| Patent | Date |
|---|
Apparatus for enhancing flow uniformity in a process chamber
Grant 11,270,898 - Ramalingam , et al. March 8, 2 | 2022-03-08 |
Methods and apparatus for substrate edge uniformity
Grant 11,056,325 - Nguyen , et al. July 6, 2 | 2021-07-06 |
Biased cover ring for a substrate processing system
Grant 11,049,701 - Allen , et al. June 29, 2 | 2021-06-29 |
Target profile for a physical vapor deposition chamber target
Grant D894,137 - Johanson , et al. A | 2020-08-25 |
Process kit having a floating shadow ring
Grant 10,648,071 - Johanson , et al. | 2020-05-12 |
Apparatus For Enhancing Flow Uniformity In A Process Chamber
App 20200090957 - Ramalingam; Jothilingam ; et al. | 2020-03-19 |
Methods And Apparatus For Maintaining Low Non-uniformity Over Target Life
App 20190259586 - JOHANSON; WILLIAM ; et al. | 2019-08-22 |
Methods And Apparatus For Substrate Edge Uniformity
App 20190189407 - NGUYEN; THANH X. ; et al. | 2019-06-20 |
Target profile for a physical vapor deposition chamber target
Grant D851,613 - Johanson , et al. | 2019-06-18 |
Methods and apparatus for maintaining low non-uniformity over target life
Grant 10,283,334 - Johanson , et al. | 2019-05-07 |
One-piece process kit shield for reducing the impact of an electric field near the substrate
Grant 10,103,012 - Johanson , et al. October 16, 2 | 2018-10-16 |
Target profile for a physical vapor deposition chamber target
Grant D825,504 - Zhang , et al. August 14, 2 | 2018-08-14 |
Magnetron assembly for physical vapor deposition chamber
Grant 9,991,101 - Johanson , et al. June 5, 2 | 2018-06-05 |
Biased Cover Ring For A Substrate Processing System
App 20180151325 - ALLEN; ADOLPH MILLER ; et al. | 2018-05-31 |
Process Kit Having A Floating Shadow Ring
App 20180142340 - JOHANSON; WILLIAM ; et al. | 2018-05-24 |
Integrated process kit for a substrate processing chamber
Grant 9,953,812 - Johanson , et al. April 24, 2 | 2018-04-24 |
Process kit having tall deposition ring and deposition ring clamp
Grant 9,909,206 - Johanson , et al. March 6, 2 | 2018-03-06 |
Target profile for a physical vapor deposition chamber target
Grant D797,067 - Zhang , et al. September 12, 2 | 2017-09-12 |
Integrated Process Kit For A Substrate Processing Chamber
App 20170098530 - JOHANSON; William ; et al. | 2017-04-06 |
One-piece Process Kit Shield For Reducing The Impact Of An Electric Field Near The Substrate
App 20170076924 - JOHANSON; William ; et al. | 2017-03-16 |
Process Kit Having Tall Deposition Ring And Deposition Ring Clamp
App 20170002461 - JOHANSON; William ; et al. | 2017-01-05 |
Selectively groundable cover ring for substrate process chambers
Grant 9,472,443 - Rasheed , et al. October 18, 2 | 2016-10-18 |
Methods for processing a substrate using multiple substrate support positions
Grant 9,315,891 - Lee , et al. April 19, 2 | 2016-04-19 |
Methods And Apparatus For Maintaining Low Non-uniformity Over Target Life
App 20160056024 - JOHANSON; WILLIAM ; et al. | 2016-02-25 |
Magnetron Assembly For Physical Vapor Deposition Chamber
App 20160035547 - JOHANSON; WILLIAM ; et al. | 2016-02-04 |
Selectively Groundable Cover Ring For Substrate Process Chambers
App 20140262763 - RASHEED; MUHAMMAD M. ; et al. | 2014-09-18 |
Methods For Processing A Substrate Using Multiple Substrate Support Positions
App 20140263169 - LEE; JOUNG JOO ; et al. | 2014-09-18 |
Dual seal deposition process chamber and process
Grant 7,737,035 - Lind , et al. June 15, 2 | 2010-06-15 |
Apparatus and method for delivering uniform fluid flow in a chemical deposition system
App 20080081114 - Johanson; William ; et al. | 2008-04-03 |
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