Fukushima; Makoto
Patent Applications and Registrations
Patent applications and USPTO patent grants for Fukushima; Makoto.The latest application filed is for "polishing recipe determination device".
Company Profile
24.85.87
- Fukushima; Makoto - Tokyo JP
- Fukushima; Makoto - Isesaki-shi JP
- Fukushima; Makoto - Ohta-ku JP
- Fukushima; Makoto - Yokohama JP
- Fukushima; Makoto - Saitama JP
- Fukushima; Makoto - Kariya-shi JP
- FUKUSHIMA; Makoto - Yokohama-shi JP
- Fukushima; Makoto - Kanagawa JP
- Fukushima; Makoto - Kawagoe JP
- Fukushima, Makoto - Kawagoe-shi JP
- Fukushima; Makoto - Yorii-machi JP
- Fukushima; Makoto - Hyogo JP
Patent Activity
| Patent | Date |
|---|---|
| Polishing Recipe Determination Device App 20220168864 - Kato; Yoshikazu ; et al. | 2022-06-02 |
| Information Processing System, Information Processing Method, Program, And Substrate Processing Apparatus App 20220093409 - Namiki; Keisuke ; et al. | 2022-03-24 |
| Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, And Method For Replacing Elastic Membrane App 20220048157 - Nabeya; Osamu ; et al. | 2022-02-17 |
| Polishing apparatus Grant 11,224,956 - Nabeya , et al. January 18, 2 | 2022-01-18 |
| Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane Grant 11,179,823 - Nabeya , et al. November 23, 2 | 2021-11-23 |
| Elastic Membrane, Substrate Holding Device, And Polishing Apparatus App 20210335650 - Yamaki; Satoru ; et al. | 2021-10-28 |
| Elastic membrane, substrate holding device, and polishing apparatus Grant 11,088,011 - Yamaki , et al. August 10, 2 | 2021-08-10 |
| Substrate Holding Apparatus, Substrate Suction Determination Method, Substrate Polishing Apparatus, Substrate Polishing Method, Method Of Removing Liquid From Upper Suface Of Wafer To Be Polished, Elastic Film For Pressing Wafer Against Polishing Pad, Substrate Release Method, And Constant Amount Ga App 20210217647 - Nabeya; Osamu ; et al. | 2021-07-15 |
| Substrate Holding Apparatus And Method Of Manufacturing A Drive Ring App 20210138606 - NAMIKI; Keisuke ; et al. | 2021-05-13 |
| Elastic membrane Grant D918,161 - Togashi , et al. May 4, 2 | 2021-05-04 |
| Substrate holding apparatus, substrate suction determination method, substrate polishing apparatus, substrate polishing method, method of removing liquid from upper surface of wafer to be polished, elastic film for pressing wafer against polishing pad, substrate release method, and constant amount g Grant 10,991,613 - Nabeya , et al. April 27, 2 | 2021-04-27 |
| Elastic membrane for semiconductor wafer polishing Grant D913,977 - Yamaki , et al. March 23, 2 | 2021-03-23 |
| Elastic Membrane And Substrate Holding Apparatus App 20210060725 - Cheng; Cheng ; et al. | 2021-03-04 |
| Polishing Apparatus And Polishing Method App 20200368874 - KATO; Yoshikazu ; et al. | 2020-11-26 |
| Polishing Apparatus App 20200361056 - Fukushima; Makoto ; et al. | 2020-11-19 |
| Polishing apparatus Grant 10,702,972 - Fukushima , et al. | 2020-07-07 |
| Polishing Apparatus And Polishing Method App 20200206867 - Togashi; Shingo ; et al. | 2020-07-02 |
| Polishing Apparatus And Method Of Controlling Inclination Of Stationary Ring App 20200206868 - Owada; Tomoko ; et al. | 2020-07-02 |
