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Patent applications and USPTO patent grants for Gurary; Alexander I..The latest application filed is for "rotating disk reactor with split substrate carrier".
Patent | Date |
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Rotating Disk Reactor with Split Substrate Carrier App 20220243325 - Krishnan; Sandeep ;   et al. | 2022-08-04 |
Deposition System With Integrated Carrier Cleaning Modules App 20200354828 - Gurary; Alexander I. ;   et al. | 2020-11-12 |
Rotating Disk Reactor with Self-Locking Carrier-to-Support Interface for Chemical Vapor Deposition App 20200248307 - Kind Code | 2020-08-06 |
Rotating disk reactor with ferrofluid seal for chemical vapor deposition Grant 10,718,052 - Barriss , et al. | 2020-07-21 |
Self-Centering Wafer Carrier System for Chemical Vapor Deposition App 20190362963 - Krishnan; Sandeep ;   et al. | 2019-11-28 |
Self-centering wafer carrier system for chemical vapor deposition Grant 10,438,795 - Krishnan , et al. O | 2019-10-08 |
Wafter carrier for chemical vapor deposition systems Grant 10,316,412 - Krishnan , et al. | 2019-06-11 |
Wafer Carrier Having Thermal Cover For Chemical Vapor Deposition Systems App 20190157125 - Gurary; Alexander I. ;   et al. | 2019-05-23 |
Terminal for mechanical support of a heating element Grant 10,136,472 - Plankensteiner , et al. November 20, 2 | 2018-11-20 |
Wafer carrier having thermal cover for chemical vapor deposition systems Grant 10,134,617 - Gurary , et al. November 20, 2 | 2018-11-20 |
Processing methods and apparatus with temperature distribution control Grant 10,002,805 - Gurary , et al. June 19, 2 | 2018-06-19 |
Self-centering wafer carrier for chemical vapor deposition Grant D819,580 - Krishnan , et al. June 5, 2 | 2018-06-05 |
Density-matching alkyl push flow for vertical flow rotating disk reactors Grant 9,982,362 - Mitrovic , et al. May 29, 2 | 2018-05-29 |
Self-centering wafer carrier for chemical vapor deposition Grant D810,705 - Krishnan , et al. February 20, 2 | 2018-02-20 |
Keyed wafer carrier Grant 9,816,184 - Krishnan , et al. November 14, 2 | 2017-11-14 |
Temperature control for GaN based materials Grant 9,677,944 - Gurary , et al. June 13, 2 | 2017-06-13 |
Heated wafer carrier profiling Grant 9,653,340 - Boguslavskiy , et al. May 16, 2 | 2017-05-16 |
Rotating Disk Reactor With Ferrofluid Seal For Chemical Vapor Deposition App 20170096734 - Barriss; Louise S. ;   et al. | 2017-04-06 |
Self-Centering Wafer Carrier System For Chemical Vapor Deposition App 20160372321 - Krishnan; Sandeep ;   et al. | 2016-12-22 |
Processing Methods And Apparatus With Temperature Distribution Control App 20160204044 - Gurary; Alexander I. ;   et al. | 2016-07-14 |
Self-cleaning shutter for CVD reactor Grant 9,388,493 - Chang , et al. July 12, 2 | 2016-07-12 |
Wafer carrier with temperature distribution control Grant 9,273,413 - Krishnan , et al. March 1, 2 | 2016-03-01 |
TEMPERATURE CONTROL FOR GaN BASED MATERIALS App 20160041037 - Gurary; Alexander I. ;   et al. | 2016-02-11 |
Keyed spindle Grant D748,591 - Krishnan , et al. February 2, 2 | 2016-02-02 |
Spindle key Grant D744,967 - Krishnan , et al. December 8, 2 | 2015-12-08 |
Temperature control for GaN based materials Grant 9,200,965 - Gurary , et al. December 1, 2 | 2015-12-01 |
Density-matching Alkyl Push Flow For Vertical Flow Rotating Disk Reactors App 20150225875 - Mitrovic; Bojan ;   et al. | 2015-08-13 |
Water Carrier Having Thermal Cover for Chemical Vapor Deposition Systems App 20150187620 - Gurary; Alexander I. ;   et al. | 2015-07-02 |
Chemical vapor deposition with elevated temperature gas injection Grant 9,053,935 - Gurary , et al. June 9, 2 | 2015-06-09 |
Keyed spindle Grant D726,133 - Krishnan , et al. April 7, 2 | 2015-04-07 |
Rotating Disk Reactor With Ferrofluid Seal For Chemical Vapor Deposition App 20150075431 - Barriss; Louise S. ;   et al. | 2015-03-19 |
