Sansoni; Steven V.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sansoni; Steven V..The latest application filed is for "detachable biasable electrostatic chuck for high temperature applications".
Company Profile
7.24.21
- Sansoni; Steven V. - Livermore CA
- Sansoni; Steven V - Livermore CA
- Sansoni; Steven V. - Livemore CA
Patent Activity
| Patent | Date |
|---|---|
| Processing system for forming layers Grant 11,414,740 - Lerner , et al. August 16, 2 | 2022-08-16 |
| Base plate for a processing chamber substrate support Grant D960,216 - Rao , et al. August 9, 2 | 2022-08-09 |
| Compliant robot blade for substrate support and transfer Grant 11,348,823 - Sansoni , et al. May 31, 2 | 2022-05-31 |
| Base plate for a processing chamber substrate support Grant D947,914 - Rao , et al. April 5, 2 | 2022-04-05 |
| Process shield for a substrate processing chamber Grant D942,516 - Koppa , et al. February 1, 2 | 2022-02-01 |
| Methods and apparatus for producing low angle depositions Grant 11,170,982 - Subramani , et al. November 9, 2 | 2021-11-09 |
| Deposition ring for a substrate processing chamber Grant D933,725 - Koppa , et al. October 19, 2 | 2021-10-19 |
| Detachable Biasable Electrostatic Chuck For High Temperature Applications App 20200411354 - RAO; Shreesha Yogish ; et al. | 2020-12-31 |
| Processing System For Forming Layers App 20200385851 - LERNER; Alexander N. ; et al. | 2020-12-10 |
| Process shield for a substrate processing chamber Grant D891,382 - Koppa , et al. | 2020-07-28 |
| Process kit design for in-chamber heater and wafer rotating mechanism Grant 10,704,147 - Rasheed , et al. | 2020-07-07 |
| Methods And Apparatus For Producing Low Angle Depositions App 20200051794 - SUBRAMANI; ANANTHA K. ; et al. | 2020-02-13 |
| Substrate support apparatus having reduced substrate particle generation Grant 10,431,489 - Agarwal , et al. O | 2019-10-01 |
| Compliant Robot Blade For Defect Reduction App 20190267275 - SANSONI; STEVEN V. ; et al. | 2019-08-29 |
| Compliant robot blade for defect reduction Grant 10,312,127 - Sansoni , et al. | 2019-06-04 |
| Methods and apparatus for rapidly cooling a substrate Grant 10,312,116 - Ravi , et al. | 2019-06-04 |
| Process Kit Design For In-chamber Heater And Wafer Rotating Mechanism App 20180155838 - RASHEED; Muhammad M. ; et al. | 2018-06-07 |
| Methods And Apparatus For Rapidly Cooling A Substrate App 20180025924 - Ravi; Jallepally ; et al. | 2018-01-25 |
| Methods and apparatus for rapidly cooling a substrate Grant 9,779,971 - Ravi , et al. October 3, 2 | 2017-10-03 |
| In-situ removable electrostatic chuck Grant 9,773,692 - Cox , et al. September 26, 2 | 2017-09-26 |
| Electrostatic chuck Grant 9,608,549 - Parkhe , et al. March 28, 2 | 2017-03-28 |
| In-situ Removable Electrostatic Chuck App 20170062260 - COX; Michael S. ; et al. | 2017-03-02 |
| In-situ removable electrostatic chuck Grant 9,508,584 - Cox , et al. November 29, 2 | 2016-11-29 |
| Substrate transfer robot end effector Grant 9,425,076 - Agarwal , et al. August 23, 2 | 2016-08-23 |
| Substrate Transfer Robot End Effector App 20160005638 - AGARWAL; PULKIT ; et al. | 2016-01-07 |
| Methods And Apparatus For Rapidly Cooling A Substrate App 20150294886 - Ravi; Jallepally ; et al. | 2015-10-15 |
| Linked vacuum processing tools and methods of using the same Grant 9,147,592 - Englhardt , et al. September 29, 2 | 2015-09-29 |
| Substrate Support Apparatus Having Reduced Substrate Particle Generation App 20150170954 - AGARWAL; PULKIT ; et al. | 2015-06-18 |
| Compliant Robot Blade For Defect Reduction App 20150078874 - SANSONI; STEVEN V. ; et al. | 2015-03-19 |
| Electrostatic chuck with temperature control Grant 8,971,009 - Parkhe , et al. March 3, 2 | 2015-03-03 |
| In-situ Removable Electrostatic Chuck App 20150036259 - COX; Michael S. ; et al. | 2015-02-05 |
| Linked Vacuum Processing Tools And Methods Of Using The Same App 20140044503 - Englhardt; Eric A. ; et al. | 2014-02-13 |
| Electrostatic chuck and methods of use thereof Grant 8,559,159 - Roy , et al. October 15, 2 | 2013-10-15 |
| Electrostatic Chuck With Temperature Control App 20130088809 - PARKHE; VIJAY D. ; et al. | 2013-04-11 |
| Electrostatic Chuck App 20130088808 - PARKHE; VIJAY D. ; et al. | 2013-04-11 |
| Electrostatic chuck assembly Grant 8,390,980 - Sansoni , et al. March 5, 2 | 2013-03-05 |
| Electrostatic Chuck And Methods Of Use Thereof App 20120033340 - ROY; SHAMBHU N. ; et al. | 2012-02-09 |
| Ring Assembly For Substrate Processing Chamber App 20100065216 - Tiller; Jennifer ; et al. | 2010-03-18 |
| Electrostatic Chuck Assembly App 20100039747 - Sansoni; Steven V. ; et al. | 2010-02-18 |
| Detachable electrostatic chuck having sealing assembly Grant 7,589,950 - Parkhe , et al. September 15, 2 | 2009-09-15 |
| Deposition Analysis For Robot Motion Correction App 20080101912 - Martin; Todd W. ; et al. | 2008-05-01 |
| Detachable electrostatic chuck having sealing assembly App 20080089001 - Parkhe; Vijay D. ; et al. | 2008-04-17 |
| Ring assembly for substrate processing chamber App 20070283884 - Tiller; Jennifer ; et al. | 2007-12-13 |
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