Koppa; Manjunatha P.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Koppa; Manjunatha P..The latest application filed is for "methods and apparatus for dual channel showerheads".
- Koppa; Manjunatha P. - Bengaluru IN
| Patent | Date |
|---|---|
| Base plate for a processing chamber substrate support Grant D960,216 - Rao , et al. August 9, 2 | 2022-08-09 |
| Base plate for a processing chamber substrate support Grant D947,914 - Rao , et al. April 5, 2 | 2022-04-05 |
| Pre-clean chamber with integrated shutter garage Grant 11,251,028 - Tsai , et al. February 15, 2 | 2022-02-15 |
| Process shield for a substrate processing chamber Grant D942,516 - Koppa , et al. February 1, 2 | 2022-02-01 |
| Deposition ring for a substrate processing chamber Grant D933,725 - Koppa , et al. October 19, 2 | 2021-10-19 |
| Methods And Apparatus For Dual Channel Showerheads App 20210032753 - RAVI; Jallepally ; et al. | 2021-02-04 |
| Detachable Biasable Electrostatic Chuck For High Temperature Applications App 20200411354 - RAO; Shreesha Yogish ; et al. | 2020-12-31 |
| Base plate for a processing chamber substrate support Grant D893,441 - Rao , et al. A | 2020-08-18 |
| Process shield for a substrate processing chamber Grant D891,382 - Koppa , et al. | 2020-07-28 |
| Pre-clean Chamber With Integrated Shutter Garage App 20190348264 - Tsai; Cheng-Hsiung Matt ; et al. | 2019-11-14 |
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