loadpatents
Patent applications and USPTO patent grants for Yasuda; Hozumi.The latest application filed is for "polishing head system and polishing apparatus".
Patent | Date |
---|---|
Polishing apparatus Grant 11,224,956 - Nabeya , et al. January 18, 2 | 2022-01-18 |
Polishing Head System And Polishing Apparatus App 20210237224 - Kobata; Itsuki ;   et al. | 2021-08-05 |
Substrate Processing Apparatus And Substrate Processing Method App 20210237221 - TAKADA; Nobuyuki ;   et al. | 2021-08-05 |
Substrate Processing Apparatus And Substrate Processing Method App 20210193494 - TAKADA; Nobuyuki ;   et al. | 2021-06-24 |
Polishing Apparatus App 20200361056 - Fukushima; Makoto ;   et al. | 2020-11-19 |
Substrate Polishing Device And Substrate Polishing Method App 20200269383 - YASUDA; Hozumi ;   et al. | 2020-08-27 |
Polishing apparatus Grant 10,702,972 - Fukushima , et al. | 2020-07-07 |
Polishing Machine And A Polishing Method For A Substrate App 20200171618 - KOBATA; Itsuki ;   et al. | 2020-06-04 |
Polishing Head And Polishing Apparatus App 20200094371 - Akazawa; Kenichi ;   et al. | 2020-03-26 |
Substrate Holding Device, Substrate Polishing Apparatus, And Method Of Manufacturing The Substrate Holding Device App 20200047308 - Togashi; Shingo ;   et al. | 2020-02-13 |
Substrate holding device, and substrate polishing apparatus Grant 10,486,284 - Togashi , et al. Nov | 2019-11-26 |
Substrate polishing method, top ring, and substrate polishing apparatus Grant 10,464,185 - Isono , et al. No | 2019-11-05 |
Substrate holding apparatus and polishing apparatus Grant 10,442,056 - Namiki , et al. Oc | 2019-10-15 |
Polishing apparatus and polishing method Grant 10,414,015 - Fukushima , et al. Sept | 2019-09-17 |
Polishing apparatus, control method and recording medium Grant 10,391,603 - Yamaki , et al. A | 2019-08-27 |
Substrate Processing Control System, Substrate Processing Control Method, And Program App 20190240799 - TAKEDA; Koichi ;   et al. | 2019-08-08 |
Polishing Apparatus App 20190224808 - NABEYA; Osamu ;   et al. | 2019-07-25 |
Polishing apparatus Grant 10,293,455 - Nabeya , et al. | 2019-05-21 |
Elastic membrane, substrate holding apparatus, and polishing apparatus Grant 10,213,896 - Fukushima , et al. Feb | 2019-02-26 |
Polishing apparatus, polishing head, and retainer ring Grant 10,092,992 - Yasuda , et al. October 9, 2 | 2018-10-09 |
Substrate Polisher And Polishing Method App 20180236630 - YASUDA; Hozumi ;   et al. | 2018-08-23 |
Polishing apparatus Grant 10,040,166 - Nabeya , et al. August 7, 2 | 2018-08-07 |
Polishing device and polishing method Grant 9,999,956 - Namiki , et al. June 19, 2 | 2018-06-19 |
Elastic membrane for semiconductor wafer polishing apparatus Grant D813,180 - Fukushima , et al. March 20, 2 | 2018-03-20 |
Elastic membrane and substrate holding apparatus Grant 9,884,401 - Fukushima , et al. February 6, 2 | 2018-02-06 |
Elastic membrane for semiconductor wafer polishing apparatus Grant D808,349 - Fukushima , et al. January 23, 2 | 2018-01-23 |
Substrate holder, polishing apparatus, polishing method, and retaining ring Grant 9,815,171 - Yamaki , et al. November 14, 2 | 2017-11-14 |
Substrate retaining ring Grant D799,437 - Nabeya , et al. October 10, 2 | 2017-10-10 |
Substrate Polishing Method, Top Ring, And Substrate Polishing Apparatus App 20170266779 - ISONO; Shintaro ;   et al. | 2017-09-21 |
