Johanson; William R.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Johanson; William R..The latest application filed is for "methods and apparatus for reducing tungsten resitivity".
- Johanson; William R. - Gilroy CA
- Johanson; William R. - San Jose CA
| Patent | Date |
|---|---|
| Methods and apparatus for reducing tungsten resistivity Grant 11,447,857 - Hou , et al. September 20, 2 | 2022-09-20 |
| Methods and apparatus for in-situ cleaning of electrostatic chucks Grant 11,361,982 - Savandaiah , et al. June 14, 2 | 2022-06-14 |
| Methods And Apparatus For Reducing Tungsten Resitivity App 20220081756 - HOU; Wenting ; et al. | 2022-03-17 |
| Methods And Apparatus For In-situ Cleaning Of Electrostatic Chucks App 20210175107 - SAVANDAIAH; KIRANKUMAR NEELASANDRA ; et al. | 2021-06-10 |
| Magnetron having enhanced target cooling configuration Grant 11,024,490 - Faune , et al. June 1, 2 | 2021-06-01 |
| Target profile for a physical vapor deposition chamber target Grant D902,165 - Johanson , et al. November 17, 2 | 2020-11-17 |
| Target profile for a physical vapor deposition chamber target Grant D877,101 - Johanson , et al. | 2020-03-03 |
| Magnetron Having Enhanced Target Cooling Configuration App 20190180992 - FAUNE; VANESSA ; et al. | 2019-06-13 |
| Wafer centering system and method Grant 6,405,101 - Johanson , et al. June 11, 2 | 2002-06-11 |
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