Grimard; Dennis S.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Grimard; Dennis S..The latest application filed is for "high definition heater system having a fluid medium".

Company Profile

0.23.15

Grimard; Dennis S. - Ann Arbor MI
Grimard; Dennis S. - US
Grimard; Dennis S. - Ann Harbor MI

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
High definition heater system having a fluid medium Grant 11,133,201 - Smith , et al. September 28, 2	2021-09-28
High definition heater system having a fluid medium Grant 10,361,103 - Smith , et al.	2019-07-23
High Definition Heater System Having A Fluid Medium App 20170236732 - Smith; Kevin R. ; et al.	2017-08-17
High Definition Heater System Having A Fluid Medium App 20170092514 - Smith; Kevin R. ; et al.	2017-03-30
Plasma control using dual cathode frequency mixing Grant 7,838,430 - Shannon , et al. November 23, 2	2010-11-23
Time-based wafer de-chucking from an electrostatic chuck having separate RF BIAS and DC chucking electrodes Grant 7,813,103 - Shannon , et al. October 12, 2	2010-10-12
Time-based wafer de-chucking from an electrostatic chuck having separate RF bias and DC chucking electrodes App 20090097185 - Shannon; Steven C. ; et al.	2009-04-16
Plasma generation and control using dual frequency RF signals Grant 7,510,665 - Shannon , et al. March 31, 2	2009-03-31
Plasma Control Using Dual Cathode Frequency Mixing App 20070000611 - Shannon; Steven C. ; et al.	2007-01-04
Plasma generation and control using dual frequency RF signals App 20060266735 - Shannon; Steven C. ; et al.	2006-11-30
Plasma control using dual cathode frequency mixing App 20050090118 - Shannon, Steven C. ; et al.	2005-04-28
Electrostatic chuck having dielectric member with stacked layers and manufacture App 20040190215 - Weldon, Edwin C. ; et al.	2004-09-30
High temperature electrical connector Grant 6,736,668 - Kholodenko , et al. May 18, 2	2004-05-18
Electrostatic chuck having composite dielectric layer and method of manufacture Grant 6,721,162 - Weldon , et al. April 13, 2	2004-04-13
Method and apparatus for improving exhaust gas consumption in an exhaust conduit Grant 6,642,489 - Ramaswamy , et al. November 4, 2	2003-11-04
Fabricating an electrostatic chuck having plasma resistant gas conduits Grant 6,581,275 - Narendrnath , et al. June 24, 2	2003-06-24
Electrostatic chuck having heater and method Grant 6,538,872 - Wang , et al. March 25, 2	2003-03-25
Electrostatic chuck with dielectric coating App 20030010292 - Kholodenko, Arnold V. ; et al.	2003-01-16
Plasma chamber support with coupled electrode Grant 6,494,958 - Shamouilian , et al. December 17, 2	2002-12-17
Support for supporting a substrate in a process chamber Grant 6,490,144 - Narendrnath , et al. December 3, 2	2002-12-03
Electrostatic chuck bonded to base with a bond layer and method Grant 6,490,146 - Wang , et al. December 3, 2	2002-12-03
Plasma chamber support having dual electrodes Grant 6,478,924 - Shamouilian , et al. November 12, 2	2002-11-12
Electrostatic chuck having improved electrical connector and method Grant 6,462,928 - Shamouilian , et al. October 8, 2	2002-10-08
Electrostatic chuck having composite dielectric layer and method of manufacture App 20020135969 - Weldon, Edwin C. ; et al.	2002-09-26
Fabricating an electrostatic chuck having plasma resistant gas conduits App 20020095782 - Narendrnath, Kadthala R. ; et al.	2002-07-25
Method and apparatus for improving exhaust gas consumption in an exhaust conduit App 20020088797 - Ramaswamy, Kartik ; et al.	2002-07-11
Electrostatic chuck bonded to base with a bond layer and method App 20020075624 - Wang, You ; et al.	2002-06-20
Electrostatic Chuck Having Composite Base And Method App 20020036881 - SHAMOUILIAN, SHAMOUIL ; et al.	2002-03-28
Connectors For An Eletrostatic Chuck App 20020022403 - CHENG, WING L. ; et al.	2002-02-21
Chuck having pressurized zones of heat transfer gas Grant 6,320,736 - Shamouilian , et al. November 20, 2	2001-11-20
Electrostatic chuck having gas cavity and method Grant 6,310,755 - Kholodenko , et al. October 30, 2	2001-10-30
Substrate support for plasma processing Grant 6,273,958 - Shamouilian , et al. August 14, 2	2001-08-14
Substrate Support For Plasma Processing App 20010003298 - SHAMOUILIAN, SHAMOUIL ; et al.	2001-06-14
Connectors for an electrostatic chuck and combination thereof Grant 6,151,203 - Shamouilian , et al. November 21, 2	2000-11-21
Electrostatic chuck having improved gas conduits Grant 6,108,189 - Weldon , et al. August 22, 2	2000-08-22
High density plasma process chamber Grant 6,095,084 - Shamouilian , et al. August 1, 2	2000-08-01
Plasma chamber support having an electrically coupled collar ring Grant 6,074,488 - Roderick , et al. June 13, 2	2000-06-13
Hybrid Johnsen-Rahbek electrostatic chuck having highly resistive mesas separating the chuck from a wafer supported thereupon and method of fabricating same Grant 5,903,428 - Grimard , et al. May 11, 1	1999-05-11

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