Substrate retaining ring
Fukushima , et al. August 8, 2
U.S. patent number D793,976 [Application Number D/573,831] was granted by the patent office on 2017-08-08 for substrate retaining ring. This patent grant is currently assigned to EBARA CORPORATION. The grantee listed for this patent is EBARA CORPORATION. Invention is credited to Makoto Fukushima, Osamu Nabeya, Keisuke Namiki, Shingo Togashi, Satoru Yamaki, Hozumi Yasuda.
| United States Patent | D793,976 |
| Fukushima , et al. | August 8, 2017 |
Substrate retaining ring
Claims
CLAIM The ornamental design for a substrate retaining ring, as shown and described.
| Inventors: | Fukushima; Makoto (Tokyo, JP), Yasuda; Hozumi (Tokyo, JP), Namiki; Keisuke (Tokyo, JP), Nabeya; Osamu (Tokyo, JP), Togashi; Shingo (Tokyo, JP), Yamaki; Satoru (Tokyo, JP) | ||||||||||
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| Applicant: |
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| Assignee: | EBARA CORPORATION (Tokyo,
JP) |
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| Appl. No.: | D/573,831 | ||||||||||
| Filed: | August 10, 2016 |
Related U.S. Patent Documents
| Application Number | Filing Date | Patent Number | Issue Date | ||
|---|---|---|---|---|---|
| 29472350 | Nov 12, 2013 | D766849 | |||
Foreign Application Priority Data
| May 15, 2013 [JP] | 2013-10671 | |||
| Jun 14, 2013 [JP] | 2013-13457 | |||
| Oct 30, 2013 [JP] | 2013-25259 | |||
| Current U.S. Class: | D13/182 |
| Current International Class: | 1303 |
| Field of Search: | ;D13/182 ;156/345.12,345.13,345.14 ;451/173,177,28,282,285,286,287,288,296,297,307,398,41,443,51 |
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Attorney, Agent or Firm: Pearne & Gordon LLP
Description
FIG. 1 is a top perspective view of a substrate retaining ring, showing our new design;
FIG. 2 is a bottom perspective view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a side view thereof, with the ring being radially symmetrical about a vertical axis;
FIG. 6 is a cross sectional view taken along line 6-6 in FIG. 3;
FIG. 7 is a cross sectional view taken along line 7-7 in FIG. 3; and,
FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 3.
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