ALLEN; Adolph Miller

Patent Applications and Registrations

Patent applications and USPTO patent grants for ALLEN; Adolph Miller.The latest application filed is for "methods and apparatus for controlling ion fraction in physical vapor deposition processes".

Company Profile

20.31.44

ALLEN; Adolph Miller - Oakland CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods And Apparatus For Controlling Ion Fraction In Physical Vapor Deposition Processes App 20220020577 - WANG; Xiaodong ; et al.	2022-01-20
Methods And Apparatus For Cleaning A Showerhead App 20210335586 - YU; Tom H. ; et al.	2021-10-28
Biased cover ring for a substrate processing system Grant 11,049,701 - Allen , et al. June 29, 2	2021-06-29
Methods and apparatus for controlling ion fraction in physical vapor deposition processes Grant 11,037,768 - Wang , et al. June 15, 2	2021-06-15
Blockchain for distributed authentication of hardware operating profile Grant 10,972,280 - Allen , et al. April 6, 2	2021-04-06
Methods And Apparatus For Controlling Ion Fraction In Physical Vapor Deposition Processes App 20210071294 - WANG; Xiaodong ; et al.	2021-03-11
High density, low stress amorphous carbon film, and process and equipment for its deposition Grant 10,858,727 - Liu , et al. December 8, 2	2020-12-08
High Pressure Rf-dc Sputtering And Methods To Improve Film Uniformity And Step-coverage Of This Process App 20200357616 - ALLEN; Adolph Miller ; et al.	2020-11-12
Techniques for forming low stress etch-resistant mask using implantation Grant 10,811,257 - Prasad , et al. October 20, 2	2020-10-20
High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process Grant 10,763,090 - Allen , et al. Sep	2020-09-01
Method For Particle Removal From Wafers Through Plasma Modification In Pulsed PVD App 20200255938 - Chong; Halbert ; et al.	2020-08-13
Blockchain For Distributed Authentication Of Hardware Operating Profile App 20200112438 - Allen; Adolph Miller ; et al.	2020-04-09
Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers Grant 10,563,304 - Xie , et al. Feb	2020-02-18
Method and system for balancing the electrostatic chucking force on a substrate Grant 10,541,169 - Jiang , et al. Ja	2020-01-21
Techniques For Forming Low Stress Etch-resistant Mask Using Implantation App 20190304783 - Prasad; Rajesh ; et al.	2019-10-03
Counter based time compensation to reduce process shifting in reactive magnetron sputtering reactor Grant 10,400,327 - Chowdhury , et al. Sep	2019-09-03
Shield For A Substrate Processing Chamber App 20190267220 - Scheible; Kathleen ; et al.	2019-08-29
Methods And Apparatus For Maintaining Low Non-uniformity Over Target Life App 20190259586 - JOHANSON; WILLIAM ; et al.	2019-08-22
Holding assembly for substrate processing chamber Grant 10,347,475 - Scheible , et al. July 9, 2	2019-07-09
Methods for pre-cleaning conductive materials on a substrate Grant 10,283,345 - Xie , et al.	2019-05-07
Methods and apparatus for maintaining low non-uniformity over target life Grant 10,283,334 - Johanson , et al.	2019-05-07
Pulsed Dc Source For High Power Impulse Magnetron Sputtering Physical Vapor Deposition Of Dielectric Films And Methods Of Application App 20190127842 - BABAYAN; Viachslav ; et al.	2019-05-02
Auto capacitance tuner current compensation to control one or more film properties through target life Grant 10,266,940 - Ge , et al.	2019-04-23
RF power compensation to control film stress, density, resistivity, and/or uniformity through target life Grant 10,242,873 - Allen , et al.	2019-03-26
Sync Controller For High Impulse Magnetron Sputtering App 20190088457 - BABAYAN; Viachslav ; et al.	2019-03-21
Method And System For Balancing The Electrostatic Chucking Force On A Substrate App 20180330977 - JIANG; Chong ; et al.	2018-11-15
Barrier Film Deposition And Treatment App 20180294162 - XIE; XIANGJIN ; et al.	2018-10-11
Target profile for a physical vapor deposition chamber target Grant D825,504 - Zhang , et al. August 14, 2	2018-08-14
Magnetron assembly for physical vapor deposition chamber Grant 9,991,101 - Johanson , et al. June 5, 2	2018-06-05
Biased Cover Ring For A Substrate Processing System App 20180151325 - ALLEN; ADOLPH MILLER ; et al.	2018-05-31
POWER DELIVERY FOR HIGH POWER IMPULSE MAGNETRON SPUTTERING (HiPIMS) App 20180108519 - BABAYAN; VIACHSLAV ; et al.	2018-04-19
Process kit having tall deposition ring and deposition ring clamp Grant 9,909,206 - Johanson , et al. March 6, 2	2018-03-06
High Density, Low Stress Amorphous Carbon Film, And Process And Equipment For Its Deposition App 20180051368 - Liu; Jingjing ; et al.	2018-02-22
