U.S. patent application number 11/530670 was filed with the patent office on 2007-01-04 for plasma control using dual cathode frequency mixing.
This patent application is currently assigned to APPLIED MATERIALS, INC.. Invention is credited to Michael G. Chafin, Troy S. Detrick, Dennis S. Grimard, Daniel J. Hoffman, Jingbao Liu, Theodoros Panagopoulos, Alexander Paterson, Bryan Y. Pu, Steven C. Shannon, Taeho Shin.
Application Number | 20070000611 11/530670 |
Document ID | / |
Family ID | 38992494 |
Filed Date | 2007-01-04 |
United States Patent
Application |
20070000611 |
Kind Code |
A1 |
Shannon; Steven C. ; et
al. |
January 4, 2007 |
PLASMA CONTROL USING DUAL CATHODE FREQUENCY MIXING
Abstract
A method and apparatus for controlling characteristics of a
plasma in a semiconductor substrate processing chamber using a dual
frequency RF source is provided. The method comprises supplying a
first RF signal to a first electrode disposed in a processing
chamber, and supplying a second RF signal to the first electrode,
wherein an interaction between the first and second RF signals is
used to control at least one characteristic of a plasma formed in
the processing chamber.
Inventors: |
Shannon; Steven C.; (San
Mateo, CA) ; Grimard; Dennis S.; (Ann Arbor, MI)
; Panagopoulos; Theodoros; (Cupertino, CA) ;
Hoffman; Daniel J.; (Saratoga, CA) ; Chafin; Michael
G.; (Santa Clara, CA) ; Detrick; Troy S.; (Los
Altos, CA) ; Paterson; Alexander; (San Jose, CA)
; Liu; Jingbao; (Sunnyvale, CA) ; Shin; Taeho;
(San Jose, CA) ; Pu; Bryan Y.; (San Jose,
CA) |
Correspondence
Address: |
MOSER IP LAW GROUP / APPLIED MATERIALS, INC.
1040 BROAD STREET
2ND FLOOR
SHREWSBURY
NJ
07702
US
|
Assignee: |
APPLIED MATERIALS, INC.
SANTA CLARA
CA
|
Family ID: |
38992494 |
Appl. No.: |
11/530670 |
Filed: |
September 11, 2006 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
10823364 |
Apr 12, 2004 |
|
|
|
11530670 |
Sep 11, 2006 |
|
|
|
60514993 |
Oct 28, 2003 |
|
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|
Current U.S.
Class: |
156/345.28 ;
118/723R |
Current CPC
Class: |
H01J 37/32165 20130101;
H01J 37/32082 20130101 |
Class at
Publication: |
156/345.28 ;
118/723.00R |
International
Class: |
C23F 1/00 20060101
C23F001/00; C23C 16/00 20060101 C23C016/00 |
Claims
1. Apparatus for controlling characteristics of a plasma in a
semiconductor substrate processing system, comprising: a first
electrode disposed within a chamber; a first RF source for
providing a first RF signal coupled to the first electrode through
a match network; a second RF source for providing a second RF
signal coupled to the first electrode through the match network,
wherein the match network has a single feed to the first electrode;
and a controller for controlling the application of the first and
second RF signals such that a manipulable interaction between the
first and second RF signals controls at least one plasma
characteristic.
2. The apparatus of claim 1, further comprising: a third RF source
for providing a third RF signal coupled to a second electrode
disposed in the chamber.
3. The apparatus of claim 2, wherein the first electrode is
disposed in a substrate support pedestal contained in the chamber
and the second electrode is disposed proximate a roof of the
chamber above the support pedestal.
4. The apparatus of claim 2, wherein the third RF signal coupled to
the second electrode is adapted to form a plasma in the chamber
during operation thereof.
5. The apparatus of claim 1, wherein the first electrode is
disposed in a substrate support pedestal contained in the
chamber.
6. The apparatus of claim 1, wherein the chamber an etch
reactor.
