Prabhu; Prashant Prabhakar
Patent Applications and Registrations
Patent applications and USPTO patent grants for Prabhu; Prashant Prabhakar.The latest application filed is for "methods and apparatus for in-situ cleaning of electrostatic chucks".
- Prabhu; Prashant Prabhakar - Karwar IN
| Patent | Date |
|---|---|
| Methods and apparatus for in-situ cleaning of electrostatic chucks Grant 11,361,982 - Savandaiah , et al. June 14, 2 | 2022-06-14 |
| Methods And Apparatus For In-situ Cleaning Of Electrostatic Chucks App 20210175107 - SAVANDAIAH; KIRANKUMAR NEELASANDRA ; et al. | 2021-06-10 |
| Target profile for a physical vapor deposition chamber target Grant D902,165 - Johanson , et al. November 17, 2 | 2020-11-17 |
| Target profile for a physical vapor deposition chamber target Grant D894,137 - Johanson , et al. A | 2020-08-25 |
| Target profile for a physical vapor deposition chamber target Grant D877,101 - Johanson , et al. | 2020-03-03 |
| Target profile for a physical vapor deposition chamber target Grant D851,613 - Johanson , et al. | 2019-06-18 |
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