Target profile for a physical vapor deposition chamber target Grant D797,067 - Zhang , et al. September 12, 2	2017-09-12
Methods And Apparatus For Controlling Ion Fraction In Physical Vapor Deposition Processes App 20170253959 - WANG; Xiaodong ; et al.	2017-09-07
Pattern fortification for HDD bit patterned media pattern transfer Grant 9,660,185 - Gouk , et al. May 23, 2	2017-05-23
Methods For Pre-cleaning Conductive Materials On A Substrate App 20170098540 - XIE; Xiangjin ; et al.	2017-04-06
Crystalline orientation and overhang control in collision based RF plasmas Grant 9,611,539 - Ge , et al. April 4, 2	2017-04-04
Process Kit Shield And Physical Vapor Deposition Chamber Having Same App 20170088942 - RASHEED; MUHAMMAD ; et al.	2017-03-30
High Pressure Rf-dc Sputtering And Methods To Improve Film Uniformity And Step-coverage Of This Process App 20170029941 - ALLEN; Adolph Miller ; et al.	2017-02-02
Process Kit Having Tall Deposition Ring And Deposition Ring Clamp App 20170002461 - JOHANSON; William ; et al.	2017-01-05
High density TiN RF/DC PVD deposition with stress tuning Grant 9,499,901 - Cao , et al. November 22, 2	2016-11-22
Methods for pre-cleaning conductive interconnect structures Grant 9,460,959 - Xie , et al. October 4, 2	2016-10-04
Pattern Fortification For Hdd Bit Patterned Media Pattern Transfer App 20160260896 - GOUK; Roman ; et al.	2016-09-08
Auto Capacitance Tuner Current Compensation To Control One Or More Film Properties Through Target Life App 20160244874 - GE; Zhenbin ; et al.	2016-08-25
Counter Based Time Compensation To Reduce Process Shifting In Reactive Magnetron Sputtering Reactor App 20160222503 - Chowdhury; Mohammad Kamruzzaman ; et al.	2016-08-04
Pattern fortification for HDD bit patterned media pattern transfer Grant 9,343,664 - Gouk , et al. May 17, 2	2016-05-17
Methods And Apparatus For Maintaining Low Non-uniformity Over Target Life App 20160056024 - JOHANSON; WILLIAM ; et al.	2016-02-25
Magnetron Assembly For Physical Vapor Deposition Chamber App 20160035547 - JOHANSON; WILLIAM ; et al.	2016-02-04
Holding Assembly For Substrate Processing Chamber App 20150380223 - Scheible; Kathleen ; et al.	2015-12-31
Methods of forming a metal containing layer on a substrate with high uniformity and good profile control Grant 9,218,961 - Ge , et al. December 22, 2	2015-12-22
Rf Power Compensation To Control Film Stress, Density, Resistivity, And/or Uniformity Through Target Life App 20150252467 - ALLEN; ADOLPH MILLER ; et al.	2015-09-10
Process kit and target for substrate processing chamber Grant 9,127,362 - Scheible , et al. September 8, 2	2015-09-08
Pattern Fortification For Hdd Bit Patterned Media Pattern Transfer App 20150214475 - GOUK; Roman ; et al.	2015-07-30
Sputtering target having increased life and sputtering uniformity Grant 8,968,536 - Allen , et al. March 3, 2	2015-03-03
Pattern Fortification For Hdd Bit Patterned Media Pattern Transfer App 20140131308 - GOUK; Roman ; et al.	2014-05-15
Process Kit Shield And Physical Vapor Deposition Chamber Having Same App 20130277203 - RASHEED; MUHAMMAD ; et al.	2013-10-24
HIGH DENSITY TiN RF/DC PVD DEPOSITION WITH STRESS TUNING App 20130199925 - CAO; YONG ; et al.	2013-08-08
Crystalline Orientation And Overhang Control In Collision Based Rf Plasmas App 20130192980 - GE; ZHENBIN ; et al.	2013-08-01
Process Kit For Rf Physical Vapor Deposition App 20130087452 - Hawrylchak; Lara ; et al.	2013-04-11
Methods Of Forming A Metal Containing Layer On A Substrate With High Uniformity And Good Profile Control App 20130075246 - Ge; Zhenbin ; et al.	2013-03-28
Process Kit For Rf Physical Vapor Deposition App 20110036709 - Hawrylchak; Lara ; et al.	2011-02-17
Method to modulate coverage of barrier and seed layer using titanium nitride Grant 7,829,456 - Lam , et al. November 9, 2	2010-11-09
High Pressure Rf-dc Sputtering And Methods To Improve Film Uniformity And Step-coverage Of This Process App 20100252417 - Allen; Adolph Miller ; et al.	2010-10-07
Method To Modulate Coverage Of Barrier And Seed Layer Using Titanium Nitride App 20100105204 - LAM; WINSOR ; et al.	2010-04-29
Sputtering Target Having Increased Life And Sputtering Uniformity App 20080308416 - Allen; Adolph Miller ; et al.	2008-12-18
Method for plasma ignition Grant 7,422,664 - Ritchie , et al. September 9, 2	2008-09-09
Method for plasma ignition App 20070181063 - Ritchie; Alan Alexander ; et al.	2007-08-09
Process Kit And Target For Substrate Processing Chamber App 20070102286 - Scheible; Kathleen ; et al.	2007-05-10

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.