| Substrate Adsorption Method, Substrate Holding Apparatus, Substrate Polishing Apparatus, Elastic Film, Substrate Adsorption Dete App 20200094372 - SHINOZAKI; Hiroyuki ; et al. | 2020-03-26 |
| Substrate Holding Device, Substrate Polishing Apparatus, And Method Of Manufacturing The Substrate Holding Device App 20200047308 - Togashi; Shingo ; et al. | 2020-02-13 |
| Substrate Holding Apparatus, Substrate Suction Determination Method, Substrate Polishing Apparatus, Substrate Polishing Method, App 20200043773 - Nabeya; Osamu ; et al. | 2020-02-06 |
| Substrate Processing Apparatus App 20200023487 - Namiki; Keisuke ; et al. | 2020-01-23 |
| Substrate adsorption method, substrate holding apparatus, substrate polishing apparatus, elastic film, substrate adsorption determination method for substrate holding apparatus, and pressure control method for substrate holding apparatus Grant 10,537,975 - Shinozaki , et al. Ja | 2020-01-21 |
| Substrate holding device, and substrate polishing apparatus Grant 10,486,284 - Togashi , et al. Nov | 2019-11-26 |
| Substrate polishing method, top ring, and substrate polishing apparatus Grant 10,464,185 - Isono , et al. No | 2019-11-05 |
| Substrate holding apparatus and polishing apparatus Grant 10,442,056 - Namiki , et al. Oc | 2019-10-15 |
| Polishing apparatus and polishing method Grant 10,414,015 - Fukushima , et al. Sept | 2019-09-17 |
| Elastic membrane for semiconductor wafer polishing Grant D859,332 - Yamaki , et al. Sept | 2019-09-10 |
| Polishing apparatus, control method and recording medium Grant 10,391,603 - Yamaki , et al. A | 2019-08-27 |
| Method And Apparatus For Polishing A Substrate App 20190240801 - FUKUSHIMA; Makoto ; et al. | 2019-08-08 |
| Polishing Apparatus App 20190224808 - NABEYA; Osamu ; et al. | 2019-07-25 |
| Method and apparatus for polishing a substrate Grant 10,307,882 - Fukushima , et al. | 2019-06-04 |
| Polishing apparatus Grant 10,293,455 - Nabeya , et al. | 2019-05-21 |
| Substrate Processing Apparatus App 20190126427 - Kato; Yoshikazu ; et al. | 2019-05-02 |
| Elastic membrane, substrate holding apparatus, and polishing apparatus Grant 10,213,896 - Fukushima , et al. Feb | 2019-02-26 |
| Elastic membrane for semiconductor wafer polishing Grant D839,224 - Yamaki , et al. Ja | 2019-01-29 |
| Elastic Membrane, Substrate Holding Device, And Polishing Apparatus App 20180301367 - YAMAKI; Satoru ; et al. | 2018-10-18 |
| Polishing apparatus, polishing head, and retainer ring Grant 10,092,992 - Yasuda , et al. October 9, 2 | 2018-10-09 |
| Polishing apparatus Grant 10,040,166 - Nabeya , et al. August 7, 2 | 2018-08-07 |
| Polishing device and polishing method Grant 9,999,956 - Namiki , et al. June 19, 2 | 2018-06-19 |
| Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, And Method For Replacing Elastic Membrane App 20180117730 - NABEYA; Osamu ; et al. | 2018-05-03 |
| Elastic membrane for semiconductor wafer polishing apparatus Grant D813,180 - Fukushima , et al. March 20, 2 | 2018-03-20 |
| Elastic membrane and substrate holding apparatus Grant 9,884,401 - Fukushima , et al. February 6, 2 | 2018-02-06 |
| Elastic membrane for semiconductor wafer polishing apparatus Grant D808,349 - Fukushima , et al. January 23, 2 | 2018-01-23 |
| Substrate holder, polishing apparatus, polishing method, and retaining ring Grant 9,815,171 - Yamaki , et al. November 14, 2 | 2017-11-14 |
