Shield and cover for target of sputter coating apparatus

Description

FIG. 1 is a perspective view of a shield and cover for target of sputter coating apparatus embodying the design of the invention;

FIG. 2 is a top plan view of the shield and cover for target of sputter coating apparatus of FIG. 1;

FIG. 3 is a bottom plan view of the shield and cover for target of sputter coating apparatus of FIG. 1;

FIG. 4 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the bottom of FIG. 2;

FIG. 5 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the top of FIG. 2;

FIG. 6 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the left side of FIG. 2;

FIG. 7 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the right side of FIG. 2; and,

FIG. 8 is a cross-sectional view of the shield and cover for target of sputter coating apparatus taken along the line 8--8 of FIG. 2.

Claims

The ornamental design for a shield and cover for target of sputter coating apparatus, as shown and described.

---

Inventors:	Tudhope; Andrew William (Danville, CA), Jordan; David Bruce (San Jose, CA), Gonzalez; Jose Luis (Redwood City, CA)
Assignee:	Semiconductor Equipment Technology (San Jose, CA)
Appl. No.:	D/082,647
Filed:	January 27, 1998

---

Current U.S. Class:	D15/138
Current International Class:	1509
Field of Search:	;D15/138 ;204/298.02-298.11

---

References Cited [Referenced By]

---

U.S. Patent Documents

5690795	November 1997	Rosenstein et al.

Primary Examiner: Davis; Antoine Duval
Attorney, Agent or Firm: Gray Cary Ware & Friedenrich