7. The apparatus of claim 1, wherein the plasma characteristic is
at least sheath modulation.
8. The apparatus of claim 7, wherein the first and second RF
sources are adapted to provide respective first and second RF
signals of a low enough frequency to provide a strong self-biasing
sheath in the plasma.
9. The apparatus of claim 7, wherein the frequency of the first RF
signal is selected to provide a broad ion energy distribution and
the frequency of the second RF signal is selected to provide a
peaked, well defined ion energy distribution during operation of
the chamber.
10. The apparatus of claim 9, wherein the first RF signal has a
cycle time that is larger than the transit time of an ion in the
sheath, and wherein the second RF signal has a period that is
nearly equal to or greater than the transit time of an ion in the
sheath.
11. The apparatus of claim 7, wherein the combined applied voltage
of the first and second RF signal is used to control a peak-to-peak
sheath voltage and a self-biased DC potential.
12. The apparatus of claim 11, wherein the controller further
controls a desired ratio of the applied power of the first and
second RF signals.
13. The apparatus of claim 12, wherein the ratio is used to tune
the energy distribution about an average acceleration generated by
the DC potential.
14. The apparatus of claim 1, wherein the plasma characteristic is
at least a power distribution within the plasma.
15. The apparatus of claim 14, wherein the first and second RF
signals provide similar plasma excitation properties and different
spatial uniformity profiles.
16. The apparatus of claim 15, wherein the manipulable interaction
between the first and second RF signals is a varying effect on the
power distribution in the plasma.
17. The apparatus of claim 16, wherein the first and the second RF
signals are selected such that a combined effect of the first and
second RF signals produces a substantially flat power
distribution.
18. The apparatus of claim 16, wherein the manipulable interaction
between the first and second RF signals is used to control the
uniformity of a plasma enhanced etch process.
19. The apparatus of claim 1, wherein the controller is further
configured to control the application of the first and second RF
signals to provide a desired plasma energy distribution along a
continuum of plasma energy distributions obtainable using
individual low to high frequency RF sources.
20. The apparatus of claim 19, wherein the controller is further
configured to provide the desired plasma energy distribution by
controlling a ratio of the power of the first and second RF
signals.
21. The apparatus of claim 1, wherein the controller is further
configured to control the application of the first and second RF
signals to provide a desired power distribution within the
plasma.
22. The apparatus of claim 1, wherein the first power supply is
adapted to provide a first power distribution in the plasma and
wherein the second
23. Apparatus for controlling characteristics of a plasma in a
semiconductor substrate processing system, comprising: a first
electrode disposed beneath a substrate support pedestal in a
chamber; a first RF bias source for providing a first RF bias
signal and a second RF bias source for providing a second RF bias
signal, the first and second RF bias signals coupled to the first
electrode through a match network having a single feed to the first
electrode; an RF source for providing an RF signal to a second
electrode disposed above the substrate support pedestal, the RF
signal adapted to form a plasma during operation; a controller for
controlling the application of the first and second RF bias signals
such that a manipulable interaction between the first and second RF
signals controls at least one plasma characteristic.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a divisional of co-pending U.S. patent
application Ser. No. 10/823,364, filed Apr. 12, 2004, which claims
benefit of U.S. Provisional Application No. 60/514,993 filed Oct.
28, 2003. Each of the aforementioned related patent applications is
herein incorporated by reference in their entirety.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] The present invention generally relates to plasma control in
a semiconductor substrate processing system and, more particularly,
to plasma control using a dual cathode frequency mixing
technique.
[0004] 2. Description of the Related Art
[0005] The increase in size of plasma enhanced semiconductor
processing chambers contributes to a spatially variant effect over
the surface of the substrate being processed. That is, as the size
of the substrate being processed approaches the wavelength of the
frequency that is used to bias the substrate, a spatial variation
in the RF power distribution forms over the surface of the
substrate (e.g., proximate the cathode that forms an electrode).