Chemical Vapor Deposition With Elevated Temperature Gas Injection App 20150056790 - Gurary; Alexander I. ;   et al. | 2015-02-26 |
Heated wafer carrier profiling Grant 8,958,061 - Boguslavskiy , et al. February 17, 2 | 2015-02-17 |
Chemical Vapor Deposition With Elevated Temperature Gas Injection App 20140352619 - Gurary; Alexander I. ;   et al. | 2014-12-04 |
Methods and systems for in-situ pyrometer calibration Grant 8,888,360 - Gurary , et al. November 18, 2 | 2014-11-18 |
Wafer Carrier With Temperature Distribution Control App 20140261698 - Krishnan; Sandeep ;   et al. | 2014-09-18 |
Spindle key Grant D712,852 - Krishnan , et al. September 9, 2 | 2014-09-09 |
Multi-keyed spindle Grant D711,332 - Krishnan , et al. August 19, 2 | 2014-08-19 |
Self-cleaning Shutter For Cvd Reactor App 20140190405 - Chang; Chenghung Paul ;   et al. | 2014-07-10 |
Terminal For Mechanical Support Of A Heating Element App 20140042147 - PLANKENSTEINER; ARNO ;   et al. | 2014-02-13 |
TEMPERATURE CONTROL FOR GaN BASED MATERIALS App 20130343426 - Gurary; Alexander I. ;   et al. | 2013-12-26 |
Wafer carrier having pockets Grant D695,242 - Gurary , et al. December 10, 2 | 2013-12-10 |
Wafer carrier having pockets Grant D695,241 - Gurary , et al. December 10, 2 | 2013-12-10 |
Wafter Carrier For Chemical Vapor Deposition Systems App 20130276704 - Krishnan; Sandeep ;   et al. | 2013-10-24 |
Sectional wafer carrier Grant 8,562,746 - Gurary , et al. October 22, 2 | 2013-10-22 |
Wafer carrier having pockets Grant D690,671 - Gurary , et al. October 1, 2 | 2013-10-01 |
Keyed Wafer Carrier App 20130252404 - Krishnan; Sandeep ;   et al. | 2013-09-26 |
Keyed wafer carrier Grant D687,790 - Krishnan , et al. August 13, 2 | 2013-08-13 |
Multi-keyed wafer carrier Grant D687,791 - Krishnan , et al. August 13, 2 | 2013-08-13 |
Wafer carrier having pockets Grant D686,175 - Gurary , et al. July 16, 2 | 2013-07-16 |
Heated Wafer Carrier Profiling App 20120304926 - Boguslavskiy; Vadim ;   et al. | 2012-12-06 |
Heated Wafer Carrier Profiling App 20120307233 - Boguslavskiy; Vadim ;   et al. | 2012-12-06 |
Wafer processing method with carrier hub removal Grant 8,231,940 - Boguslavskiy , et al. July 31, 2 | 2012-07-31 |
Methods And Systems For In-situ Pyrometer Calibration App 20120170609 - Gurary; Alexander I. ;   et al. | 2012-07-05 |
Sectional Wafer Carrier App 20120156374 - Gurary; Alexander I. ;   et al. | 2012-06-21 |
Movable Injectors In Rotating Disc Gas Reactors App 20120070916 - Sferlazzo; Piero ;   et al. | 2012-03-22 |
Movable injectors in rotating disc gas reactors Grant 8,092,599 - Sferlazzo , et al. January 10, 2 | 2012-01-10 |
Wafer Carrier With Hub App 20110287635 - Boguslavskiy; Vadim ;   et al. | 2011-11-24 |
Wafer carrier with hub Grant 8,021,487 - Boguslavskiy , et al. September 20, 2 | 2011-09-20 |
Wafer Carrier With Hub App 20110114022 - Boguslavskiy; Vadim ;   et al. | 2011-05-19 |
Wafer carrier with hub App 20090155028 - Boguslavskiy; Vadim ;   et al. | 2009-06-18 |
Movable injectors in rotating disc gas reactors App 20090017190 - Sferlazzo; Piero ;   et al. | 2009-01-15 |
Calibration wafer and method of calibrating in situ temperatures Grant 7,452,125 - Volf , et al. November 18, 2 | 2008-11-18 |
Chemical vapor deposition apparatus Grant 6,197,121 - Gurary , et al. March 6, 2 | 2001-03-06 |
Wafer carriers for epitaxial growth processes Grant 6,001,183 - Gurary , et al. December 14, 1 | 1999-12-14 |
Wafer carrier with flexible wafer flat holder Grant 5,840,124 - Gurary , et al. November 24, 1 | 1998-11-24 |
Liquid vaporizer system and method Grant 5,835,677 - Li , et al. November 10, 1 | 1998-11-10 |
CVD reactor for uniform heating with radiant heating filaments Grant 5,759,281 - Gurary , et al. June 2, 1 | 1998-06-02 |
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