| Patent | Date |
|---|
Polishing Recipe Determination Device
App 20220168864 - Kato; Yoshikazu ; et al. | 2022-06-02 |
Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, And Method For Replacing Elastic Membrane
App 20220048157 - Nabeya; Osamu ; et al. | 2022-02-17 |
Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane
Grant 11,179,823 - Nabeya , et al. November 23, 2 | 2021-11-23 |
Elastic Membrane, Substrate Holding Device, And Polishing Apparatus
App 20210335650 - Yamaki; Satoru ; et al. | 2021-10-28 |
Elastic membrane, substrate holding device, and polishing apparatus
Grant 11,088,011 - Yamaki , et al. August 10, 2 | 2021-08-10 |
Elastic membrane
Grant D918,161 - Togashi , et al. May 4, 2 | 2021-05-04 |
Elastic membrane for semiconductor wafer polishing
Grant D913,977 - Yamaki , et al. March 23, 2 | 2021-03-23 |
Method Of Detecting Abnormality Of A Roller Which Transmits A Local Load To A Retainer Ring, And Polishing Apparatus
App 20210060723 - Owada; Tomoko ; et al. | 2021-03-04 |
Elastic Membrane And Substrate Holding Apparatus
App 20210060725 - Cheng; Cheng ; et al. | 2021-03-04 |
Polishing Apparatus
App 20200361056 - Fukushima; Makoto ; et al. | 2020-11-19 |
Polishing apparatus
Grant 10,702,972 - Fukushima , et al. | 2020-07-07 |
Polishing Apparatus And Method Of Controlling Inclination Of Stationary Ring
App 20200206868 - Owada; Tomoko ; et al. | 2020-07-02 |
Polishing Apparatus And Polishing Method
App 20200206867 - Togashi; Shingo ; et al. | 2020-07-02 |
Substrate Holding Device, Substrate Polishing Apparatus, And Method Of Manufacturing The Substrate Holding Device
App 20200047308 - Togashi; Shingo ; et al. | 2020-02-13 |
Substrate holding device, and substrate polishing apparatus
Grant 10,486,284 - Togashi , et al. Nov | 2019-11-26 |
Substrate polishing method, top ring, and substrate polishing apparatus
Grant 10,464,185 - Isono , et al. No | 2019-11-05 |
Polishing apparatus and polishing method
Grant 10,414,015 - Fukushima , et al. Sept | 2019-09-17 |
Elastic membrane for semiconductor wafer polishing
Grant D859,332 - Yamaki , et al. Sept | 2019-09-10 |
Polishing apparatus, control method and recording medium
Grant 10,391,603 - Yamaki , et al. A | 2019-08-27 |
Method And Apparatus For Polishing A Substrate
App 20190240801 - FUKUSHIMA; Makoto ; et al. | 2019-08-08 |
Method and apparatus for polishing a substrate
Grant 10,307,882 - Fukushima , et al. | 2019-06-04 |
Elastic membrane, substrate holding apparatus, and polishing apparatus
Grant 10,213,896 - Fukushima , et al. Feb | 2019-02-26 |
Elastic membrane for semiconductor wafer polishing
Grant D839,224 - Yamaki , et al. Ja | 2019-01-29 |
Elastic Membrane, Substrate Holding Device, And Polishing Apparatus
App 20180301367 - YAMAKI; Satoru ; et al. | 2018-10-18 |
Polishing device and polishing method
Grant 9,999,956 - Namiki , et al. June 19, 2 | 2018-06-19 |
Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, And Method For Replacing Elastic Membrane
App 20180117730 - NABEYA; Osamu ; et al. | 2018-05-03 |
Elastic membrane for semiconductor wafer polishing apparatus
Grant D813,180 - Fukushima , et al. March 20, 2 | 2018-03-20 |
Elastic membrane and substrate holding apparatus
Grant 9,884,401 - Fukushima , et al. February 6, 2 | 2018-02-06 |
Elastic membrane for semiconductor wafer polishing apparatus