This spatial variation can be frequency dependent in the regime of
higher frequencies (shorter wavelengths), larger substrates, or
combinations of the two. This spatially variant effect has a
negative impact on process uniformity. For example, in an etch
reactor, the standing wave effect can cause non-uniformity in the
etched substrate surface.
[0006] Therefore, there is a need for an improved method and
apparatus for semiconductor substrate processing that combats this
spatially variant effect.
SUMMARY OF THE INVENTION
[0007] The present invention is a method and apparatus for
controlling characteristics of a plasma in a plasma enhanced
semiconductor substrate processing chamber. The method comprises
supplying a first RF signal to a first electrode disposed in a
processing chamber, and supplying a second RF signal to the first
electrode, wherein an interaction between the first and second RF
signals is used to control at least one characteristic of a plasma
formed in the processing chamber.
BRIEF DESCRIPTION OF THE DRAWINGS
[0008] So that the manner in which the above recited features,
advantages and objects of the present invention are attained and
can be understood in detail, a more particular description of the
invention, briefly summarized above, may be had by reference to the
embodiments thereof which are illustrated in the appended drawings.
It is to be noted, however, that the appended drawings illustrate
only typical embodiments of this invention and are therefore not to
be considered limiting of its scope, for the invention may admit to
other equally effective embodiments.
[0009] FIG. 1 is a partial schematic, cross-sectional view of a
plasma enhanced processing chamber useful for practicing the
present invention;
[0010] FIG. 2 is a graph of known ion energy distributions as a
function of drive frequency;
[0011] FIG. 3 is a series of graphs depicting ion energy
distribution at various RF current ratios;
[0012] FIG. 4 is an illustrative schematic graph depicting the
effect of multi-frequency mixing; and
[0013] FIG. 5 is a graph depicting improvement in uniformity
realized using the frequency mixing principles of the present
invention.
[0014] To facilitate understanding, identical reference numerals
have been used, where possible, to designate identical elements
that are common to the figures.
DETAILED DESCRIPTION
[0015] The present invention generally relates to semiconductor
substrate processing in plasma enhanced processing chambers. More
specifically, the present invention is a method and apparatus for
controlling the characteristics of a plasma formed in a plasma
enhanced processing chamber. Characteristics of the plasma which
may be controlled include, but are not limited to, the power
distribution within the plasma, and the ion energy distribution
within the plasma and incident on the workpiece. These plasma
characteristics may be controlled via a dual frequency cathode with
ratio control in a plasma enhanced processing chamber.
[0016] Examples of plasma enhanced semiconductor processing
chambers that may be adapted to benefit from the present invention
include the eMaX.TM., MXP.RTM., and ENABLER.TM. processing
chambers, all available from Applied Materials, Inc. of Santa
Clara, Calif. The eMaX.TM. processing chamber is described in U.S.
Pat. No. 6,113,731, issued Sep. 5, 2000 to Shan et al. The MXP.RTM.
processing chamber is described in U.S. Pat. No. 5,534,108, issued
Jul. 9, 1996 to Qian et al., and U.S. Pat. No. 5,674,321, issued
Oct. 7, 1997 to Pu et al. The ENABLER.TM. processing chamber is
described in U.S. patent application Ser. No. 10/192,271, filed on
Jul. 9, 2002. Each of these above-mentioned patents are hereby
incorporated by reference in their entireties.
[0017] FIG. 1 depicts a partial schematic, cross-section view of a
plasma enhanced processing chamber 100 useful for practicing the
present invention. In one embodiment, a process chamber 100
includes a grounded chamber body 102 and at least one coil segment
106 disposed proximate to the exterior of the chamber body 102. The
process chamber 100 also includes a wafer support pedestal 116
disposed within the chamber body 102 and spaced apart from a gas
inlet 132. The wafer support pedestal 116 comprises a cathode 127
and an electrostatic chuck 126 for retaining a substrate 114
beneath the gas inlet 132.