| Substrate retaining ring Grant D799,437 - Nabeya , et al. October 10, 2 | 2017-10-10 |
| Substrate Polishing Method, Top Ring, And Substrate Polishing Apparatus App 20170266779 - ISONO; Shintaro ; et al. | 2017-09-21 |
| Retainer ring for substrate Grant D794,585 - Nabeya , et al. August 15, 2 | 2017-08-15 |
| Substrate retaining ring Grant D793,976 - Fukushima , et al. August 8, 2 | 2017-08-08 |
| Polishing apparatus Grant 9,724,797 - Nabeya , et al. August 8, 2 | 2017-08-08 |
| Polishing Apparatus, Control Method And Recording Medium App 20170173756 - YAMAKI; Satoru ; et al. | 2017-06-22 |
| Substrate holder, polishing apparatus, and polishing method Grant 9,662,764 - Fukushima , et al. May 30, 2 | 2017-05-30 |
| Elastic Membrane, Substrate Holding Apparatus, And Polishing Apparatus App 20170144267 - FUKUSHIMA; Makoto ; et al. | 2017-05-25 |
| Substrate Holding Device, Substrate Polishing Apparatus, And Method Of Manufacturing The Substrate Holding Device App 20170106497 - Togashi; Shingo ; et al. | 2017-04-20 |
| Polishing Apparatus And Polishing Method App 20170057049 - Fukushima; Makoto ; et al. | 2017-03-02 |
| Substrate Adsorption Method, Substrate Holding Apparatus, Substrate Polishing Apparatus, Elastic Film, Substrate Adsorption Determination Method For Substrate Holding Apparatus, And Pressure Control Method For Substrate Holding Apparatus App 20170050289 - SHINOZAKI; Hiroyuki ; et al. | 2017-02-23 |
| Elastic membrane, substrate holding apparatus, and polishing apparatus Grant 9,573,244 - Fukushima , et al. February 21, 2 | 2017-02-21 |
| Polishing apparatus and polishing method Grant 9,573,241 - Fukushima , et al. February 21, 2 | 2017-02-21 |
| Substrate holding apparatus and polishing apparatus Grant 9,550,271 - Yasuda , et al. January 24, 2 | 2017-01-24 |
| Polishing Apparatus, Polishing Head, And Retainer Ring App 20160368115 - YASUDA; Hozumi ; et al. | 2016-12-22 |
| Elastic membrane for semiconductor wafer polishing apparatus Grant D770,990 - Fukushima , et al. November 8, 2 | 2016-11-08 |
| Elastic membrane for semiconductor wafer polishing apparatus Grant D769,200 - Fukushima , et al. October 18, 2 | 2016-10-18 |
| Substrate retaining ring Grant D766,849 - Fukushima , et al. September 20, 2 | 2016-09-20 |
| Polishing Apparatus App 20160250735 - NABEYA; Osamu ; et al. | 2016-09-01 |
| Retainer Ring, Substrate Holding Apparatus, And Polishing Apparatus, And Retainer Ring Maintenance Method App 20160243670 - FUKUSHIMA; Makoto ; et al. | 2016-08-25 |
| Polishing apparatus and polishing method Grant 9,403,255 - Fukushima , et al. August 2, 2 | 2016-08-02 |
| Polishing apparatus and polishing method Grant 9,399,277 - Yoshida , et al. July 26, 2 | 2016-07-26 |
| Method And Apparatus For Polishing A Substrate App 20160176011 - FUKUSHIMA; Makoto ; et al. | 2016-06-23 |
| Polishing Apparatus App 20160176009 - YOSHIDA; Hiroshi ; et al. | 2016-06-23 |
| Method and apparatus for polishing a substrate Grant 9,308,621 - Fukushima , et al. April 12, 2 | 2016-04-12 |
| Polishing Apparatus And Polishing Method App 20160074989 - FUKUSHIMA; Makoto ; et al. | 2016-03-17 |
| Polishing Apparatus And Polishing Method App 20150311097 - YOSHIDA; Hiroshi ; et al. | 2015-10-29 |
