loadpatents
Patent applications and USPTO patent grants for Namiki; Keisuke.The latest application filed is for "polishing recipe determination device".
Patent | Date |
---|---|
Polishing Recipe Determination Device App 20220168864 - Kato; Yoshikazu ;   et al. | 2022-06-02 |
Information Processing System, Information Processing Method, Program, And Substrate Processing Apparatus App 20220093409 - Namiki; Keisuke ;   et al. | 2022-03-24 |
Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, And Method For Replacing Elastic Membrane App 20220048157 - Nabeya; Osamu ;   et al. | 2022-02-17 |
Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane Grant 11,179,823 - Nabeya , et al. November 23, 2 | 2021-11-23 |
Elastic Membrane, Substrate Holding Device, And Polishing Apparatus App 20210335650 - Yamaki; Satoru ;   et al. | 2021-10-28 |
Elastic membrane, substrate holding device, and polishing apparatus Grant 11,088,011 - Yamaki , et al. August 10, 2 | 2021-08-10 |
Substrate Holding Apparatus And Method Of Manufacturing A Drive Ring App 20210138606 - NAMIKI; Keisuke ;   et al. | 2021-05-13 |
Elastic membrane Grant D918,161 - Togashi , et al. May 4, 2 | 2021-05-04 |
Elastic membrane for semiconductor wafer polishing Grant D913,977 - Yamaki , et al. March 23, 2 | 2021-03-23 |
Polishing Apparatus App 20200361056 - Fukushima; Makoto ;   et al. | 2020-11-19 |
Polishing apparatus Grant 10,702,972 - Fukushima , et al. | 2020-07-07 |
Polishing Apparatus And Polishing Method App 20200206867 - Togashi; Shingo ;   et al. | 2020-07-02 |
Polishing Apparatus And Method Of Controlling Inclination Of Stationary Ring App 20200206868 - Owada; Tomoko ;   et al. | 2020-07-02 |
Substrate Processing Apparatus App 20200023487 - Namiki; Keisuke ;   et al. | 2020-01-23 |
Substrate polishing method, top ring, and substrate polishing apparatus Grant 10,464,185 - Isono , et al. No | 2019-11-05 |
Substrate holding apparatus and polishing apparatus Grant 10,442,056 - Namiki , et al. Oc | 2019-10-15 |
Elastic membrane for semiconductor wafer polishing Grant D859,332 - Yamaki , et al. Sept | 2019-09-10 |
Polishing apparatus, control method and recording medium Grant 10,391,603 - Yamaki , et al. A | 2019-08-27 |
Elastic membrane, substrate holding apparatus, and polishing apparatus Grant 10,213,896 - Fukushima , et al. Feb | 2019-02-26 |
Elastic membrane for semiconductor wafer polishing Grant D839,224 - Yamaki , et al. Ja | 2019-01-29 |
Elastic Membrane, Substrate Holding Device, And Polishing Apparatus App 20180301367 - YAMAKI; Satoru ;   et al. | 2018-10-18 |
Polishing device and polishing method Grant 9,999,956 - Namiki , et al. June 19, 2 | 2018-06-19 |
Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, And Method For Replacing Elastic Membrane App 20180117730 - NABEYA; Osamu ;   et al. | 2018-05-03 |
Elastic membrane for semiconductor wafer polishing apparatus Grant D813,180 - Fukushima , et al. March 20, 2 | 2018-03-20 |
Elastic membrane for semiconductor wafer polishing apparatus Grant D808,349 - Fukushima , et al. January 23, 2 | 2018-01-23 |
Substrate holder, polishing apparatus, polishing method, and retaining ring Grant 9,815,171 - Yamaki , et al. November 14, 2 | 2017-11-14 |
Substrate retaining ring Grant D799,437 - Nabeya , et al. October 10, 2 | 2017-10-10 |
Substrate Polishing Method, Top Ring, And Substrate Polishing Apparatus App 20170266779 - ISONO; Shintaro ;   et al. | 2017-09-21 |
Retainer ring for substrate Grant D794,585 - Nabeya , et al. August 15, 2 | 2017-08-15 |
Substrate retaining ring Grant D793,976 - Fukushima , et al. August 8, 2 | 2017-08-08 |
Polishing Apparatus, Control Method And Recording Medium App 20170173756 - YAMAKI; Satoru ;   et al. | 2017-06-22 |
Polishing method and polishing apparatus Grant 9,676,076 - Namiki , et al. June 13, 2 | 2017-06-13 |
Substrate holder, polishing apparatus, and polishing method Grant 9,662,764 - Fukushima , et al. May 30, 2 | 2017-05-30 |
Elastic Membrane, Substrate Holding Apparatus, And Polishing Apparatus App 20170144267 - FUKUSHIMA; Makoto ;   et al. | 2017-05-25 |
Polishing apparatus and polishing method Grant 9,573,241 - Fukushima , et al. February 21, 2 | 2017-02-21 |
Elastic membrane, substrate holding apparatus, and polishing apparatus Grant 9,573,244 - Fukushima , et al. February 21, 2 | 2017-02-21 |
Elastic membrane for semiconductor wafer polishing apparatus Grant D770,990 - Fukushima , et al. November 8, 2 | 2016-11-08 |
Elastic membrane for semiconductor wafer polishing apparatus Grant D769,200 - Fukushima , et al. October 18, 2 | 2016-10-18 |
Substrate retaining ring Grant D766,849 - Fukushima , et al. September 20, 2 | 2016-09-20 |
