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Patent applications and USPTO patent grants for Kishimoto; Masahiko.The latest application filed is for "substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane".
Patent | Date |
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Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, And Method For Replacing Elastic Membrane App 20220048157 - Nabeya; Osamu ;   et al. | 2022-02-17 |
Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane Grant 11,179,823 - Nabeya , et al. November 23, 2 | 2021-11-23 |
Elastic membrane for semiconductor wafer polishing Grant D913,977 - Yamaki , et al. March 23, 2 | 2021-03-23 |
Elastic membrane for semiconductor wafer polishing Grant D839,224 - Yamaki , et al. Ja | 2019-01-29 |
Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, And Method For Replacing Elastic Membrane App 20180117730 - NABEYA; Osamu ;   et al. | 2018-05-03 |
Substrate holding apparatus and polishing apparatus Grant 9,550,271 - Yasuda , et al. January 24, 2 | 2017-01-24 |
Substrate Holding Apparatus And Polishing Apparatus App 20150202733 - YASUDA; Hozumi ;   et al. | 2015-07-23 |
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