| Polishing apparatus having substrate holding apparatus Grant 9,149,903 - Fukushima , et al. October 6, 2 | 2015-10-06 |
| Elastic Membrane, Substrate Holding Apparatus, And Polishing Apparatus App 20150273657 - FUKUSHIMA; Makoto ; et al. | 2015-10-01 |
| Polishing Device And Polishing Method App 20150273650 - Namiki; Keisuke ; et al. | 2015-10-01 |
| Substrate Holding Apparatus And Polishing Apparatus App 20150202733 - YASUDA; Hozumi ; et al. | 2015-07-23 |
| Polishing apparatus having thermal energy measuring means Grant 9,073,170 - Fukushima , et al. July 7, 2 | 2015-07-07 |
| Elastic membrane for semiconductor wafer polishing Grant D729,753 - Fukushima , et al. May 19, 2 | 2015-05-19 |
| Substrate Holder, Polishing Apparatus, Polishing Method, And Retaining Ring App 20150133038 - YAMAKI; Satoru ; et al. | 2015-05-14 |
| Polishing Apparatus And Method App 20150093968 - FUKUSHIMA; Makoto ; et al. | 2015-04-02 |
| Polishing Apparatus And Method App 20150093971 - FUKUSHIMA; Makoto ; et al. | 2015-04-02 |
| Polishing apparatus having thermal energy measuring means Grant 8,932,106 - Fukushima , et al. January 13, 2 | 2015-01-13 |
| Polishing Apparatus App 20140370794 - FUKUSHIMA; Makoto ; et al. | 2014-12-18 |
| Polishing Apparatus App 20140357164 - NABEYA; Osamu ; et al. | 2014-12-04 |
| Polishing Apparatus App 20140329446 - NABEYA; Osamu ; et al. | 2014-11-06 |
| Elastic membrane Grant 8,859,070 - Yasuda , et al. October 14, 2 | 2014-10-14 |
| Polishing Apparatus App 20140302754 - NABEYA; Osamu ; et al. | 2014-10-09 |
| Polishing apparatus Grant 8,845,396 - Nabeya , et al. September 30, 2 | 2014-09-30 |
| Elastic membrane for semiconductor wafer polishing Grant D711,330 - Fukushima , et al. August 19, 2 | 2014-08-19 |
| Elastic Membrane And Substrate Holding Apparatus App 20140065934 - FUKUSHIMA; Makoto ; et al. | 2014-03-06 |
| Substrate Holding Apparatus And Polishing Apparatus App 20140004779 - Namiki; Keisuke ; et al. | 2014-01-02 |
| Polishing Apparatus And Polishing Method App 20130324012 - FUKUSHIMA; Makoto ; et al. | 2013-12-05 |
| Magnesium-Alloy Member, Compressor for Use in Air Conditioner, and Method for Manufacturing Magnesium-Alloy Member App 20130213528 - Hirawatari; Sueji ; et al. | 2013-08-22 |
| Substrate Holder, Polishing Apparatus, And Polishing Method App 20130196573 - FUKUSHIMA; Makoto ; et al. | 2013-08-01 |
| Substrate holding apparatus, polishing apparatus, and polishing method Grant 8,485,866 - Yasuda , et al. July 16, 2 | 2013-07-16 |
| Elastic Membrane App 20130136884 - YASUDA; Hozumi ; et al. | 2013-05-30 |
| Polishing method and polishing apparatus Grant 8,430,716 - Fukushima , et al. April 30, 2 | 2013-04-30 |
| Polishing apparatus Grant 8,357,029 - Fukushima , et al. January 22, 2 | 2013-01-22 |
| Substrate Holding Apparatus, Polishing Apparatus, And Polishing Method App 20120309277 - YASUDA; Hozumi ; et al. | 2012-12-06 |
| Substrate holding apparatus, polishing apparatus, and polishing method Grant 8,267,746 - Yasuda , et al. September 18, 2 | 2012-09-18 |
| Polishing Apparatus App 20120071065 - NABEYA; Osamu ; et al. | 2012-03-22 |
| Polishing Apparatus And Method App 20120058709 - FUKUSHIMA; Makoto ; et al. | 2012-03-08 |
