Deposition ring for physical vapor deposition chamber

Description

FIG. 1 is a perspective view of a deposition ring for a physical vapor deposition chamber, according to the novel design.

FIG. 2 is a top plan view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a front elevation view thereof.

FIG. 5 is a back elevation view thereof.

FIG. 6 is a left side elevation view thereof.

FIG. 7 is a right side elevation view thereof.

FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2.

FIG. 9 is a perspective view of a deposition ring for a physical vapor deposition chamber, according to the novel design.

FIG. 10 is a top plan view thereof.

FIG. 11 is a bottom plan view thereof.

FIG. 12 is a front elevation view thereof.

FIG. 13 is a back elevation view thereof.

FIG. 14 is a left side elevation view thereof.

FIG. 15 is a right side elevation view thereof; and,

FIG. 16 is a cross-sectional view taken along line 16-16 in FIG. 10.

The dashed lines in FIGS. 9-16 represent unclaimed environment forming no part of the claimed design.

Claims

CLAIM The ornamental design for a deposition ring for a physical vapor deposition chamber, as shown and described.

---

Inventors:	Gunther; David (San Jose, CA), Tsai; Cheng-Hsiung (Cupertino, CA), Savandaiah; Kirankumar Neelasandra (Bangalore, IN)
Applicant:	Name City State Country Type APPLIED MATERIALS, INC. Santa Clara CA US
Assignee:	APPLIED MATERIALS, INC. (Santa Clara, CA)
Appl. No.:	D/673,685
Filed:	December 17, 2018

---

Current U.S. Class:	D23/269; D23/259
Current International Class:	2301
Field of Search:	;D23/269,262,249,259 ;D15/138-139,143 ;277/351-360,504,563,572,316,364-365,394,397,406-407,418,449,451-454,458-460,491,517,529,602,610,612,641-642,644,648 ;285/339,343

---

References Cited [Referenced By]

---

U.S. Patent Documents

D244533	May 1977	Eidelberg
D338621	August 1993	Balson
D379588	June 1997	Pledger
5803977	September 1998	Tepman
5863340	January 1999	Flanigan
D497977	November 2004	Engelbrektsson
7282123	October 2007	Kosyachkov
7520969	April 2009	Miller
D665491	August 2012	Goel
8596870	December 2013	Akita
8911601	December 2014	Rasheed
9534286	January 2017	Yoshidome et al.
9689070	June 2017	Rasheed et al.
9909206	March 2018	Johanson et al.
9960021	May 2018	Riker et al.
2007/0102286	May 2007	Scheible et al.
2008/0141942	June 2008	Brown
2012/0042825	February 2012	Hawrylchak
2012/0103257	May 2012	Rasheed
2013/0206070	August 2013	Chen
2015/0047563	February 2015	Chung et al.
2017/0002461	January 2017	Johanson et al.

Foreign Patent Documents

	206573738		Oct 2017		CN
	207176067		Apr 2018		CN
	223429		May 1994		TW
	223430		May 1994		TW
	M431893		Jun 2012		TW
	201413868		Apr 2014		TW
	D180764		Jan 2017		TW
	D181803		Mar 2017		TW
	I600108		Sep 2017		TW
	D188898		Mar 2018		TW
	D191626		Jul 2018		TW

Other References

Search Report for Taiwan Design Application No. 108303547, dated Dec. 10, 2019. cited by applicant . International Search Report and Written Opinion for PCT/US2019/065900 dated Apr. 10, 2020. cited by applicant.

Primary Examiner: Wierenga; Amy C
Attorney, Agent or Firm: Moser Taboada Taboada; Alan

Images