| Patent | Date |
|---|
Hot Showerhead
App 20220307131 - Subramani; Anantha K. ; et al. | 2022-09-29 |
Multiple sequential linear powder dispensers for additive manufacturing
Grant 11,446,740 - Rowland , et al. September 20, 2 | 2022-09-20 |
Fabricating a recursive flow gas distribution stack using multiple layers
Grant 11,371,148 - Agarwal , et al. June 28, 2 | 2022-06-28 |
Seamless electrical conduit
Grant 11,368,003 - Kraus , et al. June 21, 2 | 2022-06-21 |
RF return path for reduction of parasitic plasma
Grant 11,335,543 - Subramani , et al. May 17, 2 | 2022-05-17 |
Internally Divisible Process Chamber Using A Shutter Disk Assembly
App 20220139684 - MAZZOCCO; John Joseph ; et al. | 2022-05-05 |
Shaped electrodes for improved plasma exposure from vertical plasma source
Grant 11,315,763 - Bera , et al. April 26, 2 | 2022-04-26 |
Plasma source for rotating susceptor
Grant 11,315,769 - Bera , et al. April 26, 2 | 2022-04-26 |
Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability
Grant 11,289,312 - Allen , et al. March 29, 2 | 2022-03-29 |
Fabricating A Recursive Flow Gas Distribution Stack Using Multiple Layers
App 20220056584 - Agarwal; Sumit ; et al. | 2022-02-24 |
Showerhead With Interlaced Gas Feed And Removal And Methods Of Use
App 20220051910 - Bera; Kallol ; et al. | 2022-02-17 |
Deposition System With Multi-Cathode And Method Of Manufacture Thereof
App 20220037136 - Subramani; Anantha K. ; et al. | 2022-02-03 |
Distribution Components For Semiconductor Processing Systems
App 20220028710 - Subramani; Anantha K. ; et al. | 2022-01-27 |
Showerhead with interlaced gas feed and removal and methods of use
Grant 11,189,502 - Bera , et al. November 30, 2 | 2021-11-30 |
Deposition system with multi-cathode and method of manufacture thereof
Grant 11,183,375 - Subramani , et al. November 23, 2 | 2021-11-23 |
Methods and apparatus for producing low angle depositions
Grant 11,170,982 - Subramani , et al. November 9, 2 | 2021-11-09 |
Rf Return Path For Reduction Of Parasitic Plasma
App 20210305020 - Subramani; Anantha K. ; et al. | 2021-09-30 |
Methods and apparatus for co-sputtering multiple targets
Grant 11,101,117 - Subramani , et al. August 24, 2 | 2021-08-24 |
Symmetric Plasma Source to Generate Pie-Shaped Treatment
App 20210210312 - Subramani; Anantha K. ; et al. | 2021-07-08 |
Process kit for multi-cathode processing chamber
Grant 11,043,364 - Wu , et al. June 22, 2 | 2021-06-22 |
Plasma Source For Rotating Susceptor
App 20210166923 - Bera; Kallol ; et al. | 2021-06-03 |
Methods and apparatus for multi-cathode substrate processing
Grant 11,011,357 - Wu , et al. May 18, 2 | 2021-05-18 |
Extension of PVD chamber with multiple reaction gases, high bias power, and high power impulse source for deposition, implantation, and treatment
Grant 10,927,449 - Liu , et al. February 23, 2 | 2021-02-23 |
Microwave Plasma Source For Spatial Plasma Enhanced Atomic Layer Deposition (PE-ALD) Processing Tool
App 20210050187 - Kudela; Jozef ; et al. | 2021-02-18 |
Plasma source for rotating susceptor
Grant 10,903,056 - Bera , et al. January 26, 2 | 2021-01-26 |
Symmetric plasma source to generate pie shaped treatment
Grant 10,879,042 - Subramani , et al. December 29, 2 | 2020-12-29 |
Shaped Electrodes For Improved Plasma Exposure From Vertical Plasma Source
App 20200395194 - Bera; Kallol ; et al. | 2020-12-17 |
Physical Vapor Deposition (pvd) Chamber With In Situ Chamber Cleaning Capability
App 20200395198 - ALLEN; ADOLPH M. ; et al. | 2020-12-17 |
Seamless Electrical Conduit
App 20200388998 - KRAUS; Philip Allan ; et al. | 2020-12-10 |
Rf Components With Chemically Resistant Surfaces
App 20200385866 - Srinivasan; Swaminathan ; et al. | 2020-12-10 |
Shaped electrodes for improved plasma exposure from vertical plasma source
Grant 10,763,085 - Bera , et al. Sep | 2020-09-01 |
Two zone flow cooling plate design with concentric or spiral channel for efficient gas distribution assembly cooling
Grant 10,697,061 - Shah , et al. | 2020-06-30 |
Single oxide metal deposition chamber
Grant 10,597,785 - Subramani , et al. | 2020-03-24 |
