Deposition chamber liner
Goel , et al. August 7, 2
U.S. patent number D665,071 [Application Number D/411,698] was granted by the patent office on 2012-08-07 for deposition chamber liner. This patent grant is currently assigned to Applied Materials, Inc.. Invention is credited to Ashish Goel, Anantha K. Subramani.
| United States Patent | D665,071 |
| Goel , et al. | August 7, 2012 |
Deposition chamber liner
Claims
CLAIM The ornamental design for a deposition chamber liner, as shown and described.
| Inventors: | Goel; Ashish (Bangalore, IN), Subramani; Anantha K. (San Jose, CA) |
|---|---|
| Assignee: | Applied Materials, Inc. (Santa
Clara, CA) |
| Appl. No.: | D/411,698 |
| Filed: | January 25, 2012 |
| Current U.S. Class: | D23/386; D15/144 |
| Current International Class: | 2304 |
| Field of Search: | ;D23/385-395,397,370-373,365,351,354,399-403,421,499,269,262,266 ;D15/144,144.1,144.2 ;454/309,275-277,284,287-291,358-363 ;55/502,506,DIG.26 ;52/302.1,32.07 ;204/298.11,298.02 ;438/680 ;277/602 ;248/62-64 ;D12/207,208 |
References Cited [Referenced By]
U.S. Patent Documents
| D387074 | December 1997 | Farley et al. |
| D446298 | August 2001 | Thurman |
| D451457 | December 2001 | Hale, Jr. |
| D466652 | December 2002 | Thurman |
| 6719886 | April 2004 | Drewery et al. |
| D491963 | June 2004 | Doba |
| 6780294 | August 2004 | Hixson et al. |
| 6824658 | November 2004 | Gopalraja et al. |
| 6837974 | January 2005 | Lawson et al. |
| D504503 | April 2005 | Thurman |
| D508005 | August 2005 | Ikeda et al. |
| D589126 | March 2009 | Concannon |
| D646373 | October 2011 | Liebson et al. |
Attorney, Agent or Firm: Patterson & Sheridan, LLP
Description
FIG. 1 is a top perspective view of a deposition chamber liner.
FIG. 2 is a bottom perspective view of the deposition chamber liner of FIG. 1.
FIG. 3 is a top plan view of the deposition chamber liner of FIG. 1.
FIG. 4 is a bottom plan view of the deposition chamber liner of FIG. 1.
FIG. 5 is a side elevation view of the deposition chamber liner of FIG. 1, the other sides being identical.
FIG. 6 is a side cross-sectional view of the deposition chamber liner of FIG. 1, taken along section line 6-6 of FIG. 5.
FIG. 7 is an enlarged partial cross-sectional view of FIG. 6; and,
FIG. 8 is an enlarged partial cross-sectional view of FIG. 6.
The jagged lines on the sides of FIGS. 7 and 8 are utilized to show where the enlarged view is broken away from the remainder of the deposition chamber liner of FIG. 6. The jagged lines on FIGS. 7 and 8 form no part of the claimed design.
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