[0018] The electrostatic chuck 126 is driven by a DC power supply
120 to develop an electrostatic force that holds the substrate on
the chuck surface. The cathode 127 is coupled to a pair of RF bias
sources 122, 123 through a matching network 124. The bias sources
122, 123 are generally capable of producing an RF signal having a
frequency of from about 50 kHz to about 100 MHz and a power of
between about 0 and about 10,000 Watts. The matching network 124
matches the impedance of the sources 122, 123 to the plasma
impedance. A single feed couples energy from both sources 122, 123
to the support pedestal 116. Alternatively, each source 122, 123
can be coupled to the cathode 127 via a separate feed.
[0019] The gas inlet 132 may comprise one or more nozzles or a
showerhead. The gas inlet 132 may comprise a plurality of gas
distribution zones such that various gases provided from a gas
source 108--which, when ignited, form a plasma 110--can be supplied
to the chamber body 102 using a specific gas distribution gradient.
The gas inlet 132 may form an upper electrode 128 that opposes the
support pedestal 116. The upper electrode 128 can be coupled to an
RF source 118 through a matching network 119, terminated to a
specific impedance, or grounded. The source 118 is generally
capable of producing an RF signal having a frequency in the about
10 Mhz to about 3 GHz range and a power between about 0 and 10,000
Watts. In one embodiment, the source 118 is capable of producing an
RF signal having a frequency of about 60 MHz. The RF energy
supplied by the source is generally used to facilitate dissociation
and ionization of gases in the plasma.
[0020] In operation, a substrate 114 is disposed in the processing
chamber 100 and held to the support pedestal 116 by the
electrostatic chuck 126. A process gas is introduced into the
chamber body 102 through the gas inlet 132 by the gas source 108. A
vacuum pump, not shown, maintains the pressure inside the chamber
body 102 at operating pressures--typically between about 10 mTorr
to about 20 Torr.
[0021] In one embodiment, the RF source 118 provides about 1000
Watts of RF voltage at 13.56 MHz to the upper electrode 128,
thereby exciting the gas inside the chamber body 102 and forming a
plasma 110. The RF source 122 is selected to generate power at a
frequency of about 2 MHz and the RF source 123 is selected to
generate power at a frequency of about 13.56 MHz. The RF sources
122, 123 provide up to about 10,000 Watts of total RF power in a
predetermined power ratio from the source 122 to the source 123 of
between 1:0 and 0:1. These RF sources 122, 123 provide bias power
that both self-biases the substrate and modulates the plasma
sheath. Adjusting the ratio between the source 122 and 123 controls
the characteristics of the plasma as defined below. The plasma,
having a characteristic defined by the power ratio of the bias
sources, facilitates etching one or more materials on the surface
of the substrate. After a period of time, or the detection of a
specific endpoint, the plasma is extinguished.
Control of Ion Energy Distribution Within the Plasma
[0022] The frequency dependence of ion energy distribution within a
plasma chamber is well known. FIG. 2, taken from IEEE Trans. Plasma
Sci., Vol. 19, No. 2, page 242, depicts a series of graphs
200.sub.1-7 of histograms (along the Y axes) of known ion energy
distributions (along the X axes) as a function of drive frequencies
(along the Z axis). As can be seen in the graphs 200.sub.1-7, the
ion energy distribution associated with lower frequencies has a
broader energy bandwidth (e.g., distribution 210.sub.1 in graph
200.sub.1), while higher frequencies have a progressively much more
concentrated energy bandwidth (e.g., distribution 210.sub.7 in
graph 200.sub.7). The relationship is generally continuous along
the spectrum moving from the low frequency ion energy distribution
to the high frequency ion energy distribution (e.g., compare
distributions 210.sub.1-7 from graphs 200.sub.1-7).