Sputtering showerhead
Grant 10,577,689 - Subramani , et al. | 2020-03-03 |
Methods And Apparatus For Producing Low Angle Depositions
App 20200051794 - SUBRAMANI; ANANTHA K. ; et al. | 2020-02-13 |
Methods And Apparatus For Co-sputtering Multiple Targets
App 20200013597 - SUBRAMANI; Anantha K. ; et al. | 2020-01-09 |
Biasable rotatable electrostatic chuck
Grant 10,490,434 - Swaminathan , et al. Nov | 2019-11-26 |
Methods and apparatus for co-sputtering multiple targets
Grant 10,468,238 - Subramani , et al. No | 2019-11-05 |
Showerhead With Interlaced Gas Feed And Removal And Methods Of Use
App 20190311920 - Bera; Kallol ; et al. | 2019-10-10 |
Methods and apparatus for processing a substrate
Grant 10,431,440 - Wang , et al. O | 2019-10-01 |
Methods And Apparatus For Physical Vapor Deposition Using Directional Linear Scanning
App 20190276931 - Mebarki; Bencherki ; et al. | 2019-09-12 |
Dual-feed tunable plasma source
Grant 10,395,893 - Hammond, IV , et al. A | 2019-08-27 |
Shaped Electrodes For Improved Plasma Exposure From Vertical Plasma Source
App 20190189404 - Bera; Kallol ; et al. | 2019-06-20 |
In-situ temperature measurement in a noisy environment
Grant 10,249,522 - Wu , et al. | 2019-04-02 |
Process Kit For Multi-cathode Processing Chamber
App 20180350572 - Wu; Hanbing ; et al. | 2018-12-06 |
Plasma Source For Rotating Susceptor
App 20180330927 - Bera; Kallol ; et al. | 2018-11-15 |
Lateral plasma/radical source
Grant 10,121,655 - Subramani , et al. November 6, 2 | 2018-11-06 |
Methods And Apparatus For Multi-cathode Substrate Processing
App 20180240655 - WU; HANBING ; et al. | 2018-08-23 |
Linear Powder Dispenser That Raster Scans For Additive Manufacturing
App 20180221949 - Rowland; Christopher A. ; et al. | 2018-08-09 |
Multiple Sequential Linear Powder Dispensers For Additive Manufacturing
App 20180221948 - Rowland; Christopher A. ; et al. | 2018-08-09 |
Extension Of Pvd Chamber With Multiple Reaction Gases, High Bias Power, And High Power Impulse Source For Deposition, Implantation, And Treatment
App 20180209035 - LIU; Jingjing ; et al. | 2018-07-26 |
UHV In-Situ Cryo-Cool Chamber
App 20180163306 - Swaminathan; Bharath ; et al. | 2018-06-14 |
Two Zone Flow Cooling Plate Design With Concentric Or Spiral Channel For Efficient Gas Distribution Assembly Cooling
App 20180142352 - SHAH; Kartik ; et al. | 2018-05-24 |
Sputtering Showerhead
App 20180087155 - SUBRAMANI; Anantha K. ; et al. | 2018-03-29 |
Single Oxide Metal Deposition Chamber
App 20180073150 - SUBRAMANI; Anantha K. ; et al. | 2018-03-15 |
Independently Controllable Powder Delivery For Additive Manufacturing
App 20180065178 - Rowland; Christopher A. ; et al. | 2018-03-08 |
Reflective deposition rings and substrate processing chambers incorporating same
Grant 9,905,443 - Subramani , et al. February 27, 2 | 2018-02-27 |
Rotatable heated electrostatic chuck
Grant 9,853,579 - Subramani , et al. December 26, 2 | 2017-12-26 |
Off-angled heating of the underside of a substrate using a lamp assembly
Grant 9,818,587 - Ewert , et al. November 14, 2 | 2017-11-14 |
In-situ Temperature Measurement In A Noisy Environment
App 20170271182 - WU; Hanbing ; et al. | 2017-09-21 |
Sputter Source For Semiconductor Process Chambers
App 20170211175 - SUBRAMANI; ANANTHA K. ; et al. | 2017-07-27 |
Symmetric Plasma Source To Generate Pie Shaped Treatment
App 20170213701 - Subramani; Anantha K. ; et al. | 2017-07-27 |
Dual-Feed Tunable Plasma Source
App 20170213702 - Hammond, IV; Edward P. ; et al. | 2017-07-27 |
Layerwise Heating, Linewise Heating, Plasma Heating And Multiple Feed Materials In Additive Manufacturing
App 20170203363 - Rowland; Christopher A. ; et al. | 2017-07-20 |
Additive Manufacturing With Laser And Plasma
App 20170203364 - Ramaswamy; Kartik ; et al. | 2017-07-20 |
Additive Manufacturing With Laser And Gas Flow
App 20170182556 - Ramaswamy; Kartik ; et al. | 2017-06-29 |
Methods And Apparatus For Processing A Substrate
App 20170178877 - WANG; RONGJUN ; et al. | 2017-06-22 |
In-situ temperature measurement in a noisy environment