Retainer Ring, Substrate Holding Apparatus, And Polishing Apparatus, And Retainer Ring Maintenance Method App 20160243670 - FUKUSHIMA; Makoto ;   et al. | 2016-08-25 |
Polishing apparatus and polishing method Grant 9,403,255 - Fukushima , et al. August 2, 2 | 2016-08-02 |
Polishing Apparatus And Polishing Method App 20160074989 - FUKUSHIMA; Makoto ;   et al. | 2016-03-17 |
Polishing Device And Polishing Method App 20150273650 - Namiki; Keisuke ;   et al. | 2015-10-01 |
Elastic Membrane, Substrate Holding Apparatus, And Polishing Apparatus App 20150273657 - FUKUSHIMA; Makoto ;   et al. | 2015-10-01 |
Elastic membrane for semiconductor wafer polishing Grant D729,753 - Fukushima , et al. May 19, 2 | 2015-05-19 |
Substrate Holder, Polishing Apparatus, Polishing Method, And Retaining Ring App 20150133038 - YAMAKI; Satoru ;   et al. | 2015-05-14 |
Polishing Apparatus App 20140370794 - FUKUSHIMA; Makoto ;   et al. | 2014-12-18 |
Method and apparatus for dressing polishing pad, profile measuring method, substrate polishing apparatus, and substrate polishing method Grant 8,870,625 - Togawa , et al. October 28, 2 | 2014-10-28 |
Elastic membrane Grant 8,859,070 - Yasuda , et al. October 14, 2 | 2014-10-14 |
Elastic membrane for semiconductor wafer polishing Grant D711,330 - Fukushima , et al. August 19, 2 | 2014-08-19 |
Substrate Holding Apparatus And Polishing Apparatus App 20140004779 - Namiki; Keisuke ;   et al. | 2014-01-02 |
Polishing Method And Polishing Apparatus App 20130337722 - NAMIKI; KEISUKE ;   et al. | 2013-12-19 |
Polishing Apparatus And Polishing Method App 20130324012 - FUKUSHIMA; Makoto ;   et al. | 2013-12-05 |
Substrate Holder, Polishing Apparatus, And Polishing Method App 20130196573 - FUKUSHIMA; Makoto ;   et al. | 2013-08-01 |
Elastic Membrane App 20130136884 - YASUDA; Hozumi ;   et al. | 2013-05-30 |
Elastic membrane for semiconductor wafer polishing apparatus Grant D634,719 - Yasuda , et al. March 22, 2 | 2011-03-22 |
Plating apparatus Grant 7,901,550 - Makino , et al. March 8, 2 | 2011-03-08 |
Elastic membrane for semiconductor wafer polishing apparatus Grant D633,452 - Namiki , et al. March 1, 2 | 2011-03-01 |
Substrate holding apparatus and substrate polishing apparatus Grant 7,897,007 - Gunji , et al. March 1, 2 | 2011-03-01 |
Substrate holding apparatus Grant 7,850,509 - Togawa , et al. December 14, 2 | 2010-12-14 |
Method and apparatus for dressing polishing pad, profile measuring method, substrate polishing apparatus, and substrate polishing method App 20090137190 - Togawa; Tetsuji ;   et al. | 2009-05-28 |
Plating method App 20090095634 - Makino; Natsuki ;   et al. | 2009-04-16 |
Plating apparatus App 20090095618 - Makino; Natsuki ;   et al. | 2009-04-16 |
Substrate holding apparatus App 20090061748 - TOGAWA; Tetsuji ;   et al. | 2009-03-05 |
Substrate holding apparatus Grant 7,491,117 - Togawa , et al. February 17, 2 | 2009-02-17 |
Substrate Holding Apparatus And Substrate Polishing Apparatus App 20080299880 - Gunji; Yoshihiro ;   et al. | 2008-12-04 |
Substrate holding apparatus and substrate polishing apparatus App 20080066862 - Gunji; Yoshihiro ;   et al. | 2008-03-20 |
Substrate holding apparatus and substrate polishing apparatus App 20080047667 - Gunji; Yoshihiro ;   et al. | 2008-02-28 |
Electrolytic processing apparatus and method App 20070034526 - Makino; Natsuki ;   et al. | 2007-02-15 |
Substrate polishing machine Grant 7,156,725 - Togawa , et al. January 2, 2 | 2007-01-02 |
Substrate holding apparatus App 20060234609 - Togawa; Tetsuji ;   et al. | 2006-10-19 |
Substrate holding apparatus Grant 7,083,507 - Togawa , et al. August 1, 2 | 2006-08-01 |
Plating device and planting method App 20060113192 - Kurashina; Keiichi ;   et al. | 2006-06-01 |
Electrolytic processing apparatus and method App 20050155865 - Mishima, Koji ;   et al. | 2005-07-21 |
Substrate holding apparatus App 20050118935 - Togawa, Tetsuji ;   et al. | 2005-06-02 |
Substrate holding apparatus and substrate polishing apparatus Grant 6,890,402 - Gunji , et al. May 10, 2 | 2005-05-10 |
Substrate holding apparatus and substrate polishing apparatus App 20050072527 - Gunji, Yoshihiro ;   et al. | 2005-04-07 |
Substrate holding apparatus Grant 6,852,019 - Togawa , et al. February 8, 2 | 2005-02-08 |
Substrate polishing machine App 20040209560 - Togawa, Tetsuji ;   et al. | 2004-10-21 |
Substrate holding apparatus App 20020042246 - Togawa, Tetsuji ;   et al. | 2002-04-11 |
Substrate holding apparatus and substrate polishing apparatus App 20020017365 - Gunji, Yoshihiro ;   et al. | 2002-02-14 |
Method and apparatus for polishing workpiece Grant 5,651,724 - Kimura , et al. July 29, 1 | 1997-07-29 |
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