Polishing Machine And A Polishing Method For A Substrate App 20170259395 - KOBATA; Itsuki ;   et al. | 2017-09-14 |
Retainer ring for substrate Grant D794,585 - Nabeya , et al. August 15, 2 | 2017-08-15 |
Polishing apparatus Grant 9,724,797 - Nabeya , et al. August 8, 2 | 2017-08-08 |
Substrate retaining ring Grant D793,976 - Fukushima , et al. August 8, 2 | 2017-08-08 |
Polishing Apparatus, Control Method And Recording Medium App 20170173756 - YAMAKI; Satoru ;   et al. | 2017-06-22 |
Polishing method and polishing apparatus Grant 9,676,076 - Namiki , et al. June 13, 2 | 2017-06-13 |
Substrate holder, polishing apparatus, and polishing method Grant 9,662,764 - Fukushima , et al. May 30, 2 | 2017-05-30 |
Elastic Membrane, Substrate Holding Apparatus, And Polishing Apparatus App 20170144267 - FUKUSHIMA; Makoto ;   et al. | 2017-05-25 |
Substrate Holding Device, Substrate Polishing Apparatus, And Method Of Manufacturing The Substrate Holding Device App 20170106497 - Togashi; Shingo ;   et al. | 2017-04-20 |
Polishing Apparatus And Polishing Method App 20170057049 - Fukushima; Makoto ;   et al. | 2017-03-02 |
Polishing apparatus and polishing method Grant 9,573,241 - Fukushima , et al. February 21, 2 | 2017-02-21 |
Elastic membrane, substrate holding apparatus, and polishing apparatus Grant 9,573,244 - Fukushima , et al. February 21, 2 | 2017-02-21 |
Substrate holding apparatus and polishing apparatus Grant 9,550,271 - Yasuda , et al. January 24, 2 | 2017-01-24 |
Polishing Apparatus, Polishing Head, And Retainer Ring App 20160368115 - YASUDA; Hozumi ;   et al. | 2016-12-22 |
Elastic membrane for semiconductor wafer polishing apparatus Grant D770,990 - Fukushima , et al. November 8, 2 | 2016-11-08 |
Elastic membrane for semiconductor wafer polishing apparatus Grant D769,200 - Fukushima , et al. October 18, 2 | 2016-10-18 |
Substrate retaining ring Grant D766,849 - Fukushima , et al. September 20, 2 | 2016-09-20 |
Polishing Apparatus App 20160250735 - NABEYA; Osamu ;   et al. | 2016-09-01 |
Retainer Ring, Substrate Holding Apparatus, And Polishing Apparatus, And Retainer Ring Maintenance Method App 20160243670 - FUKUSHIMA; Makoto ;   et al. | 2016-08-25 |
Polishing apparatus and polishing method Grant 9,403,255 - Fukushima , et al. August 2, 2 | 2016-08-02 |
Polishing apparatus and polishing method Grant 9,399,277 - Yoshida , et al. July 26, 2 | 2016-07-26 |
Polishing Apparatus App 20160176009 - YOSHIDA; Hiroshi ;   et al. | 2016-06-23 |
Polishing Apparatus And Polishing Method App 20160074989 - FUKUSHIMA; Makoto ;   et al. | 2016-03-17 |
Polishing Apparatus And Polishing Method App 20150311097 - YOSHIDA; Hiroshi ;   et al. | 2015-10-29 |
Polishing apparatus having substrate holding apparatus Grant 9,149,903 - Fukushima , et al. October 6, 2 | 2015-10-06 |
Elastic Membrane, Substrate Holding Apparatus, And Polishing Apparatus App 20150273657 - FUKUSHIMA; Makoto ;   et al. | 2015-10-01 |
Polishing Device And Polishing Method App 20150273650 - Namiki; Keisuke ;   et al. | 2015-10-01 |
Substrate Holding Apparatus And Polishing Apparatus App 20150202733 - YASUDA; Hozumi ;   et al. | 2015-07-23 |
Polishing apparatus having thermal energy measuring means Grant 9,073,170 - Fukushima , et al. July 7, 2 | 2015-07-07 |
