U.S. patent number D913,977 [Application Number D/672,852] was granted by the patent office on 2021-03-23 for elastic membrane for semiconductor wafer polishing.
This patent grant is currently assigned to EBARA CORPORATION. The grantee listed for this patent is EBARA CORPORATION. Invention is credited to Makoto Fukushima, Masahiko Kishimoto, Osamu Nabeya, Keisuke Namiki, Tomoko Owada, Shingo Togashi, Satoru Yamaki.
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United States Patent |
D913,977 |
Yamaki , et al. |
March 23, 2021 |
Elastic membrane for semiconductor wafer polishing
Claims
CLAIM The ornamental design for an elastic membrane for
semiconductor wafer polishing, as shown and described.
Inventors: |
Yamaki; Satoru (Tokyo,
JP), Fukushima; Makoto (Tokyo, JP), Namiki;
Keisuke (Tokyo, JP), Nabeya; Osamu (Tokyo,
JP), Togashi; Shingo (Tokyo, JP), Owada;
Tomoko (Tokyo, JP), Kishimoto; Masahiko (Tokyo,
JP) |
Applicant: |
Name |
City |
State |
Country |
Type |
EBARA CORPORATION |
Tokyo |
N/A |
JP |
|
|
Assignee: |
EBARA CORPORATION (Tokyo,
JP)
|
Appl.
No.: |
D/672,852 |
Filed: |
December 10, 2018 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
|
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29606998 |
Jun 9, 2017 |
D839224 |
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Foreign Application Priority Data
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Dec 12, 2016 [JP] |
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2016-026913 |
Dec 12, 2016 [JP] |
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2016-026914 |
Dec 12, 2016 [JP] |
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2016-026915 |
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Current U.S.
Class: |
D13/182 |
Current International
Class: |
1303 |
Field of
Search: |
;D13/182
;451/66,288,289 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Pearne & Gordon LLP
Description
FIG. 1 is a bottom perspective view of an elastic membrane for
semiconductor wafer polishing showing our new design;
FIG. 2 is a top perspective view thereof;
FIG. 3 is a bottom view thereof;
FIG. 4 is a top view thereof;
FIG. 5 is a front view thereof, rear view being identical;
FIG. 6 is a right-side view thereof, left-side view being
identical;
FIG. 7 is a cross-sectional view taken along line 7-7 of FIG. 4;
and,
FIG. 8 is an enlarged portion view labeled FIG. 8 in FIG. 7.
The portions of the elastic membrane shown in even broken lines
form no part of the claimed design. The dashed-dot lines in the
drawings represent the boundary lines of the claimed design. The
box labeled FIG. 8 shown in even broken lines in FIG. 7 defines the
enlarged portion view of FIG. 8.
* * * * *