[0023] Referring back to FIG. 1, in one embodiment, the invention
comprises a dual frequency electrode (cathode 127) for use in a
plasma enhanced processing chamber 100 as described above. The two
frequencies on the cathode 127 are generally selected for the
purpose of sheath modulation and are selected such that they are of
a low enough frequency so as to provide a strong self-biasing
sheath in the plasma discharge above the powered surface.
[0024] The first frequency provides a broad ion energy distribution
(i.e., lower frequency). The second frequency provides a peaked,
well defined ion energy distribution (i.e., higher frequency).
Typically, the first frequency is selected such that it's cycle
time is much larger than the transit time of an ion in the sheath,
while the second frequency is selected such that it's period
approaches or surpasses the transit time of the ion in the sheath.
These frequencies are also selected such that when used in
conjunction with a third power source provided by an independently
driven electrode (e.g., the electrode 128 referred to in FIG. 1),
they are not the primary power contributor for plasma ionization
and dissociation.
[0025] The combined applied voltage of the two frequency sources is
used to control the peak-to-peak sheath voltage as well as the
self-biased DC potential that is used for anisotropic etching. The
mixing of the two frequencies is used to tune the energy
distribution about this average acceleration generated by this DC
potential. Thus, utilizing a plasma enhanced processing chamber
with a dual frequency cathode as described above, the ion energy
distribution within the plasma can be controlled.
[0026] To understand how this ion energy distribution tuning works,
consider a simple sheath model based on the RF current driven
through a cylindrical plasma discharge. The thickness of the plasma
sheath generated will oscillate linearly with the applied current:
s(t)={overscore (s)}-s.sub.0 sin(.omega.t) (1) where s is the
thickness of the sheath, {overscore (s)} is the average thickness
over time, and s.sub.0 is the amplitude of modulation generated by
the RF power delivery at frequency .omega./2.pi..
[0027] If multiple frequencies are applied, the effect on the
sheath thickness is additive, yielding: s(t)={overscore
(s)}-s.sub.0.sub.xMHz sin(.omega..sub.xt)-s.sub.0.sub.yMHz
sin(.omega..sub.yt) (2) where the subscripts x and y refer to the
first and second RF sources respectively.
[0028] Assuming a symmetric discharge Oust for simplicity of
discussion; a similar case will hold true for asymmetric discharges
as well), the sheath modulation can be related to applied RF
current by the relationship: s _ = s 0 x .times. MHz + s 0 y
.times. MHz ( 3 ) s 0 x .times. MHz = I x .times. MHz en .times.
.times. .omega. x .times. A ( 4 ) s 0 y .times. MHz = I y .times.
MHz en .times. .times. .omega. y .times. A ( 5 ) ##EQU1## where I
is the current amplitude at the stated frequency; e is the electron
charge; n is the electron density of the bulk plasma; and A is the
area of the powered surface (electrode).
[0029] The voltage across the sheath is related to this sheath
modulation by the equation: V sheath .function. ( t ) = - en 2
.times. 0 .times. s .function. ( t ) 2 ( 6 ) ##EQU2## where
.epsilon..sub.0 is the permittivity of free space.
[0030] The acceleration of the ions and electrons can then be
solved using a system of differential equations based on charged
particle motion in an electromagnetic field: ions .times. : .times.
d 2 .times. x d t 2 = e M ion .function. ( s x .times. MHz + s y
.times. MHz ) 2 .times. V .function. ( t ) .times. x = 0 ( 7 )
electrons .times. : .times. d 2 .times. x d t 2 = - e m e
.function. ( s x .times. MHz + s y .times. MHz ) 2 .times. V
.function. ( t ) .times. x = 0 ( 8 ) ##EQU3## where M.sub.ion and
m.sub.e are the masses of an ion and an electron, respectively, and
with boundary conditions stating that the net charge on the
electrode surface over an RF cycle is zero and that the initial
velocity of the ion before it enters the sheath is equal to the
Bohm velocity of the ion. Solving for this system of equations for
ion velocity at the electrode surface provides a measure of ion
energy distribution.