Elastic membrane for semiconductor wafer polishing Grant D729,753 - Fukushima , et al. May 19, 2 | 2015-05-19 |
Substrate Holder, Polishing Apparatus, Polishing Method, And Retaining Ring App 20150133038 - YAMAKI; Satoru ;   et al. | 2015-05-14 |
Polishing Apparatus And Method App 20150093968 - FUKUSHIMA; Makoto ;   et al. | 2015-04-02 |
Polishing Apparatus And Method App 20150093971 - FUKUSHIMA; Makoto ;   et al. | 2015-04-02 |
Polishing apparatus having thermal energy measuring means Grant 8,932,106 - Fukushima , et al. January 13, 2 | 2015-01-13 |
Polishing Apparatus App 20140370794 - FUKUSHIMA; Makoto ;   et al. | 2014-12-18 |
Polishing Apparatus App 20140357164 - NABEYA; Osamu ;   et al. | 2014-12-04 |
Polishing Apparatus App 20140329446 - NABEYA; Osamu ;   et al. | 2014-11-06 |
Elastic membrane Grant 8,859,070 - Yasuda , et al. October 14, 2 | 2014-10-14 |
Polishing Apparatus App 20140302754 - NABEYA; Osamu ;   et al. | 2014-10-09 |
Polishing apparatus Grant 8,845,396 - Nabeya , et al. September 30, 2 | 2014-09-30 |
Elastic membrane for semiconductor wafer polishing Grant D711,330 - Fukushima , et al. August 19, 2 | 2014-08-19 |
Elastic Membrane And Substrate Holding Apparatus App 20140065934 - FUKUSHIMA; Makoto ;   et al. | 2014-03-06 |
Substrate Holding Apparatus And Polishing Apparatus App 20140004779 - Namiki; Keisuke ;   et al. | 2014-01-02 |
Polishing Method And Polishing Apparatus App 20130337722 - NAMIKI; KEISUKE ;   et al. | 2013-12-19 |
Polishing Apparatus And Polishing Method App 20130324012 - FUKUSHIMA; Makoto ;   et al. | 2013-12-05 |
Substrate Holder, Polishing Apparatus, And Polishing Method App 20130196573 - FUKUSHIMA; Makoto ;   et al. | 2013-08-01 |
Substrate holding apparatus, polishing apparatus, and polishing method Grant 8,485,866 - Yasuda , et al. July 16, 2 | 2013-07-16 |
Elastic Membrane App 20130136884 - YASUDA; Hozumi ;   et al. | 2013-05-30 |
Polishing method and polishing apparatus Grant 8,430,716 - Fukushima , et al. April 30, 2 | 2013-04-30 |
Polishing apparatus Grant 8,357,029 - Fukushima , et al. January 22, 2 | 2013-01-22 |
Substrate Holding Apparatus, Polishing Apparatus, And Polishing Method App 20120309277 - YASUDA; Hozumi ;   et al. | 2012-12-06 |
Substrate holding apparatus, polishing apparatus, and polishing method Grant 8,267,746 - Yasuda , et al. September 18, 2 | 2012-09-18 |
Polishing Apparatus App 20120071065 - NABEYA; Osamu ;   et al. | 2012-03-22 |
Method for regenerating ion exchanger Grant 8,133,380 - Saito , et al. March 13, 2 | 2012-03-13 |
Polishing Apparatus And Method App 20120058709 - FUKUSHIMA; Makoto ;   et al. | 2012-03-08 |
Polishing apparatus Grant 8,100,743 - Nabeya , et al. January 24, 2 | 2012-01-24 |
Substrate holding apparatus, polishing apparatus, and polishing method Grant 8,100,739 - Yasuda , et al. January 24, 2 | 2012-01-24 |
Polishing apparatus and method Grant 8,070,560 - Yasuda , et al. December 6, 2 | 2011-12-06 |
Substrate holding apparatus, polishing apparatus, and polishing method Grant 7,967,665 - Yasuda , et al. June 28, 2 | 2011-06-28 |
Elastic membrane for semiconductor wafer polishing apparatus Grant D634,719 - Yasuda , et al. March 22, 2 | 2011-03-22 |
Elastic membrane for semiconductor wafer polishing apparatus Grant D633,452 - Namiki , et al. March 1, 2 | 2011-03-01 |
Substrate holding apparatus and substrate polishing apparatus Grant 7,897,007 - Gunji , et al. March 1, 2 | 2011-03-01 |
