - SAVANDAIAH; Kirankumar Neelasandra ; et al. | 2022-08-25 |
Cathode Exchange Mechanism To Improve Preventative Maintenance Time For Cluster System
App 20220242706 - PRASAD; Bhaskar ; et al. | 2022-08-04 |
Symmetric Pump Down Mini-volume With Laminar Flow Cavity Gas Injection For High And Low Pressure
App 20220243331 - SAVANDAIAH; Kirankumar Neelasandra ; et al. | 2022-08-04 |
Common Vacuum Shutter And Pasting Mechanism For A Multistation Cluster Platform
App 20220235453 - SAVANDAIAH; Kirankumar Neelasandra ; et al. | 2022-07-28 |
Reduced Substrate Process Chamber Cavity Volume
App 20220223367 - SAVANDAIAH; Kirankumar Neelasandra ; et al. | 2022-07-14 |
Methods And Apparatus For Wafer Detection
App 20220216079 - PRASAD; Bhaskar ; et al. | 2022-07-07 |
Gas Injection Process Kit To Eliminate Arcing And Improve Uniform Gas Distribution For A Pvd Process
App 20220186361 - SAVANDAIAH; Kirankumar Neelasandra ; et al. | 2022-06-16 |
Methods and apparatus for in-situ cleaning of electrostatic chucks
Grant 11,361,982 - Savandaiah , et al. June 14, 2 | 2022-06-14 |
Multi-radius magnetron for physical vapor deposition (PVD) and methods of use thereof
Grant 11,295,938 - Song , et al. April 5, 2 | 2022-04-05 |
Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability
Grant 11,289,312 - Allen , et al. March 29, 2 | 2022-03-29 |
Electrostatic Chuck Having A Heating And Chucking Capabilities
App 20220093439 - PRASAD; Bhaskar ; et al. | 2022-03-24 |
Alignment Of An Electrostatic Chuck With A Substrate Support
App 20220076978 - PRASAD; Bhaskar ; et al. | 2022-03-10 |
Self Aligning Wafer Carrier Pedestal Element With Power Contacts
App 20220076971 - SAVANDAIAH; Kirankumar Neelasandra ; et al. | 2022-03-10 |
Sealing Device For A Pedestal Assembly
App 20220076981 - SHIRAHATTI; Lakshmikanth Krishnamurthy ; et al. | 2022-03-10 |
Pedestal Assembly For A Substrate Processing Chamber
App 20220076979 - PRASAD; Bhaskar ; et al. | 2022-03-10 |
Apparatus for enhancing flow uniformity in a process chamber
Grant 11,270,898 - Ramalingam , et al. March 8, 2 | 2022-03-08 |
Substrate Transfer Devices
App 20220068690 - SOVENAHALLI; Sreenath ; et al. | 2022-03-03 |
Transfer Chamber With Integrated Substrate Pre-process Chamber
App 20220051918 - SAVANDAIAH; Kirankumar Neelasandra ; et al. | 2022-02-17 |
Low Profile Deposition Ring For Enhanced Life
App 20220037128 - SAVANDAIAH; Kirankumar Neelasandra ; et al. | 2022-02-03 |
Methods And Apparatus For Extended Chamber For Through Silicon Via Deposition
App 20220033956 - GUNTHER; David ; et al. | 2022-02-03 |
Substrate Holder Replacement With Protective Disk During Pasting Process
App 20220028711 - YEDLA; Srinivasa Rao ; et al. | 2022-01-27 |
Apparatus, System, And Method For Non-contact Temperature Monitoring Of Substrate Supports
App 20220028712 - PRASAD; Bhaskar ; et al. | 2022-01-27 |
Transfer Carousel With Detachable Chucks
App 20220013382 - PRASAD; Bhaskar ; et al. | 2022-01-13 |
Substrate Processing Module And Method Of Moving A Workpiece
App 20220013383 - SAVANDAIAH; Kirankumar Neelasandra ; et al. | 2022-01-13 |
Target profile for a physical vapor deposition chamber target
Grant D940,765 - Gunther , et al. January 11, 2 | 2022-01-11 |
Multi-radius Magnetron For Physical Vapor Deposition (pvd) And Methods Of Use Thereof
App 20210407778 - SONG; Jiao ; et al. | 2021-12-30 |
Apparatus For Improved Anode-cathode Ratio For Rf Chambers
App 20210395877 - SAVANDAIAH; Kirankumar Neelasandra ; et al. | 2021-12-23 |
Substrate Processing System
App 20210381101 - NANJUNDAPPA; Nagabhushana ; et al. | 2021-12-09 |
Sputter target for a physical vapor deposition chamber
Grant D937,329 - Riker , et al. November 30, 2 | 2021-11-30 |
Floating Pin For Substrate Transfer
App 20210358797 - SOVENAHALLI; Sreenath ; et al. | 2021-11-18 |
Deposition ring for a semiconductor processing chamber
Grant D933,726 - Savandaiah , et al. October 19, 2 | 2021-10-19 |
Physical vapor deposition apparatus
Grant 11,114,288 - Savandaiah , et al. September 7, 2 | 2021-09-07 |
Methods And Apparatus For In-situ Cleaning Of Electrostatic Chucks
App 20210175107 - SAVANDAIAH; KIRANKUMAR NEELASANDRA ; et al. | 2021-06-10 |
Magnetron having enhanced target cooling configuration
Grant 11,024,490 - Faune , et al. June 1, 2 | 2021-06-01 |
Substrate processing platforms including multiple processing chambers
Grant 10,998,209 - Brezoczky , et al. May 4, 2 | 2021-05-04 |
Sputtering target for a physical vapor deposition chamber
Grant D908,645 - Savandaiah , et al. January 26, 2 | 2021-01-26 |
Physical Vapor Deposition (pvd) Chamber With In Situ Chamber Cleaning Capability
App 20200395198 - ALLEN; ADOLPH M. ; et al. | 2020-12-17 |
Multisubstrate Process System
App 20200381276 - YEDLA; Srinivasa Rao ; et al. | 2020-12-03 |
Substrate Processing Platforms Including Multiple Processing Chambers
App 20200381275 - BREZOCZKY; THOMAS ; et al. | 2020-12-03 |
Target profile for a physical vapor deposition chamber target
Grant D902,165 - Johanson , et al. November 17, 2 | 2020-11-17 |
Physcial Vapor Deposition Apparatus
App 20200258723 - A1 | 2020-08-13 |
Deposition ring for physical vapor deposition chamber
Grant D888,903 - Gunther , et al. | 2020-06-30 |
Process Kit Having Tall Deposition Ring For Pvd Chamber
App 20200194243 - GUNTHER; DAVID ; et al. | 2020-06-18 |
Apparatus For Enhancing Flow Uniformity In A Process Chamber
App 20200090957 - Ramalingam; Jothilingam ; et al. | 2020-03-19 |
Target profile for a physical vapor deposition chamber target
Grant D877,101 - Johanson , et al. | 2020-03-03 |
Process Kit Geometry For Particle Reduction In Pvd Processes
App 20190237311 - ALLEN; ADOLPH M. ; et al. | 2019-08-01 |
Magnetron Having Enhanced Target Cooling Configuration
App 20190180992 - FAUNE; VANESSA ; et al. | 2019-06-13 |
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