Self-centering wafer carrier for chemical vapor deposition

Description

FIG. 1 is a top perspective view of a first embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 2 is a bottom perspective view of the first embodiment thereof;

FIG. 3 is a top view of the first embodiment thereof;

FIG. 4 is a bottom view of the first embodiment thereof;

FIG. 5 is a right view of the first embodiment thereof;

FIG. 6 is a left view of the first embodiment thereof;

FIG. 7 is a rear view of the first embodiment thereof; and

FIG. 8 is a front view of the first embodiment thereof.

FIG. 9 is a top perspective view of a second embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 10 is a bottom perspective view of the second embodiment thereof;

FIG. 11 is a top view of the second embodiment thereof;

FIG. 12 is a bottom view of the second embodiment thereof;

FIG. 13 is a right view of the second embodiment thereof;

FIG. 14 is a left view of the second embodiment thereof;

FIG. 15 is a rear view of the second embodiment thereof; and

FIG. 16 is a front view of the second embodiment thereof.

FIG. 17 is a cross sectional view of the second embodiment taken along 17-17 in FIG. 11 thereof.

FIG. 18 is a top perspective view of a third embodiment of an ornamental design for a self-centering wafer carrier for chemical vapor deposition;

FIG. 19 is a bottom perspective view of the third embodiment thereof;

FIG. 20 is a top view of the third embodiment thereof;

FIG. 21 is a bottom view of the third embodiment thereof;

FIG. 22 is a right view of the third embodiment thereof;

FIG. 23 is a left view of the third embodiment thereof;

FIG. 24 is a rear view of the third embodiment thereof; and,

FIG. 25 is a front view of the third embodiment thereof.

Claims

CLAIM The ornamental design for a self-centering wafer carrier for chemical vapor deposition, as shown and described.

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Inventors:	Krishnan; Sandeep (Jersey City, NJ), Gurary; Alexander I. (Bridgewater, NJ), Chang; Chenghung Paul (Easton, PA), Marcelo; Earl (Franklin Park, NJ)
Applicant:	Name City State Country Type Veeco Instruments, Inc. Plainview NY US
Assignee:	Veeco Instruments, Inc. (Plainview, NY)
Appl. No.:	D/559,939
Filed:	April 1, 2016

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Current U.S. Class:	D13/182; D15/138
Current International Class:	1303
Field of Search:	;D13/158-177,179,180,182,199 ;D10/104.1,108 ;D11/143,144,152 ;D14/216,240,356,509 ;D17/22 ;D23/323,328,333,335,336,337,341,352,357,370,385,386,399,400,499 ;D12/303,315 ;118/50,722,715,724,733 ;205/118,123 ;D9/500,452,454 ;D15/122,199,138 ;D8/16,19,323,399 ;D7/367,404,624.1

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References Cited [Referenced By]

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Primary Examiner: Asch; Jeffrey D
Assistant Examiner: Bell; Tracey J
Attorney, Agent or Firm: Rauschenbach; Kurt Rauschenbach Patent Law Group, LLP