| Substrate holding apparatus, polishing apparatus, and polishing method Grant 8,100,739 - Yasuda , et al. January 24, 2 | 2012-01-24 |
| Polishing apparatus Grant 8,100,743 - Nabeya , et al. January 24, 2 | 2012-01-24 |
| Polishing apparatus Grant 8,083,571 - Nabeya , et al. December 27, 2 | 2011-12-27 |
| Polishing apparatus and method Grant 8,070,560 - Yasuda , et al. December 6, 2 | 2011-12-06 |
| Substrate holding apparatus and polishing apparatus Grant 7,988,537 - Togawa , et al. August 2, 2 | 2011-08-02 |
| Method And Apparatus For Polishing A Substrate App 20110159783 - Fukushima; Makoto ; et al. | 2011-06-30 |
| Substrate holding apparatus, polishing apparatus, and polishing method Grant 7,967,665 - Yasuda , et al. June 28, 2 | 2011-06-28 |
| Elastic membrane for semiconductor wafer polishing apparatus Grant D634,719 - Yasuda , et al. March 22, 2 | 2011-03-22 |
| Elastic membrane for semiconductor wafer polishing apparatus Grant D633,452 - Namiki , et al. March 1, 2 | 2011-03-01 |
| Substrate holding apparatus and polishing apparatus Grant 7,867,063 - Togawa , et al. January 11, 2 | 2011-01-11 |
| Substrate holding apparatus Grant 7,850,509 - Togawa , et al. December 14, 2 | 2010-12-14 |
| Polishing Apparatus App 20100273405 - Fukushima; Makoto ; et al. | 2010-10-28 |
| Membrane electrode assembly, method for manufacturing the same, and fuel cell including the same Grant 7,754,365 - Fukushima , et al. July 13, 2 | 2010-07-13 |
| Substrate Holding Apparatus And Polishing Apparatus App 20100056028 - TOGAWA; Tetsuji ; et al. | 2010-03-04 |
| Fluid Coupling Device App 20100025177 - Fukushima; Makoto ; et al. | 2010-02-04 |
| Substrate holding device and polishing apparatus Grant 7,635,292 - Togawa , et al. December 22, 2 | 2009-12-22 |
| Substrate holding apparatus and polishing apparatus Grant 7,632,173 - Togawa , et al. December 15, 2 | 2009-12-15 |
| Substrate holding apparatus and polishing apparatus App 20090233532 - Togawa; Tetsuji ; et al. | 2009-09-17 |
| Polishing method and polishing apparatus App 20090191791 - Fukushima; Makoto ; et al. | 2009-07-30 |
| Polishing apparatus App 20090191797 - NABEYA; Osamu ; et al. | 2009-07-30 |
| Polishing apparatus and method App 20090142996 - Yasuda; Hozumi ; et al. | 2009-06-04 |
| Polishing Apparatus App 20090111362 - Nabeya; Osamu ; et al. | 2009-04-30 |
| Substrate holding apparatus App 20090061748 - TOGAWA; Tetsuji ; et al. | 2009-03-05 |
| Substrate holding apparatus Grant 7,491,117 - Togawa , et al. February 17, 2 | 2009-02-17 |
| Substrate holding apparatus, polishing apparatus, and polishing method App 20080318499 - Yasuda; Hozumi ; et al. | 2008-12-25 |
| Substrate holding apparatus, polishing apparatus, and polishing method App 20080318492 - Yasuda; Hozumi ; et al. | 2008-12-25 |
| Membrane electrode assembly, method for manufacturing the same, and fuel cell including the same App 20080220307 - Fukushima; Makoto ; et al. | 2008-09-11 |
| Substrate holding apparatus and polishing apparatus App 20080166957 - Togawa; Tetsuji ; et al. | 2008-07-10 |
| Substrate holding apparatus and polishing apparatus App 20080119121 - Togawa; Tetsuji ; et al. | 2008-05-22 |
| Substrate holding apparatus and polishing apparatus Grant 7,357,699 - Togawa , et al. April 15, 2 | 2008-04-15 |