[0031] In order to physically assess the ability to control the ion
energy distribution of the plasma in operation, the expected ion
energy distribution in a plasma formed under a range of operating
conditions was modeled and experimentally verified. The ion energy
distribution was estimated by studying the on-wafer voltage on a
wafer under various process conditions in an eMax.TM. processing
chamber outfitted with a dual frequency cathode as described above
with reference to FIG. 1. During this analysis, the two fundamental
components of the plasma relative to it's interaction with the
powered electrode (sheath peak-to-peak voltage and bulk electron
density) were held constant and the ratios of applied currents
(i.e., proportional to the applied power) of the two RF bias
sources were varied while feeding a constant total power to the
cathode. The first RF source 122 was tuned to 13.56 MHz and the
second RF source 123 was tuned to 2 MHz.
[0032] FIG. 3 is a series of graphs 300.sub.1-5 of this analysis,
illustrating the results of varying the ratio of the applied
currents of the two RF sources. The graphs show a distribution
(axis 302) of the energy (axis 304) measured on the wafer. As can
be seen from the graph 3005, labeled 0% 13 MHz, 100% 2 MHz, if the
cathode is only driven with the low frequency RF source, an ion
energy distribution 310.sub.5 which is very broad is obtained. This
result is similar to the low frequency ion energy distributions
depicted in FIG. 2 (see, e.g., distribution 210.sub.1 in graph
200.sub.1). The graph 300.sub.1, labeled 100% 13 MHz, 0% 2 MHz, on
the other hand, shows a narrow energy distribution 310.sub.1
similar to the high frequency ion energy distributions depicted in
FIG. 2 (see, e.g., distributions 210.sub.5 and 210.sub.6 in graphs
200.sub.5-6) when only the high frequency RF source is used.
[0033] However, the remaining graphs depicting other ratios where
both the high and the low RF frequencies were mixed together reveal
an important result. These graphs show the exact same trend as if
individual intermediate frequencies were selected, as can be seen
by comparison of the graphs 300.sub.1-5 to the histograms depicted
in the graphs 200.sub.1-7 of FIG. 2. This shows how a desired
distribution along a continuum of individual low to high frequency
RF sources may be obtained by utilizing only two sources, rather
than many sources. This result increases the capability to perform
more processes in one chamber, i.e., increases the "process window"
of the chamber.
[0034] Although the foregoing discussion focused only on modulating
sheath properties with the dual frequency cathode drive, the
principles discussed herein could be applied for dissociation as
well. This would eliminate the need for the upper RF source for
dissociation (RF source 118 in FIG. 1).
[0035] Furthermore, the chosen frequencies of 2 MHz and 13.56 MHz
are illustrative only and not intended to define limitations of the
invention. Both higher and lower frequencies can be utilized in the
current invention.
Control of Power Distribution Within the Plasma
[0036] In another embodiment, the power distribution within the
plasma can be controlled utilizing a plasma enhanced processing
chamber with a dual frequency cathode as described above with
reference to FIG. 1. In this embodiment, two frequencies that
provide similar plasma excitation properties but with different
spatial uniformity profiles are combined to tune the uniformity of
a process. For example, in the process chamber 100 depicted in FIG.
1, the cathode 127 forms a radial transmission line which is
terminated along an outer perimeter 112 of the electrostatic chuck
126. This contributes to the creation of a spatially variant power
distribution, illustratively shown as a dashed line 130 (it should
be noted that the standing wave could be the inverse of the one
shown as well). The spatially variant power distribution affects
the power distribution in the plasma 110, resulting in greater
power near the peak of the wave (near the center of the substrate
114 for the wave 130 depicted in FIG. 1) and lesser power in the
trough (near the edge of the substrate 114 in FIG. 1). This power
differential in the plasma affects the uniformity of the process
being performed on the substrate. As such, in an etch reaction, the
uniformity of an etched wafer would be negatively impacted.