Grant 9,673,074 - Wu , et al. June 6, 2 | 2017-06-06 |
Lateral Plasma/Radical Source
App 20170148626 - Subramani; Anantha K. ; et al. | 2017-05-25 |
Biasable Rotatable Electrostatic Chuck
App 20170125274 - SWAMINATHAN; Bharath ; et al. | 2017-05-04 |
Sputter source for semiconductor process chambers
Grant 9,620,339 - Subramani , et al. April 11, 2 | 2017-04-11 |
Methods And Apparatus For Co-sputtering Multiple Targets
App 20170053784 - SUBRAMANI; Anantha K. ; et al. | 2017-02-23 |
Wafer processing deposition shielding components
Grant 9,476,122 - Riker , et al. October 25, 2 | 2016-10-25 |
Method of depositing metals using high frequency plasma
Grant 9,466,524 - Ma , et al. October 11, 2 | 2016-10-11 |
Deposition System With Multi-cathode And Method Of Manufacture Thereof
App 20150279635 - Subramani; Anantha K. ; et al. | 2015-10-01 |
Rotatable Heated Electrostatic Chuck
App 20150170952 - SUBRAMANI; ANANTHA K. ; et al. | 2015-06-18 |
In-situ Temperature Measurement In A Noisy Environment
App 20140269826 - WU; Hanbing ; et al. | 2014-09-18 |
Sputter Source For Semiconductor Process Chambers
App 20140262767 - SUBRAMANI; Anantha K. ; et al. | 2014-09-18 |
Wafer Processing Deposition Shielding Components
App 20140190822 - RIKER; Martin Lee ; et al. | 2014-07-10 |
Mechanism for continuously varying radial position of a magnetron
Grant 8,685,215 - Miller , et al. April 1, 2 | 2014-04-01 |
Method for metal deposition using hydrogen plasma
Grant 8,637,410 - Subramani , et al. January 28, 2 | 2014-01-28 |
Off-angled Heating Of The Underside Of A Substrate Using A Lamp Assembly
App 20130270107 - EWERT; MAURICE E. ; et al. | 2013-10-17 |
Method Of Depositing Metals Using High Frequency Plasma
App 20130196507 - Ma; Paul F. ; et al. | 2013-08-01 |
Use Of A1 Barrier Layer To Produce High Haze Zno Films On Glass Substrates
App 20130139878 - Bhatnagar; Yashraj K. ; et al. | 2013-06-06 |
Off-angled heating of the underside of a substrate using a lamp assembly
Grant 8,404,048 - Ewert , et al. March 26, 2 | 2013-03-26 |
Reflective Deposition Rings And Substrate Processing Chambers Incorporting Same
App 20130055952 - SUBRAMANI; ANANTHA K. ; et al. | 2013-03-07 |
Method for Metal Deposition Using Hydrogen Plasma
App 20120258602 - Subramani; Anantha K. ; et al. | 2012-10-11 |
Off-angled Heating Of The Underside Of A Substrate Using A Lamp Assembly
App 20120231633 - Ewert; Maurice E. ; et al. | 2012-09-13 |
Deposition chamber cover ring
Grant D665,491 - Goel , et al. August 14, 2 | 2012-08-14 |
Deposition chamber liner
Grant D665,071 - Goel , et al. August 7, 2 | 2012-08-07 |
Mechanism for continuously varying radial position of a magnetron
App 20100243440 - Miller; Keith A. ; et al. | 2010-09-30 |
Magnetron having continuously variable radial position
Grant 7,736,473 - Miller , et al. June 15, 2 | 2010-06-15 |
Wafer Processing Deposition Shielding Components
App 20090308739 - Riker; Martin Lee ; et al. | 2009-12-17 |
Apparatus And Method For Uniform Deposition
App 20090308732 - Cao; Yong ; et al. | 2009-12-17 |
Electroformed sputtering target
Grant 7,297,247 - Subramani , et al. November 20, 2 | 2007-11-20 |
Electroformed Sputtering Target
App 20070246346 - Subramani; Anantha K. ; et al. | 2007-10-25 |
Magnetron having continuously variable radial position
App 20060076232 - Miller; Keith A. ; et al. | 2006-04-13 |
Selectable dual position magnetron
Grant 7,018,515 - Gung , et al. March 28, 2 | 2006-03-28 |
Selectable dual position magnetron
App 20050211548 - Gung, Tza-Jing ; et al. | 2005-09-29 |
Partially filling copper seed layer
Grant 6,899,796 - Wang , et al. May 31, 2 | 2005-05-31 |
Diffusion enhanced ion plating for copper fill
Grant 6,884,329 - Wang , et al. April 26, 2 | 2005-04-26 |
Electroformed sputtering target
App 20040222088 - Subramani, Anantha K. ; et al. | 2004-11-11 |
Diffusion enhanced ion plating for copper fill
App 20040134768 - Wang, Wei D. ; et al. | 2004-07-15 |
Partially filling copper seed layer
App 20040134769 - Wang, Wei D. ; et al. | 2004-07-15 |
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