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Patent applications and USPTO patent grants for Chang; Chenghung Paul.The latest application filed is for "self-centering wafer carrier system for chemical vapor deposition".
Patent | Date |
---|---|
Multi-filament heater assembly Grant D921,431 - Krishnan , et al. June 8, 2 | 2021-06-08 |
Self-Centering Wafer Carrier System for Chemical Vapor Deposition App 20190362963 - Krishnan; Sandeep ;   et al. | 2019-11-28 |
Self-centering wafer carrier system for chemical vapor deposition Grant 10,438,795 - Krishnan , et al. O | 2019-10-08 |
Terminal for mechanical support of a heating element Grant 10,136,472 - Plankensteiner , et al. November 20, 2 | 2018-11-20 |
Self-centering wafer carrier for chemical vapor deposition Grant D819,580 - Krishnan , et al. June 5, 2 | 2018-06-05 |
Self-centering wafer carrier for chemical vapor deposition Grant D810,705 - Krishnan , et al. February 20, 2 | 2018-02-20 |
Self-Centering Wafer Carrier System For Chemical Vapor Deposition App 20160372321 - Krishnan; Sandeep ;   et al. | 2016-12-22 |
Self-cleaning shutter for CVD reactor Grant 9,388,493 - Chang , et al. July 12, 2 | 2016-07-12 |
Self-cleaning Shutter For Cvd Reactor App 20140190405 - Chang; Chenghung Paul ;   et al. | 2014-07-10 |
Terminal For Mechanical Support Of A Heating Element App 20140042147 - PLANKENSTEINER; ARNO ;   et al. | 2014-02-13 |
Wafer carrier having pockets Grant D695,241 - Gurary , et al. December 10, 2 | 2013-12-10 |
Wafer carrier having pockets Grant D690,671 - Gurary , et al. October 1, 2 | 2013-10-01 |
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