Tsai; Cheng-Hsiung Matt
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tsai; Cheng-Hsiung Matt.The latest application filed is for "pre-clean chamber with integrated shutter garage".
- Tsai; Cheng-Hsiung Matt - Cupertino CA
- Tsai; Cheng-Hsiung (Matt) - Matt
| Patent | Date |
|---|---|
| Pre-clean chamber with integrated shutter garage Grant 11,251,028 - Tsai , et al. February 15, 2 | 2022-02-15 |
| Process shield for a substrate processing chamber Grant D942,516 - Koppa , et al. February 1, 2 | 2022-02-01 |
| Deposition ring for a substrate processing chamber Grant D933,725 - Koppa , et al. October 19, 2 | 2021-10-19 |
| Process shield for a substrate processing chamber Grant D891,382 - Koppa , et al. | 2020-07-28 |
| Pre-clean Chamber With Integrated Shutter Garage App 20190348264 - Tsai; Cheng-Hsiung Matt ; et al. | 2019-11-14 |
| High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications Grant 6,875,927 - Brown , et al. April 5, 2 | 2005-04-05 |
| High temperature DC chucking and RF biasing cable with high voltage isolation for biasable electrostatic chuck applications App 20030169553 - Brown, Karl ; et al. | 2003-09-11 |
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