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Substrate Temperature Non-uniformity Reduction Over Target Life Using Spacing Compensation
App 20220259720 - BANGALORE UMESH; Suhas ; et al. | 2022-08-18 |
Methods and apparatus to prevent interference between processing chambers
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Methods and apparatus for processing a substrate
Grant 11,315,771 - Xie , et al. April 26, 2 | 2022-04-26 |
Biasable flux optimizer / collimator for PVD sputter chamber
Grant 11,309,169 - Riker , et al. April 19, 2 | 2022-04-19 |
Target profile for a physical vapor deposition chamber target
Grant D946,638 - Riker , et al. March 22, 2 | 2022-03-22 |
Methods And Apparatus For Controlling Ion Fraction In Physical Vapor Deposition Processes
App 20220020577 - WANG; Xiaodong ; et al. | 2022-01-20 |
Methods And Apparatus For Processing A Substrate
App 20220020578 - XIE; Xiangjin ; et al. | 2022-01-20 |
Apparatus For Improved Anode-cathode Ratio For Rf Chambers
App 20210395877 - SAVANDAIAH; Kirankumar Neelasandra ; et al. | 2021-12-23 |
Methods and apparatus for controlling ion fraction in physical vapor deposition processes
Grant 11,037,768 - Wang , et al. June 15, 2 | 2021-06-15 |
Methods And Apparatus For Controlling Ion Fraction In Physical Vapor Deposition Processes
App 20210071294 - WANG; Xiaodong ; et al. | 2021-03-11 |
Biasable Flux Optimizer / Collimator For Pvd Sputter Chamber
App 20200357617 - RIKER; Martin Lee ; et al. | 2020-11-12 |
Biasable flux optimizer / collimator for PVD sputter chamber
Grant 10,727,033 - Riker , et al. | 2020-07-28 |
Methods And Apparatus To Prevent Interference Between Processing Chambers
App 20200035527 - Zhang; Fuhong ; et al. | 2020-01-30 |
Target profile for a physical vapor deposition chamber target
Grant D869,409 - Riker , et al. Dec | 2019-12-10 |
Target profile for a physical vapor deposition chamber target
Grant D868,124 - Riker , et al. Nov | 2019-11-26 |
Methods and apparatus to prevent interference between processing chambers
Grant 10,438,828 - Zhang , et al. O | 2019-10-08 |
Biasable Flux Optimizer / Collimator For Pvd Sputter Chamber
App 20190279851 - RIKER; Martin Lee ; et al. | 2019-09-12 |
Collimator for a physical vapor deposition chamber
Grant D859,333 - Riker , et al. Sept | 2019-09-10 |
Collimator for a physical vapor deposition chamber
Grant D858,468 - Riker , et al. Sep | 2019-09-03 |
Biasable flux optimizer / collimator for PVD sputter chamber
Grant 10,347,474 - Riker , et al. July 9, 2 | 2019-07-09 |
Physical vapor deposition (PVD) plasma energy control per dynamic magnetron control
Grant 10,312,065 - Riker , et al. | 2019-06-04 |
Target profile for a physical vapor deposition chamber target
Grant D837,755 - Riker , et al. J | 2019-01-08 |
Target profile for a physical vapor deposition chamber target
Grant D836,572 - Riker , et al. Dec | 2018-12-25 |
Biasable Flux Optimizer / Collimator For Pvd Sputter Chamber
App 20180218889 - RIKER; Martin Lee ; et al. | 2018-08-02 |
Biasable flux optimizer / collimator for PVD sputter chamber
Grant 9,960,024 - Riker , et al. May 1, 2 | 2018-05-01 |
Physical vapor deposition (PVD) target having low friction pads
Grant 9,960,021 - Riker , et al. May 1, 2 | 2018-05-01 |
Methods and Apparatus to Prevent Interference Between Processing Chambers
App 20180096871 - Zhang; Fuhong ; et al. | 2018-04-05 |
Physical Vapor Deposition (pvd) Plasma Energy Control Per Dynamic Magnetron Control
App 20180025895 - RIKER; Martin Lee ; et al. | 2018-01-25 |
Target profile for a physical vapor deposition chamber target
Grant D801,942 - Riker , et al. November 7, 2 | 2017-11-07 |
Methods And Apparatus For Controlling Ion Fraction In Physical Vapor Deposition Processes
App 20170253959 - WANG; Xiaodong ; et al. | 2017-09-07 |
Biasable Flux Optimizer / Collimator For Pvd Sputter Chamber
App 20170117121 - RIKER; Martin Lee ; et al. | 2017-04-27 |
Sputter source for use in a semiconductor process chamber
Grant 9,580,795 - Miller , et al. February 28, 2 | 2017-02-28 |
Collimator for use in substrate processing chambers
Grant 9,543,126 - Riker January 10, 2 | 2017-01-10 |
Wafer processing deposition shielding components
Grant 9,476,122 - Riker , et al. October 25, 2 | 2016-10-25 |
Collimator For Use In Substrate Processing Chambers
App 20160145735 - RIKER; MARTIN LEE | 2016-05-26 |
Cooled Process Tool Adapter For Use In Substrate Processing Chambers
App 20150354054 - FRUCHTERMAN; WILLIAM R. ; et al. | 2015-12-10 |
Wafer processing deposition shielding components
Grant 9,062,379 - Riker , et al. June 23, 2 | 2015-06-23 |
Physical Vapor Deposition (pvd) Target Having Low Friction Pads
App 20150170888 - RIKER; MARTIN LEE ; et al. | 2015-06-18 |
Wafer Processing Deposition Shielding Components
App 20150162171 - Riker; Martin Lee ; et al. | 2015-06-11 |
Sputter Source For Use In A Semiconductor Process Chamber
App 20140251800 - MILLER; Keith A. ; et al. | 2014-09-11 |
Wafer Processing Deposition Shielding Components
App 20140190822 - RIKER; Martin Lee ; et al. | 2014-07-10 |
Wafer processing deposition shielding components
Grant 8,696,878 - Riker , et al. April 15, 2 | 2014-04-15 |
Target Center Positional Constraint For Physical Vapor Deposition (pvd) Processing Systems
App 20140061041 - RIKER; MARTIN LEE ; et al. | 2014-03-06 |
Target Cooling For Physical Vapor Deposition (pvd) Processing Systems
App 20140061039 - RIKER; MARTIN LEE ; et al. | 2014-03-06 |
Method And Apparatus Deposition Process Synchronization
App 20140046475 - LAM; WINSOR ; et al. | 2014-02-13 |
Wafer Processing Deposition Shielding Components
App 20130334038 - Riker; Martin Lee ; et al. | 2013-12-19 |
Electrostatic chuck and methods of use thereof
Grant 8,559,159 - Roy , et al. October 15, 2 | 2013-10-15 |
Wafer Processing Deposition Shielding Components
App 20120211359 - Riker; Martin Lee ; et al. | 2012-08-23 |
Electrostatic Chuck And Methods Of Use Thereof
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Wafer Processing Deposition Shielding Components
App 20090308739 - Riker; Martin Lee ; et al. | 2009-12-17 |
Wafer Processing Deposition Shielding Components
App 20090260982 - Riker; Martin Lee ; et al. | 2009-10-22 |
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