Deposition chamber cover ring
Goel , et al. August 14, 2
U.S. patent number D665,491 [Application Number D/411,713] was granted by the patent office on 2012-08-14 for deposition chamber cover ring. This patent grant is currently assigned to Applied Materials, Inc.. Invention is credited to Ashish Goel, Anantha K. Subramani.
| United States Patent | D665,491 |
| Goel , et al. | August 14, 2012 |
Deposition chamber cover ring
Claims
CLAIM The ornamental design for a deposition chamber cover ring, as shown and described.
| Inventors: | Goel; Ashish (Bangalore, IN), Subramani; Anantha K. (San Jose, CA) |
|---|---|
| Assignee: | Applied Materials, Inc. (Santa
Clara, CA) |
| Appl. No.: | D/411,713 |
| Filed: | January 25, 2012 |
| Current U.S. Class: | D23/386; D15/144 |
| Current International Class: | 2304 |
| Field of Search: | ;D23/385-395,397,370-373,365,351,354,399-403,421,499,269,262,266 ;D15/144,144.1,144.2 ;454/309,275-277,284,287-291,358-363 ;55/502,506,DIG.26 ;52/302.1,32.07 ;277/602 ;248/62-64 ;204/298.11,298.02 ;D9/435,445,446,449,454,456 ;D32/54 ;250/505.1 |
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Attorney, Agent or Firm: Patterson & Sheridan, LLP
Description
FIG. 1 is a bottom perspective view of a deposition chamber cover ring.
FIG. 2 is a top perspective view of the deposition chamber cover ring of FIG. 1.
FIG. 3 is a bottom plan view of the deposition chamber cover ring of FIG. 1.
FIG. 4 is a top plan view of the deposition chamber cover ring of FIG. 1.
FIG. 5 is a side elevation view of the deposition chamber cover ring of FIG. 1, the other sides being identical; and,
FIG. 6 is an enlarged partial side cross-sectional view of the deposition chamber cover ring of FIG. 1 taken along section line 6-6 of FIG. 5.
The jagged line on the side of FIG. 6 is utilized to show where the enlarged view is broken away from the remainder of the deposition chamber cover ring of FIG. 5. The jagged line forms no part of the claimed design.
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