Target profile for a physical vapor deposition chamber target

Description

FIG. 1 is a perspective view of a target profile for a physical vapor deposition chamber target, showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a right side elevation view thereof;

FIG. 5 is a left side elevation view thereof;

FIG. 6 is a back elevation view thereof;

FIG. 7 is a front elevation view thereof; and,

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2.

The broken lines in FIGS. 1-8 represent unclaimed environment and form no part of the claimed design.

Claims

CLAIM The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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Inventors:	Zhang; Fuhong (San Jose, CA), Johanson; William (Gilroy, CA), Liu; Yu (Campbell, CA), Allen; Adolph Miller (Oakland, CA), Datta; Brij (Cupertino, CA), Miller; Keith A. (Mountain View, CA)
Applicant:	Name City State Country Type APPLIED MATERIALS, INC. Santa Clara CA US
Assignee:	APPLIED MATERIALS, INC. (Santa Clara, CA)
Appl. No.:	D/524,557
Filed:	April 21, 2015

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Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;D15/144.1,144.2,199

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References Cited [Referenced By]

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U.S. Patent Documents

6659850	December 2003	Korovin
D557226	December 2007	Uchino
D614593	April 2010	Lee
D616390	May 2010	Sato
D633452	March 2011	Namiki
D691974	October 2013	Osada
D716742	November 2014	Jang
D724553	March 2015	Choi
D741823	October 2015	Tateno
D769200	October 2016	Fukushima
D770992	November 2016	Tauchi
2005/0152089	July 2005	Matsuda
2005/0193952	September 2005	Goodman

Other References

US. Appl. No. 29/524,109, filed Apr. 16, 2015, Riker et al. cited by applicant . U.S. Appl. No. 29/530,683, filed Jun. 18, 2015, Hanson et al. cited by applicant.

Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Moser Taboada Taboada; Alan