Wafer support ring
Kirkland , et al. September 20, 2
U.S. patent number D767,234 [Application Number D/519,122] was granted by the patent office on 2016-09-20 for wafer support ring. This patent grant is currently assigned to Entegris, Inc.. The grantee listed for this patent is ENTEGRIS, INC.. Invention is credited to Eric A. Kirkland, Russ V. Raschke, Jason T. Steffens.
| United States Patent | D767,234 |
| Kirkland , et al. | September 20, 2016 |
Wafer support ring
Claims
CLAIM The ornamental design for a wafer support ring, as shown and described.
| Inventors: | Kirkland; Eric A. (Colorado Springs, CO), Raschke; Russ V. (Chanhassen, MN), Steffens; Jason T. (Shakopee, MN) | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| Applicant: |
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| Assignee: | Entegris, Inc. (Billerica,
MA) |
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| Appl. No.: | D/519,122 | ||||||||||
| Filed: | March 2, 2015 |
| Current U.S. Class: | D34/29 |
| Current International Class: | 1205 |
| Field of Search: | ;D34/29,28 ;198/851,853,825,890.1,370.1,370.04,782,722,771,866,367,790 ;193/35A,35C ;414/744.5,800 ;D23/269 |
References Cited [Referenced By]
U.S. Patent Documents
| 3893649 | July 1975 | Cornell |
| 4867401 | September 1989 | Graff |
| 4899967 | February 1990 | Johnson |
| D457283 | May 2002 | Wayt |
| D591924 | May 2009 | Abe |
| 8016542 | September 2011 | Cox |
| D646764 | October 2011 | Rusconi |
| D655401 | March 2012 | Muramatsu |
| D667601 | September 2012 | Fitzpatrick |
| D723239 | February 2015 | Raschke |
| D743513 | November 2015 | Yamagishi |
| D754308 | April 2016 | Nakagawa |
| 2004/0048474 | March 2004 | Asano |
| 2006/0166503 | July 2006 | Sasaki |
| 2012/0263569 | October 2012 | Priddy |
| 2013/0330165 | December 2013 | Wimplinger |
| 2014/0154038 | June 2014 | Hudgens |
Attorney, Agent or Firm: Christensen Fonder P.A.
Description
FIG. 1 is a top perspective view of a wafer support ring showing our new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a front elevational view, with the rear being a mirror image thereof;
FIG. 6 is a cross sectional view taken at line 6-6 of FIG. 3; and,
FIG. 7 is a cross sectional view taken at line 7-7 of FIG. 3.
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