Retainer ring for substrate

Description

FIG. 1 is a top perspective view of a retainer ring for substrate showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a front view thereof;

FIG. 6 is a rear view thereof;

FIG. 7 is a right side view thereof;

FIG. 8 is a left side view thereof;

FIG. 9 is an enlarged cross-section view thereof, taken along the line 9-9 of part 9 of FIG. 3;

FIG. 10 is an enlarged cross-section view thereof, taken along the line 10-10 of part 10 of FIG. 3;

FIG. 11 is an enlarged cross-section view thereof, taken along the line 11-11 of part 11 of FIG. 3;

FIG. 12 is an enlarged perspective view thereof, observed from an inside of the retainer ring and taken along the line 12,13-12,13 of FIG. 4; and,

FIG. 13 is an enlarged perspective view thereof, observed from an outside of the retainer ring and taken along the line 12,13-12,13 of FIG. 4.

The broken lines depict environmental subject matter only and form no part of the claimed design.

Claims

CLAIM The ornamental design for a retainer ring for substrate, as shown and described.

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Inventors:	Nabeya; Osamu (Tokyo, JP), Yasuda; Hozumi (Tokyo, JP), Fukushima; Makoto (Tokyo, JP), Namiki; Keisuke (Tokyo, JP), Togashi; Shingo (Tokyo, JP), Yamaki; Satoru (Tokyo, JP)
Applicant:	Name City State Country Type EBARA CORPORATION Tokyo N/A JP
Assignee:	EBARA CORPORATION (Tokyo, JP)
Appl. No.:	D/560,291
Filed:	April 5, 2016

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Foreign Application Priority Data

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Oct 6, 2015 [JP]			2015-021985

Current U.S. Class:	D13/182
Current International Class:	1303
Field of Search:	;D13/182 ;156/345.12,345.13,345.14 ;451/173,177,28,282,285,286,287,288,289,296,297,307,398,41,443,51

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References Cited [Referenced By]

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U.S. Patent Documents

5944593	August 1999	Chiu
6186880	February 2001	Gonzalez
6224472	May 2001	Lai
6602116	August 2003	Prince
6869335	March 2005	Taylor
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D557226	December 2007	Uchino
D559993	January 2008	Nagakubo
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7819723	October 2010	Nakamura
8298046	October 2012	Frank, Jr.
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D697038	January 2014	Matsumoto
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D729730	May 2015	Gillespie-Brown
D734377	July 2015	Hirakida
D766849	September 2016	Fukushima

Foreign Patent Documents

	302820523		May 2014		CN

Primary Examiner: Oswecki; Elizabeth J
Attorney, Agent or Firm: Pearne & Gordon LLP