[0037] However, since the spatially variant power effect described
above varies at different frequencies, two RF sources with
different frequencies may be mixed together to drive the cathode
127 such that their respective standing waves substantially cancel
each other. This is illustratively depicted in FIG. 4, which shows
two opposing power distribution profiles 410, 420 centered over a
substrate yielding a flat combined effect 430. It should also be
noted that any other final power distribution profile that may
prove beneficial to a certain process can also be formed using this
method. (For example, in some CVD processes, an edge high power
deposition profile is preferred to minimize the impact of
non-azimuthally symmetric deposition in high-aspect ratio features
on a processed workpiece).
[0038] This frequency mixing phenomenon may be used to control the
power distribution in the plasma and thereby control uniformity of
a desired process, such as etching. For example, to measure the
effect of dual frequency tuning on process uniformity, an oxide
layer and a photoresist layer on multiple wafers were etched using
different cathode frequency ratios in an eMaX.TM. processing
chamber outfitted with a dual frequency cathode as described above
with reference to FIG. 1. The first RF source was tuned to 13.56
MHz and the second RF source was tuned to 2 MHz. In each of these
etch processes, the ratios of applied currents of the two RF drives
were varied while keeping the total power to the cathode constant
at 2,500 Watts. The oxide and photoresist etch rates were measured
as well as the uniformity of each layer.
[0039] FIG. 5 depicts a combined bar graph and line graph 500
depicting the etch rates and wafer uniformity for the processes
described above. The x-axis 502 of the graph depicts the ratio of
the power supplied by the 13.56 Mhz source to the power supplied by
the 2 Mhz source. (For example 0:2500 means 0 W of the 13.56 MHz
source and 2,500 W of the 2 MHz source.) As can be seen from the
bars 510 labeled 0 X ER (oxide etch rate) and the bars 512 labeled
PR ER (photoresist etch rate), the etch rate (axis 504) remains
relatively constant regardless of the mix of power levels at the
different frequencies.
[0040] However, the wafer uniformity (axis 506) for both the oxide
and the photoresist (respectively shown as line 520, labeled "OX
unif," and line 522, labeled PR unif," in FIG. 5) varied
substantially over the power ratio mix. The uniformity ranged
somewhat linearly from about 60% (indicating center-fast etching)
at OW 13.56 MHz and 2500 W 2 MHz, to about -50% (indicating
edge-fast etching) at 2500 W 13.56 MHz and 0 W 2 MHz, and near 0%
with a fairly even ratio of the power of two frequencies. These
results show that uniformity on an etched surface can be controlled
fairly independently of the etch rate by controlling the power
ratio of each frequency applied to a dual frequency cathode.
[0041] As mentioned above, the principles discussed herein apply to
dissociation or ionization of bulk plasma, as well as modulation of
the sheath properties of the plasma. Also, the chosen frequencies
of 2 MHz and 13.56 MHz are illustrative only and not intended to
define limitations of the invention. Both higher and lower
frequencies may be utilized in the current invention. For example,
drive frequencies may be grouped by their effect on the plasma,
then selected as necessary to control the desired property. For
example, high frequencies effect ionization and dissociation, while
lower frequencies effect sheath modulation. Furthermore, the
principles disclosed herein are not limited to control of standing
waves. Additional reasons for frequency dependent propagation
exist. For example, providing a frequency dependent termination to
the transmission line, or a frequency dependent return path to
ground in the chamber that can direct the RF waveform dependent
upon its frequency.
[0042] Thus, a method and apparatus for controlling characteristics
of a plasma in a plasma enhanced processing chamber using a dual
frequency cathode drive has been provided. The mixing of the two
frequencies driving the cathode controls the ion energy and power
distributions of a plasma.
[0043] While the foregoing is directed to the illustrative
embodiment of the present invention, other and further embodiments
of the invention may be devised without departing from the basic
scope thereof, and the scope thereof is determined by the claims
that follow.
* * * * *