Target profile for a physical vapor deposition chamber target

Riker , et al. November 7, 2

Patent Grant D801942

U.S. patent number D801,942 [Application Number D/524,109] was granted by the patent office on 2017-11-07 for target profile for a physical vapor deposition chamber target. This patent grant is currently assigned to APPLIED MATERIALS, INC.. The grantee listed for this patent is APPLIED MATERIALS, INC.. Invention is credited to Yu Liu, Martin Lee Riker, Fuhong Zhang.


United States Patent D801,942
Riker ,   et al. November 7, 2017

Target profile for a physical vapor deposition chamber target

Claims

CLAIM The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
Inventors: Riker; Martin Lee (Milpitas, CA), Zhang; Fuhong (Cupertino, CA), Liu; Yu (Campbell, CA)
Applicant:
Name City State Country Type

APPLIED MATERIALS, INC.

Santa Clara

CA

US
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Appl. No.: D/524,109
Filed: April 16, 2015

Current U.S. Class: D13/182
Current International Class: 1303
Field of Search: ;D13/182 ;D15/144.1,144.2,199

References Cited [Referenced By]

U.S. Patent Documents
6659850 December 2003 Korovin
D557226 December 2007 Uchino
D614593 April 2010 Lee
D616390 May 2010 Sato
D633452 March 2011 Namiki
D691974 October 2013 Osada
D716742 November 2014 Jang
D724553 March 2015 Choi
D741823 October 2015 Tateno
D769200 October 2016 Fukushima
D770992 November 2016 Tauchi
2005/0152089 July 2005 Matsuda
2005/0193952 September 2005 Goodman

Other References

US. Appl. No. 29/524,557, filed Apr. 21, 2015, Zhang et al. cited by applicant .
U.S. Appl. No. 29/530,683, filed Jun. 18, 2015, Hanson et al. cited by applicant.

Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Moser Taboada Taboada; Alan

Description



FIG. 1 is a perspective view of a target profile for a physical vapor deposition chamber target, showing our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a right side elevation view thereof;

FIG. 5 is a left side elevation view thereof;

FIG. 6 is a front elevation view thereof;

FIG. 7 is a back elevation view thereof; and,

FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 2.

The broken lines in FIGS. 1-8 represent unclaimed environment and form no part of the claimed design.

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