Process shield for a substrate processing chamber

Description

FIG. 1 is a top isometric view of a process shield for a substrate processing chamber, according to one embodiment of the novel design.

FIG. 2 is a bottom isometric view thereof.

FIG. 3 is a bottom plan view thereof.

FIG. 4 is a top plan view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a back elevation view thereof.

FIG. 7 is a left side elevation view thereof.

FIG. 8 is a right side elevation view thereof.

FIG. 9 is cross-sectional view taken along line 9-9 of FIG. 3.

FIG. 10 is a top isometric view of a process shield for a substrate processing chamber, according to another embodiment of the novel design.

FIG. 11 is a bottom isometric view thereof.

FIG. 12 is a bottom plan view thereof.

FIG. 13 is a top plan view thereof.

FIG. 14 is a front elevation view thereof.

FIG. 15 is a back elevation view thereof.

FIG. 16 is a left side elevation view thereof.

FIG. 17 is a right side elevation view thereof.

FIG. 18 is cross-sectional view taken along line 18-18 of FIG. 12; and,

FIG. 19 is cross-sectional view taken along line 19-19 of FIG. 14.

The dashed lines in FIGS. 1-19 represent unclaimed environment forming no part of the claimed design.

Claims

CLAIM The ornamental design for a process shield for a substrate processing chamber, as shown and described.

---

Inventors:	Koppa; Manjunatha P. (Bengaluru, IN), Kamath; Aravind (Santa Clara, CA), Tsai; Cheng-Hsiung Matt (Cupertino, CA), Venkataswamappa; Manjunath H. (Bangalore, IN), Sansoni; Steven V. (Livermore, CA), Or; David (Santa Clara, CA)
Applicant:	Name City State Country Type APPLIED MATERIALS, INC. Santa Clara CA US
Assignee:	APPLIED MATERIALS, INC. (Santa Clara, CA)
Appl. No.:	D/679,734
Filed:	February 8, 2019

---

Current U.S. Class:	D15/138; D13/182
Current International Class:	1509
Field of Search:	;D23/249,259,262,269 ;D15/138,139,143,144,144.1,144.2,150,199 ;D13/118,122,133,162,182,184,199 ;D22/113,119

---

References Cited [Referenced By]

---

U.S. Patent Documents

5320728	June 1994	Tepman
D351450	October 1994	Maryska
D376744	December 1996	Eisenblatter
D381030	July 1997	Tepman
D395483	June 1998	Maryska
D401252	November 1998	Tudhope
D403002	December 1998	Tudhope
D403334	December 1998	Tudhope
D403337	December 1998	Or
D491963	June 2004	Doba
D559066	January 2008	Tano
D584591	January 2009	Tano
D592029	May 2009	Tano
D592030	May 2009	Tano
D600989	September 2009	Tano
D616389	May 2010	Takahashi
8043487	October 2011	Li et al.
D665491	August 2012	Goel
8371904	February 2013	Jindal
D678745	March 2013	Nguyen
D703162	April 2014	Tamaso
D738451	September 2015	Olson
D741823	October 2015	Tateno
D741921	October 2015	Jarvius
9475996	October 2016	Mandle
D795208	August 2017	Sasaki
D796458	September 2017	Jang
D810705	February 2018	Krishnan
D819580	June 2018	Krishnan
D877101	March 2020	Johanson
D888903	June 2020	Gunther
D891382	July 2020	Koppa
D913979	March 2021	Babu
D913980	March 2021	Lee
2003/0029564	February 2003	Brown et al.
2012/0263569	October 2012	Priddy
2015/0357169	December 2015	Yuan
2017/0009367	January 2017	Harris
2020/0090915	March 2020	Kerschbaumer

Foreign Patent Documents

	D1481081		Oct 2013		JP
	D1509910		Oct 2014		JP
	D1549498		May 2016		JP
	D1570910		Mar 2017		JP
	D1575876		May 2017		JP
	D1584875		Aug 2017		JP
	D1584906		Aug 2017		JP
	D161030		Jun 2014		TW
	D166552		Mar 2015		TW
	D167109		Apr 2015		TW
	D166431		Nov 2017		TW
	D187432		Dec 2017		TW

Other References

Search Report for Taiwan Design Application No. 108304729, dated Aug. 5, 2020. cited by applicant . Search Report for Taiwan Design Application No. 108304735001, dated Dec. 2, 2020. cited by applicant.

Primary Examiner: Lane; Sheryl
Assistant Examiner: Philipps; Mark T.
Attorney, Agent or Firm: Moser Taboada