Substrate holding apparatus Grant 7,850,509 - Togawa , et al. December 14, 2 | 2010-12-14 |
Polishing Apparatus App 20100273405 - Fukushima; Makoto ;   et al. | 2010-10-28 |
Electrolytic processing apparatus and method Grant 7,655,118 - Shirakashi , et al. February 2, 2 | 2010-02-02 |
Electrolytic processing apparatus and electrolytic processing method Grant 7,638,030 - Nabeya , et al. December 29, 2 | 2009-12-29 |
Electrolytic processing method Grant 7,578,920 - Noji , et al. August 25, 2 | 2009-08-25 |
Electrolytic processing apparatus and substrate processing apparatus and method Grant 7,569,135 - Shirakashi , et al. August 4, 2 | 2009-08-04 |
Polishing method and polishing apparatus App 20090191791 - Fukushima; Makoto ;   et al. | 2009-07-30 |
Polishing apparatus App 20090191797 - NABEYA; Osamu ;   et al. | 2009-07-30 |
Polishing apparatus and method App 20090142996 - Yasuda; Hozumi ;   et al. | 2009-06-04 |
Polishing Apparatus App 20090111362 - Nabeya; Osamu ;   et al. | 2009-04-30 |
Substrate holding apparatus App 20090061748 - TOGAWA; Tetsuji ;   et al. | 2009-03-05 |
Substrate holding apparatus Grant 7,491,117 - Togawa , et al. February 17, 2 | 2009-02-17 |
Electrolytic processing apparatus and electrolytic processing method Grant 7,476,303 - Yasuda , et al. January 13, 2 | 2009-01-13 |
Method and device for regenerating ion exchanger, and electrolytic processing apparatus App 20080314763 - Saito; Takayuki ;   et al. | 2008-12-25 |
Substrate holding apparatus, polishing apparatus, and polishing method App 20080318499 - Yasuda; Hozumi ;   et al. | 2008-12-25 |
Substrate holding apparatus, polishing apparatus, and polishing method App 20080318492 - Yasuda; Hozumi ;   et al. | 2008-12-25 |
Substrate Holding Apparatus And Substrate Polishing Apparatus App 20080299880 - Gunji; Yoshihiro ;   et al. | 2008-12-04 |
Method and device for regenerating ion exchanger, and electrolytic processing apparatus Grant 7,427,345 - Saito , et al. September 23, 2 | 2008-09-23 |
Substrate holding apparatus and substrate polishing apparatus App 20080066862 - Gunji; Yoshihiro ;   et al. | 2008-03-20 |
Polishing Apparatus App 20080070479 - Nabeya; Osamu ;   et al. | 2008-03-20 |
Substrate holding apparatus and substrate polishing apparatus App 20080047667 - Gunji; Yoshihiro ;   et al. | 2008-02-28 |
Electrolytic Processing Apparatus and Electrolytic Processing Method App 20070272562 - Noji; Ikutaro ;   et al. | 2007-11-29 |
Substrate holding apparatus, polishing apparatus, and polishing method App 20070232193 - Yasuda; Hozumi ;   et al. | 2007-10-04 |
Electrolytic processing apparatus and electrolytic processing method App 20070187257 - Noji; Ikutaro ;   et al. | 2007-08-16 |
Substrate processing apparatus and method App 20070187259 - Kobata; Itsuki ;   et al. | 2007-08-16 |
Electrolytic processing apparatus and substrate processing apparatus and method App 20070181432 - Shirakashi; Mitsuhiko ;   et al. | 2007-08-09 |
Electrolytic processing apparatus and electrolytic processing method App 20070095659 - Yasuda; Hozumi ;   et al. | 2007-05-03 |
Substrate processing apparatus and method Grant 7,208,076 - Kobata , et al. April 24, 2 | 2007-04-24 |
Polishing apparatus App 20070004324 - Hirose; Masayoshi ;   et al. | 2007-01-04 |