| Polishing Apparatus App 20080070479 - Nabeya; Osamu ; et al. | 2008-03-20 |
| Substrate holding apparatus and polishing apparatus Grant 7,311,585 - Togawa , et al. December 25, 2 | 2007-12-25 |
| Substrate Holding Device And Polishing Apparatus App 20070293129 - Togawa; Tetsuji ; et al. | 2007-12-20 |
| Substrate holding apparatus, polishing apparatus, and polishing method App 20070232193 - Yasuda; Hozumi ; et al. | 2007-10-04 |
| Polishing method Grant 7,163,895 - Togawa , et al. January 16, 2 | 2007-01-16 |
| Substrate polishing machine Grant 7,156,725 - Togawa , et al. January 2, 2 | 2007-01-02 |
| Substrate holding apparatus App 20060234609 - Togawa; Tetsuji ; et al. | 2006-10-19 |
| Substrate holding apparatus and polishing apparatus Grant 7,108,592 - Fukaya , et al. September 19, 2 | 2006-09-19 |
| Substrate holding apparatus and polishing apparatus App 20060199479 - Togawa; Tetsuji ; et al. | 2006-09-07 |
| Substrate holding apparatus Grant 7,083,507 - Togawa , et al. August 1, 2 | 2006-08-01 |
| Substrate holding apparatus and polishing apparatus App 20060099892 - Togawa; Tetsuji ; et al. | 2006-05-11 |
| Substrate holding device and polishing device Grant 7,033,260 - Togawa , et al. April 25, 2 | 2006-04-25 |
| Polishing method App 20060079092 - Togawa; Tetsuji ; et al. | 2006-04-13 |
| Substrate holding apparatus App 20050118935 - Togawa, Tetsuji ; et al. | 2005-06-02 |
| Substrate holding device and polishing device App 20050107015 - Togawa, Tetsuji ; et al. | 2005-05-19 |
| Substrate holding apparatus and polishing apparatus App 20050028931 - Fukaya, Koichi ; et al. | 2005-02-10 |
| Substrate holding apparatus Grant 6,852,019 - Togawa , et al. February 8, 2 | 2005-02-08 |
| Substrate polishing machine App 20040209560 - Togawa, Tetsuji ; et al. | 2004-10-21 |
| Polishing method App 20040198011 - Togawa, Tetsuji ; et al. | 2004-10-07 |
| Direct-feed ballpoint writing implement Grant 6,755,587 - Fukushima June 29, 2 | 2004-06-29 |
| Direct-feed ballpoint writing implement App 20040081506 - Fukushima, Makoto | 2004-04-29 |
| Wiring substrate and gas discharge display device Grant 6,621,217 - Nishiki , et al. September 16, 2 | 2003-09-16 |
| Direct liquid type writing instrument Grant 6,599,046 - Fukushima , et al. July 29, 2 | 2003-07-29 |
| Direct Liquid Type Writing Instrument App 20030099501 - Fukushima, Makoto ; et al. | 2003-05-29 |
| Ink reservoir for writing refill App 20020118264 - Fukushima, Makoto | 2002-08-29 |
| Wiring substrate and gas discharge display device App 20020070665 - Nishiki, Masashi ; et al. | 2002-06-13 |
| Substrate holding apparatus App 20020042246 - Togawa, Tetsuji ; et al. | 2002-04-11 |
| Wiring substrate and gas discharge display device App 20020014841 - Nishiki, Masashi ; et al. | 2002-02-07 |
| System and method for using metadata to flexibly analyze data App 20010037228 - Ito, Akihide ; et al. | 2001-11-01 |
| Ballpoint tip for ballpoint liquid container Grant 6,220,774 - Fukushima April 24, 2 | 2001-04-24 |
| IC device contactor Grant 6,204,681 - Nagatsuka , et al. March 20, 2 | 2001-03-20 |
| Method for preventing adhesion of thallium 201 to container Grant 5,667,762 - Fukushima , et al. September 16, 1 | 1997-09-16 |
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