Grant D808,349 - Fukushima , et al. January 23, 2 | 2018-01-23 |
Substrate holder, polishing apparatus, polishing method, and retaining ring
Grant 9,815,171 - Yamaki , et al. November 14, 2 | 2017-11-14 |
Substrate retaining ring
Grant D799,437 - Nabeya , et al. October 10, 2 | 2017-10-10 |
Substrate Polishing Method, Top Ring, And Substrate Polishing Apparatus
App 20170266779 - ISONO; Shintaro ; et al. | 2017-09-21 |
Retainer ring for substrate
Grant D794,585 - Nabeya , et al. August 15, 2 | 2017-08-15 |
Substrate retaining ring
Grant D793,976 - Fukushima , et al. August 8, 2 | 2017-08-08 |
Polishing Apparatus, Control Method And Recording Medium
App 20170173756 - YAMAKI; Satoru ; et al. | 2017-06-22 |
Polishing method and polishing apparatus
Grant 9,676,076 - Namiki , et al. June 13, 2 | 2017-06-13 |
Substrate holder, polishing apparatus, and polishing method
Grant 9,662,764 - Fukushima , et al. May 30, 2 | 2017-05-30 |
Elastic Membrane, Substrate Holding Apparatus, And Polishing Apparatus
App 20170144267 - FUKUSHIMA; Makoto ; et al. | 2017-05-25 |
Substrate Holding Device, Substrate Polishing Apparatus, And Method Of Manufacturing The Substrate Holding Device
App 20170106497 - Togashi; Shingo ; et al. | 2017-04-20 |
Polishing Apparatus And Polishing Method
App 20170057049 - Fukushima; Makoto ; et al. | 2017-03-02 |
Elastic membrane, substrate holding apparatus, and polishing apparatus
Grant 9,573,244 - Fukushima , et al. February 21, 2 | 2017-02-21 |
Elastic membrane for semiconductor wafer polishing apparatus
Grant D770,990 - Fukushima , et al. November 8, 2 | 2016-11-08 |
Elastic membrane for semiconductor wafer polishing apparatus
Grant D769,200 - Fukushima , et al. October 18, 2 | 2016-10-18 |
Substrate retaining ring
Grant D766,849 - Fukushima , et al. September 20, 2 | 2016-09-20 |
Polishing apparatus and polishing method
Grant 9,403,255 - Fukushima , et al. August 2, 2 | 2016-08-02 |
Method And Apparatus For Polishing A Substrate
App 20160176011 - FUKUSHIMA; Makoto ; et al. | 2016-06-23 |
Polishing Device And Polishing Method
App 20150273650 - Namiki; Keisuke ; et al. | 2015-10-01 |
Elastic Membrane, Substrate Holding Apparatus, And Polishing Apparatus
App 20150273657 - FUKUSHIMA; Makoto ; et al. | 2015-10-01 |
Substrate Holder, Polishing Apparatus, Polishing Method, And Retaining Ring
App 20150133038 - YAMAKI; Satoru ; et al. | 2015-05-14 |
Polishing Apparatus
App 20140370794 - FUKUSHIMA; Makoto ; et al. | 2014-12-18 |
Elastic membrane
Grant 8,859,070 - Yasuda , et al. October 14, 2 | 2014-10-14 |
Elastic Membrane And Substrate Holding Apparatus
App 20140065934 - FUKUSHIMA; Makoto ; et al. | 2014-03-06 |
Polishing Method And Polishing Apparatus
App 20130337722 - NAMIKI; KEISUKE ; et al. | 2013-12-19 |
Polishing Apparatus And Polishing Method
App 20130324012 - FUKUSHIMA; Makoto ; et al. | 2013-12-05 |
Substrate Holder, Polishing Apparatus, And Polishing Method
App 20130196573 - FUKUSHIMA; Makoto ; et al. | 2013-08-01 |
Elastic Membrane
App 20130136884 - YASUDA; Hozumi ; et al. | 2013-05-30 |
Elastic membrane for semiconductor wafer polishing apparatus
Grant D634,719 - Yasuda , et al. March 22, 2 | 2011-03-22 |
Elastic membrane for semiconductor wafer polishing apparatus
Grant D633,452 - Namiki , et al. March 1, 2 | 2011-03-01 |
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