Substrate polishing machine Grant 7,156,725 - Togawa , et al. January 2, 2 | 2007-01-02 |
Substrate holding apparatus App 20060234609 - Togawa; Tetsuji ;   et al. | 2006-10-19 |
Substrate processing apparatus and substrate processing method App 20060234508 - Shirakashi; Mitsuhiko ;   et al. | 2006-10-19 |
Electrolytic processing device and substrate processing apparatus Grant 7,101,465 - Kobata , et al. September 5, 2 | 2006-09-05 |
Substrate holding apparatus Grant 7,083,507 - Togawa , et al. August 1, 2 | 2006-08-01 |
Electrochemical machining device and electrochemical machining method App 20060144711 - Kobata; Itsuki ;   et al. | 2006-07-06 |
Electrolytic processing apparatus and method App 20050121328 - Shirakashi, Mitsuhiko ;   et al. | 2005-06-09 |
Electrolytic processing apparatus and method App 20050115838 - Mori, Yuzo ;   et al. | 2005-06-02 |
Substrate holding apparatus App 20050118935 - Togawa, Tetsuji ;   et al. | 2005-06-02 |
Substrate holding apparatus and substrate polishing apparatus Grant 6,890,402 - Gunji , et al. May 10, 2 | 2005-05-10 |
Substrate holding apparatus and substrate polishing apparatus App 20050072527 - Gunji, Yoshihiro ;   et al. | 2005-04-07 |
Electrolytic processing apparatus and electrolytic processing method App 20050067289 - Noji, Ikutaro ;   et al. | 2005-03-31 |
Electrolytic processing apparatus and method App 20050051432 - Shirakashi, Mitsuhiko ;   et al. | 2005-03-10 |
Electrolytic processing apparatus and electrolytic processing method App 20050035001 - Yasuda, Hozumi ;   et al. | 2005-02-17 |
Substrate holding apparatus Grant 6,852,019 - Togawa , et al. February 8, 2 | 2005-02-08 |
Electrolytic processing apparatus and method App 20040256237 - Kobata, Itsuki ;   et al. | 2004-12-23 |
Substrate processing appartus and method App 20040231989 - Kobata, Itsuki ;   et al. | 2004-11-25 |
Substrate polishing machine App 20040209560 - Togawa, Tetsuji ;   et al. | 2004-10-21 |
Electrolytic processing apparatus and substrate processing apparatus and method App 20040206634 - Shirakashi, Mitsuhiko ;   et al. | 2004-10-21 |
Electrolytic processing apparatus and electrolytic processing method App 20040129569 - Nabeya, Osamu ;   et al. | 2004-07-08 |
Method and device for regenerating ion exchanger, and electrolytic processing apparatus App 20040112761 - Saito, Takayuki ;   et al. | 2004-06-17 |
Electrolytic processing device and substrate processing apparatus App 20030136668 - Kobata, Itsuki ;   et al. | 2003-07-24 |
Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof Grant 6,435,949 - Katsuoka , et al. August 20, 2 | 2002-08-20 |
Apparatus for and method of polishing workpiece Grant 6,432,258 - Kimura , et al. August 13, 2 | 2002-08-13 |
Substrate holding apparatus App 20020042246 - Togawa, Tetsuji ;   et al. | 2002-04-11 |
Substrate holding apparatus and substrate polishing apparatus App 20020017365 - Gunji, Yoshihiro ;   et al. | 2002-02-14 |
Polishing apparatus Grant 6,077,385 - Kimura , et al. June 20, 2 | 2000-06-20 |
Apparatus for and method of polishing workpiece Grant 6,033,520 - Kimura , et al. March 7, 2 | 2000-03-07 |
Polishing apparatus Grant 5,679,063 - Kimura , et al. October 21, 1 | 1997-10-21 |
Method and apparatus for polishing workpiece Grant 5,651,724 - Kimura , et al. July 29, 1 | 1997-07-29 |
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