Owada; Tomoko

Patent Applications and Registrations

Patent applications and USPTO patent grants for Owada; Tomoko.The latest application filed is for "substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane".

Company Profile

6.6.7

Owada; Tomoko - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, And Method For Replacing Elastic Membrane App 20220048157 - Nabeya; Osamu ; et al.	2022-02-17
Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane Grant 11,179,823 - Nabeya , et al. November 23, 2	2021-11-23
Elastic Membrane, Substrate Holding Device, And Polishing Apparatus App 20210335650 - Yamaki; Satoru ; et al.	2021-10-28
Elastic membrane, substrate holding device, and polishing apparatus Grant 11,088,011 - Yamaki , et al. August 10, 2	2021-08-10
Elastic membrane Grant D918,161 - Togashi , et al. May 4, 2	2021-05-04
Elastic membrane for semiconductor wafer polishing Grant D913,977 - Yamaki , et al. March 23, 2	2021-03-23
Method Of Detecting Abnormality Of A Roller Which Transmits A Local Load To A Retainer Ring, And Polishing Apparatus App 20210060723 - Owada; Tomoko ; et al.	2021-03-04
Polishing Apparatus And Polishing Method App 20200206867 - Togashi; Shingo ; et al.	2020-07-02
Polishing Apparatus And Method Of Controlling Inclination Of Stationary Ring App 20200206868 - Owada; Tomoko ; et al.	2020-07-02
Elastic membrane for semiconductor wafer polishing Grant D859,332 - Yamaki , et al. Sept	2019-09-10
Elastic membrane for semiconductor wafer polishing Grant D839,224 - Yamaki , et al. Ja	2019-01-29
Elastic Membrane, Substrate Holding Device, And Polishing Apparatus App 20180301367 - YAMAKI; Satoru ; et al.	2018-10-18
Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, And Method For Replacing Elastic Membrane App 20180117730 - NABEYA; Osamu ; et al.	2018-05-03

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