KAMATH; Aravind

Patent Applications and Registrations

Patent applications and USPTO patent grants for KAMATH; Aravind.The latest application filed is for "substrate position calibration for substrate supports in substrate processing systems".

Company Profile

2.5.4

KAMATH; Aravind - San Jose CA
Kamath; Aravind - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Position Calibration For Substrate Supports In Substrate Processing Systems App 20220099426 - MATSUSHITA; Tomoharu ; et al.	2022-03-31
Process shield for a substrate processing chamber Grant D942,516 - Koppa , et al. February 1, 2	2022-02-01
Substrate position calibration for substrate supports in substrate processing systems Grant 11,201,078 - Matsushita , et al. December 14, 2	2021-12-14
Methods And Apparatus For Precleaning And Treating Wafer Surfaces App 20210371972 - XIE; Xiangjin ; et al.	2021-12-02
Deposition ring for a substrate processing chamber Grant D933,725 - Koppa , et al. October 19, 2	2021-10-19
Process shield for a substrate processing chamber Grant D891,382 - Koppa , et al.	2020-07-28
Substrate Position Calibration For Substrate Supports In Substrate Processing Systems App 20180233396 - MATSUSHITA; TOMOHARU ; et al.	2018-08-16
Substrate support with multiple heating zones Grant 9,888,528 - Matsushita , et al. February 6, 2	2018-02-06
Substrate Support With Multiple Heating Zones App 20160192444 - MATSUSHITA; TOMOHARU ; et al.	2016-06-30

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